Contamination shield for mechanically insulating equipment

Abstract

An apparatus includes a mechanical insulation device having a flexible bellows (315) extending between a first flange and a second flange (325, 330), the flexible bellows (315) defining a bellows passage extending between an opening of the first flange and an opening of the second flange along an axial direction; an inner rigid sleeve (335) affixed to or supported by the first flange and extending along the bellows passage in the axial direction; and a shielding device (340, including 342, 344). An outer diameter of the inner rigid sleeve is less than an inner diameter of the flexible bellows. The shielding device is at least partially affixed to or supported by the second flange and defines an axial device opening having a diameter that is less than the inner diameter of the flexible bellows and greater than the outer diameter of the inner rigid sleeve. The shielding device is configured to impede particulate from entering an area between the flexible bellows and the inner rigid sleeve.

Description

[0001] Cross-references to related applications

[0002] This application claims priority to U.S. Application No. 63 / 020,760, filed May 6, 2020, entitled “Contamination Shield for Mechanically Insulating Device,” the entire contents of which are incorporated herein by reference. Technical Field

[0003] The disclosed subject matter relates to a device for shielding mechanically insulating equipment, such as flexible corrugated pipes, from the influence of unwanted materials. Background Technology

[0004] Fluid materials (such as liquids, gases, or partially liquids) moving within a system can collide with surfaces within the system (impact surfaces). Collisions with impact surfaces can result in material splashing, deposition, and / or scattering, which can contaminate the impact surface and objects in its vicinity. For example, contamination might be a fragment of material ejected from the material due to the impact. Contaminant bodies can degrade the performance of objects and / or the entire system.

[0005] For example, the system may include optical elements such as mirrors, and contamination of the mirror may alter its reflective properties. The mirror may be a mirror in an extreme ultraviolet (EUV) light source, and contamination may result in a reduction in the amount of EUV light output from the EUV light source.

[0006] EUV light, such as electromagnetic radiation with wavelengths of 100 nanometers (nm) or less (sometimes also called soft X-rays) and including light with wavelengths of, for example, 20 nm or less, between 5 nm and 20 nm, or between 13 nm and 14 nm, can be used in photolithography processes to create minute features in a substrate (e.g., a silicon wafer) by initiating polymerization in a resist layer. Methods for generating EUV light include, but are not limited to, converting materials comprising elements such as xenon, lithium, or tin into a plasma state using emission lines in the EUV range. In one such method, the desired plasma, commonly referred to as laser-generated plasma (“LPP”), is generated by irradiating a target material (e.g., in the form of droplets, plates, strips, streams, or clusters of material) with an amplified beam of light. For this process, the plasma is typically generated in a sealed container (e.g., a vacuum chamber) and monitored using various types of metrological equipment.

[0007] During operation, the EUV light source utilizes and generates gases, liquids, and partial liquids (such as plasma effluents), which are transported between components and through various mechanical connection devices that provide conduits for fluid flow between components. Summary of the Invention

[0008] In some general aspects, an apparatus includes: a mechanical insulating device having a flexible bellows extending between a first flange and a second flange; an inner rigid sleeve; and a shielding device. The flexible bellows defines a bellows channel extending axially between an opening in the first flange and an opening in the second flange. The inner rigid sleeve is attached to or supported by the first flange and extends axially along the bellows channel. The outer diameter of the inner rigid sleeve is smaller than the inner diameter of the flexible bellows. The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening with a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve. The shielding device is configured to allow relative movement between the first flange and the second flange, including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

[0009] Each implementation may include one or more of the following features. For example, the shielding device may extend into the bellows channel.

[0010] The distance between the inner diameter of the flexible bellows and the outer diameter of the inner rigid sleeve can be greater than about 10%, about 20%, or about 30% of the inner diameter of the flexible bellows.

[0011] The shielding device may include one or more discs extending in a direction not parallel to the axial direction. The direction in which the one or more discs extend may be perpendicular to the axial direction. The one or more discs may include multiple discs. The outer diameter of at least one disc may differ from the outer diameter of each of the other discs, and the inner diameter of at least one disc may differ from the inner diameter of each of the other discs. The outer diameter of at least one disc may be equal to the outer diameter of another disc, and the inner diameter of at least one disc may be equal to the inner diameter of another disc. Each disc may be restricted from movement in the axial direction but may be freely movable in a direction not parallel to the axial direction. Each disc may be defined by a thickness in the axial direction that allows each disc to be mounted adjacent to a second flange. Each of the one or more discs may include a slit extending from the outer diameter of the disc to the inner diameter of the disc, allowing each disc to be mounted adjacent to a second flange. The shielding device may also include a disc housing configured to hold the one or more discs. The disc housing may be defined by an inner diameter equal to the inner diameter of a flexible bellows. The outer diameter of at least one of the one or more discs may be larger than the inner diameter of the disc housing. The one or more discs may include multiple discs. If any one of the disks is a small disk whose outer diameter is smaller than the sum of the inner diameter of the disk shell and the annular radius of the disk shell, then the small disk can be sandwiched between two disks, and the outer diameter of each of the two disks is larger than the sum of the inner diameter of the disk shell and the annular radius of the disk shell.

[0012] Each disk may be defined by a thickness along the axial direction, allowing one or more disks to be received within a disk housing.

[0013] The shielding device can be configured to at least partially cover or cover the area between the flexible bellows and the inner rigid sleeve, thereby preventing particles from entering that area. Particles may include one or more of the following: solid particles, fluid particles, and splashes.

[0014] The flexible bellows may include pleats that are configured to fold or unfold to allow relative movement between the first flange and the second flange.

[0015] The shielding device can be made of metal, which includes a coating configured to prevent particulate contamination of the shielding device. Particulates can include one or more of the following: solid particles, fluid particles, and splashes. Furthermore, the shielding device coating can be configured to: repel fluid particles, thereby preventing fluid particles from accumulating on the shielding device; and prevent solid particles solidified on the shielding device from adhering to the shielding device. The shielding device coating can also be configured to prevent corrosion of the external surface of the shielding device caused by particulate contamination. The metal may be stainless steel, and the shielding device coating may be a metal nitride or a metal oxide.

[0016] The inner rigid sleeve can be made of metal. The metal can have high thermal conductivity. The inner rigid sleeve can be made of molybdenum, aluminum, copper, alumina, diamond, or graphite. The inner rigid sleeve may include a coating configured to prevent particulate contamination of the shielding device and one or more of the inner rigid sleeve. Particulates can include one or more of the following: solid particles, liquid particles, and splashes. The inner rigid sleeve coating can be configured to: repel fluid particles, thereby preventing fluid particles from accumulating on the shielding device; and prevent solid particles solidified on the shielding device from adhering to the shielding device. The inner rigid sleeve coating can be configured to repel fluid particles in a direction parallel to the axial direction or away from the shielding device, such that when fluid propagates through the inner rigid sleeve, the fluid separates from the inner rigid sleeve, which has a propagation direction parallel to the axial direction or away from the shielding device. The inner rigid sleeve coating can also be configured to prevent corrosion of the outer surface of the shielding device caused by particulate contamination. The inner rigid sleeve coating may be a metal nitride, a metal oxide, or silicon nitride.

[0017] The device may also include a heating element configured to adjust the temperature of the inner rigid sleeve. The heating element may be in direct thermal communication with the outer surface of the inner rigid sleeve to adjust its temperature via heat conduction. Alternatively, the heating element may be arranged not in direct thermal communication with the flexible bellows.

[0018] The first and second flanges may be vacuum flanges.

[0019] The device may also include an inner protective member extending over one or more of the following openings: a first flange and a second flange. The inner protective member may be made of metal including a protective coating configured to prevent particulate contamination of the inner protective member. The distance between the inner protective member and the corresponding flange may be small enough to reduce the amount of particulate matter contaminating the corresponding flange. The distance between the inner protective member and the corresponding flange may be configured to reduce the amount of particulate matter contaminating the corresponding flange, at least partially due to particles being repelled from the surfaces of the inner protective member and the corresponding flange. Particulate matter may include one or more of the following: solid particles, fluid particles, and splashes. The coating may be configured to repel fluid particles to prevent their accumulation on the inner protective member and to prevent solid particles from adhering to the inner protective member. The protective coating may be a metal nitride.

[0020] The inner rigid sleeve and the shielding device can be arranged such that the inner rigid sleeve is configured to penetrate the opening of the shielding device.

[0021] The first end of the flexible bellows can be coupled or fixed to the first flange, while its second end is coupled or fixed to the second flange. The inner rigid sleeve can be directly attached to the first flange, or attached to the first end of the flexible bellows fixed to the first flange.

[0022] In other general aspects, an extreme ultraviolet (EUV) light source includes a chamber including a chamber wall defining a fluid inlet; and a device held at the chamber wall. The device includes: a mechanically insulating device having a flexible bellows extending between a first flange and a second flange; an inner rigid sleeve; and a shielding device. The flexible bellows defines a bellows channel extending axially between openings in the first flange and openings in the second flange, these openings being in fluid communication with a body inlet. The inner rigid sleeve is attached to or supported by the first flange and extends axially along the bellows channel. The outer diameter of the inner sleeve is smaller than the inner diameter of the flexible bellows. The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening with a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve. The shielding device is configured to achieve relative motion between the first flange and the second flange caused by the movement of the chamber wall, the relative motion including translational motion along one or more directions perpendicular to the axial direction and rotational motion about one or more directions perpendicular to the axial direction.

[0023] Various implementations may include one or more of the following features. For example, a first flange may be fixed to a chamber wall, and a second flange may be fixed to a second wall of a second chamber. The EUV source may also include a target material supply system comprising a droplet generator configured to generate a target stream. The target comprises target material that emits EUV light when in a plasma state. The EUV source may also include a structure comprising a structure channel configured to receive target material traveling along a target material path. The first flange may be fixed to a wall of the structure. The second flange may be fixed to a wall of a container configured to receive target material from the structure channel. The first and second flanges may be vacuum flanges, the first flange being fixed to the wall of the structure using a vacuum seal, and the second flange being fixed to the wall of the container using another vacuum seal. The EUV source may also include a first inner guard extending over an opening of the first flange and a second inner guard extending over an opening of the second flange. Each of the first and second inner protective elements can be configured to: prevent target material from contacting the corresponding vacuum seal; and prevent the target material from solidifying at the location of the vacuum seal between the corresponding flange and the structural wall, thereby forming an unwanted joint between the corresponding flange and the structural wall. This structure can be positioned in a chamber opposite the droplet generator. The structural channel can be aligned with the direction of gravity, and the flow direction of the target material is at least partially aligned with the direction of gravity.

