A method and apparatus for confirming parameters of a scanning motor curve tracking

Abstract

This invention provides a method and apparatus for confirming parameters for curve tracking of a scanning motor. The method includes: setting different basic parameters of the scanning motor and pre-setting different adaptive adjustment factors for each displacement interval; calculating the corresponding scanning parameters using a tracking scanning algorithm based on the basic parameters and adaptive adjustment factors; performing simulation calculations based on the different scanning parameters to obtain simulation results; and selecting the optimal basic parameters and adaptive adjustment factors based on the simulation results and inputting them into the actual scanning motor for curve tracking. This invention enables the scanning motor to smoothly track a custom curve by setting scanning parameters and adaptive adjustment factors, eliminating the problems of accumulated errors and excessive torque. By simulating the grinding trajectory of the polishing disc after setting various scanning parameters, it reduces experimental costs and improves experimental efficiency.

Description

Technical Field

[0001] This invention relates to the field of chemical machinery technology, specifically to a method and apparatus for confirming parameters of a scanning motor curve tracking system. Background Technology

[0002] The specific oscillation trajectory of the scanning motor in a chemical mechanical planarization (CMP) device needs to follow the time-displacement curve set in the scanning human-machine interface (Sweep interface). The Sweep interface requires setting parameters such as the scanning motor's operating mode, start point, end point, operating frequency, and number of displacement intervals. The operating mode refers to the function curve tracked by the scanning motor during operation, and includes modes such as No Sweep (the scanning motor remains stationary at a fixed position), Sin Sweep (sine curve tracking scan), and Custom Sweep (custom curve tracking scan).

[0003] In chemical mechanical planarization equipment, the polishing stage serves as the carrier for wafer grinding, such as... Figure 1 As shown. Polishing head 1 can apply pressure to multiple areas, thus supporting the wafer on the grinding table for grinding. The scanning motor of the polishing head allows the wafer to be ground at different positions on the polishing pad. The scanning motor of the dresser 2 scans the polishing pad, thus polishing it. The slurry scanning motor 3 sprays chemical solution at set positions, causing the chemical solution on the polishing pad to distribute along a set trajectory. All scanning motors need to scan according to set parameters. In addition to meeting these parameters, they also need to operate smoothly throughout the entire cycle, especially during transitions between different areas. Traditional scanning motors do not consider smoothness, resulting in significant speed changes at the transition points between different areas, causing cumulative time and position errors, and introducing large scanning motor torque, affecting the scanning motor's lifespan. Some existing scanning motors prioritize smoothness and stability, which may cause the scanning motor to scan beyond the set area range within the response region under extreme conditions. Summary of the Invention

[0004] In view of this, the present invention provides a method and apparatus for confirming the parameters of a scanning motor curve tracking, which solves the problems of large cumulative error, excessive torque and out-of-range caused by unreasonable setting of scanning motor parameters.

[0005] In a first aspect, embodiments of the present invention provide a method for confirming parameters for scanning motor curve tracking, the method comprising:

[0006] Set different basic parameters for the scanning motor, including: the operating mode, start point, end point, frequency, and number of displacement intervals of the scanning motor, and preset different adaptive adjustment factors for each displacement interval.

[0007] Based on the basic parameters and adaptive adjustment factors, a tracking scan algorithm is used to calculate the corresponding different scan parameters;

[0008] Simulation calculations were performed based on different scanning parameters to obtain simulation results;

[0009] Based on the simulation results, the optimal basic parameters and adaptive adjustment factors are selected as the final curve tracking parameters and input into the actual scanning motor for curve tracking.

[0010] The scanning motor curve tracking parameter confirmation method provided in this invention sets scanning parameters and adaptive adjustment factors, enabling the scanning motor to smoothly track a custom curve, eliminating the problems of cumulative error and excessive torque. By simulating the grinding trajectory of the polishing disk after setting various scanning parameters, the experimental cost of setting scanning parameters is reduced and the experimental efficiency is improved.

[0011] Optionally, the tracking and scanning algorithm uses a preset time-displacement function to track the running trajectory of the scanning motor. The tracking and scanning algorithm includes the following steps:

[0012] The operating cycle of the scanning motor is divided into n uniform time intervals T. n , corresponding to n displacement intervals, each time interval T n The corresponding displacement interval is Y n ;

[0013] The coefficients of all time-displacement functions of the scanning motor within one operating cycle are pre-stored in four arrays A[n], B[n], C[n], and D[n]. Here, A[n] is the coefficient of the cubic term in the time-displacement function within the nth displacement interval, B[n] is the coefficient of the quadratic term in the time-displacement function within the nth displacement interval, C[n] is the coefficient of the linear term in the time-displacement function within the nth displacement interval, and D[n] is the coefficient of the constant term in the time-displacement function within the nth displacement interval.

