Microlens array assembly and rotary laser machining assembly

Abstract

The application discloses a microlens array assembly and a rotary laser processing assembly. The microlens array assembly comprises a lens fixing frame, a first light-transmitting lens, a second light-transmitting lens and a plurality of microlenses, the plurality of microlenses are arranged on the lens fixing frame, the first light-transmitting lens and the second light-transmitting lens are oppositely arranged on two sides of the lens fixing frame along the axial direction of the lens fixing frame, and a plurality of outgoing light beams are formed after an incident laser beam incident from the first light-transmitting lens is focused by the plurality of microlenses. The microlens array assembly provided by the embodiment of the application can realize short focusing of a laser beam, high-speed and high-precision laser processing and rotation of a laser processing light spot.

Description

Technical Field

[0001] This invention specifically relates to a microlens array assembly and a rotary laser processing assembly capable of controllable short focal length focusing, high-precision laser beam generation, and high-speed processing, belonging to the field of laser precision processing technology. Background Technology

[0002] Currently, in conventional laser processing, the adjustable range and form of the processing spot size after the laser beam generated by the laser is focused by a lens, directly affecting the control of laser energy density. Improving processing efficiency at low power is difficult because the laser energy density corresponding to a conventional spot size is limited at low power. If the material ablation threshold is not reached, material cannot be removed. Furthermore, improving efficiency requires high scanning speeds, but high-speed scanning at low power introduces insufficient laser energy absorption, affecting the processing effect. High-power processing with a larger pulse width can achieve a certain degree of high-speed scanning, but while the laser energy density can reach the material ablation threshold, it introduces a larger heat-affected zone. When a conventional laser beam is focused by a field lens for material removal, it is difficult to control the processing resolution because the laser beam has processing capability within a certain spatial range near the beam waist, resulting in low laser processing resolution. Microlens with short focal length single-point focusing can improve processing resolution, but the spot processing capability is limited, making high-speed, large-area processing difficult.

[0003] Therefore, controlling the size of the laser beam spot and the spatial range of the beam waist to improve material processing resolution and simultaneously increase the processing speed of large-format workpieces are key issues and technical requirements for promoting efficient and precise laser machining. Large-format high-speed scanning precision machining places technical demands on the control of spot size, coverage area, and processing resolution. Summary of the Invention

[0004] The main objective of this invention is to provide a microlens array assembly and a rotary laser processing assembly, thereby overcoming the shortcomings of the prior art.

[0005] To achieve the aforementioned objectives, the technical solution adopted by this invention includes:

[0006] This invention provides a microlens array assembly, including a lens holder, a first light-transmitting lens, a second light-transmitting lens, and multiple microlenses. The multiple microlenses are disposed on the lens holder. The first light-transmitting lens and the second light-transmitting lens are respectively disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder. An incident laser beam incident from the first light-transmitting lens is focused by the multiple microlenses to form multiple outgoing beams.

[0007] This invention also provides a rotary laser processing assembly, including a laser source and a beam shaper, a laser beam expander, a laser reflector, a light field modulator, and the aforementioned microlens array assembly, which are sequentially arranged in the optical path of the laser beam provided by the laser source. The lens holder of the microlens array assembly is rotatably connected to the light field modulator and is capable of rotating about its own axis relative to the light field modulator.

[0008] And a first driving mechanism, which is connected to the lens holder of the microlens array assembly and is used to drive the lens holder to rotate around its own axis so that the multiple light spots formed by the laser beam can rotate around their own axis.

[0009] Compared with the prior art, the advantages of the present invention include:

[0010] 1) The microlens array assembly provided in this embodiment of the invention can realize short focusing of laser beams, high-speed and high-precision laser processing, and rotation of laser processing spot;

[0011] 2) The microlens array assembly provided in this embodiment of the invention can also realize short focal length processing and can modulate the laser beam, thereby adjusting the size of the focused spot, further improving the laser power density, improving the processing effect, and realizing high-resolution processing. It has the advantages of flexible adjustment, high controllability, and good processing effect. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of a large-format, high-speed, high-precision laser rapid leveling system and microlens array assembly provided in a typical embodiment of the present invention.

[0013] Figure 2a This is a schematic diagram of the lens holder and spherical lens array provided in a typical embodiment of the present invention;

[0014] Figure 2b yes Figure 2c The cross-sectional structure formed along BB is shown in the schematic diagram.

[0015] Figure 2c yes Figure 2a The cross-sectional structure formed along AA is shown in the schematic diagram.

[0016] Figure 3a This is a schematic diagram of a spherical lens distributed in a parallel row-by-row array, provided in a typical embodiment of the present invention;

[0017] Figure 3b yes Figure 3a The cross-sectional structure formed along AA is shown in the schematic diagram.

[0018] Figure 4a This is a schematic diagram of another type of parallel row-by-row array distribution of spherical lenses provided in a typical embodiment of the present invention;

[0019] Figure 4b yes Figure 4a The cross-sectional structure formed along AA is shown in the schematic diagram.