[0024] The device can be implemented as a gravity-driven emission device configured to pass through or capture target material traveling within a chamber.

[0025] In other general aspects, an apparatus includes: a mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange; an inner rigid sleeve; and a shielding device. The flexible bellows defines a bellows channel extending axially between an opening in the first flange and an opening in the second flange. The inner rigid sleeve is attached to or supported by the first flange and extends axially along the bellows channel. The outer diameter of the inner sleeve is smaller than the inner diameter of the flexible bellows. The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening with a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve. The shielding device is configured to at least partially or substantially cover the area between the flexible bellows and the inner rigid sleeve, such that the shielding device prevents particles from entering that area.

[0026] Various implementations may include one or more of the following features. For example, the shielding device may include one or more movable discs supported by a disc housing fixed to a second flange, each disc defining an opening large enough to accommodate an inner rigid sleeve. The inner diameter of each disc may be smaller than the inner diameter of the flexible bellows. The one or more movable discs may be configured to achieve relative movement between the first flange and the second flange, including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

[0027] In other general aspects, an apparatus includes a structure including an interior configured to receive target material traveling along a path; a container including a volume; and a connecting device located between the structure and the container and configured to provide fluid communication between the interior of the structure and the container volume. The connecting device includes: a mechanical insulation device including a flexible bellows extending between a first flange and a second flange; an inner sleeve; and a shielding device. The flexible bellows defines a bellows channel extending axially between an opening in the first flange and an opening in the second flange. The first flange is fixed to a wall of the structure, while the second flange is fixed to the container. The inner sleeve is attached to or supported by the first flange and extends axially within the bellows channel. The outer diameter of the inner sleeve is smaller than the inner diameter of the flexible bellows and defines a sleeve channel within the bellows channel, such that the sleeve channel provides fluid communication between the interior of the structure and the container volume. The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening with a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve.

[0028] Each implementation may include one or more of the following features. For example, the container may be in fluid communication with the nozzle system of a target supply system configured to supply target material to an EUV light source. The container may be part of a target material debris collection and discharge system within an emission module inside the EUV light source chamber. Attached Figure Description

[0029] Figure 1 This is a block diagram of an apparatus that includes a mechanical insulating device, an inner rigid sleeve extending within a channel of the mechanical insulating device, and a shielding device configured to prevent particles from entering the gap between the inner rigid sleeve and the mechanical insulating device.

[0030] Figure 2A and Figure 2B yes Figure 1 A block diagram of the device, which shows the translational and rotational relative motions between the first flange at the first end of the mechanical insulation device and the second flange at the second end of the mechanical insulation device, respectively;

[0031] Figure 3A yes Figure 1 A cross-sectional perspective view of the implementation method of the device;

[0032] Figure 3B yes Figure 3A A perspective view of the inner rigid sleeve of the device;

[0033] Figure 3C It is used for Figure 3A A perspective view of the implementation method of the disk in the shielding device of the apparatus;

[0034] Figure 3D yes Figure 3A A side sectional view of the device;

[0035] Figure 3E It is along Figure 3D A plan view of the XY plane at point 3E-3E, the plan view including Figure 3D The device's disc housing, disc, and inner rigid sleeve;

[0036] Figure 3F It shows Figure 3D A side sectional view of the implementation of segment 3F of the device;

[0037] Figure 3G It shows Figure 3D A side sectional view of another implementation of segment 3F of the device;

[0038] Figure 3H It is used for Figure 3A A perspective view of another implementation of the disk in the shielding device of the apparatus;

[0039] Figure 4A yes Figure 3A A side sectional view of the device, showing the relative movement between a first flange and a second flange attached to the mechanical insulating device along the axial direction;

[0040] Figure 4B It is along Figure 4A A plan view of the XY plane at plane 4B-4B, the plan view including Figure 4A The device's disc housing, disc, and inner rigid sleeve;

[0041] Figure 5A yes Figure 3A A side sectional view of the device, showing the relative movement between a first flange and a second flange attached to the mechanical insulating device, the relative movement being a translational movement in a direction perpendicular to the axial direction;

[0042] Figure 5B It is along Figure 5A A plan view of the XY plane at plane 5B-5B, the plan view includes Figure 5A The device's disc housing, disc, and inner rigid sleeve;

[0043] Figure 6A yes Figure 3A A side sectional view of the device, showing the relative movement between a first flange and a second flange attached to a mechanical insulating device, the relative movement being a rotational movement about a direction perpendicular to the axial direction;

[0044] Figure 6B It is along Figure 6A A plan view of the XY plane at plane 6B-6B, the plan view including Figure 6A The device's disc housing, disc, and inner rigid sleeve;

[0045] Figure 7A yes Figure 1 A side sectional view of another implementation of the device, wherein the shielding device includes a plurality of disks located in a disk housing;

[0046] Figure 7B It is along Figure 7A A plan view of the XY plane at plane 7B-7B, the plan view includes Figure 7A The device's disc housing, disc, and inner rigid sleeve;

[0047] Figure 7C It shows Figure 7A A side sectional view of the implementation of segment 7C of the device;

[0048] Figure 8A yes Figure 3DA side sectional view of another implementation of the device, segment 3F, showing the movement of the inner rigid sleeve relative to the shielding device, which includes a single disk in a disk housing;

[0049] Figure 8B yes Figure 7A A side sectional view of another implementation of the device, segment 7C, showing the movement of the inner rigid sleeve relative to the shielding device, which includes two disks in a disk housing;

[0050] Figure 9A yes Figure 7A A side sectional view of the device, showing the relative movement between a first flange and a second flange attached to the mechanical insulating device, the relative movement being a translational movement in a direction perpendicular to the axial direction;

[0051] Figure 9B It is along Figure 9A A plan view of the XY plane at plane 9B-9B, the plan view includes Figure 9A The device's disc housing, disc, and inner rigid sleeve;

[0052] Figure 10A yes Figure 7A A side sectional view of the device, showing the relative movement between a first flange and a second flange attached to a mechanical insulating device, the relative movement being a rotational movement about a direction perpendicular to the axial direction;

[0053] Figure 10B It is along Figure 10A A plan view of the XY plane at plane 10B-10B, the plan view including Figure 10A The device's disc housing, disc, and inner rigid sleeve;

[0054] Figure 11A yes Figure 1 A side sectional view of another implementation of the device, wherein the device includes a heating cladding associated with an inner rigid sleeve and an inner protective element associated with a second flange attached to a mechanical insulating device;

[0055] Figure 11B It is along Figure 11A A plan view of the XY plane at plane 11B-11B, the plan view including Figure 11A The device's housing, disk, inner rigid sleeve, and inner protective components;

[0056] Figure 11C yes Figure 11A A perspective view of how the internal protective components of the device are implemented;

[0057] Figure 12 It includes the structure, the container, and the connecting equipment between the structure and the container. Figure 1A block diagram of the device; and

[0058] Figure 13 This is a block diagram of an extreme ultraviolet (EUV) light source, in which... Figure 12 The container is in fluid communication with the nozzle system of the target supply system configured to supply target material. Detailed Implementation

[0059] refer to Figure 1 , Figure 2A and Figure 2B The device 100 is configured as a straight-through fluid device connecting a first portion 105 and a second portion 110. The device 100 enables relative movement between the first portion 105 and the second portion 110 while maintaining the connection between them, and also maintains a fluid flow path for the fluid to pass through between the first portion 105 and the second portion 110. The relative movement between the first portion 105 and the second portion 110 may be attributed to thermal expansion or contraction of one or more portions of the first portion 105 and the second portion 110, as well as vibration and positional misalignment between the first portion 105 and the second portion 110.

[0060] The device 100 provides a flexible and mechanically adjustable path for fluid flow between the first portion 105 and the second portion 110. The device 100 includes a mechanical insulation device 115 comprising a flexible bellows extending between a first flange 125 defining a first opening 125° and a second flange 130 defining a second opening 130°. The flexible bellows 115 is defined between the openings 125° and 130° along an axial direction B. A Extended bellows channel 120. Axial direction B A Parallel to the Z-axis of the X, Y, Z coordinate system.

[0061] A first flange 125 is fixed to a first portion 105, and a second flange 130 is fixed to a second portion 110, allowing fluid to pass through openings 125° and 130°. The first flange 125 and the second flange 130 are extensions (such as ribs or edges) that provide strength and attachment between the respective first portions 105 and 110 and the mechanical insulation device 115. Furthermore, the first flange 125 and the second flange 130 may be vacuum flanges, each used to provide an airtight seal between the respective first portions 105 and 110 and the mechanical insulation device 115, a seal used to retain fluid within a fluid flow path. Therefore, to achieve a vacuum seal at each vacuum flange 125, 130, a gasket can be arranged at the interface between the respective first portions 105 and 110 and the first flange 125 and the second flange 130. The gasket can be, for example, a resilient O-ring placed in a groove.

[0062] The device 100 includes an inner rigid sleeve 135, which is fixed to a first flange 125 by a mounting structure 136. The inner rigid sleeve 135 extends along the axial direction B. A Extending along the bellows channel 120 and defining a sleeve channel 137 within the bellows channel 120. The outer diameter OD of the inner sleeve 135. 135 The inner diameter ID is smaller than that of the flexible corrugated pipe 115. 115 The inner rigid sleeve 135 serves as a shield to prevent or significantly reduce contamination of the flexible bellows 115. Specifically, the inner rigid sleeve 135 physically blocks particles (which may be in the fluid flowing between the first portion 105 and the second portion 110) from reaching the flexible bellows 115. Specifically, the inner rigid sleeve 135 holds particles traveling between the first portion 105 and the second portion 110 within the sleeve channel 137 (thus keeping these particles separated from the flexible bellows 115). The inner rigid sleeve 135 also ensures that these particles are removed from the sleeve channel 137 in a manner that minimizes or reduces disruption to the operation of the first flange 125, the second flange 130, and the flexible bellows 115.