[0014] Determine the number of displacement intervals n, where n is greater than a preset threshold;

[0015] The nth time interval T n The average score is T n1 and T n2 The nth displacement interval is Y n T n1 The displacement of the internal scanning motor is Y n1 T n2 The displacement of the internal scanning motor is Y n2 The following conditions are met:

[0016] T n1 +T n2 =Tn Y n1 +Y n2 =Y n ;

[0017] Select the operating mode of the scanning motor, in T n1 During the time period, the scanning motor undergoes uniformly accelerated linear motion with an acceleration a(n), at time T n2 During the time period, the scanning motor moves at a speed V n It moves at a constant velocity in a straight line.

[0018] The scanning motor curve tracking parameter confirmation method provided in this embodiment of the invention uses time as the dividing line. In each time interval, the scanning motor spends half of its time on uniform acceleration and half of its time on uniform motion. The running time in a time interval matches the time interval of the preset time displacement function curve, so the motor will not generate time accumulation error in one cycle.

[0019] Optionally, the displacement of the scanning motor within the nth displacement interval is:

[0020]

[0021] Where Factor(n) is the adaptive adjustment factor for the nth displacement interval, ranging from 0 to 1, and t is the time point within the nth displacement interval.

[0022] The scanning motor curve tracking parameter confirmation method provided in this embodiment of the invention introduces an adaptive adjustment factor, which ensures smooth operation of the scanning motor while avoiding the problem of exceeding the set range in the response area due to excessive consideration of smoothness.

[0023] Optionally, the T n1 The acceleration and T of the scanning motor during the time period n2 The calculation process for the scanning motor speed within the time period is as follows:

[0024] The displacement of the starting point of the nth displacement interval is:

[0025]

[0026] The displacement of the endpoint of the nth displacement interval is:

[0027]

[0028] T n2 The speed of the scanning motor during the time period is:

[0029] Among them, t s Let t be the time point at the start of the nth displacement interval. eV is the time point at the end of the nth displacement interval. n-1 For the (n-1)th time interval T n-1 The average speed of the internal scanning motor;

[0030] T n1 The acceleration of the scanning motor during the time period is: a(n) = (V n -V n-1 ) / (T n / 2).

[0031] The scanning motor curve tracking parameter confirmation method provided in this embodiment of the invention calculates the speed and acceleration of the scanning motor during operation, enabling the scanning motor to track the preset curve more smoothly, ensuring that the motor's time, displacement and torque all operate according to the preset parameters, and eliminating the problems of cumulative error and excessive torque.

[0032] Optionally, the preset threshold is the number of segments of the curve corresponding to the time displacement function within one operating cycle of the scanning motor.

[0033] The scanning motor curve tracking parameter confirmation method provided in this embodiment of the invention uses equal time intervals as dividing points within one operating cycle, and sets the number of time interval points to n. The size of the time interval can be determined based on the input information. If the motor's operating cycle is long, a larger number of time intervals can be used; if the motor's operating cycle is short, a smaller number of time intervals can be used. This method can fully utilize the time displacement information provided by the display interface, thereby achieving better fitting.

[0034] Optionally, the simulation calculation process is as follows:

[0035] Determine the key parameters in the physical structure of the polishing pad;

[0036] Based on the aforementioned key parameters, determine the positional relationship between the scanning motor's scanning-related parameters and the key parameters in the physical structure of the polishing disc;

[0037] Simulation calculations are performed based on the described positional relationships.

[0038] Optionally, the key parameters in the physical structure of the polishing disc include: the arm length of the scanning motor, the radius of the polishing disc, the distance between the center of the polishing disc and the axis of the scanning motor arm, and the rotational speed of the polishing disc.

[0039] This invention reduces the experimental cost of setting scanning parameters and improves experimental efficiency by simulating the grinding trajectory after setting each scanning parameter by corresponding key parameters with the physical structure of the polishing pad.

