A synergistically driven two-step stick-slip driving device and method

Abstract

The application provides a kind of synergic driving double-step stick-slip driving device and method, it is related to micro-nano precision manufacturing and control technical field, in view of the problem that the output displacement of piezoelectric stick-slip driver exists back movement and leads to low driving efficiency, by configuring two friction heads and two driving modules arranged symmetrically, the back movement is inhibited by synergic driving movement unit, and the friction head can drive the movement unit to move again after inhibiting the back movement of another friction head, double-step displacement is generated to improve driving speed and efficiency.

Description

Technical Field

[0001] This invention relates to the field of micro-nano precision manufacturing and control technology, specifically to a cooperatively driven dual-step stick-slip drive device and method. Background Technology

[0002] Piezoelectric actuators are devices that convert electrical energy into mechanical energy through the inverse piezoelectric effect, and they are currently widely used in many fields such as micro-nano positioning, biomedicine, and measurement. Piezoelectric actuators mainly include ultrasonic, inchworm, and stick-slip piezoelectric actuators. Among them, stick-slip actuators are widely used in the design of linear and rotary piezoelectric actuators due to their simple structure and control. Based on the principle of stick-slip motion, the driving process of a stick-slip actuator mainly includes two cycles: "viscous" and "sliding."

[0003] In the output displacement of piezoelectric stick-slip actuators, a backward motion, or "sliding" cycle, is prevalent. This means the output displacement first reaches its maximum value, then moves backward a certain distance. This backward motion affects the actuator's performance, particularly its output speed and efficiency. Suppressing this backward motion and increasing the effective displacement per cycle will improve the actuator's drive speed and efficiency. Existing technologies have proposed various methods to address the backward motion problem in stick-slip actuators, but these generally suffer from low efficiency, limited positioning accuracy, and heat generation and wear issues. They fail to meet the requirements for effectively suppressing backward motion, achieving high-efficiency, high-speed motion, and reducing heat generation and wear in stick-slip actuators. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by providing a cooperatively driven dual-step stick-slip drive device and method. By configuring two symmetrically arranged friction heads and two drive modules, the motion unit is cooperatively driven to suppress retraction. Furthermore, both friction heads can drive the motion unit to move, generating dual-step displacement to improve drive speed and efficiency.

[0005] The first objective of this invention is to provide a cooperatively driven dual-stepping stick-slip drive device, which adopts the following solution:

[0006] The device includes two spaced-apart friction heads, each connected to a drive module via a bridge amplification mechanism. The drive module generates longitudinal reciprocating displacement to drive the longitudinal and lateral movements of its corresponding friction head. The two friction heads move laterally in opposite directions, while their longitudinal displacement directions are the same. One friction head contacts and holds the moving unit in position to counteract the retraction of the other friction head, enabling the moving unit to move in unidirectional steps. The bridge amplification mechanism outputs both longitudinal and parasitic lateral movements under the drive of the drive module.

[0007] Furthermore, the two friction heads are arranged at intervals along the direction of motion of the motion unit, and the friction heads are symmetrically installed on both sides of the bracket.

[0008] Furthermore, the bridge amplification mechanism includes flexible hinges arranged on both sides of the drive module. Under the longitudinal displacement of the drive module, the flexible hinges on both sides of the drive module bend and drive the friction head to generate longitudinal and lateral movements.

[0009] Furthermore, the drive module is driven by piezoelectric ceramic, and the output of the drive module acts on the bridge amplification mechanism; when the drive module is longitudinally forward displaced and longitudinally reverse displaced, the movement direction of the driven friction head is opposite.

[0010] Furthermore, a pre-tightening mechanism is installed on the bridge amplification mechanism to adjust the pre-tightening force between the drive module and the bridge amplification mechanism.

[0011] Furthermore, the bridge-type amplification structure, the drive module, and the friction head together form a drive unit. The motion unit and the drive unit are respectively mounted on the base, and the base is provided with an adjustment mechanism to move the drive unit closer to or further away from the motion unit.

[0012] Furthermore, the adjustment mechanism includes an adjustment rod and an adjustment seat. The drive unit is mounted on the base via the adjustment seat, and the adjustment rod connects the drive unit and the base, driving the drive unit to move along the adjustment seat.

[0013] Furthermore, the motion unit includes a guide rail and a slider slidably mounted on the guide rail, with a friction head abutting against the side of the slider.

