Solid state tip-tilt phased array

Abstract

A solid state optical beam steering device comprising: a body of electro-optic material, wherein the body of electro-optic material comprises any material in a class of hydrogen-doped phase-change metal oxides, and wherein the body has a first face and a second face opposite the first face; a first transparent resistive sheet on the first face of the body of electro-optic material, wherein the first transparent resistive sheet has a first side and a second side; and a transparent conductor on the second face of the body of electro-optic material, wherein the transparent conductor is coupled to the second side of the first transparent resistive sheet.

Description

[0001] Cross-reference to related applications

[0002] This application relates to and claims the benefit of U.S. Provisional Patent Application Serial No. 63 / 027,844, filed May 20, 2020, entitled “Solid State Tip-TiltPhased Array,” which is incorporated herein by reference.

[0003] This application also relates to and claims the benefit of U.S. Provisional Patent Application Serial No. 63 / 027,841, filed May 20, 2020, entitled “Solid-state Electrically-Variable Optical Wedge,” which is incorporated herein by reference.

[0004] This application also relates to and claims the benefit of U.S. Provisional Patent Application Serial No. 63 / 027,838, filed May 20, 2020, entitled “Solid State Electrically Variable-Focal Length Lens,” which is incorporated herein by reference.

[0005] This application also relates to and claims the benefit of U.S. Provisional Patent Application Serial No. 63 / 027,847, filed May 20, 2020, entitled “Method to Grow IROptical Materials with Extremely Small Optical Loss,” which is incorporated herein by reference.

[0006] This application also relates to and claims the benefit of U.S. Provisional Patent Application Serial No. 63 / 027,849, filed May 20, 2020, entitled “Method to Grow Thick Crystalline Optical Films on Si Substrates,” which is incorporated herein by reference.

[0007] This application also relates to U.S. Patent Application Serial No. 16 / 296,049, filed March 7, 2019, entitled “Electrically Reconfigurable Optical Apparatus Using Electric Field,” which is incorporated herein by reference.

[0008] This application also relates to U.S. Provisional Patent Application Serial No. 63 / 094,756 (Publication No. 20200124, L&P ref. 632741-8), filed on October 21, 2020, entitled “Electric Field-Tunable IRDevices with Very Large Modulation of Refractive Index and Methods to Fabricate Them,” which is incorporated herein by reference.

[0009] Statement regarding federal funding

[0010] none Technical Field

[0011] This disclosure relates to optical beam steering. Background Technology

[0012] In the prior art, beam steering is performed using an optical phased array (OPA). This OPA is described in “AMonolithically Integrated Large-Scale Optical Phased Array in Silicon-on-Insulator CMOS”, Chung, SungWon; Abediasl, Hooman; Hashemi, Hossein, IEEE Journal of Solid-State Circuits, Vol. 53, No. 1, pp. 275-296, January 2018, which is incorporated herein by reference.

[0013] Beam steering has also been performed using deformable mirrors as described by Michael A. Helmbrecht and Thor Juneau, “Piston-tip-tilt positioning of a segmented MEMS deformable mirror,” Proc. SPIE 6467, MEMS Adaptive Optics, 64670M (February 9, 2007), which is incorporated herein by reference.

[0014] Youmin Wang and Ming C. Wu*, “MICROMIRROR BASED OPTICAL PHASED ARRAY FORWIDE-ANGLE BEAMSTEERING”, MEMS 2017, Las Vegas, NV, USA, January 22-26, 2017, describe a microelectromechanical system (MEMS), which is incorporated herein by reference. MEMS mirrors offer reasonably wide-angle operation and useful (even if the size is still too small) aperture areas, but they are mechanical and not fast enough for many applications, and are plagued by fragility issues, as shocks from vibrations can displace the mirrors.

[0015] A pair of wedge prisms, known as a Risley prism pair, has also been used for beam steering. Rotating one wedge relative to the other changes the direction of the incident beam. When the wedges are angled in the same direction, the angle of the refracted beam increases. When the wedges are rotated to an angle in opposite directions, they cancel each other out, allowing the beam to pass through directly.

[0016] Electro-optic phase shifters have been used to change the phase of incident light in response to an applied voltage. However, the effect is rather small and insufficient for some applications. These prior art electro-optic phase shifters use electro-optic (E / O) phase-shifting materials, such as lithium niobate.

[0017] There are many other solutions for beam steering in the existing technology for automotive LiDAR. Most of these solutions use mechanical beam steering.

[0018] There is a need for an improved beam steering device that has no moving parts and is robust and simpler than existing devices. A wide field of view and low optical loss are also required. The embodiments of this disclosure meet these and other requirements. Summary of the Invention

[0019] In a first embodiment disclosed herein, a solid-state beam steering device includes: a body of electro-optic material, wherein the body of electro-optic material comprises any material of the class of hydrogen-doped phase-change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; a first transparent resistive sheet on the first surface of the body of electro-optic material, wherein the first transparent resistive sheet has a first side and a second side; and a transparent conductor on the second surface of the body of electro-optic material, wherein the transparent conductor is coupled to the second side of the first transparent resistive sheet.

[0020] In another embodiment disclosed herein, a solid-state beam steering device includes: a body of electro-optic material, wherein the body of electro-optic material comprises any material of the class of hydrogen-doped phase-change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; a first transparent resistive sheet on the first surface of the body of electro-optic material, wherein the first transparent resistive sheet extends along the first surface; a second transparent resistive sheet on the second surface of the body of electro-optic material, wherein the second transparent resistive sheet extends along the second surface; a first voltage coupled between a first end and a second end of the first transparent resistive sheet; and a second voltage coupled between the first end and the second end of the second transparent resistive sheet, wherein the first end and the second end of the first transparent resistive sheet are opposite to each other, wherein the first end and the second end of the second transparent resistive sheet are opposite to each other, wherein the first voltage biases the first transparent resistive sheet in a first direction, and wherein the second voltage biases the second transparent resistive sheet in a second direction.