[0040] Secondly, embodiments of the present invention provide a scanning motor curve tracking parameter confirmation device, comprising:

[0041] The setting module is used to set different basic parameters of the scanning motor. The basic parameters include: the operating mode of the scanning motor, the start point, the end point, the frequency, the number of displacement intervals, and different adaptive adjustment factors are preset for each displacement interval.

[0042] The scanning parameter acquisition module is used to calculate the tracking scanning algorithm based on the basic parameters and the adaptive adjustment factor to obtain different corresponding scanning parameters.

[0043] The simulation module is used to perform simulation calculations based on different scanning parameters and obtain simulation results.

[0044] The tracking module is used to select the optimal basic parameters and adaptive adjustment factors based on the simulation results, which are then used as the final curve tracking parameters and input into the actual scanning motor for curve tracking.

[0045] The scanning motor curve tracking parameter confirmation device provided in this embodiment of the invention sets scanning parameters and adaptive adjustment factors, enabling the scanning motor to smoothly track a custom curve, eliminating the problems of cumulative error and excessive torque. By simulating the grinding trajectory of the polishing disk after setting various scanning parameters, the experimental cost of setting scanning parameters is reduced and the experimental efficiency is improved.

[0046] Thirdly, embodiments of the present invention provide a computer device, including: a memory and a processor, wherein the memory and the processor are communicatively connected to each other, the memory stores computer instructions, and the processor executes the computer instructions to perform the method described in the first aspect, or any optional embodiment of the first aspect.

[0047] Fourthly, embodiments of the present invention provide a computer-readable storage medium storing computer instructions for causing the computer to perform the method described in the first aspect, or any optional embodiment of the first aspect. Attached Figure Description

[0048] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0049] Figure 1 This is a schematic diagram of the structure of the scanning motor on the polishing stage in the chemical mechanical planarization apparatus provided in an embodiment of the present invention;

[0050] Figure 2 A flowchart of a method for confirming scanning motor curve tracking parameters provided in an embodiment of the present invention;

[0051] Figure 3 This is a schematic diagram of the scanning parameters and the physical structure of the polishing disk provided in an embodiment of the present invention;

[0052] Figure 4 This is a comparison chart of simulation results obtained with different scanning parameters provided in the embodiments of the present invention;

[0053] Figure 5 This is a schematic diagram of a scanning motor curve tracking parameter confirmation device provided in an embodiment of the present invention;

[0054] Figure 6 This is a schematic diagram of the structure of a computer device provided in an embodiment of the present invention. Detailed Implementation

[0055] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0056] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0057] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can also refer to the internal connection of two components; and they can refer to a wireless connection or a wired connection. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0058] The technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0059] This invention provides a method for confirming parameters for scanning motor curve tracking, such as... Figure 2 As shown, the method specifically includes the following steps:

[0060] Step S1: Set different basic parameters for the scanning motor. These basic parameters include: the scanning motor's operating mode, start point, end point, frequency, and number of displacement intervals. For each displacement interval, a different adaptive adjustment factor is preset. For example, the basic parameters and adaptive adjustment factors of the scanning motor are set through the human-machine interface.

[0061] Step S2: Calculate the tracking scan algorithm based on the basic parameters and adaptive adjustment factor to obtain the corresponding different scan parameters.

[0062] Specifically, in one embodiment, the tracking and scanning algorithm scans the running trajectory of the motor as a curve corresponding to a preset time-displacement function. The tracking and scanning algorithm includes the following steps:

[0063] Step S21: Divide the operating cycle of the scanning motor into n uniform time intervals T. n , corresponding to n displacement intervals, each time interval T n The corresponding displacement interval is Y n ;

[0064] Step S22: Pre-store the coefficients of all time-displacement functions of the scanning motor in one operating cycle in four arrays A[n], B[n], C[n], and D[n]. Here, A[n] is the coefficient of the cubic term in the time-displacement function in the nth displacement interval, B[n] is the coefficient of the quadratic term in the time-displacement function in the nth displacement interval, C[n] is the coefficient of the linear term in the time-displacement function in the nth displacement interval, and D[n] is the coefficient of the constant term in the time-displacement function in the nth displacement interval.

[0065] Step S23: Determine the number of displacement intervals n, where n is greater than a preset threshold. For example, the number of displacement intervals corresponds to the number of uniform time intervals within a running cycle. The size of the time interval can be determined based on the input information. If the running cycle of the motor is long, a larger time interval can be used; if the running cycle of the motor is short, a smaller time interval can be used.

