Shape measuring apparatus and control method thereof

Abstract

Provided is a shape measuring device capable of easily detecting a cause of an abnormality occurring in shape measurement of a measurement target and a control method thereof. The present invention relates to: a displacement detecting device for detecting displacement of a contact; a relative movement mechanism for relatively moving the displacement detecting device with respect to a measurement target to allow the contact to trace a surface to be measured of the measurement target; a position detecting sensor for detecting a relative position of the displacement detecting device with respect to the measurement target; a camera for capturing an image of the contact and outputting the image of the contact; and a synchronization control unit for allowing three actions including detection of the relative position by the position detecting sensor, detection of the displacement by the displacement detecting device, and capturing of the image by the camera to be performed repeatedly in synchronization with each other while the relative movement mechanism performs relative movement.

Description

Technical Field

[0001] The subject matter of this disclosure relates to a shape measuring device that performs shape measurement of an object by using contacts, and a method for controlling the shape measuring device. Background Technology

[0002] A surface shape measuring device (shape measuring device) is known that measures the surface shape, such as profile shape and surface roughness, of a workpiece (the object to be measured). When a contact point contacts the workpiece surface, the contact point and the workpiece move relative to each other in the horizontal direction. This surface shape measuring device allows the contact point to track the workpiece surface while a displacement detector detects the displacement caused by the contact point's oscillation, and the surface shape of the workpiece surface is measured based on the displacement detection signal output from the displacement detector (see PTL 1).

[0003] Reference List

[0004] Patent documents

[0005] PTL 1: Japanese Patent Application Publication No. 2017-161548 Summary of the Invention

[0006] Technical issues

[0007] When measuring the surface shape of a workpiece using a surface shape measuring device, abnormal waveforms may appear in the displacement detection signal output from the displacement detector. In such cases, it is difficult to determine whether the abnormal waveform is caused by the actual shape of the workpiece surface or by external environmental factors (e.g., dust adhering to the workpiece surface).

[0008] Therefore, increasing the measuring force (the pressure applied to the contact point on the workpiece) of the surface shape measuring device can be considered to reduce the influence of foreign matter adhering to the workpiece surface on the measurement results. However, increasing the measuring force can cause workpiece deformation or scratches on the workpiece surface.

[0009] In view of this situation, the purpose of this disclosure is to provide a shape measuring device and its control method that can easily detect the cause of shape measurement anomalies of the measured object.

[0010] Solution to the problem

[0011] A shape measuring device for achieving the objectives of this disclosure is a shape measuring device for measuring the shape of a measured object using a contact point that contacts the measured object, comprising: a displacement detector configured to detect displacement of the contact point; a relative movement mechanism configured to move the displacement detector relative to the measured object and allow the contact point to track the surface to be measured of the measured object; a position detection sensor configured to detect the relative position of the displacement detector relative to the measured object; a camera configured to image the contact point and output a captured image of the contact point; and a synchronization controller configured to synchronously and repeatedly perform three actions together while the relative movement mechanism is performing relative movement, the actions including detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and imaging by the camera.

[0012] According to the shape measuring device, these three actions are repeated synchronously, allowing the operator to verify the captured image acquired at a timing synchronized with the relative position of each position relative to the displacement detector. In other words, the operator can verify the captured image corresponding to any relative position.

[0013] In a shape measuring apparatus according to another aspect of the subject matter of this disclosure, a synchronization controller outputs a synchronization signal to a position detection sensor, a displacement detector, and a camera to synchronize the three actions. Therefore, the three actions can be repeated synchronously together.

[0014] According to another aspect of the subject matter of this disclosure, the shape measuring device also includes a storage controller configured to store, in a correlated manner, the relative position detected by the position detection sensor, the displacement of the contact point detected by the displacement detector, and the captured image taken by the camera in a storage unit each time the three actions are performed synchronously together. Therefore, for each relative position of the displacement detector, the operator can verify the captured image obtained at a timing synchronized with the relative position.

[0015] According to another aspect of the subject matter of this disclosure, the shape measuring device further includes: a signal generator configured to generate a displacement detection signal indicating the displacement of the contact at each relative position; a display controller configured to cause a monitor to display the displacement detection signal generated by the signal generator; and an operation unit configured to accept a specified operation at any specified position of the displacement detection signal displayed on the monitor, wherein the display controller obtains a captured image corresponding to the specified position specified by the specified operation of the operation unit from a storage unit and causes the monitor to display the captured image. Therefore, the operator can verify the captured image corresponding to the desired specified position.

[0016] In a shape measuring device according to another aspect of the subject matter of this disclosure, each time a specified position is changed, the display controller repeatedly performs the following operations: obtains a captured image from a storage unit and displays the captured image on a monitor. Therefore, the operator can verify the captured image corresponding to the desired specified position. When an abnormal waveform appears in the displacement detection signal, the captured images taken before and after its occurrence can be verified, making it easy to detect the cause of the abnormal waveform.