[0021] In another embodiment disclosed herein, a solid-state beam steering device includes an array of multiple beam steering elements, wherein each beam steering element includes: a body of electro-optic material, wherein the body of electro-optic material includes any material of the class of hydrogen-doped phase change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; a first transparent resistive sheet on the first surface of the body of electro-optic material, wherein the first transparent resistive sheet extends along the first surface; and a second transparent resistive sheet on the second surface of the body of electro-optic material, wherein the second transparent resistive sheet extends along the second surface.

[0022] In another embodiment disclosed herein, a method for providing beam deflection includes: providing a body of an electro-optic material, wherein the body of the electro-optic material comprises any material of the class of hydrogen-doped phase-change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; providing a first transparent resistive sheet on the first surface of the electro-optic material body, wherein the first transparent resistive sheet has a first side and a second side; providing a transparent conductor on the second surface of the electro-optic material body, wherein the transparent conductor is coupled to the second side of the first transparent resistive sheet; and applying a voltage between the first side of the first transparent resistive sheet and the transparent conductor to apply a voltage bias across the first transparent resistive sheet.

[0023] In another embodiment disclosed herein, a method for providing two-dimensional beam steering includes: providing a body of electro-optic material, wherein the body of electro-optic material comprises any material of the class of hydrogen-doped phase-change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; providing a first transparent resistive sheet on the first surface of the body of electro-optic material, wherein the first transparent resistive sheet extends along the first surface; providing a second transparent resistive sheet on the second surface of the body of electro-optic material, wherein the second transparent resistive sheet extends along the second surface; applying a first voltage between a first end and a second end of the first transparent resistive sheet; and applying a second voltage between the first end and the second end of the second transparent resistive sheet, wherein the first end and the second end of the first transparent resistive sheet are opposite to each other, wherein the first end and the second end of the second transparent resistive sheet are opposite to each other, wherein the first voltage biases the first transparent resistive sheet in a first direction, wherein the second voltage biases the second transparent resistive sheet in a second direction, and wherein the second direction is orthogonal to the first direction.

[0024] In another embodiment disclosed herein, a method for providing beam deflection includes: providing an array of a plurality of beam deflecting elements, wherein providing each beam deflecting element includes: providing a body of electro-optic material, wherein the body of electro-optic material comprises any material of the class of hydrogen-doped phase-change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; providing a first transparent resistive sheet on the first surface of the body of electro-optic material, wherein the first transparent resistive sheet extends along the first surface; providing a second transparent resistive sheet on the second surface of the body of electro-optic material, wherein the second transparent resistive sheet extends along the second surface; applying a first voltage between a first end and a second end of the first transparent resistive sheet; and applying a second voltage between the first end and the second end of the second transparent resistive sheet, wherein the first end and the second end of the first transparent resistive sheet are opposite to each other, wherein the first end and the second end of the second transparent resistive sheet are opposite to each other, wherein the first voltage biases the first transparent resistive sheet in a first direction, wherein the second voltage biases the second transparent resistive sheet in a second direction, and wherein the second direction is orthogonal to the first direction.

[0025] These and other features and advantages will become more apparent from the following detailed description and accompanying drawings. In the drawings and description, reference numerals indicate various features, and the same reference numerals refer to the same features throughout both the drawings and the description. Attached Figure Description

[0026] Figure 1 An embodiment for using a solid-state electrically variable optical wedge to direct an optical plane wave is shown according to the present disclosure.

[0027] Figure 2This is a side elevation view of a reflection embodiment for using a solid-state electrically variable optical wedge to deflect an optical plane wave according to the present disclosure.

[0028] Figure 3 Another embodiment of the present disclosure for using a solid-state electrically variable optical wedge to deflect an optical plane wave is shown.

[0029] Figure 4 Another embodiment of the present disclosure for using a solid-state electrically variable optical wedge to deflect an optical plane wave is shown.

[0030] Figure 5 Example results of simulations of the operation of a solid-state electrically variable optical wedge on a light wave according to this disclosure are shown.

[0031] Figure 6 Example variations of band gap (eV) and refractive index of materials as a function of hydrogen doping density are shown according to this disclosure.

[0032] Figure 7 A two-dimensional array of elements according to this disclosure is depicted, wherein the individual elements are in the same orientation. It guides its beamlets and provides up to 2π of phase lag to coherently combine all the beamlets from the element array into a single beam.

[0033] Figure 8 It shows Figure 7 The diagram shows a plan view of a single element in a two-dimensional array of elements, and shows orientations 2A and 2B of the elements according to this disclosure.

[0034] Figure 9 , Figure 10 and Figure 11 The elements of the array are shown in more detail, and the voltages applied to the individual elements according to this disclosure are shown.

[0035] Figure 12 It is a side elevation view of a portion of the element array according to the present disclosure, wherein a plane wave incident from below is transformed into a plurality of fine beams that are coherently coherent into a single beam. Detailed Implementation

[0036] The following description is provided to enable those skilled in the art to make and use the invention, and is incorporated into the context of a particular application. Various modifications and uses in different applications will readily become apparent to those skilled in the art, and the general principles defined herein can be applied to a wide range of embodiments. Thus, the invention is not intended to be limited to the proposed embodiments, but is accorded the widest scope consistent with the principles and novel features disclosed herein.

[0037] In the following detailed description, numerous specific details are set forth in order to provide a more thorough understanding of the invention. However, it will be apparent to those skilled in the art that the invention can be practiced without being limited to these specific details. In other instances, well-known structures and apparatuses are shown in block diagram form rather than in detail in order to avoid obscuring the invention.