[0066] Step S24: Set the nth time interval T n The average score is T n1 and T n2 The nth displacement interval is Y n T n1The displacement of the internal scanning motor is Y n1 T n2 The displacement of the internal scanning motor is Y n2 The following conditions are met:

[0067] T n1 +T n2 =T n Y n1 +Y n2 =Y n ;

[0068] Step S25: Select the operating mode of the scanning motor, in T n1 During the time period, the scanning motor undergoes uniformly accelerated linear motion with an acceleration a(n), at time T n2 During the time period, the scanning motor moves at a speed V n It moves at a constant velocity in a straight line.

[0069] The scanning motor curve tracking parameter confirmation method provided in this embodiment of the invention uses time as the dividing line. In each time interval, the scanning motor spends half of its time on uniform acceleration and half of its time on uniform motion. The running time in a time interval matches the time interval of the preset time displacement function curve, so the motor will not generate time accumulation error in one cycle.

[0070] Specifically, in one embodiment, the scanning motor displacement within the nth displacement interval is:

[0071] Step S26: Y n =Factor(n)*(A[n]*(tt) n-1 ) 3 +B[n]*(tt n-1 ) 2 +C[n]*t-tn-1+Dn+1-Factorn*(Yn-Yn-1*t-tn-1tn-tn-1+Yn-1)

[0072] Where Factor(n) is the adaptive adjustment factor for the nth displacement interval, ranging from 0 to 1, and t is the time point within the nth displacement interval. The larger the value of the adaptive adjustment factor, the smoother the running curve of the scanning motor; the smaller the value, the more linear the running curve of the scanning motor. During adjustment, the adaptive adjustment factor is gradually decreased from 1. When the running curve of the scanning motor is closest to the preset curve and does not exceed the set range, the optimal adaptive adjustment factor is obtained.

[0073] The scanning motor curve tracking parameter confirmation method provided in this embodiment of the invention introduces an adaptive adjustment factor to adaptively adjust the parameters of each displacement interval, ensuring a smooth transition of the running curves between adjacent intervals of the scanning motor, and avoiding the problem of exceeding the set range in the response area due to excessive consideration of smoothness.

[0074] Specifically, in one embodiment, T n1 The acceleration and T of the scanning motor during the time period n2 The calculation process for the scanning motor speed within the time period is as follows:

[0075] Step S27: The displacement of the starting point of the nth displacement interval is:

[0076]

[0077] The displacement of the endpoint of the nth displacement interval is:

[0078]

[0079] Step S28: The speed of the scanning motor during the time period Tn2 is:

[0080] Among them, t s Let t be the time point at the start of the nth displacement interval. e V is the time point at the end of the nth displacement interval. n-1 For the (n-1)th time interval T n-1 The average speed of the internal scanning motor;

[0081] Step S29: T n1 The acceleration of the scanning motor during the time period is: a(n) = (V n -V n-1 ) / (T n / 2).

[0082] The scanning motor curve tracking parameter confirmation method provided in this embodiment of the invention calculates the speed and acceleration of the scanning motor during operation, enabling the scanning motor to track the preset curve more smoothly, ensuring that the motor's time, displacement and torque all operate according to the preset parameters, and eliminating the problems of cumulative error and excessive torque.

[0083] Specifically, in one embodiment, the preset threshold is the number of segments of the curve corresponding to the time displacement function of the scanning motor within one operating cycle.

[0084] The scanning motor curve tracking parameter confirmation method provided in this embodiment of the invention uses equal time intervals as dividing points within one operating cycle, and sets the number of time interval points to n. The size of the time interval can be determined based on the input information. If the motor's operating cycle is long, a larger number of time intervals can be used; if the motor's operating cycle is short, a smaller number of time intervals can be used. This method can fully utilize the time displacement information provided by the display interface, thereby achieving better fitting.

[0085] Step S3: Perform simulation calculations based on different scanning parameters to obtain simulation results.

[0086] Step S4: Select the optimal basic parameters and adaptive adjustment factors based on the simulation results as the final curve tracking parameters, and input them into the actual scanning motor for curve tracking.

[0087] The scanning motor curve tracking parameter confirmation method provided in this invention sets scanning parameters and adaptive adjustment factors, enabling the scanning motor to smoothly track a custom curve, eliminating the problems of cumulative error and excessive torque. By simulating the grinding trajectory of the polishing disk after setting various scanning parameters, the experimental cost of setting scanning parameters is reduced and the experimental efficiency is improved.