[0014] A second objective of the present invention is to provide a method of operating a dual-stepping stick-slip drive device utilizing the cooperative drive as described in the first objective, comprising:

[0015] When the first driving module corresponding to the first friction head is powered on, the first friction head generates longitudinal and lateral motion, squeezes the motion unit and drives the motion unit to move in the first direction, generating an effective displacement x1.

[0016] Before the first drive module is powered off, the second drive module corresponding to the second friction head is powered on, and the second friction head generates longitudinal movement and reverse lateral movement. Due to the clamping effect of the first friction head, the motion unit does not move.

[0017] When the first drive module is powered off, the first friction head generates reverse longitudinal and reverse lateral movements. Due to the clamping effect of the second friction head, the motion unit does not move.

[0018] When the second drive module is powered off, the second friction head generates reverse longitudinal and lateral movements, driving the motion unit to move in the first direction, generating an effective displacement x2. The total displacement generated in a single cycle is x. a=x1+x2.

[0019] Furthermore, the power-on timing of the first drive module and the second drive module is swapped, causing the motion unit to move in the second direction, while the first direction and the second direction are collinear and opposite.

[0020] Compared with the prior art, the advantages and positive effects of this invention are:

[0021] (1) To address the problem of low driving efficiency caused by the back motion in the output displacement of the current piezoelectric stick-slip actuator, two symmetrically arranged friction heads and two driving modules are configured to work together to drive the motion unit to suppress the back motion. After the friction head suppresses the back motion of the other friction head, it can drive the motion unit to move again, generating a double step displacement to improve the driving speed and efficiency.

[0022] (2) The parasitic motion of the bridge amplification mechanism is used as the drive, and the dual piezoelectric ceramics are used for coordinated drive. When the motion direction of the first friction head under the action of the drive module is the main motion direction, the second friction head is used as a clamp to suppress the retraction motion of the first friction head, and the retraction displacement of the second friction head is used as part of the effective displacement to achieve dual step displacement to improve the drive speed and drive efficiency.

[0023] (3) Two sets of friction heads and corresponding drive modules are symmetrically arranged to improve the consistency of forward and reverse motion, and the direction of motion can be changed by changing the power-on sequence of the drive modules.

[0024] (4) Control the voltage rise rate when the drive module is powered on and the voltage drop rate when it is powered off, so that the friction head can quickly enter or leave the clamping state, reduce the interval time between the two steps, and make the voltage rise steadily when the drive motion unit moves, so as to achieve smooth drive of the motion unit. Attached Figure Description

[0025] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0026] Figure 1 This is a schematic diagram of the structure of the cooperatively driven dual-step stick-slip drive device in Embodiments 1 and 2 of the present invention.

[0027] Figure 2 This is a schematic diagram of the bridge amplification mechanism in Embodiments 1 and 2 of the present invention.

[0028] Figure 3 This is a schematic diagram of the adjustment mechanism in Embodiments 1 and 2 of the present invention.

[0029] Figure 4This is a schematic diagram of the motion unit in Embodiments 1 and 2 of the present invention.

[0030] Figure 5 This is a schematic diagram of the base structure in Embodiments 1 and 2 of the present invention.

[0031] Figure 6 This is a schematic diagram of the friction head driving the motion unit in Embodiments 1 and 2 of the present invention.

[0032] Figure 7 This is a schematic diagram of the piezoelectric ceramic driving timing in Embodiments 1 and 2 of the present invention.

[0033] Figure 8 This is a schematic diagram of the output displacement of the stick-slip actuator with retraction motion in Embodiments 1 and 2 of the present invention.

[0034] Figure 9 This is a schematic diagram of the output displacement of the stick-slip actuator after actively suppressing the retraction motion in Embodiments 1 and 2 of the present invention.

[0035] Among them, 1. Drive unit; 101. Friction head; 102. First threaded hole; 103. Contact surface; 104. Flexible hinge; 105. Second threaded hole; 2. Left piezoelectric ceramic; 3. Motion unit; 4. Base; 401. Third threaded hole; 402. Fourth threaded hole; 5. Fine adjustment mechanism; 6. Right piezoelectric ceramic. Detailed Implementation

[0036] Example 1

[0037] In a typical embodiment of the present invention, such as Figures 1-9 As shown, a cooperative dual-step stick-slip drive device is presented.