[0063] In some implementations, target materials that emit EUV light while in a plasma state can be used to form microparticles (such as...) within the extreme ultraviolet (EUV) light source chamber. Figure 13 (As shown). The target material can be, for example, water, tin, lithium, xenon, or any material that has an emission line in the EUV range when converted to a plasma state. For example, the target material can be elemental tin, which can be used as pure tin (Sn); as a tin compound, such as SnBr4, SnBr2, SnH4; or as a tin alloy, such as a tin-gallium alloy, a tin-indium alloy, a tin-indium-gallium alloy, or any combination of these alloys.

[0064] During operation, and without the use of the inner rigid sleeve 135, the flexible bellows 115 may be exposed to particles due to fluid flow between the first portion 105 and the second portion 110. Such particles include, for example, solid particles, fluid particles, and splashes of particle clusters. Contamination of the flexible bellows 115 and the attached flanges 125, 130 by these particles can adversely affect the function of the flexible bellows 115, the vacuum integrity of the flexible bellows 115, and the integrity of one or more vacuum seals maintained at least partially by the flexible bellows 115. Specifically, the flexible bellows 115 is formed by [missing information - likely a component or part] along the axial direction B [missing information - likely a component or part]. AThe flexible, thin bellows material is made of an extended, flexible material having a geometric configuration including corrugations or folds (such as ridges or grooves). These corrugations or folds are configured to fold and unfold to allow relative movement between the first flange 125 and the second flange 130. These corrugations or folds provide functionality to the flexible bellows 115; for example, the expansion and contraction of the corrugations allows relative movement between the first portion 105 and the second portion 110 while maintaining the connection between the first portion 105 and the second portion 110. Therefore, particles deposited within the corrugations of the flexible bellows 115 may impair the ability of the flexible bellows 115 to expand and / or contract. Furthermore, particles deposited on the thin bellows material of the flexible bellows 115 can also corrode the thin bellows material, thereby impairing the vacuum integrity of the flexible bellows 115. This can lead to vacuum leakage through the thin bellows material of the flexible bellows 115.

[0065] As discussed above, the outer diameter OD of the inner sleeve 135 135 The inner diameter ID is smaller than that of the flexible corrugated pipe 115. 115 In addition, the outer diameter OD of the inner sleeve 135 135 The gap between the inner sleeve 135 and the flexible bellows 115 is small enough to allow the flexible bellows 115 to make the required movement and to allow sufficient relative movement between the first flange 125 and the second flange 130. The inner diameter ID of the flexible bellows 115... 115 With the outer diameter OD of the inner sleeve 135 135 The difference (G) between them is given by G = ID 115 -OD 135 This difference G can be greater than the inner diameter ID of the flexible bellows 115. 115 The percentage P. In some implementations, the difference G is greater than the inner diameter ID of the flexible bellows 115. 115 Approximately 10%, or G > 0.1 * ID 115 In other implementations, the difference G is greater than the inner diameter ID of the flexible bellows 115. 115 Approximately 20%, or G > 0.2 * ID 115 In other implementations, the difference G is greater than the inner diameter ID of the flexible bellows 115. 115 Approximately 30%, or G > 0.3 * ID 115 .

[0066] like Figure 2A As shown, the relative movement between the first flange 125 and the second flange 130 can be along a direction perpendicular to the axial direction B. A Translational motion in one or more directions. Although Figure 2A The diagram illustrates translation along the X-axis, but this translational motion can occur in any direction within the XY plane. For example... Figure 2BAs shown, the relative movement between the first flange 125 and the second flange 130 can be around a direction perpendicular to the axial direction B. A Rotational motion in one or more directions. Although Figure 2B The diagram shows rotation about the Y-axis, but this rotational motion can be in any direction around the XY plane.

[0067] The device 100 also includes a shielding device 140 located within the gap between the inner sleeve 135 and the flexible bellows 115. The shielding device 140 functions as a shield or cover that prevents particles (such as solid particles, fluid particles, and splashes or splash particles) from entering the gap between the inner rigid sleeve 135 and the flexible bellows 115. Furthermore, the shielding device 140 is capable of preventing contamination while still maintaining separation between the inner sleeve 135 and the flexible bellows 115 without restricting the movement of the inner rigid sleeve 135.

[0068] refer to Figure 3A The diagram illustrates an implementation 300 of the device 100. The device 300 includes a flexible bellows 315 extending between a first flange 325 defining a first opening 325o and a second flange 330 defining a second opening 330o. The first flange 325 can be secured to, for example, a first portion 105 (…). Figure 1 Structures or parts such as ), and the second flange 330 can be fixed to such as the second part 110 ( Figure 1 Another structure or component, such as ), can thus form a vacuum seal between the first flange 325 and the first portion 105, and a vacuum seal can also be formed between the second flange 330 and the second portion 110. The flexible bellows 315 is a mechanical insulation device 115. Figure 1 The device 300 also includes an inner rigid sleeve 335 fixed to the first flange 325 and a shielding device 340 at least partially fixed or supported by the second flange 330.

[0069] Flexible bellows 315 defines a bellows channel 320, which is located along the axial direction B. A It extends between the first opening 325° and the second opening 330°. Axial direction B AParallel to the Z-axis. The flexible bellows 315 includes a first end 317, a second end 319, and a corrugated portion 316, which is made of bellows material and geometrically shaped to realize the functions of the flexible bellows 315, including expansion and contraction. The first end 317 is fixed to a first flange 325 and connects the corrugated portion 316 of the flexible bellows 315 to the first flange 325. The second end 319 is fixed to a shielding device 340 and connects the corrugated portion 316 of the flexible bellows 315 to the shielding device 340. The corrugated portion 316 includes pleats 318 configured to fold and unfold, thereby allowing the flexible bellows 315 to fold approximately along the axial direction B. A Expansion and contraction. This function of the flexible bellows 315 allows for relative movement between the first flange 325 and the second flange 330, which can be caused by thermal expansion or contraction of one or more structures fixed to each of the flanges 325, 330, as well as vibration and positional misalignment between the structures fixed to each of the flanges 325, 330. Reference Figures 4A to 6B The relative motion is discussed.

[0070] The inner rigid sleeve 335 along the axial direction B A The bellows channel 320 extends through the bellows channel 320. An inner rigid sleeve 335 defines a sleeve channel 337 within the bellows channel 320. The inner rigid sleeve 335 is secured to the first flange 325 by a mounting structure 336. The mounting structure 336 is coupled to a first end 317 of the flexible bellows 315, and the first end 317 directly engages with the first flange 325. See also... Figure 3B The inner rigid sleeve 335 is a cylinder having a circular cross-section cut in the XY plane. The inner rigid sleeve 335 is made of a rigid material that does not react with the fluid passing through the bellows channel 320. For example, the inner rigid sleeve 335 can be made of a metal such as molybdenum, aluminum, or copper, or other suitable materials such as, but not limited to, alumina, diamond, and graphite. The inner rigid sleeve 335 may have a generally smooth inner surface 338 (which defines the sleeve channel 337).

[0071] Refer again Figure 3A The shielding device 340 is at least partially fixed to or supported by the second flange 330. The shielding device 340 defines an axial device opening 340o in fluid communication with the second opening 330o. The shielding device 340 is located at the free end of the inner rigid sleeve 335 (the end closest to the second flange 330) such that the free end of the inner rigid sleeve 335 extends through the axial device opening 340o.

[0072] The shielding device 340 includes at least one movable disk 344 and a disk housing 342 configured to hold the disk 344. The disk housing 342 includes a first side 346a and a second side 346b. The first side 346a of the shielding device 340 is fixed to a second end 319 of the flexible bellows 340, and the second side 346b is fixed to a second flange 330 via a mounting area 327. This fixing can be achieved by a vacuum seal. Specifically, the first side 346a can be vacuum-sealed to the second end 319 of the flexible bellows 340, and the second side 346b can be vacuum-sealed to the second flange 330.

[0073] For details, please refer to the following: Figure 3D and 3F To avoid obstructing fluid flow through the device 300 and to allow relative movement between the first flange 325 and the second flange 330, the disc housing 342 is annular in shape, thus defining an axial device opening 340o through which the inner rigid sleeve 335 can pass. The axial device opening 340o is defined by the inner diameter ID. 342 Limit, inner diameter ID 342 With the inner diameter ID of flexible corrugated pipe 315 315 Approximately or roughly the same. Inner diameter ID 342 and ID 315 It can be approximately the same size as the diameter of the opening 330°. The disk housing 342 has an annular radius AR. 342 ( Figure 3E The ring radius AR 342 Given the outer circumferential edge of the disk housing 342 (with defined outer diameter OD) 342 ) and the inner circumferential edge (defining the inner diameter ID of the axial opening 340°) 342 Half the distance between them.

[0074] refer to Figures 3C to 3F When disk 344 is inserted into disk housing 342, disk 344 moves along the axial direction B A It has a generally flat shape. The disk 344 is held in the disk housing 342, so that the disk 344 can move along the XY plane.

[0075] exist Figures 3A to 3F In the implementation shown, only one disk 344 is held in the disk housing 342, and the outer diameter OD of disk 344 is... 344 The inner diameter ID of the disk housing is greater than 342. 342 This prevents the disk 344 from moving out of the disk housing 342 or tilting within the disk housing 342, which could cause the disk 344 to jam and become immobile. Furthermore, to allow the disk 344 to move freely in the XY plane and to move sufficiently far in the XY plane to achieve a full range of relative movement between the first flange 325 and the second flange 330, the outer diameter OD of the disk 344...344 It should be smaller than the outer diameter OD of the disk housing 342. 342 The outer diameter OD of the disk housing is 342. 342 OD of the outer diameter of disk 344 344 The greater the difference between them, the greater the range of motion of disk 344 in the XY plane.