[0088] Specifically, in one embodiment, the simulation calculation process is as follows:

[0089] Step S31: Determine the key parameters in the physical structure of the polishing pad. For example, such as... Figure 3 As shown, L1 refers to the arm length of the scanning motor, L2 refers to the radius of the polishing disk, and L3 refers to the distance between the center of the polishing disk and the axis of the scanning motor arm. Op is the center of the polishing disk, Om is the center of the scanning motor shaft, and Pm is the position of the scanning motor at time ts. The scanning motor scans from the starting position P_s to the ending position P_e according to the parameter settings, and the polishing disk rotates at a speed of R_platen.

[0090] Step S32: Determine the positional relationship between the scanning motor's scanning parameters and the key parameters in the physical structure of the polishing disc based on the key parameters. For example, if the arc length of the motor is Sm at time ts, the positional relationship is as follows:

[0091] ∠OpOmPm=Sm / L1

[0092] According to the law of cosines, the distance between the scanning motor and the center of the polishing disk is:

[0093] L(OpOm)=Sqrt(L3^2+L1^2-2*L3*L1*Cos(∠OpOmPm));

[0094] At time ts, the angle of rotation of the polishing disk is:

[0095] J(Platen)=2π*ts / (60 / R_platen)

[0096] Where R_platen represents the number of revolutions of the polishing disk per minute;

[0097] Step S33: Perform simulation calculations based on the positional relationships. For example, define the polar coordinate pole as the center of the polishing disk, and define the polar axis as the direction from the center of the polishing disk to the motor shaft at time 0. At time ts, the motor's polar coordinates are: Rs = L(OpOm), θs = J(Platen);

[0098] The polar coordinate position of the motor position Pm at time ts at time te, where the scan ends, is:

[0099] Re = L(OpOm)

[0100] θe=J(Platen)+(te-ts)*2π / (60 / R_platen)

[0101] Convert the polar coordinates of the position at time ts after the scan ends to Cartesian coordinates as follows:

[0102] X = Re * Cos(θe)

[0103] Y = Re * Sin(θe).

[0104] Simulation results are as follows Figure 4 As shown, judging from the uniformity of the polishing of the polishing pad, Figure 4 The parameter settings for b are better than Figure 4 The parameter settings in section a. These are used when the actual scanning motor performs curve tracking. Figure 4 Set the parameters corresponding to b to complete the curve tracking of the scanning motor.

[0105] This invention, by corresponding key parameters to the physical structure of the polishing pad and considering the relationship between the scanning motor frequency and the polishing pad's rotation frequency, ensures uniform grinding of the polishing pad, improving yield and reducing pad cost. Verifying scanning parameters requires the entire lifespan of the polishing pad, resulting in lengthy and costly experiments. Simulating the grinding trajectory after setting various scanning parameters reduces the experimental cost of setting scanning parameters and improves experimental efficiency.

[0106] This invention provides a scanning motor curve tracking parameter confirmation device, such as... Figure 5 As shown, it includes:

[0107] Setting module 1 is used to set different basic parameters of the scanning motor. These basic parameters include: the scanning motor's operating mode, start point, end point, frequency, and number of displacement intervals. Different adaptive adjustment factors are preset for each displacement interval. For details, please refer to the relevant description of step S1 in the above method embodiments, which will not be repeated here.

[0108] The scanning parameter acquisition module 2 is used to calculate the corresponding scanning parameters based on the basic parameters and the adaptive adjustment factor using a tracking scanning algorithm. For details, please refer to the relevant description of step S2 in the above method embodiment, which will not be repeated here.

[0109] Simulation module 3 is used to perform simulation calculations based on different scanning parameters and obtain simulation results. For details, please refer to the relevant description of step S3 in the above method embodiments, which will not be repeated here.

[0110] Tracking module 4 is used to select the optimal basic parameters and adaptive adjustment factors based on the simulation results, as the final curve tracking parameters, and input them into the actual scanning motor for curve tracking. For details, please refer to the relevant description of step S4 in the above method embodiment, which will not be repeated here.

[0111] The scanning motor curve tracking parameter confirmation device provided in this embodiment of the invention sets scanning parameters and adaptive adjustment factors, enabling the scanning motor to smoothly track a custom curve, eliminating the problems of cumulative error and excessive torque. By simulating the grinding trajectory of the polishing disk after setting various scanning parameters, the experimental cost of setting scanning parameters is reduced and the experimental efficiency is improved.