[0020] Figure 5a This is a schematic diagram of a concentric circular array of spherical lenses provided in a typical embodiment of the present invention;

[0021] Figure 5b yes Figure 5a The cross-sectional structure formed along AA is shown in the schematic diagram.

[0022] Figure 6a , Figure 6b , Figure 6d This is a schematic diagram of a spherical lens ring array distribution provided in a typical embodiment of the present invention;

[0023] Figure 6c yes Figure 6a The cross-sectional structure formed along AA is shown in the schematic diagram.

[0024] Figure 7 This is a schematic diagram of laser processing of a workpiece using a microlens array assembly provided in an embodiment of the present invention;

[0025] Figure 8 These are schematic diagrams illustrating laser processing of a workpiece using a field lens, a spherical lens for focusing, and a microlens array assembly provided in an embodiment of the present invention.

[0026] Figure 9 This is a schematic diagram of the process of laser processing of a workpiece using a large-format, high-speed, high-precision laser rapid leveling system with a microlens array, provided in a typical embodiment of the present invention. Detailed Implementation

[0027] In view of the shortcomings of the prior art, the inventors of this invention, through long-term research and extensive practice, have proposed the technical solution of this invention. The following will further explain and illustrate this technical solution, its implementation process, and its principles.

[0028] This invention provides a microlens array assembly, including a lens holder, a first light-transmitting lens, a second light-transmitting lens, and multiple microlenses. The multiple microlenses are disposed on the lens holder. The first light-transmitting lens and the second light-transmitting lens are respectively disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder. An incident laser beam incident from the first light-transmitting lens is focused by the multiple microlenses to form multiple outgoing beams.

[0029] In one specific embodiment, the lens holder has a receiving hole that extends through the lens holder along its own axial direction. The first light-transmitting lens and the second light-transmitting lens are disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder and are fixedly connected to the lens holder. The first light-transmitting lens, the second light-transmitting lens and the receiving hole form a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber.

[0030] In one specific embodiment, the lens holder has a receiving groove recessed along its own axis, the bottom of the receiving groove is a light-transmitting structure, the first light-transmitting lens and the second light-transmitting lens are arranged opposite to each other on both sides of the lens holder along the axial direction of the lens holder, at least the first light-transmitting lens is fixedly connected to the lens holder, the first light-transmitting lens and the receiving groove enclose a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber.

[0031] In another specific embodiment, the lens holder has a receiving groove recessed along its own axis, and the bottom of the receiving groove is provided with a plurality of mounting holes. Each microlens is respectively disposed in a mounting hole. The first light-transmitting lens and the second light-transmitting lens are disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder. At least the first light-transmitting lens is fixedly connected to the lens holder. The first light-transmitting lens and the receiving groove enclose a receiving chamber, and the plurality of microlenses are distributed in the receiving chamber.

[0032] In one specific implementation, a plurality of the microlenses are combined to form at least one microlens group, each microlens group includes at least one microlens, and the at least one microlens contained in each microlens group is arranged along a selected trajectory. The distribution trajectories of any two microlens groups are spaced apart or intersected, wherein the selected trajectory includes a linear trajectory and a circular trajectory.

[0033] In one specific implementation, the lens holder, the first light-transmitting lens, and the second light-transmitting lens are coaxially arranged, and the center of the annular trajectory is located on the axis of the lens holder, the first light-transmitting lens, and the second light-transmitting lens, or the center of the annular trajectory is located in an area outside the axis of the lens holder, the first light-transmitting lens, and the second light-transmitting lens.

[0034] In one specific implementation, the first and second light-transmitting lenses are circular light-transmitting lenses, and the annular trajectory is either concentric or eccentric with the center of the first and second light-transmitting lenses.

[0035] In one specific embodiment, the microlens includes a plurality of first microlenses and a plurality of second microlenses, the plurality of first microlenses being combined to form at least one first microlens group, and the plurality of second microlenses being combined to form at least one second microlens group, wherein the first microlenses include spherical microlenses and the second microlenses include cylindrical microlenses.

[0036] In one specific implementation, the axial direction of the cylindrical microlens is parallel to the radial direction of the first and second light-transmitting lenses.

[0037] In one specific embodiment, the lens holder is further provided with a fluid inlet and a fluid outlet. The fluid inlet and fluid outlet of the receiving chamber are connected to the receiving chamber. The fluid inlet can also be connected to the lens cooling mechanism, thereby forming a cooling channel between the fluid inlet, the receiving chamber, and the fluid outlet.

[0038] In one specific implementation, the bottom of the receiving tank is provided with at least one guide channel, the guide channel is connected to the receiving tank, and the guide channel is located on one side of a microlens group or between two microlens groups. Furthermore, the guide channel is also connected to the fluid inlet and the fluid outlet, thereby forming a cooling channel between the fluid inlet, the guide channel, and the fluid outlet.

[0039] In one specific implementation, the shape of the receiving chamber is a regular or irregular shape.