[0076] The disc 344 is annular in shape, thus defining the central opening 345 through which the inner rigid sleeve 335 can pass. To allow the inner rigid sleeve 335 to pass through the central opening 345, the diameter D of the central opening 345... 345 The outer diameter OD of the inner rigid sleeve is greater than 335. 335 The annular radius AR of disk 344 344 Give the outer circumferential edge 343 of the positioning disk 344 (limit the outer diameter OD) 344 ) and the inner circumferential edge 341 (defining the diameter D of the central opening 345) 345 Half the distance between them.

[0077] refer to Figure 3C , Figure 3D and Figure 3F Disk 344 is composed of a thickness T cut along the Z-axis. 344 Limited, when disk 344 and shielding device 340 are attached within device 300, the Z-axis is parallel to the axial direction B. A The thickness T 344 The thickness T of the inner cavity 339 of the disk housing 342 cut along the Z-axis is smaller than the thickness T of the inner cavity 339 of the disk housing 342. 342 The thickness T of the inner cavity 339 of the disk housing 342. 342 Thickness T of disk 344 344 The difference between them should be large enough so that disk 344 can move freely along the XY plane within the inner cavity 339 of disk housing 342. Additionally, the thickness T of the inner cavity 339 of disk housing 342... 342 Thickness T of disk 344 344 The difference between them should be small enough to at least partially constrain excessive movement of disk 344 along the Z-axis when disk 344 is located within disk housing 342. Figure 3A , Figure 3D and Figure 3F The significant gap between the disk housing 342 and the disk 344 is shown in the figures for clarity; however, the disk 344 may contact or be closer to the disk housing 342, as shown in the figures. Figure 3G As shown.

[0078] refer to Figure 3H In some implementations, disk 344 includes an outer edge 343 (defining the outer diameter OD) of disk 344. 344A slit 347 extends radially between the outer edge 343 of the disk 344 and the inner edge 341 (defining the central opening 345 of the disk 344). In other words, the disk 344 is cut radially from the outer edge 343 to the central opening 345, thus forming the slit 347. The slit 347 is formed by the first radial edge 348a and the second radial edge 348b of the disk 344. By bending the disk 344, the first radial edge 348a and the second radial edge 348b can move relative to each other in the Z direction, thereby forming a gap extending in the Z direction between the first radial edge 348a and the second radial edge 348b. For example, the thickness T of the disk 344 is... 344 It can be small enough that the disk 344 is flexible and can be bent to allow the first radial edge 348a to move relative to the second radial edge 348b in the Z direction.

[0079] Slit 347 allows disk 344 to be mounted within the internal cavity 339 of disk housing 342. A gap is formed between the first radial edge 348a and the second radial edge 348b in the Z direction as the first radial edge 348a and the second radial edge 348b move relative to each other. This gap allows a portion of disk 344, including the first radial edge 348a, to be mounted within the internal cavity 339 of disk housing 342 before the remainder of disk 344, including the second radial edge 348b, is mounted into disk housing 342. Specifically, the first radial edge 348a can pass through the opening 330o of the second flange 330 and through the axial device opening 340o to mount the portion of disk 344, including the first radial edge 348a, into the internal cavity 339 of disk housing 342. Disk 344 can then be mounted around the axial direction B. A Rotate to mount the remainder of disk 344, including the second radial edge 348b, into the internal cavity 339 of disk housing 342. In this way, slit 347 allows the outer diameter OD to be rotated. 344 The defined disk 344 is installed inside the disk housing 342, the outer diameter OD 344 The inner diameter ID of the disk housing is greater than 342. 342 .

[0080] The shielding device 340, including a disk 344 and a disk housing 342, can be made of a rigid material that is unresponsive to fluids passing through the device 300. For example, the disk 344 and the disk housing 342 can be made of a metal such as stainless steel. In an implementation of the disk 344 including a slit 347, the disk 344 can be made of a metal that is flexible and bends and returns to its original shape after a force is applied to the disk 344 to deform it. Therefore, the disk 344 can be made of stainless steel with a diameter much smaller than the outer diameter OD. 344 Thickness T344 limited.

[0081] Additionally, one or more of the disk 344 and disk housing 342 (of the shielding device 340) may also include a coating configured to prevent particulate contamination of the shielding device 340. For example, the coating of the shielding device 340 may be configured to repel fluid particles to prevent fluid particles from accumulating on the shielding device 340 and to prevent solid particles from adhering to the shielding device 340. The coating of the shielding device 340 may be, for example, a nitride, such as a metal nitride or a metalloid nitride. The coating on the disk 344 and / or disk housing 342 may also be used to prevent corrosion of the underlying material (which may be stainless steel) caused by particulate contamination.

[0082] If the particles are formed from target material in a chamber with an EUV light source, a shielding device 340 coating can be selected to be compatible with and / or repel the target material.

[0083] The inner rigid sleeve 335 may also include a coating configured to prevent particulate matter 328 from contaminating one or more of the shielding device 340 and the inner rigid sleeve 335 during operation. As discussed above, particulate matter 328 may include one or more of solid particles, fluid particles, and fluid splashes passing through the sleeve channel 337. For example, the coating of the inner rigid sleeve 335 may be configured to repel fluid particles to prevent fluid particles from accumulating on the shielding device 340 and the inner rigid sleeve 335. The coating of the inner rigid sleeve 335 may be, for example, a metal nitride or silicon nitride. If the particulate matter is formed from the target material of a chamber with an EUV light source, the coating of the inner rigid sleeve 335 may be selected to be compatible with and / or repel the target material.

[0084] Specifically and refer to Figure 3F The coating of the inner rigid sleeve 335 can be configured along direction B parallel to the axial direction. A Or, in a direction away from the shielding device 340, it repels particles 328 (such as fluid particles). Specifically, as fluid propagates through the sleeve channel 337, fluid particles separate from the coating on the smooth inner surface 338 such that their propagation direction is parallel to the axial direction B. A Or, they can be separated in a manner that is far removed from the components (disc 344 and disc housing 342) of the shielding device 340, such as... Figure 3F As shown. The coating of the inner rigid sleeve 335 can also be configured to prevent solid particles from adhering to the shielding device 340 and the inner rigid sleeve 335. As another example, the coating of the inner rigid sleeve 335 can be configured to prevent corrosion of the external surfaces of the shielding device 340 (such as the surface of the disk 344 or the disk housing 342) caused by particulate contamination.

[0085] In operation, the inner rigid sleeve 335 is configured to physically block particles from reaching the flexible bellows 315 by holding particles traveling between structures or components through the device 300 within the sleeve channel 337 and separating them from the flexible bellows 315. As described above, the flexible bellows 315 functions to allow relative movement between the first flange 325 and the second flange 330, which can be caused by thermal expansion or contraction of one or more structures fixed to each of the flanges 325, 330, and by vibration and positional misalignment between the structures fixed to each of the flanges 325, 330. When each of the flanges 325, 330 moves relative to each other, the upper end of the inner rigid sleeve 335 fixed to the first flange 325 moves together with the first flange 325 and relative to the second flange 330. Thus, as the particle 328 travels through the sleeve channel 237 and each of the flanges 325, 330 moves relative to each other, the inner rigid sleeve 335 continues to prevent the particle 328 from reaching the flexible bellows 315.

[0086] Furthermore, the lower end of the inner rigid sleeve 335 near the second flange 330 extends below the shielding device 340 to physically prevent particles 328 from contaminating the shielding device 340. Additionally, the shielding device 340 prevents particles 328 from traveling through the opening defined between the lower end of the inner rigid sleeve 335 (closest to the second flange 330) and the second flange 330 into the region between the flexible bellows 315 and the inner rigid sleeve 335. Specifically, when the inner rigid sleeve 335 moves together with the first flange 325 and relative to the second flange 330, the disk 344 also moves together with the lower portion of the inner rigid sleeve 335 (closest to the second flange 330) relative to the second flange 330, preventing particles 328 from traveling into the opening 320 between the flexible bellows 315 and the inner rigid sleeve 335. Thus, during operation, both the inner rigid sleeve 335 and the shielding device 340 physically prevent particles 328 from reaching and contaminating the flexible bellows 315. Details are provided below.

[0087] During operation, as referenced above. Figure 2A and Figure 2B The relative movement between the first flange 325 and the second flange 330 discussed may include along the axial direction B A Linear motion, along the direction perpendicular to the axis B A Translational motion in one or more directions, and about B perpendicular to the axial direction A Rotational movement in one or more directions. The shielding device 340 enables this relative movement between the first flange 325 and the second flange 330 while preventing particles 328 from entering the area between the inner rigid sleeve 335 and the flexible bellows 315, thereby contaminating the flexible bellows 315.

[0088] refer to Figure 4A and Figure 4B The first flange 325 and the second flange 330 are along the axial direction B A They move relative to each other in a linear motion. For example, the first flange 325 can move along the axial direction B. A It moves toward the second flange 330. The flexible bellows 315 moves along the axial direction B. A The expansion and contraction allow the first flange 325 and the second flange 330 to move relative to each other. As described above, the flexible bellows 315 expands and contracts by folding and unfolding the pleats 318 in the corrugated portion 316 of the flexible bellows 315. For example, when the first flange 325 and the second flange 330 are along the axial direction B... A As they move toward each other, the flexible bellows 315 contracts through the folds 318; and when the first flange 325 and the second flange 330 move along the axial direction B... A As they move away from each other, the flexible bellows 315 expands by unfolding the pleats 318. Because the inner rigid sleeve 335 is fixed to the first flange 335, the inner rigid sleeve 335 moves together with the first flange 325 along the Z direction relative to the second flange 330. For example, the inner rigid sleeve 335 can move together with the first flange 325 towards the second flange 330 along the Z direction.