[0112] Figure 6 A schematic diagram of a computer device according to an embodiment of the present invention is shown, including: a processor 901 and a memory 902, wherein the processor 901 and the memory 902 can be connected via a bus or other means. Figure 6 Taking the example of a connection between China and Israel via a bus.

[0113] Processor 901 can be a Central Processing Unit (CPU). Processor 901 can also be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or combinations of the above types of chips.

[0114] The memory 902, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, such as the program instructions / modules corresponding to the methods in the above method embodiments. The processor 901 executes various functional applications and data processing of the processor by running the non-transitory software programs, instructions, and modules stored in the memory 902, thereby implementing the methods in the above method embodiments.

[0115] The memory 902 may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created by the processor 901, etc. Furthermore, the memory 902 may include high-speed random access memory and may also include non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some embodiments, the memory 902 may optionally include memory remotely located relative to the processor 901, and these remote memories may be connected to the processor 901 via a network. Examples of such networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0116] One or more modules are stored in memory 902, and when executed by processor 901, they perform the methods described in the above method embodiments.

[0117] The specific details of the aforementioned computer equipment can be understood by referring to the relevant descriptions and effects in the above method embodiments, and will not be repeated here.

[0118] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The implemented program can be stored in a computer-readable storage medium. When the program is executed, it can include the processes of the embodiments of the above methods. The storage medium can be a magnetic disk, optical disk, read-only memory (ROM), random access memory (RAM), flash memory, hard disk drive (HDD), or solid-state drive (SSD), etc.; the storage medium can also include combinations of the above types of memory.

[0119] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A method for confirming parameters of a scanning motor curve tracking, characterized in that, include: Set different basic parameters for the scanning motor, including: the operating mode, start point, end point, frequency, and number of displacement intervals of the scanning motor, and preset different adaptive adjustment factors for each displacement interval. Based on the basic parameters and adaptive adjustment factors, a tracking scan algorithm is used to calculate the corresponding different scan parameters; Simulation calculations were performed based on different scanning parameters to obtain simulation results; Based on the simulation results, the optimal basic parameters and adaptive adjustment factors are selected as the final curve tracking parameters and input into the actual scanning motor for curve tracking. The tracking and scanning algorithm uses the running trajectory of the scanning motor as a curve corresponding to a preset time-displacement function. The tracking and scanning algorithm includes the following steps: The operating cycle of the scanning motor is divided into n uniform time intervals T. n , corresponding to n displacement intervals, each time interval T n The corresponding displacement interval is Y n ; The coefficients of all time-displacement functions of the scanning motor within one operating cycle are pre-stored in four arrays A[n], B[n], C[n], and D[n]. Here, A[n] is the coefficient of the cubic term in the time-displacement function within the nth displacement interval, B[n] is the coefficient of the quadratic term in the time-displacement function within the nth displacement interval, C[n] is the coefficient of the linear term in the time-displacement function within the nth displacement interval, and D[n] is the coefficient of the constant term in the time-displacement function within the nth displacement interval. Determine the number of displacement intervals n, where n is greater than a preset threshold; The nth time interval T n The average score is T n1 and T n2 The nth displacement interval is Y n T n1 The displacement of the internal scanning motor is Y n1 T n2 The displacement of the internal scanning motor is Y n2 The following conditions are met: T n1 +T n2 =T n , Y n1 +Y n2 =Y n ; Select the operating mode of the scanning motor, in T n1 During the time period, the scanning motor undergoes uniformly accelerated linear motion with an acceleration a(n), at time T n2 During the time period, the scanning motor moves at a speed V n It moves at a constant velocity in a straight line. The displacement of the scanning motor within the nth displacement interval is: in, is the adaptive adjustment factor for the nth displacement interval, ranging from 0 to 1, and t is the time point within the nth displacement interval; The T n1 The acceleration and T of the scanning motor during the time period n2 The calculation process for the scanning motor speed within the time period is as follows: The displacement of the starting point of the nth displacement interval is: The displacement of the endpoint of the nth displacement interval is: T n2 The speed of the scanning motor during the time period is: Among them, t s Let t be the time point at the start of the nth displacement interval. e V is the time point at the end of the nth displacement interval. n-1 For the (n-1)th time interval T n-1 Average speed of the internal scanning motor; T n1 The acceleration of the scanning motor during the time period is: ; When adjusting the adaptive adjustment factor, the adaptive adjustment factor is gradually decreased from 1. The optimal adaptive adjustment factor is obtained when the running curve of the scanning motor is closest to the preset curve and does not exceed the set range.