[0040] In one specific embodiment, the shape of the receiving chamber includes any one of polygonal, circular, and elliptical shapes, but is not limited thereto.

[0041] In one specific embodiment, the microlens array assembly further includes a torsion connector and a lens holder. The torsion connector is rotatably connected to the lens holder, and the lens holder is rotatable about its own axis together with the movable part in the torsion connector. The lens holder is fixedly mounted on the lens holder and is rotatable together with the lens holder.

[0042] This invention also provides a rotary laser processing assembly, including a laser source and a beam shaper, a laser beam expander, a laser reflector, a light field modulator, and the aforementioned microlens array assembly, which are sequentially arranged in the optical path of the laser beam provided by the laser source. The lens holder of the microlens array assembly is rotatably connected to the light field modulator and is capable of rotating about its own axis relative to the light field modulator.

[0043] And a first driving mechanism, which is connected to the lens holder of the microlens array assembly and is used to drive the lens holder to rotate around its own axis so that the multiple light spots formed by the laser beam can rotate around their own axis.

[0044] In one specific embodiment, the lens holder is connected to the light field modulator via a torsion connecting frame. The fixed part of the torsion connecting frame is fixedly connected to the light field modulator, and the movable part is fixedly connected to the lens holder. The fixed part and the movable part of the torsion connecting frame are rotatably engaged.

[0045] In one specific implementation, a beam channel is also provided between the optical field modulator and the lens holder, allowing the laser beam to pass through.

[0046] In one specific embodiment, the rotary laser processing assembly further includes a lens cooling mechanism connected to a fluid inlet on the lens holder and used at least to provide a cooling medium, including air or cooling water, into the containment chamber.

[0047] The following will further explain the technical solution, its implementation process and principle in conjunction with the accompanying drawings and specific implementation examples. Unless otherwise specified, the optical components such as beam shapers, laser beam expanders, laser reflectors, light field modulators, and microlenses used in the embodiments of the present invention, as well as the drive motor, drive cylinder, vibration generating mechanism, control computer, CNC program and software, can all be those known to those skilled in the art and can all be obtained commercially. Different models and sizes of the above components will not affect the implementation of the technical solution of the present invention and the corresponding results obtained. Those skilled in the art can select different models or sizes of components according to specific needs. Here, the model of each functional component is not specifically limited.

[0048] Example

[0049] Please see Figure 1 , Figures 6a-6d A microlens array assembly includes a lens holder 15, a first light-transmitting lens 14, a first light-transmitting lens 16, and a plurality of microlenses 18. The plurality of microlenses 18 are disposed on the lens holder 15. The first light-transmitting lens 14 and the first light-transmitting lens 16 are respectively disposed opposite to each other on both sides of the lens holder 15 along the axial direction of the lens holder 15. An incident laser beam incident from the first light-transmitting lens 14 is focused by the plurality of microlenses 18 to form a plurality of outgoing beams or a plurality of light spots.

[0050] In this embodiment, the lens holder 15 has a receiving hole that extends through the lens holder 15 along its own axial direction. The first light-transmitting lens 14 and the first light-transmitting lens 16 are arranged opposite to each other on both sides of the lens holder 15 along the axial direction of the lens holder 15 and are fixedly connected to the lens holder 15. The first light-transmitting lens 14 and the first light-transmitting lens 16 and the receiving hole form a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber.

[0051] Alternatively, the lens holder 15 has a receiving groove recessed along its own axis, the bottom of the receiving groove is a light-transmitting structure, the first light-transmitting lens 14 and the first light-transmitting lens 16 are arranged opposite to each other on both sides of the lens holder 15 along the axial direction of the lens holder 15, at least the first light-transmitting lens 14 is fixedly connected to the lens holder 15, the first light-transmitting lens 14 and the receiving groove enclose a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber;

[0052] Alternatively, the lens holder 15 has a receiving groove recessed along its own axis, and the bottom of the receiving groove is provided with a plurality of mounting holes 21. Each microlens is respectively disposed in a mounting hole. The first light-transmitting lens 14 and the first light-transmitting lens 16 are disposed opposite to each other on both sides of the lens holder 15 along the axial direction of the lens holder 15. At least the first light-transmitting lens 14 is fixedly connected to the lens holder 15. The first light-transmitting lens 14 and the receiving groove enclose a receiving chamber, and the plurality of microlenses are distributed in the receiving chamber.

[0053] It should be noted that the lens holder can be a circular turntable, and the first and second light-transmitting lenses can be referred to as the upper cover (support) light-transmitting lens and the lower support light-transmitting lens, respectively. Multiple microlenses 18 are located between the first and second light-transmitting lenses.

[0054] In this embodiment, a plurality of microlenses 18 are combined to form at least one microlens group. Each microlens group includes at least one microlens, and the at least one microlens in each microlens group is arranged along a selected trajectory. The distribution trajectories of any two microlens groups are spaced apart or intersected. The selected trajectory includes a straight trajectory and a circular trajectory.