[0038] The driving process of a stick-slip actuator mainly includes two cycles: "stickiness" and "sliding." In the output displacement of a piezoelectric stick-slip actuator, there is a retracting motion, which is the "sliding" cycle. That is, the output displacement first reaches its maximum value, and then moves backward a certain distance, such as... Figure 8 As shown, backward motion affects actuator performance, particularly output speed and efficiency. Suppressing backward motion and increasing the effective displacement per cycle will improve the actuator's drive speed and efficiency. Currently, suppressing the backward motion of stick-slip actuators results in low actuator drive efficiency, limited positioning accuracy, and issues such as heat generation and wear.

[0039] Based on this, this embodiment provides a cooperatively driven dual-step stick-slip drive device to effectively suppress backlash, improve the motion speed and driving efficiency of the stick-slip actuator, and reduce heat generation and wear problems. Specifically, a dual-bridge mechanism is used for cooperative driving to suppress backlash, and dual friction heads 101 are used to generate dual-step displacement to improve driving speed and efficiency.

[0040] The cooperative driving dual-step stick-slip drive device provided in this embodiment will now be described with reference to the accompanying drawings.

[0041] See Figure 1 , Figure 1 This is an overall structural diagram of a cooperatively driven dual-step stick-slip drive device provided in this embodiment.

[0042] The device mainly includes a drive unit 1, a motion unit 3, an adjustment mechanism 5, and a base 4. The adjustment mechanism 5, drive unit 1, and motion unit 3 are all mounted on the base 4. The adjustment mechanism 5 can drive drive unit 1 to move relative to the base 4, thereby moving drive unit 1 closer to or further away from motion unit 3.

[0043] In this embodiment, the motion unit 3 generates translation along a straight line under the action of the driving unit 1. The corresponding horizontal direction is parallel to the movement trajectory of the motion unit 3, and the corresponding vertical direction is the normal to the movement trajectory of the motion unit 3.

[0044] Drive unit 1 includes a drive module, a bridge amplification mechanism, and a friction head 101. The bridge amplification mechanism can generate lateral and longitudinal displacements under drive, such as... Figure 2 As shown, the drive module is connected to the friction head 101 through the bridge amplification mechanism. When the drive module acts on the bridge amplification mechanism, the output end of the bridge amplification mechanism can drive the friction head 101 to generate longitudinal displacement and parasitic lateral displacement.

[0045] The driving module in the driving unit 1 is a piezoelectric ceramic. The piezoelectric ceramic drives the bridge amplification mechanism, causing the bridge amplification mechanism to output longitudinal displacement and lateral parasitic displacement. In the initial state, the friction head 101 of the driving unit 1 has a certain contact with the side of the motion unit 3, and the friction head 101 at the top of the driving unit 1 is in contact with the motion unit 3. Under the action of the driving force of the piezoelectric ceramic, the driving unit 1 pushes the motion unit 3 to produce lateral displacement.

[0046] According to the stick-slip drive principle, the longitudinal displacement of the friction head 101 can change the contact force between the friction head 101 and the moving unit 3, and the parasitic lateral displacement of the friction head 101 can drive the moving unit 3 to move along its trajectory. To solve the retraction problem in the stick-slip drive process, such as... Figure 2As shown, the drive unit 1 is equipped with two friction heads 101. Each friction head 101 is connected to the drive module through a bridge amplification mechanism. With two sets of bridge amplification mechanisms and drive modules configured, the drive module can generate longitudinal reciprocating displacement to drive the longitudinal and lateral movements of its corresponding friction head 101.

[0047] Under the same driving conditions, the two friction heads 101 move in opposite directions laterally and in the same direction longitudinally. The driving unit 1 has a symmetrical structure. One friction head 101 contacts the motion unit 3 and maintains the position of the motion unit 3 to counteract the retraction effect of the other friction head 101 on the motion unit 3, causing the motion unit 3 to move in one direction. Figure 6 , Figure 7 and Figure 9 As shown, a dual-bridge amplification mechanism works in concert, suppressing the retraction motion and coordinating the movement of the motion unit 3 by controlling the energizing timing of the piezoelectric ceramic.

[0048] During this operation, the friction head 101 connected to the bridge amplification mechanism serves as the output end of the drive unit 1. The normal contact force between the friction head 101 and the motion unit 3 changes with the discharge of the piezoelectric ceramic, which can effectively reduce wear and heat generation.

[0049] The drive module is driven by piezoelectric ceramics. The bridge amplification mechanism has a region for accommodating piezoelectric ceramics and a contact surface 103 for the piezoelectric ceramics. The output end of the drive module acts on the contact surface 103 of the bridge amplification mechanism. When the drive module moves longitudinally in the forward direction and longitudinally in the reverse direction, the movement direction of the driven friction head 101 is opposite.