[0038] The reader’s attention is directed to (i) all documents and references submitted concurrently with this specification, which are open to public review together with this specification (the contents of all such documents and references are incorporated herein by reference) and (ii) all documents and references additionally incorporated herein by reference (but not physically submitted with this specification).

[0039] All features disclosed in this specification (including any appended claims, abstract, and drawings) may be replaced by alternative features for the same, equivalent, or similar purposes, unless otherwise expressly stated. Thus, unless otherwise expressly stated, each disclosed feature is merely one example of a general set of equivalent or similar features.

[0040] Furthermore, any element in a claim that does not expressly refer to a “device” for performing a specified function or a “step” for performing a specific function shall not be construed as a “device” or “step” clause as specified in paragraph 6 of section 112 of 35 U.S.SC. Specifically, the use of “step” or “action” in the claims herein is not intended to invoke the provisions of paragraph 6 of section 112 of 35 U.S.SC.

[0041] This disclosure describes Figure 1The solid-state electro-variable optical wedge (SSEVOW) 10 shown is composed of an electro-optic (E / O) material 14. The electro-optic material 14 can include any material of the class of hydrogen-doped phase change metal oxide (H-PCMO) materials, represented by neodymium nickelate (NdNiO3). This material is the subject of U.S. Provisional Patent Application Serial No. 63 / 027,847, filed May 20, 2020, entitled "Method to Grow IROptical Materials with Extremely Small Optical Loss," and U.S. Provisional Patent Application Serial No. 63 / 027,849, filed May 20, 2020, entitled "Method to Grow Thick Crystalline Optical Films on Si Substrates," both of which are incorporated herein by reference. In addition to NdNiO3, the electro-optic material 14 can also be SmNiO3, PrNiO3, EuNiO3, and GdNiO3. These materials can be used alone or in combination to form the E / O material 14 used in the embodiments described herein. The E / O H-PCMO material 14 is substantially transparent in the infrared wavelength range and can have extremely low optical loss, for example, an extinction coefficient k less than 0.001.

[0042] When an electric field is applied to the E / O material 14, the E / O material 14 changes its refractive index. Figure 6 The changes in band gap (eV) and refractive index of SmNiO3 as a function of hydrogen doping density are shown. The refractive index (RI) is a complex number, usually written as RI = n + i*k. Figure 6 The left axis represents the band gap, measured in eV. RI(n) is the real part of the refractive index, and RI(k) is the imaginary part. The real part n indicates the phase velocity, while the imaginary part k is called the extinction coefficient. For the material SmNiO3, Figure 6 It is shown that a hydrogen doping density of up to about 10^21 hydrogen ions / cm^3 is desired to achieve the desired refractive index change.

[0043] Continue to refer to Figure 1 The electro-optic (E / O) material 14 may have a width 42 and a depth 44 between a first surface 19 and a second surface 17. When an electric field is applied to the E / O material 14, the E / O material 14 changes its refractive index. A transparent electrode or conductor 18 is on the first surface 19 of the E / O material 14, and a transparent resistive sheet 16 is on the second surface 17 of the E / O material 14. The transparent resistive sheet 16 is connected to the transparent electrode 18 via a return connection 45 to complete the circuitry for the resistive sheet.

[0044] A constant DC voltage 22 applied between the transparent electrode or conductor 18 and the transparent resistive sheet 16 generates a gradually varying electric field 40, which changes linearly across the width w 42 of the E / O material. Figure 1 In the process, an input optical plane wave 30 along the nominal optical axis 50 is applied to the first surface 19 of the E / O material 14. Figure 1 The example input optical plane wave 30 is shown in a direction perpendicular to the width w 42 of the E / O material 14.

[0045] The graded electric field 40 has an induced linear gradient of refractive index that varies across the width w 42 of the E / O material. This transverse gradient of refractive index deflects the light rays of the input optical plane wave 30 by an angle controlled by Snell's law (n sinθ = constant), as shown by the angle θ46 of the steerable optical plane wave output 32 from the nominal optical axis 50. By changing the voltage V 22, the refractive index can be altered to change the angle θ46 of the steerable optical plane wave output 32, thereby providing electrically selective beam steering.

[0046] Figure 1 A solid-state electrically variable optical wedge (SSEVOW) is shown, which deflects the light beam transmitted through the SSEVOW in transmission mode. Conversely, the solid-state electrically variable optical wedge (SSEVOW) can be configured and used in reflective embodiments, such as... Figure 2 As shown, it illustrates a solid-state electrically variable optical wedge (SSEVOW) 90 with E / O material 14. Figure 2 The solid-state electrically variable optical wedge (SSEVOW) 90 has a reflector 92 that reflects the incident light wave 94 back into the E / O material 14. Because the light wave propagates twice through the E / O material 14, it can achieve, for example, a similar effect with half the thickness of the E / O material 14. Figure 1 The same steering effect is achieved with the transmission configuration. The voltage required to achieve a specific electric field level within the E / O material 14 can be reduced at the cost of a limited field of view due to self-shielding and higher component capacitance resulting in a slower time response.

[0047] Figure 1 The configuration can perform one-dimensional (1-D) beam steering. Figure 3A configuration for two-dimensional (2-D) beam steering is shown. Two-dimensional beam steering is provided by adding a second transparent resistive sheet 60 adjacent to and on or below the second surface 17 of material 14, the second transparent resistive sheet having a voltage 23 biased in a different direction than the first transparent resistive sheet 16. Voltage 23 is connected between the second transparent resistive sheet 60 and a transparent electrode or conductor 18. The other end or side of the second transparent resistive sheet 60 is connected via a connector 45 to the other end or side of the transparent electrode 18 to complete the circuitry of the second transparent resistive sheet 60. The direction of the voltage 23 across the second transparent resistive sheet 60 can be orthogonal to the direction of the voltage 22 across the first transparent resistive sheet 16. This orthogonal arrangement of the voltage 22 across the first transparent resistive sheet 16 and the voltage 23 across the second transparent resistive sheet 60 produces a solid-state electrically variable beam wedge (SSEVOW), which behaves like a gimbal beam steering system or gimbal mirror, except that it has no moving parts and no inertia that slows down the response time.