[0055] In this embodiment, the lens holder 15, the first light-transmitting lens 14, and the first light-transmitting lens 16 are coaxially arranged. The center of the annular trajectory is located on the axis of the lens holder 15, the first light-transmitting lens 14, and the first light-transmitting lens 16, or the center of the annular trajectory is located in an area outside the axis of the lens holder 15, the first light-transmitting lens 14, and the first light-transmitting lens 16.

[0056] In this embodiment, the first light-transmitting lens 14 and the first light-transmitting lens 16 are circular light-transmitting lenses, and the annular trajectory is either concentric or eccentric with the center of the first light-transmitting lens 14 and the first light-transmitting lens 16.

[0057] In this embodiment, the microlens includes a plurality of first microlenses and a plurality of second microlenses. The plurality of first microlenses are combined to form at least one first microlens group, and the plurality of second microlenses are combined to form at least one second microlens group. The first microlenses include spherical microlenses (i.e., spherical lenses), and the second microlenses include cylindrical microlenses (i.e., cylindrical lenses).

[0058] In this embodiment, the axial direction of the cylindrical microlens is parallel to the radial direction of the first light-transmitting lens 14 and the first light-transmitting lens 16.

[0059] In this embodiment, the lens holder 15 is also provided with a fluid inlet 20 and a fluid outlet. The fluid inlet 20 and the fluid outlet are connected to the receiving chamber. The fluid inlet 20 can also be connected to the lens cooling mechanism, thereby forming a cooling channel between the fluid inlet 20, the receiving chamber, and the fluid outlet.

[0060] In this embodiment, the bottom of the receiving tank is provided with at least one guide channel 19, the guide channel 19 is connected to the receiving tank, and the guide channel 19 is disposed on one side of a microlens group or between two microlens groups. Furthermore, the guide channel 19 is also connected to the fluid inlet 20 and the fluid outlet, thereby forming a cooling channel between the fluid inlet 20, the guide channel 19, and the fluid outlet.

[0061] It should be noted that the fluid medium provided by the cooling mechanism can be cooling air, cooling water, or other coolants, so that the receiving cavity containing the spherical lens can achieve water cooling / liquid flow cooling. A steady-state liquid flow circulation can reduce the heat of the spherical lens, thereby achieving effective cooling; or, air cooling / gas cooling can be used to achieve cyclic cooling of the spherical lens array assembly.

[0062] In this embodiment, the shape of the receiving chamber is a regular or irregular shape. For example, the shape of the receiving chamber includes any one of polygons, circles, and ellipses, but is not limited to these.

[0063] In this embodiment, the microlens array assembly further includes a torsion connector 13 and a lens holder 17. The torsion connector 13 is rotatably connected to the lens holder 17. The lens holder 17 can rotate around its own axis together with the movable part in the torsion connector 13. The lens fixing bracket 15 is fixedly mounted on the lens holder 17 and can rotate together with the lens holder 17.

[0064] In this embodiment, a gap may be provided between the multiple microlenses to avoid the spherical microlenses and / or cylindrical microlenses being squeezed and damaged during acceleration and deceleration during vibration. The specific size of the gap can be adjusted according to specific needs and is not specifically limited here.

[0065] It should be noted that the microlenses can be arranged in various ways and do not necessarily fill all the "micro-concave feature positions" (i.e., mounting holes) within the lens holder 15. Multiple microlenses can be selectively arranged and set. The shape of the receiving chamber can be square, rectangular, elliptical, or a personalized contouring / forming processing chamber that matches the workpiece. The receiving chamber can be a curved surface. Furthermore, the arrangement of multiple microlenses is not limited to a regular row arrangement. Various typical arrangements and settings can be achieved according to a certain eccentric principle. It can be combined with the composite motion of multiple processing heads and worktables to control the energy interaction law and mechanism between the focused spot and the workpiece, thereby achieving different processing characteristics.

[0066] Figure 2a , Figure 2b This is a schematic diagram of the lens holder and spherical lens array provided in a typical embodiment of the present invention; the diameter of the lens holder in the figure is a; Figure 3a This is a schematic diagram of a parallel row-by-row array of spherical lenses provided in a typical embodiment of the present invention; the diameter of the lens holder in the figure is D, and the diameter of the spherical lens is d; Figure 4a This is a schematic diagram of another type of parallel row-by-row array distribution of spherical lenses provided in a typical embodiment of the present invention; Figure 5a This is a schematic diagram of a concentric circular array of spherical lenses provided in a typical embodiment of the present invention; Figure 6a , Figure 6b , Figure 6d This is a schematic diagram of a spherical lens ring array distribution provided in a typical embodiment of the present invention.

[0067] It should be noted that the diameter of the spherical lens is determined based on the coverage area of ​​the light field, and the diameter of the spherical lens is determined based on the focal length requirements and the focusing effect of the light spot; the spherical lenses can be arranged in a circumferential array or a concentric ring; in order to avoid the spherical lenses being squeezed and damaged during acceleration and deceleration during vibration, the cavity accommodating the spherical lenses can be set in the form of a dot matrix gap, with small gaps separating the spherical lenses.