[0050] A pre-tightening mechanism is installed on the bridge amplification mechanism to adjust the pre-tightening force between the drive module and the bridge amplification mechanism; a second threaded hole 105 is provided at the bridge amplification mechanism position corresponding to each piezoelectric ceramic, and the second threaded hole 105 is matched with an adjusting bolt to form a pre-tightening mechanism to adjust the pre-tightening force of each piezoelectric ceramic.

[0051] To increase rigidity, a composite bridge amplification mechanism is adopted. Two friction heads 101 are spaced apart along the movement direction of the motion unit 3. The two friction heads 101 are symmetrically mounted on both sides of the support via two bridge amplification mechanisms. Figure 1 The state shown is a reference, with one side of the friction head 101 driven by the left piezoelectric ceramic 2 and the other side of the friction head 101 driven by the right piezoelectric ceramic 6.

[0052] Based on the working principle of the bridge amplification mechanism, the bridge amplification mechanism of the drive unit 1 adopts a double straight beam type flexible hinge 104 to increase rigidity. The bridge amplification mechanism includes flexible hinges 104 arranged on both sides of the drive module. Under the longitudinal displacement of the drive module, the flexible hinges 104 located on both sides of the drive module bend and drive the friction head 101 to generate longitudinal and lateral movements.

[0053] When the piezoelectric ceramic is energized, it elongates, causing longitudinal displacement of the pushing surface and bending of the flexible hinge 104. After the flexible hinge 104 bends, it drives the friction head 101 to produce horizontal and vertical displacement. The vertical displacement increases the friction between the friction head 101 and the motion unit 3, while the horizontal displacement drives the motion unit 3 to move.

[0054] When the piezoelectric ceramic is de-energized, it contracts, and the flexible hinge 104 returns to its original shape, causing the friction head 101 to produce displacements in the opposite horizontal and vertical directions. That is, without suppression, it will cause the motion unit 3 to produce a retraction displacement. The output displacement curve of the piezoelectric stick-slip actuator without retraction displacement suppression is shown below. Figure 7 As shown, the horizontal axis represents time, and the vertical axis represents the output displacement; where L f L represents forward displacement. b This represents the retraction displacement. The resulting effective displacement is L. f -L b The presence of a backward motion will affect operating efficiency and speed.

[0055] Referring to the driving process in this embodiment, the collaborative operation of the dual friction heads 101 suppresses the retraction displacement, thereby reducing or eliminating the retraction motion and effectively improving operating speed and efficiency. The output displacement curve after completely eliminating the retraction motion is shown below. Figure 8 As shown.

[0056] It should be noted that when the piezoelectric ceramic is energized, the normal contact force between the friction head 101 and the motion unit 3 increases; when the piezoelectric ceramic is de-energized, the normal contact force between the friction head 101 and the motion unit 3 decreases during the process of the flexible hinge 104 returning to its original shape. The decrease in normal contact force reduces the dynamic friction between the friction head 101 and the motion unit 3 during the process of the flexible hinge 104 returning to its original shape, effectively reducing wear and heat generation.

[0057] like Figure 3 As shown, the bridge-type amplification structure, drive module, and friction head 101 together form drive unit 1. Motion unit 3 and drive unit 1 are respectively mounted on base 4. Base 4 is provided with adjustment mechanism 5 to move drive unit 1 closer to or further away from motion unit 3. The bracket is mounted to adjustment mechanism 5 on base 4 through first threaded hole 102 and connecting bolt.

[0058] The adjustment mechanism 5 can be configured in various forms. The adjustment mechanism 5 includes an adjustment rod and an adjustment seat. The drive unit 1 is mounted on the base 4 via the adjustment seat. The adjustment rod connects the drive unit 1 and the base 4, driving the drive unit 1 to move along the adjustment seat. Taking an adjustment platform capable of fine-tuning as an example, the adjustment rod is an adjustment bolt, which rotates to move the drive unit 1 relative to the base 4.

[0059] like Figure 5 As shown, the base 4 has an L-shaped structure and is used to install the motion unit 3, the drive unit 1, and the adjustment mechanism 5. The base 4 has a third threaded hole 401 corresponding to the position where the adjustment mechanism 5 is installed. The adjustment mechanism 5 is installed on the base 4 through the third threaded hole 401 and the connecting bolt. The base 4 also has a fourth threaded hole 402 corresponding to the position where the motion unit 3 is installed. The motion unit 3 is installed on the base 4 through the fourth threaded hole 402 and the connecting bolt.