[0017] According to another aspect of the subject matter of this disclosure, the shape measuring apparatus also includes a low-pass filter configured to apply low-pass filtering to the displacement detection signal generated by the signal generator, wherein the display controller has an overlay display mode for displaying the displacement detection signal before and after low-pass filtering. Therefore, erroneous shapes caused by external environmental factors such as foreign objects can be removed from the shape measurement results with high accuracy, which can further improve the reliability and accuracy of the measurement results.

[0018] According to another aspect of the subject matter of this disclosure, the shape measuring apparatus further includes: a signal generator configured to generate a displacement detection signal indicating the displacement of the contact at each relative position; an abnormal waveform detector configured to detect abnormal waveforms of waveform aberrations in the displacement detection signal generated by the signal generator; and a first anomaly determination unit configured to determine whether an anomaly exists in the shape measurement based on a captured image in the storage unit and corresponding to a first range, wherein the first range is assumed to be the range of relative positions of the abnormal waveforms detected by the abnormal waveform detector. Therefore, the presence or absence of an anomaly in the shape measurement can be automatically determined.

[0019] In a shape measuring apparatus according to another aspect of the subject matter of this disclosure, a first anomaly determination unit determines whether an anomaly exists in the shape measurement based on an image captured showing the presence or absence of a foreign object. Therefore, the presence or absence of an anomaly in the shape measurement can be determined automatically.

[0020] According to another aspect of the subject matter of this disclosure, the shape measuring apparatus further includes a remeasurement controller configured to perform a remeasurement by driving a relative movement mechanism and re-tracking the surface to be measured via contacts. Each time a first anomaly determination unit determines that an anomaly exists, the remeasurement controller performs a remeasurement, a signal generator generates a displacement detection signal, an anomaly waveform detector detects an anomaly waveform, and the first anomaly determination unit determines whether an anomaly exists in the shape measurement. Therefore, in the event of an anomaly in the shape measurement, a remeasurement can be performed, which can more accurately determine whether the anomaly is caused by the actual shape of the surface to be measured or by external environmental factors (foreign objects, etc.).

[0021] According to another aspect of the subject matter of this disclosure, the shape measuring device also includes a notification unit configured to issue a warning message when the number of remeasurements exceeds a predetermined specific number. Therefore, the operator can identify the occurrence of an anomaly and quickly perform verification of the factors contributing to the anomaly.

[0022] In a shape measuring device according to another aspect of the subject matter of this disclosure, a storage controller temporarily stores data including relative position detected by a position detection sensor, displacement of a contact detected by a displacement detector, and captured images taken by a camera in a buffer memory of a storage unit, and stores data that is determined to be abnormal by a first anomaly determination unit among the data temporarily stored in the buffer memory in the data storage of the storage unit.

[0023] According to another aspect of the subject matter of this disclosure, the shape measuring apparatus further includes a second anomaly determination unit, configured to determine whether an anomaly exists or does not exist in the shape measurement in each captured image stored in the storage unit. Therefore, the presence or absence of an anomaly in the shape measurement can be determined automatically.

[0024] In a shape measurement apparatus according to another aspect of the subject matter of this disclosure, a second anomaly determination unit determines the presence or absence of an anomaly in the shape measurement based on the presence or absence of a foreign object in each captured image stored in the storage unit. Therefore, the presence or absence of an anomaly in the shape measurement can be determined automatically.

[0025] According to another aspect of the subject matter of this disclosure, the shape measuring apparatus further includes: a signal generator configured to generate a displacement detection signal indicating the displacement of the contact at each relative position; and a display controller configured to cause a monitor to display the displacement detection signal generated by the signal generator, wherein the display controller references a storage unit and detects a second range, the second range being a range of relative positions corresponding to a captured image determined as abnormal by a second anomaly determination unit, and the display controller causes the monitor to identifiablely display a waveform region corresponding to the second range in the waveform of the displacement detection signal displayed on the monitor. Therefore, the location and range of the second range where the anomaly occurs in the shape measurement can be notified to the operator.

[0026] According to another aspect of the subject matter of this disclosure, the shape measuring device further includes a notification unit configured to issue a warning message when the second anomaly determination unit determines that an anomaly exists. Therefore, the operator can identify the occurrence of an anomaly and quickly perform verification of the factors contributing to the anomaly.

[0027] In a shape measuring device according to another aspect of the subject matter of this disclosure, a storage controller temporarily stores data including relative position detected by a position detection sensor, displacement of a contact detected by a displacement detector, and captured images taken by a camera in a buffer memory of a storage unit, and stores data that is determined to be abnormal by a first anomaly determination unit among the data temporarily stored in the buffer memory in the data storage of the storage unit.