[0068] Please see Figure 1A large-format, high-speed, high-precision laser rapid leveling system for microlens arrays includes a rotary laser processing unit, a motion generating unit, a vibration generating unit, and a control unit. The control unit is connected to the rotary laser processing unit, the motion generating unit, and the vibration generating unit, and is at least used to regulate the working state of the rotary laser processing unit, the motion generating unit, and the vibration generating unit.

[0069] In this embodiment, the rotary laser processing unit is at least used to provide a spot formed by a laser beam to perform laser processing on the workpiece; the motion generating unit is at least used to drive the spot and the workpiece to move relative to each other along at least one of the x, y, and z axes of a three-dimensional coordinate system; and the vibration generating unit is at least used to drive the workpiece and the spot to vibrate relative to each other along the xy plane direction in the three-dimensional coordinate system.

[0070] Please refer to it again. Figure 1 The rotary laser processing unit includes a laser source 2 and a beam shaper 3, a laser beam expander 4, a laser reflector 5, a light field modulator, a beam channel, and the microlens array assembly, which are sequentially arranged on the optical path of the laser beam provided by the laser source 2; and a first driving mechanism 12, which is connected to the lens bracket 17 and / or the lens holder 15 and is used to drive the microlens array assembly to rotate around its own axis so that the light spot formed by the laser beam can rotate around its own axis.

[0071] It should be noted that the lens holder can be fixed together with the first and second light-transmitting lenses on the lens bracket 17.

[0072] In one embodiment, the beam channel passes through the middle of the first driving mechanism 12, and the microlens array assembly is disposed at one end of the beam channel and is connected to the first driving mechanism 12 in a driving connection. The beam channel can be rotatably engaged with the first driving mechanism 12 via a bearing.

[0073] In this embodiment, the laser source 2 can be a fiber laser, etc., and the optical field modulator can modulate the laser beam. The beam modulation generates modulated laser (such as a line laser). The modulated laser includes, but is not limited to, line spots, and can include various shaped spots that are focused by a microlens array component and then scanned. The laser beam provided by the laser source 2 can be a high-power, large-diameter beam, which can be a continuous laser or a high-power pulsed laser.

[0074] In this embodiment, the first driving mechanism 12 is a rotary driving mechanism, such as a rotary driving motor or a rotary driving cylinder.

[0075] In this embodiment, the rotary laser processing assembly further includes a laser water cooling mechanism, which is thermally connected to the laser source 2 and is used at least to cool the laser source 2. It should be noted that the laser water cooling mechanism can be any type of water cooling equipment, and its specific structure and working principle are not limited or described here.

[0076] In this embodiment, the rotary laser processing assembly further includes a laser controller 1, which is electrically connected to the laser source 2 and is used at least to adjust the working state and working parameters of the laser source 2. The laser controller 1 may be a commercially available laser control computer, and its specific product model is not limited here.

[0077] The laser beam emitted from the laser source undergoes optical field shaping, and then optical elements are used to modulate the optical field of irregular or fixed-shape structures. The input laser beam can then be controlled into a spot with an adjustable projection shape / area. Furthermore, through spherical or cylindrical microlenses, multiple microlenses are used to achieve short focal length focusing, controlling the beam waist size of the output laser beam within a small range, thereby achieving high-resolution processing.

[0078] This embodiment of a rotary laser processing component can apply a certain angular velocity to the lens holder that houses the spherical or cylindrical microlenses. The application of rotational freedom enables dynamic rotational laser processing with a large coverage area. At the same time, by combining parameters such as the gap, rotation speed, and motion trajectory of the microlenses, the laser energy density on the surface of the workpiece material can be controlled, thereby improving the processing effect.

[0079] In this embodiment, the motion generating unit includes a second driving mechanism, which is in transmission cooperation with the rotary laser processing unit or the workpiece 7, and is used to drive the rotary laser processing unit or the workpiece 7 to move along the x-axis of the three-dimensional coordinate system.

[0080] As a preferred option, please refer to [the relevant documentation / reference]. Figure 1The second driving mechanism is in transmission cooperation with the rotary laser processing unit. Specifically, the motion generating unit includes a first motion platform 6, the rotary laser processing unit is mounted on the first motion platform 6 and is movably cooperated with the first motion platform 6, the rotary laser processing unit is connected to the second driving mechanism and can move along the x-axis of the three-dimensional coordinate system on the first motion platform 6 under the drive of the second driving mechanism, thereby realizing the movement of the rotary laser processing unit on the x-axis. For example, the rotary laser processing unit as a whole can achieve movable cooperation with the first motion platform through guide rails, etc. Specifically, the second driving mechanism can be fixedly mounted on the first motion platform 6, the first motion platform 6 is provided with guide rails extending along the x-axis, and the rotary laser processing unit is fixedly connected to the slider on the guide rail, thereby realizing the movable cooperation between the rotary laser processing unit and the first motion platform 6. The second driving mechanism is a linear driving mechanism, for example, it can be a linear drive motor or a linear drive cylinder.