[0048] For some applications, it is also desirable to use dynamically variable phase delays. Figure 4 An embodiment for beam steering and applying phase delay is shown. The values ​​of V1 22 and V2 20 determine the steering output angle and phase delay of the steering optical plane wave output 32, respectively.

[0049] Figure 4 Its configuration behaves like an electro-optic phase shifter with a very wide acceptance angle. Figure 4 The difference between V1 22 and V2 20 sets the gradient of the width w 42 across the E / O material 14, and thus sets the refractive index gradient. The value of V2 20 establishes the total offset electric field, and thus establishes the offset refractive index value that causes a controllable phase shift in the output light.

[0050] The solid-state electrically variable optical wedge (SSEVOW)10 can perform the same functions as existing optical phased arrays (OPAs). While SSEVOW may require only two control lines, an existing OPA with the same area as SSEVOW may require N = 1975 control lines, where N is determined by N = 4 * area / λ. 2 Therefore, the SSEVOW disclosed herein is significantly simpler than the prior art.

[0051] The operation of a solid-state electrically variable optical wedge on light waves has been simulated using the HFSS full-wave modeling tool. Figure 5Sample results are shown, and a Gaussian-shaped plane wave 70 is depicted incident from above on a simulated SSEVOW material 72 with a thickness of 40 micrometers and a width of 100 micrometers (between n = 2.2 and n = 3.2). The output wave 74 is a clean plane wave at the expected angle of the applied refractive index gradient. Note that for the simulation, the lateral extent of the simulated material was extended beyond the 100 micrometers to avoid edge-related artifacts in the simulation code.

[0052] As mentioned above, Figure 6 The variations in band gap (eV) and refractive index as a function of hydrogen doping density are shown for a specific material, SmNiO3.

[0053] Figure 7 A two-dimensional array 100 of elements 102 is depicted, which together form a solid-state tip-tilt-phased array. Figure 8 It is a plan view of a single component 102, and with Figure 7 The orientations of components 2A and 2B are shown together. These components 102 are also... Figures 1 to 4 and Figures 9 to 1 Example 3 illustrates this. The two-dimensional array 100 can have N×N elements 102; however, the solid-state tilted phased array can also be formed from a single element 102. Each element includes an electro-optic (E / O) material 14, which, as described above, can be a type of hydrogen-doped phase change metal oxide (H-PCMO) material, represented by neodymium nickelate (NdNiO3). As further described above, in addition to NdNiO3, H-PCMO materials, including SmNiO3, PrNiO3, EuNiO3, and GdNiO3, can also be used. These materials can be used alone or in combination to form the E / O material 14 used in the embodiments described herein. The E / O H-PCMO material 14 is substantially transparent in the infrared wavelength range and can have extremely low optical loss, for example, an extinction coefficient k less than 0.001.

[0054] Figure 11 This is a three-dimensional view showing how control voltages V1 120, V2 124, and V3 122 are applied. Control voltages V1 120 and V2 124 are applied across transparent resistive sheets 16 and 156, which are arranged across opposite sides of the E / O material 14. The voltage fields generated by V1 120 and V2 124 are set to be perpendicular to each other, as shown below. Figure 11 The best example shown is... Figure 9 and Figure 10 These are side elevation views that are perpendicular to each other. (Reference) Figure 7 , Figure 9 This is a cross-sectional view of component 102 along tangent 2A-2A. Figure 10This is a cross-sectional view of component 102 along tangent 2B-2B. Figure 9 and Figure 11 In the middle, a control voltage V1 120 is applied across the transparent resistive sheet 16, while Figure 10 and Figure 11 In the process, a control voltage V2124 is applied across the transparent resistive sheet 156 in a direction perpendicular to the control voltage V1120 applied across the transparent resistive sheet 16. The control voltage V3122 is discussed further below. Figure 9 and Figure 10 Control lines 150, 152, and 154 are shown, which control voltages V1 120, V3 122, and V2 124, respectively.

[0055] Figure 11 This is a three-dimensional view showing the voltage applied to resistors 16 and 156. Resistors 16 and 156 can be made of any suitable material, such as vanadium oxide, tin oxide, nanowire grids, graphite sheets, or other materials known in the art. The sheet resistance values ​​of sheets 16 and 156, in ohms per square, can be selected to achieve good device design. Note that the total resistance sets the current required to maintain the set voltage and thus establishes the total power dissipation of element 102.

[0056] Each of the plates 16 and 156 may have a conductive busbar arranged at one edge, and the voltage to be applied is applied to a conductive busbar arranged at the opposite edge. Conductive busbar 106 may be directly coupled to ground 170, while the conductive busbar 104 of plate 16 may be coupled to ground via a control voltage V3 122. If the control voltage V3 122 is zero volts, then the conductive busbar 104 is directly coupled to ground. The corner where the control voltage V3 122 is applied can be considered a common ground corner 140, especially when the control voltage V3 122 has zero volts or is not utilized; in this case, the control voltage V3 122 shown in the figure will be replaced by a wire connection.