[0089] The shielding device 340 achieves the axial direction B between the first flange 325 and the second flange 330. A The relative linear motion. Specifically, the inner rigid sleeve 335, which moves together with the first flange 325, can move along the axial direction B through the central opening 345 of the disk 344. A Movement. Because the outer diameter OD of the inner rigid sleeve is 335. 335 The diameter D of the center opening 345 of disk 344 is smaller than that of disk 344. 345 Therefore, the inner rigid sleeve 335 can move freely relative to the disk 344 along the Z direction. Thus, by allowing the inner rigid sleeve 335 to also move relative to the axial movement between the first flange 325 and the second flange 330, the shielding device 340 enables the first flange 325 and the second flange 330 to move along the axial direction B. A The relative linear motion. Additionally, when the inner rigid sleeve 335 is relative to the second flange 330 in the axial direction B... A As it moves upward, disk 344 continues to prevent particles 328 from traveling into the region between the inner rigid sleeve 335 and the flexible bellows 315. Therefore, when the first flange 325 and the second flange 330 move along the axial direction B... A When moving relative to each other, the shielding device 340 prevents particles 328 from contaminating the flexible corrugated pipe 315.

[0090] refer to Figure 5A and Figure 5B The first flange 325 and the second flange 330 are along the direction perpendicular to the axial direction B. A The X-direction moves relative to each other by translational motion. For example, as Figure 5A As shown, the first flange 325 can move relative to the second flange 330 along the -X direction. A portion or side of the flexible bellows 315 is generally along the axial direction B. A The flexible bellows 315 expands while another portion or side of it contracts, allowing the first flange 325 and the second flange 330 to move relative to each other. For example, when the first flange 325 moves relative to the second flange 330 in the -X direction, the corrugated portion 316a of the flexible bellows 315 expands by unfolding the pleats 318, while the corrugated portion 316b of the flexible bellows 315 contracts by folding the pleats 318. Because the inner rigid sleeve 335 is fixed to the first flange 335, the inner rigid sleeve 335 moves together with the first flange 325 relative to the second flange 330 in the -X direction. For example, the inner rigid sleeve 335 can move together with the first flange 325 relative to the second flange 330 in the -X direction.

[0091] The shielding device 340 enables and facilitates the relative translational movement between the first flange 325 and the second flange 330 along the XY plane. Specifically, because the disk 344 can move along the X direction (and within the XY plane) within the internal cavity 339 of the disk housing 342, the inner rigid sleeve 335, which moves with the first flange 325, can also move along the X direction while remaining within the opening 345 of the disk 344. In other words, the disk 344 does not prevent or constrain the movement of the inner rigid sleeve 335 in the X direction. Therefore, when the first flange 325 and the inner rigid sleeve 335 move relative to the second flange 330 along the X direction, the movement of the inner rigid sleeve 335 also causes the disk 344 to move along the X direction. Thus, by allowing the inner rigid sleeve 335 to also move with the first flange 325, the shielding device 340 enables the first flange 325 and the second flange 330 to move along the direction perpendicular to the axial direction B. A The relative translational motion in the X direction.

[0092] Additionally, as the inner rigid sleeve 335 moves relative to the second flange 330 in the X direction, the disk 344 continues to prevent the particles 328 from traveling into the region between the inner rigid sleeve 335 and the flexible bellows 315. Because the disk 344 moves together with the inner rigid sleeve 335 and the first flange 325 relative to the second flange 330 in the -X direction, the disk 344 continues to radially span the gap between the inner rigid sleeve 335 and the flexible bellows 315. Therefore, as the first flange 325 and the second flange 330 translate relative to each other along the XY plane, the shielding device 340 prevents the particles 328 from contaminating the flexible bellows 315. In other examples, the shielding device 340 can similarly achieve the first flange 325 and the second flange 330 along a direction perpendicular to the axial direction B. A The relative translational motion in any direction (such as, for example, the Y direction or a direction in the XY plane). In these examples, the shielding device 340 prevents the particles 328 from contaminating the flexible bellows 315 in the same manner as described above.

[0093] refer to Figure 6A and Figure 6B The first flange 325 and the second flange 330 surround the direction perpendicular to the axial direction B. A The flexible bellows 315 moves relative to each other in a rotational direction (such as the Y direction). For example, the first flange 325 can rotate relative to the second flange 330 about the Y direction. The flexible bellows 315 moves approximately along the axial direction B at the corrugated portion 316a of the flexible bellows 315. A The expansion occurs approximately along the axial direction B at the corrugated portion 316b of the flexible bellows 315. A The contraction allows the first flange 325 and the second flange 330 to rotate relative to each other. For example, the flexible bellows 315 expands by unfolding pleats 318 at a portion 316a of the flexible bellows 315 and contracts by folding pleats 318 at a portion 316b of the flexible bellows 315. Because the inner rigid sleeve 335 is fixed to the first flange 335, the inner rigid sleeve 335 rotates together with the first flange 325 relative to the second flange 330 about the Y direction. For example, the inner rigid sleeve 335 can rotate together with the first flange 325 about the Y direction such that the lower portion of the inner rigid sleeve 335 (which is closer to the second flange 330) rotates relative to the second flange 330 (and also translates relative to the second flange 330).

[0094] The shielding device 340 achieves an inclination between the first flange 325 and the second flange 330, which involves the first flange 325 and the second flange 330 around a direction perpendicular to the axial direction B. AThe relative rotational movement in the direction (e.g., the Y direction in this example). Specifically, because the disk 344 can move along the XY plane within the internal cavity 339 of the disk housing 342, the lower portion of the inner rigid sleeve 335, which moves by the rotation of the first flange 325 about the Y direction, can also rotate. In other words, the disk 344 does not prevent the lower portion of the inner rigid sleeve 335 from rotating. Therefore, when the first flange 325 and the inner rigid sleeve 335 rotate relative to the second flange 330 about the Y direction, the movement of the lower portion of the inner rigid sleeve 335 also causes the disk 344 to move along the X direction. In this way, by allowing the inner rigid sleeve 335 to move along with the first flange 325, the shielding device 340 realizes the first flange 325 and the second flange 330 about the direction perpendicular to the axial direction B. A The relative rotational motion in the Y direction.

[0095] Furthermore, as the lower portion of the inner rigid sleeve 335 rotates relative to the second flange 330, the disk 344 continues to prevent the particles 328 from traveling into the region between the inner rigid sleeve 335 and the flexible bellows 315. Because the disk 344 moves together with the lower portion of the inner rigid sleeve 335 in the X direction, the disk 344 continues to radially span the gap between the inner rigid sleeve 335 and the flexible bellows 315. Therefore, as the first flange 325 and the second flange 330 rotate relative to each other about the Y direction, the shielding device 340 prevents the particles 328 from contaminating the flexible bellows 315. In other examples, the shielding device 340 can similarly achieve the first flange 325 and the second flange 330 rotating about a direction perpendicular to the axial direction B. A Relative rotational motion in any other direction (e.g., about the X direction or about directions in the XY plane). In these examples, the shielding device 340 prevents the particles 328 from contaminating the flexible bellows 315 in the same manner as described above.

[0096] refer to Figure 7A and Figure 7B Except that device 700 includes a plurality of disks 744a, 744b, 744c (or disk stacks) located within an internal cavity 739 of disk housing 742, the design of device 700 is similar to that of device 300. Disks 744a, 744b, 744c are stacked or adjacent to each other along the Z-direction. The design of each disk in the stack 744 is similar to that of disk 344 because each disk 744a, 744b, 744c includes a corresponding central opening 745a, 745b, 745c, which is large enough to accommodate an inner rigid sleeve 735. Therefore, the diameter D of each central opening 745a, 745b, 745c is... 745a D 745b D 745cThe outer diameter OD of the inner rigid sleeve is greater than 735. 735 .

[0097] In some implementations, the outer diameter OD of at least one of these disks (e.g., disk 744b) 744b With respect to the outer diameter of each other disk (such as the outer diameter OD of the corresponding disks 744a and 744c) 744a and OD 744c The outer diameter OD of at least one disk (such as disk 744a) is different. 744a Equal to the outer diameter OD of another disc (such as disc 744c) 744c And inner diameter D 745a Equal to the inner diameter D of another 744c plate 745c In these implementations, disks 744a and 744c have the same annular radius.

[0098] Along the axial direction B A The sum of the thickness T of each of the cut disks 744a, 744b, and 744c is less than the thickness B of the internal cavity 739 along the axial direction. A The range is such that all disks 744a, 744b, and 744c can be fitted within the internal cavity 739. Furthermore, one or more of the disks 744a, 744b, and 744c may include a radially extending slit (such as slit 347 in disk 344 discussed above) between the outer edge (defining the outer diameter OD) and the inner edge (defining the center opening 745a, 745b, and 745c) of the disks 744a, 744b, and 744c. This slit may function similarly to slit 347, allowing each disk 744a, 744b, and 744c to be mounted within the internal cavity 739 of the disk housing 742.

[0099] In some implementations, one of the disks in the disk stack 744 is a smaller disk, such as disk 744b. This means that the outer diameter OD of disk 744b is smaller. 744b The inner diameter ID of the disk housing 742 is smaller than that of the disk housing. 742 Adding the annular radius AR of the disk housing 742 742 The sum ( Figure 7B and Figure 7C In this situation, the small disk 744b may move out of the internal cavity 739 or tilt within the internal cavity 739, which could cause disk 744b to become accidentally stuck and prevent it from moving within the internal cavity 739. Therefore, disk 744b is placed (clipped) between two large disks 744a and 744c, each with a corresponding outer diameter OD. 744a OD 744c The inner diameter ID of the disk housing 742 is greater than that of the disk housing. 742 Adding the annular radius AR of the disk housing 742742 sum ( Figure 7B and Figure 7C ).

[0100] Generally speaking and reference Figure 8A and Figure 8B , compared to using only one disk 344 (such as that used in device 300 and in Figure 8A When comparing (as shown in a closer view), use stacks of disks with different inner and outer diameters or multiple disks (such as in...). Figure 8B (As shown in the diagram) this may improve the compactness of the disk housing and also facilitate mounting of these disks through the opening 330o of the second flange 330. Specifically, Figure 8A The annular radius AR of the disk housing 342 (in which a single disk 344 is placed) is shown. 342 Approximately larger than the annular radius AR of the disk casing 842 842 Two disks 844a and 844b of a stack 844 are placed in the disk housing 842. Furthermore, the total extent of the two disks 844a and 844b is given by their outer diameter, and this total extent is much smaller than the outer diameter OD of disk 344. 344 However, because the inner diameter ID of the disk housing 842... 842 With the inner diameter ID of the disk housing 342 342 Because they are identical, it is easier to install disks 844a and 844b in the internal cavity of disk housing 842.