[0081] In this embodiment, the first drive mechanism 12 is also fixedly connected to a transition bracket 11, which is connected and cooperates with the first motion platform 6.

[0082] In an embodiment, the motion generating unit further includes a third driving mechanism, which is in transmission cooperation with the rotary laser processing unit or the workpiece 7 and is used to drive the rotary laser processing unit or the workpiece 7 to move along the y-axis of the three-dimensional coordinate system.

[0083] As a preferred option, please refer to [the relevant documentation / reference]. Figure 1 The third driving mechanism is in transmission cooperation with the workpiece 7. Specifically, the motion generating unit includes a second motion platform that can move along the y-axis. The workpiece 7 is fixedly mounted on the second motion platform. The second motion platform is transmissionally connected to the third driving mechanism and can move along the y-axis of the three-dimensional coordinate system under the drive of the third driving mechanism, thereby realizing the movement of the workpiece 7 along the y-axis.

[0084] Alternatively, the second motion platform can be fixed, and the workpiece 7 can be movably mounted on the second motion platform. The third drive mechanism is in transmission cooperation with the workpiece 7 and is used to drive the workpiece 7 to move along the y-axis on the second motion platform. For example, the third drive mechanism can be fixedly mounted on the second motion platform, and the second motion platform is provided with a guide rail extending along the y-axis. The workpiece 7 is fixedly connected to a slider on the guide rail, thereby realizing the movable cooperation between the workpiece 7 and the second motion platform. The third drive mechanism is a linear drive mechanism, such as a linear drive motor or a linear drive cylinder.

[0085] In this embodiment, the motion generating unit further includes a fourth driving mechanism, which is in transmission cooperation with the rotary laser processing unit or the workpiece 7, and is used to drive the rotary laser processing unit or the workpiece to move along the z-axis of the three-dimensional coordinate system.

[0086] As a preferred option, please refer to [the relevant documentation / reference]. Figure 1 The fourth driving mechanism is in transmission cooperation with the rotary laser processing unit. Specifically, the motion generating unit includes a third motion platform, which is movable. The rotary laser processing unit is disposed on the third motion platform, and the third motion platform is connected to the fourth driving mechanism. Under the drive of the fourth driving mechanism, the third motion platform can move along the z-axis of the three-dimensional coordinate system, thereby realizing the movement of the rotary laser processing unit along the z-axis. Alternatively, the third motion platform is fixed, and the rotary laser processing unit is movably disposed on the third motion platform. The fourth driving mechanism is in transmission cooperation with the rotary laser processing unit and is used to drive the rotary laser processing unit to move along the z-axis on the third motion platform. For example, the third motion platform may be provided with a guide rail extending along the z-axis, and the rotary laser processing unit is disposed on the guide rail and can move along the z-axis.

[0087] As a more preferred embodiment, the first motion platform 6 can be mounted on the third motion platform, and the rotary laser processing unit is mounted on the first motion platform 6. The first motion platform is fixed relative to the third motion platform in the x-axis direction, but movable in the z-axis direction. The rotary laser processing unit is movable in the x-axis direction with the first motion platform. The second drive mechanism is fixedly mounted on the first motion platform and drives the rotary laser processing unit. The fourth drive mechanism is fixedly mounted on the third motion platform and drives the first motion platform. The first motion platform 6, the rotary laser processing unit, and the second drive mechanism as a whole can move along the z-axis under the drive of the fourth drive mechanism.

[0088] Alternatively, the first motion platform 6 is fixedly mounted on the third motion platform, the rotary laser processing unit is mounted on the first motion platform 6, the second drive mechanism is fixedly mounted on the first motion platform or the third motion platform and is in transmission cooperation with the rotary laser processing unit; the fourth drive mechanism is in transmission connection with the third motion platform, and the first motion platform 6, the third motion platform, the rotary laser processing unit, and the second drive mechanism as a whole can move along the z-axis under the drive of the fourth drive mechanism.

[0089] In this embodiment, the fourth driving mechanism is a linear driving mechanism, such as a linear drive motor or a linear drive cylinder.

[0090] In this embodiment, the motion generating unit further includes a fifth driving mechanism, which is in transmission cooperation with the workpiece 7 and is used to drive the workpiece 7 to rotate around the z-axis of the three-dimensional coordinate system. The fifth driving mechanism is a rotary driving mechanism, such as a rotary driving motor or a rotary driving cylinder.

[0091] In this embodiment, the motion generating unit further includes a motion system control computer 9, which is connected to the second drive mechanism and / or the third drive mechanism and / or the fourth drive mechanism and / or the fifth drive mechanism, and is used to control / adjust the working state of the second drive mechanism and / or the third drive mechanism and / or the fourth drive mechanism and / or the fifth drive mechanism. The motion system control computer may be independently set up and connected to the control unit, or it may be part of the control unit.

