液体前驱体源瓶储量侦测方法
By performing evacuation and recovery tests on the source bottle and calculating the diffusion coefficient, the problem of measuring the liquid precursor reserve in the absence of a level sensor and carrier gas was solved, achieving accurate measurement of the remaining liquid precursor quantity. This method is applicable to liquid precursor source bottles in ALD processes.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- PIOTECH CO LTD
- Filing Date
- 2022-11-09
- Publication Date
- 2026-07-17
AI Technical Summary
In the existing technology, the accuracy of liquid level sensor in measuring the remaining liquid depends on the number and spacing of the points. It cannot accurately obtain the content of precursor carried by the carrier gas in situ. Especially in the absence of liquid level sensor and carrier gas, it is impossible to accurately measure the storage of liquid precursor.
By evacuating and restoring the source bottle, the diffusion coefficient is calculated, and the distance from the surface of the liquid precursor to the pressure sensor is measured using the Gaussian error function and a pressure sensor, thereby determining the remaining amount of the liquid precursor.
Accurate measurement of liquid precursor reserves was achieved without liquid level sensors or carrier gas, making it suitable for liquid precursor source bottles in ALD processes and improving the accuracy and reliability of measurements.
Smart Images
Figure CN115574886B_ABST