[0101] Generally, for disk stacks such as disk stack 744 or disk stack 844, the inner and outer diameters of each disk can be selected such that the disks in each disk stack overlap at all possible positions of the inner rigid sleeve 735, while still covering the gap between the inner rigid sleeve 735 and the flexible bellows 715. In the most compact implementation, all disks in the disk stack have the same annular radius, and the inner diameter of the nth disk is slightly smaller than the outer diameter of the (n-1)th disk, where n=1 represents the disk with the smallest inner diameter slightly larger than the outer diameter of the inner rigid sleeve 735.

[0102] refer to Figure 9A and Figure 9B Regarding device 700, a translational movement between the first flange 325 and the second flange 330 is shown. Shielding device 740 enables and facilitates the relative translational movement between the first flange 325 and the second flange 330 along the XY plane. Specifically, the small disc 744b, which tightly grips the inner rigid sleeve 735, moves together with the inner rigid sleeve 735 along the -X direction. Furthermore, the large discs 744a and 744c also move when engaged with the inner rigid sleeve 735. This is because the respective outer diameters OD of the large discs 744a and 744c... 744a OD 744c The inner diameter ID of the disk housing 742 is greater than that of the disk housing.742 Adding the annular radius AR of the disk housing 742 742 sum ( Figure 7B and Figure 7C Therefore, it prevents the small disk 744b from being removed from the internal cavity 739 of the shielding device 740.

[0103] Additionally, as the inner rigid sleeve 735 moves relative to the second flange 330 in the X direction, the disk stack 744 continues to prevent particles 328 from entering the region between the inner rigid sleeve 735 and the flexible bellows 715. Because the disks of the disk stack 744 move together with the inner rigid sleeve 735 and the first flange 725 relative to the second flange 330 in the -X direction, one or more of the disks 744a, 744b, and 744c continue to radially span the gap between the inner rigid sleeve 735 and the flexible bellows 715. Therefore, as the first flange 325 and the second flange 330 translate relative to each other along the XY plane, the shielding device 740 prevents particles 328 from contaminating the flexible bellows 715. In other examples, as discussed above, the shielding device 740 enables the first flange 325 and the second flange 330 to move along a direction perpendicular to the axial direction B. A The relative translational motion in any direction (such as, for example, the Y direction or a direction in the XY plane). In these examples, the shielding device 740 prevents the particulate 328 from contaminating the flexible bellows 715 in the same manner as described above.

[0104] refer to Figure 10A and Figure 10B Regarding device 700, a relative rotational movement between the first flange 325 and the second flange 330 is shown. The first flange 325 and the second flange 330 rotate around a direction perpendicular to the axial direction B. A Rotational motion in a direction (such as the Y direction) relative to each other. See reference... Figure 6A The flexible bellows 715 discussed here expands and contracts. Because the inner rigid sleeve 735 is fixed to the first flange 335, the inner rigid sleeve 735 rotates together with the first flange 325 relative to the second flange 330 about the Y direction.

[0105] The shielding device 740 enables the first flange 325 and the second flange 330 to be positioned around a direction perpendicular to the axial direction B. AThe relative rotational motion is in the direction of the inner rigid sleeve 735 (such as the Y direction in this example). Specifically, when the inner rigid sleeve 735 rotates, the small disk 744b moves along the XY plane within the internal cavity 739 of the disk housing 742. Specifically, when the inner rigid sleeve 735 rotates, the small disk 744b, which tightly grips the inner rigid sleeve 735, moves along the -X direction. Furthermore, the large disks 744a and 744c also move when engaged with the inner rigid sleeve 735. This is because the respective outer diameters OD of the large disks 744a and 744c... 744a OD 744c The inner diameter ID of the disk housing 742 is greater than that of the disk housing. 742 Adding the annular radius AR of the disk housing 742 742 sum ( Figure 7B and Figure 7C Therefore, it prevents the small disk 744b from being removed from the internal cavity 739 of the shielding device 740.

[0106] Additionally, as the lower portion of the inner rigid sleeve 735 rotates relative to the second flange 330, the disc stack 744 continues to prevent the particles 328 from entering the area between the inner rigid sleeve 735 and the flexible bellows 715.

[0107] refer to Figure 11A and Figure 11B Except for the inclusion of a heating element 1151 and an inner protective element 1153, the design of device 1100 is similar to that of device 300. The heating element 1151 is configured to adjust and / or regulate the temperature of the inner rigid sleeve 335. The heating element 1151 is in direct thermal communication with the outer surface 335s of the inner rigid sleeve 335 to adjust or control the temperature of the inner rigid sleeve 335 by heat conduction. The heating element 1151 is not in direct thermal communication with the flexible bellows 315. This means that the flexible bellows 315 is substantially unaffected by the thermal effects of the adjustments made by the heating element 1151. For example, the flexible bellows 315 can be positioned further away from the heating element 1151, or the flexible bellows 315 can be made of a material with reduced thermal conductivity.

[0108] The heating device 1151 may include a plurality of discrete heating elements positioned at various locations relative to the outer surface 335s of the inner rigid sleeve 335, or it may be a single heating element. By heating the outer surface 335s of the inner rigid sleeve 335, the heating device 1151 also heats the sleeve channel 337, thereby heating the fluid passing through the sleeve channel 337 during operation. This allows the fluid passing through the device 1100 to be transformed into a molten, flowing, or melted state, or maintained in such a state, in which the fluid can flow. Heating also provides to melt or evaporate any particles or other material in contact with the inner surface of the inner rigid sleeve 335, so that they can be carried away with the fluid flow.

[0109] As described above, the inner rigid sleeve 335 is made of a rigid material that does not react with fluid passing through the sleeve channel 337. Figure 11A In the example, the inner rigid sleeve 335 may be made of a metal with high thermal conductivity, such that temperature changes applied by the heating device 1151 are effectively transferred to the inner rigid sleeve 335. For example, the inner rigid sleeve 335 may be made of a metal such as molybdenum, aluminum, or copper, or other suitable materials such as alumina, diamond, or graphite. As described above, the inner rigid sleeve 335 also includes a coating configured to prevent particulate 328 from contaminating one or more of the shielding device 340 and the inner rigid sleeve 335. For example, the coating of the inner rigid sleeve 335 may be a metal nitride, a metal oxide, or silicon nitride.

[0110] Inner protective component 1153 along the axial direction B A Extending through the opening 330° of the second flange 330. See also... Figure 11C The inner protective element 1153 defines an inner protective element channel 1152 within the opening 330°. The inner protective element 1153 is secured to the second flange 330 by a mounting structure 1154. The inner protective element 1153 is cylindrical with a circular cross-section truncated in the XY plane. The inner protective element 1153 may have a generally smooth inner surface 1155 (which defines the inner protective element channel 1152). The inner protective element 1153 is made of a rigid material that does not react with fluid passing through the bellows channel 320. Therefore, the inner protective element 1153 may be made of a metal including a coating configured to prevent particulate matter 328 from contaminating the inner protective element 1153. For example, the coating may be a metal nitride. If the particulate matter is formed from target material in a chamber with an EUV light source, the coating of the inner protective layer 1153 may be selected to be compatible with and / or repel the target material.

[0111] The outer diameter OD of the inner protective component 1153 1153 The distance between the inner diameter of the inner flange 330 and the inner diameter of the second flange 330 is small enough to reduce the amount of particles 328 that contaminate the second flange 330. Specifically, because the particles are repelled from the surfaces of the inner protective member 1153 and the second flange 330, the outer diameter OD of the inner protective member 1153 is [not specified]. 1153 The distance between the inner diameter of the second flange 330 and the inner diameter of the second flange 330 is configured to at least partially reduce the amount of particles 328 that contaminate the second flange 330. As described above, the particles 328 may include solid particles and fluid particles. The coating of the inner protective member 1153 is configured to repel fluid particles to prevent fluid particles from accumulating on the inner protective member 1153 and to prevent solid particles from adhering to the inner protective member 1153.

[0112] refer to Figure 12In some implementations, device 100 may be implemented as a connecting device 1200 within device 1260. Device 1260 includes a structure 1205 as a first portion 105 and a container 1210 as a second portion 110. The structure 1205 defines a structural interior 1263 configured to receive target material traveling along a path; the container 1210 defines a fluid volume 1265. The connecting device 1200 is positioned between the structure 1205 and the container 1210 and is configured to provide fluid communication between the structural interior 1263 and the container volume 1265. A first flange 325 is fixed to a wall of the structure 1205, while a second flange 330 is fixed to a wall of the container 1210.

[0113] In some implementations, container 1210 is in fluid communication with the nozzle system of a target supply system configured to supply target material to an EUV light source, such as to... Figure 13 The target material is supplied within the target material supply system 1375. In other implementations, container 1210 is an emission module (such as...) within the chamber of the EUV light source. Figure 13 The emission module 1364 shown is part of the target material debris collection and emission system.

[0114] The device 1260 (including the connecting device 1200) can be implemented using an extreme ultraviolet (EUV) light source. (Reference) Figure 13 The diagram illustrates an EUV light source 1370. The EUV light source 1370 includes a chamber 1372 defining an interior 1373. The EUV light source 1370 includes a target material supply system 1375, which includes a droplet generator 1376 configured to generate a target stream 1377. The target 1377 includes a target material that emits EUV light when in a plasma state. The target material can be, for example, water, tin, lithium, xenon, or any material having an emission line in the EUV range when converted to a plasma state. For example, the target material can be elemental tin, which can be used as pure tin (Sn); as a tin compound, such as SnBr4, SnBr2, SnH4; or as a tin alloy, such as a tin-gallium alloy, a tin-indium alloy, a tin-indium-gallium alloy, or any combination of these alloys.