[0057] Consider the top resistive element 16. Applying V1 120 to its busbar results in a linear voltage gradient between V1 120 and the conductive busbar 104. Similarly, V2 124 produces a similar smooth gradient laterally in the bottom resistive element 156 between V2 124 and the ground busbar 106. Together, these two voltages deflect the incident beam 24 into the outgoing beam 26, as... Figure 9 , Figure 10 and Figure 12As shown. A voltage V3 122 is only required at the pinned corner between resistors 16 and 156 if full-phase modulation of the light passing through the E / O material 14 is desired. If only a single element 102 is used for the solid-state tilted phased array 50, then voltage V3 122 is replaced by a short circuit that grounds elements 16 and 156 at a common ground corner 140 of element 102. All voltages are referenced to the chip ground, so each voltage requires only a single control line. The gradient across the bottom resistor 156 is V2 / w, where w is the width of element 102. The gradient across the top resistor 16 is (V1-V3) / w, again where w is the width of element 102.

[0058] Each component 102 is in the same direction The emitted thin beam 26 is guided and provided with a phase lag of up to 2π to combine all the thin beams 26 into a single beam. Relative to Figure 7 In the case that array 100 is in the xy plane, the x, y, and z axes, then θ is the angle between the z axis and the projection of the thin beam 26 onto the xz plane, and It is the angle between the z-axis and the projection of the fine beam 26 onto the xy plane.

[0059] Each E / O material 14 has a transparent resistive sheet 16 disposed on or at a first surface 17 of the body 102 and a transparent electrode 18 disposed on or at a second surface 19 of the body 102. Each element 102 has control lines to respective voltages V1 120, V2 124, and V3 122 to apply an angle-modifying voltage V1 120 to the transparent resistive sheet 16, thereby... An angle-modifying voltage V2 124 is applied to the transparent resistive sheet 156, and a phase voltage V3 122 is applied between sheets 16 and 156.

[0060] The first two voltages, V1 120 and V2 124, are preferably common to all elements 102 in array 100. The phase voltage V3 122 is preferably unique to each element 102, depending on the desired output angle. If all voltages V1 120 and V2 124 in the array are the same, a single beam is generated. This single-beam embodiment is likely the most useful. On the other hand, if conversely, half of the voltages V1 120 and V2 124 in array 100 differ from the other half, then two beams can be generated. In this embodiment, each beam has a higher divergence than in the single-beam embodiment. Clearly, this can be extended to such an embodiment when many beam embodiments and dissimilar beam embodiments are desired.

[0061] Each component 102 can be connected to the three control lines 150, 154, and 152 for the three voltages V1 120, V2 124, and V3 122, respectively, as follows: Figure 9 , Figure 10 and Figure 11 As shown. The orientation of the voltage gradients generated by V1 120 and V2 124 is preferably perpendicular to each other or orthogonal to each other and orthogonal to the nominal optical axis 110 of element 102, as shown by element 102. Figure 10 and Figure 11 As shown. The third voltage V3 122 is used to adjust the overall phase of the fine beams so that their phase is spatially aligned with their neighbors. This phase-matching process is called "beamforming" because it combines the array of NxN fine beams 26 from array 100 into a single beam that behaves as if it were emitted from the entire aperture 100. By adjusting voltage V3 122 until... Figure 12 The middle mark is Δφ n A phase match is achieved by reducing the gap from 108 to zero. Gap Δφ n 108 corresponds to the element-to-element phase mismatch. It varies depending on the output angle. For a “coherent” beam, this element-to-element phase mismatch is driven to zero by adjusting voltage V3 122.

[0062] Figure 7 The elements 102 are shown separated by small gaps 160. These gaps 160 can be used to extend control lines 150, 154 and 152 for voltages V1 120, V2 124 and V3 122 applied to the respective elements 102.

[0063] Figure 12 Shown in side view Figure 7 The illustrated element 102 is part of a two-dimensional array 100, wherein a plane wave 24 incident from below is deflected by an angle θ. n (Where, n refers to the nth ring from the center) 130 contains a plurality of fine beams 26, and also indicates the phase adjustment Δφ that must be performed to coherently link the fine beams 26 into a single point at a distance f so that they can be represented as a lens with a focal length f. n 108. The phase lag between components is given by phase lag = Δφ n = (8*π*s) 2 / λ)*(nl / 2) / sqrt(f 2 +4n 2 s 2The formula is given, but only the phase difference needs to be applied within the nearest 2π: Applied Phase Lag = modulo(Phase Lag, 2π) . This set of relative phase lags results in a piecewise approximation of the spherical wavefront converging at a point at distance f, i.e., the effect of a lens. Various angles θ n and phase adjustment Δφ n Each ring of the structure is unique, set by the desired focal length of the lens assembly.

[0064] In a broad sense, this application discloses at least the following: a solid-state beam steering device comprising: a body of electro-optic material, wherein the body of electro-optic material comprises any material of the class of hydrogen-doped phase-change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; a first transparent resistive sheet on the first surface of the body of electro-optic material, wherein the first transparent resistive sheet has a first side and a second side; and a transparent conductor on the second surface of the body of electro-optic material, wherein the transparent conductor is coupled to the second side of the first transparent resistive sheet.

[0065] This paper proposes at least the following implementation schemes:

[0066] The proposed first embodiment is a solid-state beam steering device, comprising:

[0067] The body of the electro-optic material includes any material of the class of hydrogen-doped phase change metal oxides, and the body has a first surface and a second surface opposite to the first surface.

[0068] A first transparent resistive sheet on a first surface of the body of the electro-optic material, wherein the first transparent resistive sheet has a first side and a second side; and

[0069] A transparent conductor on the second surface of the body of the electro-optic material, wherein the transparent conductor is coupled to the second side of the first transparent resistive sheet.

[0070] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0071] A first voltage source is coupled between a first side of a first transparent resistive sheet and a transparent conductor to apply a voltage bias across the first transparent resistive sheet;

[0072] The first voltage source is variable to select the beam steering angle.