[0092] In this embodiment, the vibration generating unit includes a vibration generating mechanism, which drives the rotary laser processing unit or the workpiece to vibrate along the xy plane of the three-dimensional coordinate system. The introduction of vibration can change the periodicity of the interaction mechanism between the workpiece and the laser, and realize diversified control of energy distribution (dynamic spot overlap rate, energy uniformity). For example, the vibration generating mechanism includes a vibration platform 8, which can be fixedly set on a second motion platform. The workpiece 7 is placed on the vibration platform, and the vibration platform 8 can move along the y-axis together with the workpiece 7. For example, the vibration platform can be an electric vibration table, an ultrasonic vibration table, etc., which can realize conventional, ultrasonic or ultra-high frequency vibration.

[0093] For example, the vibration platform 8 is an ultrasonic vibration platform, and the vibration platform 8 is also connected to an ultrasonic vibration controller 10, which is connected to the control unit.

[0094] In this embodiment, a method for processing a workpiece using a large-format, high-speed, high-precision laser rapid leveling system with a microlens array is described. (See also: [link to relevant documentation]). Figure 9 As shown, it can specifically include:

[0095] Provides the aforementioned large-format, high-speed, high-precision laser rapid leveling system for microlens arrays;

[0096] The workpiece surface is laser-processed using a rotating laser spot provided by a rotating laser processing unit.

[0097] In this embodiment, the large-format, high-speed, high-precision laser rapid leveling method for microlens arrays further includes: during the laser processing of the workpiece surface with a rotating laser spot, the rotating laser spot is rotated around its own axis or around a rotation axis.

[0098] In this embodiment, the large-format, high-speed, high-precision laser rapid leveling method for microlens arrays further includes: using a motion generating unit to drive the rotating laser spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system.

[0099] In this embodiment, the large-format rotating laser high-resolution precision laser processing method further includes: driving the workpiece to rotate around the z-axis of the three-dimensional coordinate system using a motion generating unit.

[0100] In this embodiment, the large-format, high-speed, high-precision laser rapid leveling method for microlens arrays further includes: using a vibration generating unit to drive the workpiece and the rotating laser spot to generate relative vibration along the xy plane direction in the three-dimensional coordinate system.

[0101] Please see Figure 8 and Figure 9 , Figure 8 These are schematic diagrams illustrating laser processing of a workpiece using a field lens, a spherical lens for focusing, and a microlens array assembly provided in an embodiment of the present invention. Figure 9 This is a schematic diagram of the process of laser processing of a workpiece using a large-format, high-speed, high-precision laser rapid leveling system with a microlens array, provided in a typical embodiment of the present invention.

[0102] This invention provides a microlens array assembly, which achieves a short-focusing, high-speed, high-precision laser rapid leveling process by arranging microsphere lenses in an array within a circular cavity or a cavity of a certain shape. The assembly employs a high-power, large-diameter laser beam irradiation, using either continuous laser or high-power pulsed laser light source. The beam can be processed with a flat-top beam and focused by a mounting bracket assembly for the microsphere lens array to process the workpiece material. The microsphere lenses are mounted on a spherical lens mounting bracket, which can be either dry-cooled (air-cooled / gas-cooled, etc.) or wet-cooled (controllable liquid flow cooling). Wet cooling utilizes a controllable circulating liquid flow, with steady-state liquid flow circulation or air / gas cooling to reduce heat from the spherical lenses, achieving effective cooling. A turntable housing the spherical lenses is rotated at a certain angular velocity. A vibration platform is attached to the worktable at a certain distance below the cavity. Simultaneously, the vibration mode of the processed workpiece is controlled to be low-frequency, medium-frequency, high-frequency, or ultrasonic vibration, applied to the vibration platform on which the workpiece is placed, with the applied direction being bidirectional or unidirectional vibration within a plane.

[0103] This invention provides a large-format, high-speed, high-precision laser rapid leveling system using a microlens array. The input laser beam is projected as a large spot, and the microlens array component enables short-focal-length focusing of multiple spherical lenses, controlling the beam waist size within a small range, thereby achieving efficient processing of the workpiece.

[0104] The microlens array assembly provided in this embodiment of the invention can realize short-focusing, high-speed, and high-precision laser processing of laser beams, as well as rotation of the laser processing spot. Furthermore, the microlens array assembly provided in this embodiment of the invention can also realize short-focal-length processing and can modulate the laser beam, thereby controlling the size of the focused spot, further improving the laser power density, improving the processing effect, and achieving high-resolution processing. It has the advantages of flexible control, high controllability, and good processing effect.