[0060] The motion unit 3 includes a guide rail and a slider slidably mounted on the guide rail, with a friction head 101 abutting against the side of the slider. The motion unit 3 can be of various forms; in this embodiment, such as... Figure 4 He Ru Figure 1 As shown, this cross roller slide is an example. For the cross roller slide, when the bottom plate is fixed, the top plate can slide along the guide rail. Specific details will not be repeated here. The friction head 101 moves on the side of the cross roller slide.

[0061] Example 2

[0062] In another typical embodiment of the present invention, such as Figures 1-9 As shown, a working method of a cooperatively driven dual-step stick-slip drive device is presented.

[0063] The working method using the cooperatively driven dual-step stick-slip drive device as described in Example 1 includes:

[0064] When the first driving module corresponding to the first friction head 101 is powered on, the first friction head 101 generates longitudinal and lateral motion, squeezes the motion unit 3 and drives the motion unit 3 to move in the first direction, generating an effective displacement x1.

[0065] Before the first drive module is powered off, the second drive module corresponding to the second friction head 101 is powered on, and the second friction head 101 generates longitudinal movement and reverse lateral movement. Due to the clamping effect of the first friction head 101, the motion unit 3 does not move.

[0066] When the first drive module is powered off, the first friction head 101 generates reverse longitudinal and reverse lateral movements. Due to the clamping effect of the second friction head 101, the motion unit 3 does not move.

[0067] When the second drive module is powered off, the second friction head 101 generates reverse longitudinal and lateral movements, driving the motion unit 3 to move in the first direction, generating an effective displacement x2. The total displacement generated in a single cycle is x. a =x1+x2.

[0068] The following section will use a specific application scenario to illustrate the working process of the above method.

[0069] See Figure 6 Regarding the operation process of the two friction heads 101 of the drive unit 1:

[0070] Before the drive unit 1 is activated, there is a certain amount of contact between the friction head 101 of the drive unit 1 and the motion unit 3.

[0071] When the right piezoelectric ceramic 6 on one side of the drive unit 1 is energized, it starts to move, and its output end generates a lateral displacement, which causes the friction head 101 of the drive unit 1 to move laterally and drives the motion unit 3 to generate the first lateral displacement.

[0072] Before the right piezoelectric ceramic 6 on one side of the drive unit 1 is de-energized, the left piezoelectric ceramic 2 on the other side of the drive unit 1 is energized and activated. At this time, due to the clamping force of the bridge amplification mechanism on one side, the motion unit 3 does not generate reverse motion.

[0073] After the left piezoelectric ceramic 2 on the other side of the drive unit 1 is powered on, the right piezoelectric ceramic 6 on one side of the drive unit 1 is de-powered. At this time, due to the clamping force of the bridge amplification mechanism on the other side, the motion unit 3 does not generate a retracting motion.

[0074] When the right piezoelectric ceramic 6 on one side of the drive unit 1 is de-energized, the left piezoelectric ceramic 2 on the other side of the drive unit 1 is de-energized, and its output end generates a lateral displacement, causing the friction head 101 of the drive unit 1 to generate a lateral movement and driving the motion unit 3 to generate a second lateral displacement.

[0075] Throughout the process, the effective displacement includes two lateral displacements: the energization of the right piezoelectric ceramic 6 on one side and the de-energization of the left piezoelectric ceramic 2 on the other side. This is the sum of the first and second lateral displacements mentioned above.

[0076] Combination Figures 1-9 The working method of suppressing backward motion and generating double-step motion through cooperative driving is explained below, taking rightward motion as an example:

[0077] like Figure 6 As shown in (a)-(b), when the right piezoelectric ceramic 6 is energized, the voltage rises slowly, and the right friction head 101 generates horizontal and vertical displacements, pushing the motion unit 3 to move to the right, generating an effective displacement x1;

[0078] like Figure 6As shown in (c)-(d), before the right piezoelectric ceramic 6 is de-energized, the left piezoelectric ceramic 2 is energized, the voltage rises rapidly, and the left friction head 101 generates horizontal and vertical displacements. However, due to the clamping force of the right friction head 101, the motion unit 3 does not move.

[0079] like Figure 6 As shown in (f), when the right piezoelectric ceramic 6 is de-energized, the voltage drops rapidly, and the right friction head 101 produces horizontal and vertical displacements. However, due to the clamping force of the left friction head 101, the motion unit 3 does not move.