2. The method for confirming scanning motor curve tracking parameters according to claim 1, characterized in that, The preset threshold is the number of segments of the curve corresponding to the time displacement function within one operating cycle of the scanning motor.

3. The method for confirming scanning motor curve tracking parameters according to claim 1, characterized in that, The simulation calculation process is as follows: Determine the key parameters in the physical structure of the polishing pad; Based on the aforementioned key parameters, determine the positional relationship between the scanning motor's scanning-related parameters and the key parameters in the physical structure of the polishing disc; Simulation calculations are performed based on the described positional relationships.

4. The method for confirming scanning motor curve tracking parameters according to claim 3, characterized in that, Key parameters in the physical structure of the polishing disc include: the arm length of the scanning motor, the radius of the polishing disc, the distance between the center of the polishing disc and the axis of the scanning motor arm, and the rotational speed of the polishing disc.

5. A scanning motor curve tracking parameter confirmation device, characterized in that, The device includes: The setting module is used to set different basic parameters of the scanning motor. The basic parameters include: the operating mode of the scanning motor, the start point, the end point, the frequency, the number of displacement intervals, and different adaptive adjustment factors are preset for each displacement interval. The scanning parameter acquisition module is used to calculate the tracking scanning algorithm based on the basic parameters and the adaptive adjustment factor to obtain different corresponding scanning parameters. The simulation module is used to perform simulation calculations based on different scanning parameters and obtain simulation results. The tracking module is used to select the optimal basic parameters and adaptive adjustment factors based on the simulation results, which are then used as the final curve tracking parameters and input into the actual scanning motor for curve tracking. The tracking and scanning algorithm uses the running trajectory of the scanning motor as a curve corresponding to a preset time-displacement function. The tracking and scanning algorithm includes the following steps: The operating cycle of the scanning motor is divided into n uniform time intervals T. n , corresponding to n displacement intervals, each time interval T n The corresponding displacement interval is Y n ; The coefficients of all time-displacement functions of the scanning motor within one operating cycle are pre-stored in four arrays A[n], B[n], C[n], and D[n]. Here, A[n] is the coefficient of the cubic term in the time-displacement function within the nth displacement interval, B[n] is the coefficient of the quadratic term in the time-displacement function within the nth displacement interval, C[n] is the coefficient of the linear term in the time-displacement function within the nth displacement interval, and D[n] is the coefficient of the constant term in the time-displacement function within the nth displacement interval. Determine the number of displacement intervals n, where n is greater than a preset threshold; The nth time interval T n The average score is T n1 and T n2 The nth displacement interval is Y n T n1 The displacement of the internal scanning motor is Y n1 T n2 The displacement of the internal scanning motor is Y n2 The following conditions are met: T n1 +T n2 =T n , Y n1 +Y n2 =Y n ; Select the operating mode of the scanning motor, in T n1 During the time period, the scanning motor undergoes uniformly accelerated linear motion with an acceleration a(n), at time T n2 During the time period, the scanning motor moves at a speed V n It moves at a constant velocity in a straight line. The displacement of the scanning motor within the nth displacement interval is: in, is the adaptive adjustment factor for the nth displacement interval, ranging from 0 to 1, and t is the time point within the nth displacement interval; The T n1 The acceleration and T of the scanning motor during the time period n2 The calculation process for the scanning motor speed within the time period is as follows: The displacement of the starting point of the nth displacement interval is: The displacement of the endpoint of the nth displacement interval is: T n2 The speed of the scanning motor during the time period is: Among them, t s Let t be the time point at the start of the nth displacement interval. e V is the time point at the end of the nth displacement interval. n-1 For the (n-1)th time interval T n-1 Average speed of the internal scanning motor; T n1 The acceleration of the scanning motor during the time period is: ; When adjusting the adaptive adjustment factor, the adaptive adjustment factor is gradually decreased from 1. The optimal adaptive adjustment factor is obtained when the running curve of the scanning motor is closest to the preset curve and does not exceed the set range.

6. A computer device, characterized in that, include: A memory and a processor, the memory and the processor being communicatively connected to each other, the memory storing computer instructions, the processor executing the computer instructions to perform the method of any one of claims 1-4.

7. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions for causing the computer to perform the method as described in any one of claims 1-4.

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