[0115] Target 1377 is directed toward target position 1378. One or more amplified light beams 1379 are also directed toward target position 1378. The interaction between the amplified light beams 1379 and the target material within target 1377 (at target position 1378) generates plasma that emits EUV light or radiation 1380. Light collector 1382 collects the EUV light 1380 and directs the collected EUV light 1380 toward optical device 1384. Optical device 1384 may be a photolithography exposure apparatus that uses the EUV light 1380 to create patterns on a wafer, such as using any number of process steps, which may be one or more combinations of process steps, such as etching, deposition, and photolithography processes with different masks, to create patterns of openings (such as grooves, channels, or holes) in the wafer material or in the material deposited on the wafer.

[0116] Device 1260 is held at wall 1369 of chamber 1372. Structure 1205 of device 1260 is designed with a structure channel 1305p configured to receive target 1377 (or target material remaining from target 1377) traveling along target material path Ptm. In this example, structure 1305 is positioned in chamber 1372 opposite to droplet generator 1376. Furthermore, structure channel 1305p and target material path Ptm can be aligned with the direction of gravity, such that device 1260 acts as a gravity-driven discharge device configured to pass through or capture target material traveling within chamber 1372.

[0117] For example, the inner rigid sleeve 335 may have a cross-sectional shape other than a circle, such as a polygon or an ellipse. As another example, another inner guard may be arranged relative to the first flange 325 (in addition to the inner guard 1153 arranged relative to the second flange 330). As another example, the device 1260 may be arranged at the wall of the chamber 1372 such that the first flange 325 of the device 1260 is directly fixed to the chamber wall, while the second flange 330 is fixed to the wall of the second chamber (which may be container 1210).

[0118] Other aspects of the invention are set forth in the following numbered clauses.

[0119] 1. An apparatus comprising:

[0120] Mechanical insulation equipment includes a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows channel extending axially between an opening in the first flange and an opening in the second flange.

[0121] An inner rigid sleeve, attached to or supported by a first flange and extending axially along the bellows channel, wherein the outer diameter of the inner rigid sleeve is smaller than the inner diameter of the flexible bellows; and

[0122] The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening, the diameter of which is smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve.

[0123] The shielding device is configured to achieve relative movement between the first flange and the second flange, the relative movement including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

[0124] 2. The apparatus according to Clause 1, wherein the shielding device extends into the bellows channel.

[0125] 3. The device according to Clause 1, wherein the distance between the inner diameter of the flexible bellows and the outer diameter of the inner rigid sleeve is greater than about 10%, greater than about 20%, or greater than about 30% of the inner diameter of the flexible bellows.

[0126] 4. The apparatus according to Clause 1, wherein the shielding device comprises one or more discs extending in a direction not parallel to the axial direction.

[0127] 5. The device according to Clause 4, wherein one or more discs extend in a direction perpendicular to the axial direction.

[0128] 6. The apparatus according to Clause 4, wherein one or more discs comprise a plurality of discs, the outer diameter of at least one disc is different from the outer diameter of each of the other discs, and the inner diameter of at least one disc is different from the inner diameter of each of the other discs.

[0129] 7. The apparatus according to Clause 4, wherein one or more discs comprise a plurality of discs, the outer diameter of at least one disc is equal to the outer diameter of another disc, and the inner diameter of at least one disc is equal to the inner diameter of another disc.

[0130] 8. The apparatus according to Clause 4, wherein each disk is restricted from moving along the axial direction and is free to move in a direction not parallel to the axial direction.

[0131] 9. The device according to Clause 4, wherein each disk is defined by a thickness along the axial direction, the thickness allowing each disk to be mounted adjacent to the second flange.

[0132] 10. The apparatus according to Clause 4, wherein each of the one or more discs includes a slit extending from the outer diameter of the disc to the inner diameter of the disc.

[0133] 11. The apparatus according to Clause 4, wherein the shielding device further includes a disk housing configured to hold one or more disks.

[0134] 12. The device according to Clause 11, wherein the disc housing is defined by an inner diameter equal to the inner diameter of the flexible bellows.

[0135] 13. The apparatus according to Clause 11, wherein the outer diameter of at least one of the one or more discs is greater than the inner diameter of the disc housing.

[0136] 14. The apparatus according to Clause 11, wherein one or more disks comprise a plurality of disks, the plurality of disks including a small disk, the outer diameter of the small disk being smaller than the sum of the inner diameter of the disk housing and the annular radius of the disk housing, the small disk being sandwiched between two disks, the outer diameter of each of the two disks being larger than the sum of the inner diameter of the disk housing and the annular radius of the disk housing.

[0137] 15. The apparatus according to Clause 11, wherein each disk is defined by a thickness along the axial direction, such that one or more disks can be received within a disk housing.

[0138] 16. The apparatus according to Clause 1, wherein the shielding device may be configured to at least partially cover or cover the area between the flexible bellows and the inner rigid sleeve.

[0139] 17. The apparatus according to Clause 16, wherein the particulates include one or more of the following: solid particles, fluid particles, and splashes.

[0140] 18. The device according to Clause 1, wherein the flexible bellows includes pleats configured to fold or unfold to allow relative movement between the first flange and the second flange.

[0141] 19. The apparatus according to Clause 1, wherein the shielding device is made of metal including a coating configured to prevent particulate contamination of the shielding device.

[0142] 20. The apparatus according to Clause 19, wherein

[0143] Particulate matter includes one or more of the following: solid particles, fluid particles, and splashes; and

[0144] The shielding equipment coating is configured to: repel fluid particles, thereby preventing fluid particles from accumulating on the shielding equipment; and prevent solid particles that are solidified on the shielding equipment from adhering to the shielding equipment.

[0145] 21. The apparatus according to Clause 20, wherein the shielding device coating is further configured to prevent corrosion of the outer surface of the shielding device caused by particulate contamination.

[0146] 22. The apparatus according to Clause 19, wherein the metal is stainless steel and the shielding device coating is a metal nitride or a metal oxide.

[0147] 23. The device according to Clause 1, wherein the inner rigid sleeve is made of metal.

[0148] 24. The apparatus according to Clause 23, wherein the metal has high thermal conductivity.

[0149] 25. The device according to Clause 1, wherein the inner rigid sleeve is made of molybdenum, aluminum, copper, alumina, diamond or graphite.

[0150] 26. The apparatus according to Clause 23, wherein the inner rigid sleeve includes a coating configured to prevent particulate contamination of the shielding device and one or more of the inner rigid sleeve.

[0151] 27. The apparatus according to clause 26, wherein

[0152] Particulate matter includes one or more of the following: solid particles, liquid particles, and splashes; and

[0153] The inner rigid sleeve coating is configured to: repel fluid particles, thereby preventing fluid particles from accumulating on the shielding device; and prevent solid particles solidified on the shielding device from adhering to the shielding device.

[0154] 28. The apparatus according to Clause 27, wherein the inner rigid sleeve coating is configured to repel fluid particles in a direction parallel to the axial direction or away from the shielding device, such that when fluid propagates through the inner rigid sleeve, the fluid separates from the inner rigid sleeve, which has a propagation direction parallel to the axial direction or away from the shielding device.

[0155] 29. The apparatus according to Clause 27, wherein the inner rigid sleeve coating is further configured to prevent corrosion of the outer surface of the device caused by particulate contamination.

[0156] 30. The device according to Clause 1, wherein the inner rigid sleeve comprises a coating of metal nitride, metal oxide or silicon nitride.

[0157] 31. The apparatus according to Clause 1 further includes a heating device configured to adjust the temperature of the inner rigid sleeve.

[0158] 32. The apparatus according to Clause 31, wherein the heating device is in direct thermal communication with the outer surface of the inner rigid sleeve to adjust the temperature of the inner rigid sleeve by heat conduction; and the heating device is not in direct thermal communication with the flexible bellows.

[0159] 33. The apparatus according to Clause 1, wherein the first flange and the second flange are vacuum flanges.

[0160] 34. The device according to Clause 1 further includes an inner protective member extending over one or more of the openings of: a first flange and a second flange.

[0161] 35. The device according to Clause 34, wherein the inner protective element is made of metal including a protective element coating configured to prevent particulate contamination of the inner protective element.

[0162] 36. The device according to Clause 35, wherein the distance between the inner protective member and the corresponding flange is small enough to reduce the amount of particles that contaminate the corresponding flange.

[0163] 37. The device according to Clause 36, wherein the distance between the inner protective member and the corresponding flange is configured such that the amount of particles contaminating the corresponding flange is reduced, at least in part, due to particles being repelled from the surfaces of the inner protective member and the corresponding flange.

[0164] 38. The apparatus according to Clause 36, wherein the particles include one or more of the following: solid particles and fluid particles, and the coating is configured to: repel fluid particles to prevent fluid particles from accumulating on the inner protective member; and prevent solid particles from adhering to the inner protective member.

[0165] 39. The device according to Clause 35, wherein the protective coating is a metal nitride.

[0166] 40. The apparatus according to Clause 1, wherein the inner rigid sleeve and the shielding device are arranged such that the inner rigid sleeve is configured to penetrate the opening of the shielding device.

[0167] 41. The device according to Clause 1, wherein a first end of the flexible bellows may be coupled or fixed to a first flange, and a second end thereof may be coupled or fixed to a second flange.

[0168] 42. The device according to Clause 1, wherein the inner rigid sleeve is directly attached to the first flange or attached to the first end of a flexible bellows fixed to the first flange.

[0169] 43. An extreme ultraviolet (EUV) light source, comprising:

[0170] A chamber, including a chamber wall defining a fluid inlet; and

[0171] A device, held against the chamber wall, comprising:

[0172] A mechanical insulating device having a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows channel extending axially between an opening in the first flange and an opening in the second flange, the openings being in fluid communication with a body inlet.

[0173] An inner rigid sleeve, attached to or supported by a first flange, and extending axially along the bellows channel, wherein the outer diameter of the inner rigid sleeve is smaller than the inner diameter of the flexible bellows; and

[0174] The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening with a diameter smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve.

[0175] The shielding device is configured to achieve relative motion between the first flange and the second flange caused by the movement of the chamber wall, the relative motion including translational motion along one or more directions perpendicular to the axial direction and rotational motion about one or more directions perpendicular to the axial direction.