[0073] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0074] Electro-optic materials include NdNiO3, SmNiO3, PrNiO3, EuNiO3, GdNiO3, or any combination of NdNiO3, SmNiO3, PrNiO3, EuNiO3, and GdNiO3.

[0075] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0076] In this configuration, when a voltage gradient is applied along the first surface of the electro-optic material, the refractive index gradient causes light entering the second surface at a first angle to be redirected, thus exiting the first surface at a second angle. The solid-state beam deflector operates in transmission mode; or

[0077] The solid-state beam steering device also includes a reflector on the first surface of the electro-optic material body;

[0078] When a voltage gradient is applied along the first surface of the electro-optic material, the refractive index gradient causes light entering the second surface at a first angle to be redirected so that it is reflected by a mirror and leaves the second surface at a second angle. The solid-state beam redirection device operates in reflection mode.

[0079] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0080] A second transparent resistive sheet is located on the first surface of the electro-optic material, adjacent to and above or below the first transparent resistive sheet, and has a third side and a fourth side, wherein the fourth side is coupled to a transparent conductor.

[0081] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0082] A second voltage source is coupled between the third side of the second transparent resistive sheet and the transparent conductor to apply a voltage bias across the second transparent resistive sheet.

[0083] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0084] The first voltage source biases the first transparent resistive sheet in the first direction;

[0085] The second voltage source biases the second transparent resistive sheet in the second direction; and

[0086] The second direction is orthogonal to the first direction.

[0087] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0088] A second variable voltage is coupled between the first transparent resistive sheet and the transparent conductor;

[0089] The second variable voltage is variable in that it applies a variable phase delay.

[0090] Another embodiment relates to a solid-state beam steering device, comprising:

[0091] The body of the electro-optic material includes any material of the class of hydrogen-doped phase change metal oxides, and the body has a first surface and a second surface opposite to the first surface.

[0092] A first transparent resistive sheet is placed on the first surface of the body of the electro-optic material, wherein the first transparent resistive sheet extends along the first surface;

[0093] A second transparent resistive sheet is disposed on the second surface of the body of the electro-optic material, wherein the second transparent resistive sheet extends along the second surface;

[0094] A means for biasing a first transparent resistive sheet in a first direction; and

[0095] A device for biasing a second transparent resistive sheet in a second direction.

[0096] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0097] A means for biasing a first transparent resistive sheet in a first direction includes a first voltage source coupled between a first end and a second end of the first transparent resistive sheet; and

[0098] The means for biasing the second transparent resistive sheet in a second direction includes a second voltage source coupled between a first end and a second end of the second transparent resistive sheet;

[0099] Wherein, the first end and the second end of the first transparent resistive sheet are opposite to each other; and

[0100] In this design, the first and second ends of the second transparent resistive sheet are opposite to each other.

[0101] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0102] The second direction is orthogonal to the first direction.

[0103] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0104] The electro-optic materials include NdNiO3, SmNiO3, PrNiO3, EuNiO3, GdNiO3, or any combination of NdNiO3, SmNiO3, PrNiO3, EuNiO3, and GdNiO3.

[0105] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0106] The first voltage and the second voltage are direct current (DC) voltages.

[0107] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0108] Wherein, the second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet are electrically coupled to each other; or

[0109] The solid-state beam steering device also includes a third voltage source, which is coupled between the second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet, and is used to adjust the beam phase.

[0110] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0111] The main body of the electro-optic material has a linear or square structure.

[0112] Another embodiment relates to a solid-state beam steering device, comprising:

[0113] An array of multiple beam steering elements;

[0114] The beam steering elements include:

[0115] The body of the electro-optic material includes any material of the class of hydrogen-doped phase change metal oxides, and the body has a first surface and a second surface opposite to the first surface.

[0116] A first transparent resistive sheet on a first surface of the body of the electro-optic material, wherein the first transparent resistive sheet extends along the first surface; and

[0117] A second transparent resistive sheet is located on the second surface of the body of the electro-optic material, wherein the second transparent resistive sheet extends along the second surface.

[0118] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0119] Each beam steering element also includes:

[0120] A first voltage source, coupled between a first end and a second end of a first transparent resistive sheet; and

[0121] A second voltage source is coupled between the first and second ends of the second transparent resistive sheet;

[0122] In this arrangement, the first end and the second end of the first transparent resistive sheet are opposite to each other;

[0123] In this arrangement, the first and second ends of the second transparent resistive sheet are opposite to each other;

[0124] The first voltage source biases the first transparent resistive sheet in the first direction;

[0125] The second voltage source biases the second transparent resistive sheet in the second direction; and

[0126] The second direction is orthogonal to the first direction.

[0127] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0128] The electro-optic materials include NdNiO3, SmNiO3, PrNiO3, EuNiO3, GdNiO3, or any combination of NdNiO3, SmNiO3, PrNiO3, EuNiO3, and GdNiO3.

[0129] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0130] Each beam steering element also includes:

[0131] A third voltage source, coupled between the second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet, is used to adjust the phase of the light beam.

[0132] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0133] Specifically, when a variable gradient of the refractive index of the bulk electro-optic material of each beam steering element is caused by changing either or both of the first and second voltage sources, each beam steering element steers the input beam to form an output beam in a new direction; or

[0134] Specifically, when the variable gradient of the refractive index of the bulk of the electro-optic material of each beam steering element is caused by changing either or both of the first voltage source and the second voltage source, each beam steering element causes the input beam to be steered to form multiple output beams in the new direction.