[0105] It should be understood that the above embodiments are merely illustrative of the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A microlens array assembly, characterized in that, include: The system comprises a lens holder, a first transparent lens, a second transparent lens, and multiple microlenses. The multiple microlenses are mounted on the lens holder. The first and second transparent lenses are respectively positioned opposite each other on both sides of the lens holder along its axial direction. An incident laser beam incident from the first transparent lens is focused by the multiple microlenses to form multiple outgoing beams, which exit from the second transparent lens. The lens holder is provided with a receiving groove or receiving hole. The first and second transparent lenses, together with the receiving hole or receiving groove, form a receiving chamber. The multiple microlenses are distributed within the receiving chamber, and gaps are provided between the multiple microlenses. Multiple microlenses are combined to form at least one microlens group. Each microlens group includes at least one microlens, and the at least one microlens in each microlens group is arranged along a selected trajectory. The distribution trajectories of any two microlens groups are spaced apart or intersected. The selected trajectory includes a straight trajectory and a circular trajectory. The microlens includes a plurality of first microlenses and a plurality of second microlenses. The plurality of first microlenses are combined to form at least one first microlens group, and the plurality of second microlenses are combined to form at least one second microlens group. The first microlenses include spherical microlenses, and the second microlenses include cylindrical microlenses. A torsion connecting frame and a lens holder are provided, wherein the torsion connecting frame is rotatably connected to the lens holder, the lens holder is rotatable around its own axis together with the movable part in the torsion connecting frame, and the lens fixing frame is fixedly mounted on the lens holder and is rotatable together with the lens holder. The lens holder is also provided with a fluid inlet and a fluid outlet communicating with the receiving chamber. The bottom of the receiving groove is provided with at least one guide groove, which is connected to the receiving groove. The guide groove is located on one side of a microlens group or between two microlens groups. Furthermore, the guide groove is also connected to the fluid inlet and the fluid outlet, thereby forming a cooling channel between the fluid inlet, the guide groove, and the fluid outlet.

2. The microlens array assembly according to claim 1, characterized in that: The lens holder has a receiving hole that extends through the lens holder along its own axis. The first light-transmitting lens and the second light-transmitting lens are arranged opposite each other on both sides of the lens holder along the axial direction of the lens holder and are fixedly connected to the lens holder. The first light-transmitting lens, the second light-transmitting lens and the receiving hole form a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber.

3. The microlens array assembly according to claim 1, characterized in that: The lens holder has a recessed receiving groove along its own axis. The bottom of the receiving groove is a light-transmitting structure. The first light-transmitting lens and the second light-transmitting lens are arranged opposite each other on both sides of the lens holder along the axial direction of the lens holder. At least the first light-transmitting lens is fixedly connected to the lens holder. The first light-transmitting lens and the receiving groove enclose a receiving chamber. A plurality of microlenses are distributed in the receiving chamber.

4. The microlens array assembly according to claim 1, characterized in that: The lens holder has a receiving groove recessed along its own axis. The bottom of the receiving groove is provided with a plurality of mounting holes. Each microlens is respectively disposed in a mounting hole. The first light-transmitting lens and the second light-transmitting lens are disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder. At least the first light-transmitting lens is fixedly connected to the lens holder. The first light-transmitting lens and the receiving groove enclose a receiving chamber. The plurality of microlenses are distributed in the receiving chamber.

5. The microlens array assembly according to claim 2, 3, or 4, characterized in that: The lens holder, the first light-transmitting lens, and the second light-transmitting lens are coaxially arranged. The center of the annular trajectory is located on the axis of the lens holder, the first light-transmitting lens, and the second light-transmitting lens, or the center of the annular trajectory is located in an area outside the axis of the lens holder, the first light-transmitting lens, and the second light-transmitting lens.

6. The microlens array assembly according to claim 5, characterized in that: The first and second light-transmitting lenses are circular light-transmitting lenses, and the annular trajectory is either concentric or eccentric with the center of the first and second light-transmitting lenses.

7. The microlens array assembly according to claim 1, characterized in that: The axial direction of the cylindrical microlens is parallel to the radial direction of the first and second light-transmitting lenses.

8. The microlens array assembly according to claim 2, 3, or 4, characterized in that: The shape of the receiving chamber can be a regular or irregular shape.

9. The microlens array assembly according to claim 8, characterized in that: The shape of the containment chamber can be any one of polygonal, circular, and elliptical.

10. A rotary laser processing assembly, characterized in that, The system includes: a laser source and a beam shaper, a laser beam expander, a laser reflector, a light field modulator, a microlens array assembly according to any one of claims 1-9, and a lens cooling mechanism, which are sequentially arranged on the optical path of the laser beam provided by the laser source. The lens holder of the microlens array assembly is rotatably connected to the light field modulator and is capable of rotating about its own axis relative to the light field modulator. And a first driving mechanism, which is connected to the lens holder of the microlens array assembly and is used to drive the lens holder to rotate around its own axis so that the multiple light spots formed by the laser beam can rotate around their own axis. The lens holder is connected to the light field modulator via a torsion connecting frame. The fixed part of the torsion connecting frame is fixedly connected to the light field modulator, and the movable part is fixedly connected to the lens holder. The fixed part and the movable part of the torsion connecting frame are rotatably engaged. The lens cooling mechanism is connected to the fluid inlet on the lens holder and is used at least to provide a cooling medium to the containment chamber. The cooling medium includes air or cooling water.

11. The rotary laser processing assembly according to claim 10, characterized in that: A beam channel is also provided between the optical field modulator and the lens holder, allowing the laser beam to pass through.

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