[0176] 44. The EUV light source according to Clause 43, wherein the first flange is fixed to the chamber wall and the second flange is fixed to the second wall of the second chamber.

[0177] 45. The EUV light source according to Clause 43 may further include a target material supply system comprising a droplet generator configured to generate a target stream, wherein the target comprises target material that emits EUV light when in a plasma state.

[0178] 46. ​​The EUV light source according to Clause 45 further includes a structure comprising a structure channel configured to receive target material traveling along a target material path, wherein a first flange is fixed to a wall of the structure.

[0179] 47. An EUV light source according to Clause 46, wherein the second flange is fixed to the wall of a container configured to receive target material from a structural channel.

[0180] 48. The EUV light source according to Clause 47, wherein the first flange and the second flange are vacuum flanges, the first flange being secured to the wall of the structure using a vacuum seal, and the second flange being secured to the wall of the container using another vacuum seal.

[0181] 49. The EUV light source according to Clause 48 further includes a first inner protective member extending over the opening of the first flange and a second inner protective member extending over the opening of the second flange, wherein each of the first and second inner protective members is configured to: prevent target material from contacting the corresponding vacuum seal; and prevent the target material from solidifying at the location of the vacuum seal between the corresponding flange and the structural wall, thereby forming an unwanted joint between the corresponding flange and the structural wall.

[0182] 50. An EUV light source as described in Clause 46, wherein the structure is arranged in a position opposite to the droplet generator in a chamber.

[0183] 51. An EUV light source according to Clause 46, wherein the structural channel is aligned with the direction of gravity, and the flow direction of the target material is at least partially aligned with the direction of gravity.

[0184] 52. An EUV light source according to Clause 44, wherein the device is implemented as a gravity-driven emission device configured to pass through or capture target material traveling within a chamber.

[0185] 53. An apparatus comprising:

[0186] Mechanical insulation equipment, including a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows channel extending axially between an opening in the first flange and an opening in the second flange.

[0187] An inner rigid sleeve, attached to or supported by the first flange and extending axially along the bellows channel, wherein the outer diameter of the inner rigid sleeve is smaller than the inner diameter of the flexible bellows; and

[0188] A shielding device, at least partially fixed to or supported by a second flange and defining an axial device opening, the diameter of which is smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve, wherein the shielding device is configured to at least partially cover or cover the area between the flexible bellows and the inner rigid sleeve.

[0189] 54. The apparatus according to Clause 53, wherein the shielding device includes one or more movable disks supported by a disk housing fixed to a second flange, each disk defining an opening large enough to accommodate an inner rigid sleeve, wherein the inner diameter of each disk is smaller than the inner diameter of the flexible bellows.

[0190] 55. The apparatus of claim 54, wherein one or more movable disks are configured to achieve relative movement between a first flange and a second flange, the relative movement including translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

[0191] 56. An apparatus comprising:

[0192] The structure, including its interior, is configured to receive target material traveling along a path;

[0193] Containers, including volume; and

[0194] A connecting device, located between the structure and the container and configured to provide fluid communication between the interior of the structure and the volume of the container, the connecting device comprising:

[0195] Mechanical insulation equipment includes a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows channel extending axially between an opening in the first flange and an opening in the second flange, the first flange being fixed to a wall of a structure and the second flange being fixed to a container.

[0196] An inner sleeve, attached to or supported by a first flange and extending axially within a bellows channel, has an outer diameter smaller than the inner diameter of the flexible bellows and defines a sleeve channel within the bellows channel, such that the sleeve channel provides fluid communication between the interior of the structure and the container volume; and

[0197] The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening, the diameter of which is smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve.

[0198] 57. The apparatus according to Clause 56, wherein the container is in fluid communication with the nozzle system of a target supply system configured to supply target material to an EUV light source.

[0199] 58. The apparatus according to Clause 56, wherein the container is part of a target material debris collection and discharge system for an emission module within the chamber of an EUV light source.

[0200] Other implementations are within the scope of the following claims.

Claims

1. An apparatus comprising: A mechanical insulation device, the mechanical insulation device comprising a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows channel extending in an axial direction between an opening in the first flange and an opening in the second flange. An inner rigid sleeve is attached to or supported by the first flange and extends along the bellows channel in the axial direction, wherein the outer diameter of the inner rigid sleeve is smaller than the inner diameter of the flexible bellows. as well as The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening, the diameter of which is smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve. The shielding device further includes one or more disks and a disk housing, the disk housing defining an internal cavity for accommodating the one or more disks and constraining the one or more disks axially.

2. The apparatus of claim 1, wherein the shielding device extends into the bellows channel.

3. The device according to claim 1, wherein the distance between the inner diameter of the flexible bellows and the outer diameter of the inner rigid sleeve is greater than 10% of the inner diameter of the flexible bellows.

4. The device according to claim 3, wherein the distance between the inner diameter of the flexible bellows and the outer diameter of the inner rigid sleeve is greater than 20% of the inner diameter of the flexible bellows.

5. The device according to claim 4, wherein the distance between the inner diameter of the flexible bellows and the outer diameter of the inner rigid sleeve is greater than 30% of the inner diameter of the flexible bellows.

6. The apparatus of claim 1, wherein the one or more disks extend in a direction not parallel to the axial direction.

7. The apparatus of claim 1, wherein the direction in which the one or more disks extend is perpendicular to the axial direction.

8. The apparatus of claim 1, wherein the one or more disks comprise a plurality of disks, and the outer diameter of at least one disk is different from the outer diameter of each of the other disks, and the inner diameter of at least one disk is different from the inner diameter of each of the other disks.

9. The apparatus of claim 1, wherein the shielding device is configured to enable relative movement between the first flange and the second flange, the relative movement comprising translational movement along one or more directions perpendicular to the axial direction and rotational movement about one or more directions perpendicular to the axial direction.

10. The apparatus of claim 1, wherein the outer diameter of at least one of the one or more disks is greater than the inner diameter of the disk housing.

11. The apparatus of claim 1, wherein the one or more disks comprise a plurality of disks, the plurality of disks including a small disk, the outer diameter of the small disk being smaller than the sum of the inner diameter of the disk housing and the annular radius of the disk housing, the small disk being sandwiched between two disks, the outer diameter of each of the two disks being larger than the sum of the inner diameter of the disk housing and the annular radius of the disk housing.

12. The apparatus of claim 1, wherein each disk is defined by a thickness along the axial direction, such that the one or more disks can be received within the disk housing.

13. The apparatus of claim 1, wherein the shielding device is made of metal, the metal comprising a coating configured to prevent particulate contamination of the shielding device.

14. The apparatus of claim 13, wherein the metal is stainless steel and the shielding device coating is a metal nitride or a metal oxide.

15. The device of claim 1, wherein the inner rigid sleeve is made of metal.

16. The device according to claim 1, wherein the inner rigid sleeve is made of molybdenum, aluminum, copper, alumina, diamond, or graphite.

17. The apparatus of claim 1, wherein the inner rigid sleeve comprises a coating of metal nitride, metal oxide, or silicon nitride.

18. The apparatus of claim 1, further comprising a heating device configured to adjust the temperature of the inner rigid sleeve.

19. The device of claim 1, further comprising an inner protective member extending over an opening of one or more of the following: the first flange and the second flange.

20. The apparatus of claim 19, wherein the inner protective member is made of a metal comprising a protective coating, the protective coating being configured to prevent particulate contamination of the inner protective member.

21. The apparatus of claim 1, wherein the inner rigid sleeve and the shielding device are arranged such that the inner rigid sleeve is configured to penetrate the opening of the shielding device.

22. An extreme ultraviolet (EUV) light source, comprising: A chamber, including the chamber wall that defines the fluid inlet; as well as A device, held against the wall of the chamber, the device comprising: Mechanical insulation device, comprising a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows channel extending in an axial direction between an opening in the first flange and an opening in the second flange, the opening being in fluid communication with the fluid inlet; An inner rigid sleeve, attached to or supported by the first flange, and extending along the bellows channel in the axial direction, wherein the outer diameter of the inner rigid sleeve is smaller than the inner diameter of the flexible bellows; and The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening, the diameter of which is smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner rigid sleeve. The shielding device further includes one or more disks and a disk housing, the disk housing defining an internal cavity for accommodating the one or more disks and constraining the one or more disks axially.

23. The EUV light source of claim 22, further comprising a target material supply system including a droplet generator configured to generate a target stream, wherein the target comprises target material that emits EUV light when in a plasma state.

24. The EUV light source of claim 23, comprising a structure including a structure channel configured to receive target material traveling along a target material path, wherein the first flange is fixed to a wall of the structure.

25. The EUV light source of claim 22, wherein the shielding device is configured to realize relative motion between the first flange and the second flange caused by movement of the chamber wall, the relative motion including translational motion along one or more directions perpendicular to the axial direction and rotational motion about one or more directions perpendicular to the axial direction.

26. An apparatus comprising: A structure, including an interior of the structure, the interior of the structure being configured to receive target material traveling along a path; Containers, including volume; as well as A connecting device, located between the structure and the container and configured to provide fluid communication between the interior of the structure and the volume of the container, the connecting device comprising: Mechanical insulation device, comprising a flexible bellows extending between a first flange and a second flange, the flexible bellows defining a bellows channel extending in an axial direction between an opening in the first flange and an opening in the second flange, the first flange being fixed to a wall of the structure and the second flange being fixed to the container; An inner sleeve, attached to or supported by the first flange and extending in the axial direction within the bellows channel, the outer diameter of the inner sleeve being smaller than the inner diameter of the flexible bellows and defining a sleeve channel within the bellows channel, such that the sleeve channel provides fluid communication between the interior of the structure and the volume of the container; and The shielding device is at least partially fixed to or supported by the second flange and defines an axial device opening, the diameter of which is smaller than the inner diameter of the flexible bellows and larger than the outer diameter of the inner sleeve. The shielding device further includes one or more disks and a disk housing, the disk housing defining an internal cavity for accommodating the one or more disks and constraining the one or more disks axially.

27. The apparatus of claim 26, wherein the container is in fluid communication with the nozzle system of the target supply system, the target supply system being configured to supply target material to the EUV light source.

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