[0135] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0136] Wherein, when a variable gradient of the refractive index of the bulk electro-optic material of each beam steering element is caused by changing any one or both of the first and second voltage sources, each beam steering element steers the input beam to form an output beam in a new direction, and the optical fine beam outputs of each beam steering element are combined by adjusting the third voltage source of each corresponding beam steering element to make the optical fine beam outputs of each beam steering element coherent to form a coherent output beam; or

[0137] Specifically, when a variable gradient of the refractive index of the bulk electro-optic material of each beam steering element is caused by changing either or both of the first and second voltage sources, each beam steering element steers the input beam to form multiple output beams in the new direction, and the optical fine beam outputs of each beam steering element are combined by adjusting the third voltage source of each corresponding beam steering element to make the optical fine beam outputs of each beam steering element coherent to form multiple coherent output beams.

[0138] Another implementation involves a method for providing beam steering, comprising:

[0139] Provides a body of electro-optic material, wherein the body of the electro-optic material comprises any material of the class of hydrogen-doped phase change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface;

[0140] A first transparent resistive sheet is provided on a first surface of the body of the electro-optic material, wherein the first transparent resistive sheet has a first side and a second side;

[0141] A transparent conductor is provided on the second surface of the body of the electro-optic material, wherein the transparent conductor is coupled to the second side of the first transparent resistive sheet; and

[0142] A voltage is applied between a first side of the first transparent resistive sheet and a transparent conductor to apply a voltage bias across the first transparent resistive sheet.

[0143] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0144] The electro-optic materials include NdNiO3, SmNiO3, PrNiO3, EuNiO3, GdNiO3, or any combination of NdNiO3, SmNiO3, PrNiO3, EuNiO3, and GdNiO3.

[0145] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0146] A reflector is provided on the first surface of the electro-optic material.

[0147] Another implementation involves a method for providing two-dimensional beam steering, comprising:

[0148] Provides a body of electro-optic material, wherein the body of the electro-optic material comprises any material of the class of hydrogen-doped phase change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface;

[0149] A first transparent resistive sheet is provided on a first surface of the body of the electro-optic material, wherein the first transparent resistive sheet extends along the first surface;

[0150] A second transparent resistive sheet is provided on the second surface of the body of the electro-optic material, wherein the second transparent resistive sheet extends along the second surface;

[0151] A first voltage is applied between the first and second ends of the first transparent resistive sheet; and

[0152] A second voltage is applied between the first and second ends of the second transparent resistive sheet;

[0153] In this arrangement, the first end and the second end of the first transparent resistive sheet are opposite to each other;

[0154] In this arrangement, the first and second ends of the second transparent resistive sheet are opposite to each other;

[0155] Wherein, the first voltage biases the first transparent resistive sheet in a first direction;

[0156] The second voltage biases the second transparent resistive sheet in the second direction; and

[0157] The second direction is orthogonal to the first direction.

[0158] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0159] The electro-optic materials include NdNiO3, SmNiO3, PrNiO3, EuNiO3, GdNiO3, or any combination of NdNiO3, SmNiO3, PrNiO3, EuNiO3, and GdNiO3.

[0160] Further embodiments of any of the foregoing or the following embodiments relate to, to a degree that is not incompatible, the following:

[0161] Wherein, the second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet are electrically coupled to each other; or

[0162] It also includes applying a third voltage between the second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet to adjust the phase of the light beam.

[0163] The invention has now been described in accordance with the requirements of patent law, and those skilled in the art will understand how changes and modifications can be made to the invention to meet its specific requirements or conditions. Such changes and modifications can be made without departing from the scope and spirit of the invention as disclosed herein.

[0164] For illustrative and disclosure purposes, the foregoing detailed description of exemplary and preferred embodiments is presented as required by law. It is not intended to be exhaustive or limit the invention to the precise forms described, but merely to enable those skilled in the art to understand how the invention is suited to particular uses or embodiments. The possibility of modifications and variations will be apparent to those skilled in the art. The description of exemplary embodiments is not intended to be limiting; these embodiments may include tolerances, feature dimensions, specific operating conditions, engineering specifications, etc., and may vary between embodiments or as the prior art changes, and should not imply any limitation. The applicant has made this disclosure with respect to the current level of art, but also anticipates advancements, and future adaptations may be made taking into account these advancements, i.e., based on the then-current level of art. Where applicable, the scope of the invention is contemplated to be defined by the written claims and their equivalents. Reference to elements of the singular claims is not intended to mean "one and only one," unless expressly stated otherwise. Moreover, regardless of whether an element, component, method, or process step in this disclosure is expressly listed in the claims, such element, component, or step is not intended to be exclusive to the public.

[0165] Modifications, additions, or omissions may be made to the systems, devices, and methods described herein without departing from the scope of the invention. Components of the systems and devices may be integrated or separated. Moreover, the operation of the systems and devices may be performed by more, fewer, or other components. Methods may include more, fewer, or other steps. Furthermore, the steps may be performed in any suitable order. As used herein, "each" means each member of a set or each member of a subset of a set.

[0166] Modifications, alterations, or representations made to expedite licensing shall be deemed to have been made without any prejudice, waiver, disclaimer, or estoppel, and without any loss or dissemination of the subject matter originally presented to the public.

[0167] Reviewers of this article or any related articles should not reasonably infer any disclaimer or denial regarding any subject matter originally contained herein. Any modifications, alterations, representations, or other statements made prior art or otherwise in any related articles may be construed as falling within the scope of any disclaimer supporting any subject matter supported by the original article, and any such disclaimer is hereby revoked and withdrawn.

Claims

1. A solid-state beam steering device, comprising: The body of an electro-optic material, wherein the body of the electro-optic material comprises any material of the class of hydrogen-doped phase change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; A first transparent resistive sheet on the first surface of the body of the electro-optic material, wherein the first transparent resistive sheet extends along the first surface; A second transparent resistive sheet on the second surface of the body of the electro-optic material, wherein the second transparent resistive sheet extends along the second surface; A means for allowing a first direct current to flow through the first transparent resistive sheet in a first direction; and A device for allowing a second direct current to flow through the second transparent resistive sheet in a second direction.