[0080] like Figure 6 As shown in (g)-(h), when the left piezoelectric ceramic 2 is de-energized, the voltage drops slowly, and the left friction head 101 generates horizontal and vertical displacements, pushing the motion unit 3 to move to the right, generating an effective displacement x2.

[0081] The effective displacement occurs during the entire process, specifically during the energization of the right piezoelectric ceramic 6 and the de-energization of the left piezoelectric ceramic 2. The total displacement is: x a =x1+x2.

[0082] The energizing sequence during the rightward movement is as follows: Figure 6 As shown, by swapping the power-on timing of the first drive module and the second drive module, the motion unit 3 moves to the left, with the leftward movement direction collinear and opposite to the rightward movement direction.

[0083] The drive unit 1 adopts a symmetrical structure, which effectively improves the consistency of forward and reverse motion; it focuses on the root cause of the retraction motion—normal contact force—and reduces wear and heat generation.

[0084] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for operating a cooperatively driven dual-stepping stick-slip drive device, characterized in that, A cooperatively driven dual-step stick-slip drive device is adopted, which includes two friction heads arranged at intervals. Each friction head is connected to a drive module through a bridge amplification mechanism. The drive module can generate longitudinal reciprocating displacement to drive the longitudinal and lateral movements of its corresponding friction head. The lateral movement directions of the two friction heads are opposite, while the longitudinal displacement directions are the same. One friction head contacts the motion unit and holds the position of the motion unit to counteract the retraction effect of the other friction head on the motion unit, so that the motion unit moves in one direction in a stepping motion. The working method includes: energizing the first drive module corresponding to the first friction head, causing the first friction head to generate longitudinal and lateral movements, compressing the motion unit and driving the motion unit to move in the first direction, thereby generating effective displacement. ; Before the first drive module is powered off, the second drive module corresponding to the second friction head is powered on, and the second friction head generates longitudinal movement and reverse lateral movement. Due to the clamping effect of the first friction head, the motion unit does not move. When the first drive module is powered off, the first friction head generates reverse longitudinal and reverse lateral movements. Due to the clamping effect of the second friction head, the motion unit does not move. When the second drive module is powered off, the second friction head generates reverse longitudinal and lateral movements, driving the motion unit to move in the first direction, generating effective displacement. The total displacement generated in a single cycle is .

2. The operating method of the cooperatively driven dual-stepping stick-slip drive device as described in claim 1, characterized in that, The two friction heads are arranged at intervals along the direction of motion of the motion unit, and the friction heads are symmetrically installed on both sides of the bracket.

3. The operating method of the cooperatively driven dual-stepping stick-slip drive device as described in claim 1, characterized in that, The bridge amplification mechanism includes flexible hinges arranged on both sides of the drive module. Under the longitudinal displacement of the drive module, the flexible hinges on both sides of the drive module bend and drive the friction head to generate longitudinal and lateral movements.

4. The operating method of the cooperatively driven dual-stepping stick-slip drive device as described in claim 3, characterized in that, The drive module is driven by piezoelectric ceramic, and the output of the drive module acts on the bridge amplification mechanism; when the drive module is longitudinally forward and longitudinally reverse displaced, the movement direction of the driven friction head is opposite.

5. The operating method of the cooperatively driven dual-stepping stick-slip drive device as described in claim 3, characterized in that, The bridge amplification mechanism is equipped with a pre-tightening mechanism for adjusting the pre-tightening force between the drive module and the bridge amplification mechanism.

6. The operating method of the cooperatively driven dual-stepping stick-slip drive device as described in claim 1, characterized in that, The bridge amplification mechanism, drive module and friction head together form a drive unit. The motion unit and drive unit are respectively mounted on the base. The base is provided with an adjustment mechanism to move the drive unit closer to or further away from the motion unit.

7. The operating method of the cooperatively driven dual-stepping stick-slip drive device as described in claim 6, characterized in that, The adjustment mechanism includes an adjustment rod and an adjustment seat. The drive unit is mounted on the base via the adjustment seat. The adjustment rod connects the drive unit and the base, driving the drive unit to move along the adjustment seat.

8. The operating method of the cooperatively driven dual-stepping stick-slip drive device as described in claim 1, characterized in that, The motion unit includes a guide rail and a slider slidably mounted on the guide rail, with a friction head abutting against the side of the slider.

9. The operating method of the cooperatively driven dual-stepping stick-slip drive device as described in claim 1, characterized in that, By swapping the power-on timing of the first drive module and the second drive module, the motion unit moves in the second direction, while the first direction and the second direction are collinear and opposite.

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