2. The solid-state beam steering device according to claim 1, wherein, The means for causing a first direct current to flow through the first transparent resistive sheet in a first direction includes a first direct current voltage source coupled between a first end and a second end of the first transparent resistive sheet; as well as The means for causing a second direct current to flow through the second transparent resistive sheet in a second direction includes a second direct current voltage source coupled between a first end and a second end of the second transparent resistive sheet; Wherein, the first end and the second end of the first transparent resistive sheet are opposite to each other; and In this embodiment, the first end and the second end of the second transparent resistive sheet are opposite to each other.

3. The solid-state beam steering device according to claim 1, wherein, The second direction is orthogonal to the first direction.

4. The solid-state beam steering device according to claim 1, wherein, The electro-optic material includes NdNiO3, SmNiO3, PrNiO3, EuNiO3, GdNiO3, or any combination of NdNiO3, SmNiO3, PrNiO3, EuNiO3, and GdNiO3.

5. The solid-state beam steering device according to claim 2, in, The second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet are electrically coupled to each other; or The solid-state beam steering device further includes a third voltage source coupled between the second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet, for adjusting the beam phase.

6. The solid-state beam steering device according to claim 1, wherein, The main body of the electro-optic material has a linear structure or a square structure.

7. A solid-state beam steering device, comprising: An array of multiple beam steering elements; The beam steering elements include: The body of an electro-optic material, wherein the body of the electro-optic material comprises any material of the class of hydrogen-doped phase change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; A first transparent resistive sheet on the first surface of the body of the electro-optic material, wherein the first transparent resistive sheet extends along the first surface; and A second transparent resistive sheet on the second surface of the body of the electro-optic material, wherein the second transparent resistive sheet extends along the second surface; Each beam steering element also includes: A first voltage source, coupled between a first end and a second end of the first transparent resistive sheet; and A second voltage source is coupled between the first and second ends of the second transparent resistive sheet; Wherein, the first end and the second end of the first transparent resistive sheet are opposite to each other; Wherein, the first end and the second end of the second transparent resistive sheet are opposite to each other; Wherein, the first voltage source causes the first DC current to flow through the first transparent resistive sheet in a first direction; Wherein, the second voltage source causes a second direct current to flow through the second transparent resistive sheet in the second direction; and The second direction is orthogonal to the first direction.

8. The solid-state beam steering device according to claim 7, wherein, The electro-optic material includes NdNiO3, SmNiO3, PrNiO3, EuNiO3, GdNiO3, or any combination of NdNiO3, SmNiO3, PrNiO3, EuNiO3, and GdNiO3.

9. The solid-state beam steering device according to claim 7, wherein, Each beam steering element also includes: A third voltage source, coupled between the second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet, is used to adjust the phase of the light beam.

10. The solid-state beam steering device according to claim 7, in, When the variable gradient of the refractive index of the bulk of the electro-optic material of each beam steering element is caused by changing any one or both of the first voltage source and the second voltage source, each beam steering element causes the input beam to be steered to form an output beam in a new direction. or Specifically, when the variable gradient of the refractive index of the bulk of the electro-optic material of each beam steering element is caused by changing any one or both of the first voltage source and the second voltage source, each beam steering element causes the input beam to be steered to form multiple output beams in the new direction.

11. The solid-state beam steering device according to claim 9, in, When a variable gradient of the refractive index of the bulk of the electro-optic material of each beam steering element is caused by changing any one or both of the first voltage source and the second voltage source, each beam steering element steers the input beam to form an output beam in a new direction, and combines the optical fine beam outputs of each beam steering element by adjusting the third voltage source of each respective beam steering element to make the optical fine beam outputs of each beam steering element coherent to form a coherent output beam. or Wherein, when a variable gradient of the refractive index of the bulk of the electro-optic material of each beam steering element is caused by changing any one or both of the first voltage source and the second voltage source, each beam steering element steers the input beam to form multiple output beams in the new direction, and the optical fine beam outputs of each beam steering element are combined by adjusting the third voltage source of each corresponding beam steering element so that the optical fine beam outputs of each beam steering element are coherent to form multiple coherent output beams.

12. A method for providing two-dimensional beam steering, comprising: Provides a body of an electro-optic material, wherein the body of the electro-optic material comprises any material of the class of hydrogen-doped phase change metal oxides, and wherein the body has a first surface and a second surface opposite to the first surface; A first transparent resistive sheet is provided on the first surface of the body of the electro-optic material, wherein the first transparent resistive sheet extends along the first surface; A second transparent resistive sheet is provided on the second surface of the body of the electro-optic material, wherein the second transparent resistive sheet extends along the second surface; A first voltage is applied between the first end and the second end of the first transparent resistive sheet; and A second voltage is applied between the first and second ends of the second transparent resistive sheet; Wherein, the first end and the second end of the first transparent resistive sheet are opposite to each other; Wherein, the first end and the second end of the second transparent resistive sheet are opposite to each other; Wherein, the first voltage causes a first direct current to flow through the first transparent resistive sheet in a first direction; Wherein, the second voltage causes a second direct current to flow through the second transparent resistive sheet in the second direction; and The second direction is orthogonal to the first direction.

13. The method according to claim 12, wherein, The electro-optic material includes NdNiO3, SmNiO3, PrNiO3, EuNiO3, GdNiO3, or any combination of NdNiO3, SmNiO3, PrNiO3, EuNiO3, and GdNiO3.

14. The method according to claim 12, in, The second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet are electrically coupled to each other; or It also includes applying a third voltage between the second end of the first transparent resistive sheet and the second end of the second transparent resistive sheet to adjust the phase of the light beam.

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