[0028] In another aspect of the shape measuring apparatus according to the subject matter of this disclosure, a relative movement mechanism causes a displacement detector to move relative to the object being measured in the horizontal direction.

[0029] In another aspect of the shape measuring device according to the subject matter of this disclosure, while the contact is in contact with the outer peripheral surface of the object to be measured having a solid cylindrical shape or a hollow cylindrical shape, the relative movement mechanism causes the object to be measured and the displacement detector to rotate relative to each other about a rotation center.

[0030] A method for controlling a shape measuring device to achieve the objectives of this disclosure is a method for controlling a shape measuring device including a displacement detector and a relative movement mechanism. The displacement detector includes a contact point that contacts a measured object. The relative movement mechanism is configured to move the displacement detector relative to the measured object and allow the contact point to track the measured surface of the measured object. The shape measuring device performs shape measurement of the measured object by using the contact point. The method includes: a position detection step for detecting the relative position of the displacement detector relative to the measured object; a displacement detection step for detecting the displacement of the contact point by the displacement detector; an imaging step for imaging the contact point and outputting a captured image of the contact point; and a synchronization control step for synchronously repeating three actions together while the relative movement mechanism is performing relative movement, the actions including: detection of the relative position in the position detection step, detection of the displacement in the displacement detection step, and imaging in the imaging step.

[0031] Beneficial effects of the invention

[0032] The subject of this disclosure can easily detect the cause of shape measurement anomalies in the measured object. Attached Figure Description

[0033] [ Figure 1 ] Figure 1 A surface shape measuring device according to a first embodiment is schematically shown.

[0034] [ Figure 2 ] Figure 2 This is a block diagram illustrating the configuration of the control device according to the first embodiment.

[0035] [ Figure 3 ] Figure 3 This schematically illustrates the saved data stored in the data store by the storage controller.

[0036] [ Figure 4 ] Figure 4 It is a diagram used to show the captured image displayed on the monitor in response to a specified operation.

[0037] [ Figure 5 ] Figure 5 It is a diagram used to illustrate the display switching of captured images on the monitor in response to a change in a specified location.

[0038] [ Figure 6 ] Figure 6 This is a flowchart illustrating the process of measuring the shape of a workpiece surface using a surface shape measuring device.

[0039] [ Figure 7 ] Figure 7 This is a flowchart illustrating the process of displaying displacement detection signals and capturing images using a surface shape measuring device.

[0040] [ Figure 8 ] Figure 8 This is a block diagram illustrating the configuration of the control device of the surface shape measuring device according to the second embodiment.

[0041] [ Figure 9 ] Figure 9 This is a diagram used to illustrate the waveform of the displacement detection signal displayed on a monitor and the captured image 38 according to the second embodiment.

[0042] [ Figure 10 ] Figure 10 This is a block diagram illustrating the configuration of the control device of the surface shape measuring device according to the third embodiment.

[0043] [ Figure 11 ] Figure 11 This is a diagram used to illustrate the first to third examples of abnormal waveforms detected by the abnormal waveform detector.

[0044] [ Figure 12 ] Figure 12 This is a diagram used to illustrate the process by which an anomaly determination unit determines the presence or absence of surface shape measurement anomalies.

[0045] [ Figure 13 ] Figure 13 This is a diagram illustrating a notification of a warning message made by a notification controller according to a third embodiment.

[0046] [ Figure 14 ] Figure 14This is a flowchart illustrating the remeasurement process and warning process performed by the surface shape measuring device according to the third embodiment.

[0047] [ Figure 15 ] Figure 15 This is a block diagram showing the configuration of the control device of the surface shape measuring device according to the fourth embodiment.

[0048] [ Figure 16 ] Figure 16 This is a diagram illustrating the process by which an anomaly determination unit determines whether an anomaly exists or not in the shape measurement of a surface according to the fourth embodiment.

[0049] [ Figure 17 ] Figure 17 This is a diagram illustrating an example of the displacement detection signal displayed on the monitor when the anomaly determination unit determines that an anomaly exists in the surface shape measurement.

[0050] [ Figure 18 ] Figure 18 This is a diagram illustrating a notification of a warning message made by a notification controller according to a fourth embodiment.

[0051] [ Figure 19 ] Figure 19 The roughness measuring device is shown schematically.

[0052] [ Figure 20 ] Figure 20 This diagram illustrates the beneficial effects of imaging the contact points with a camera during the rotation of the turntable and the workpiece.

[0053] [ Figure 21 ] Figure 21 This is a block diagram illustrating a modified example of a surface shape measuring device according to a third embodiment.

[0054] [ Figure 22 ] Figure 22 This is a block diagram illustrating a modified example of a surface shape measuring device according to the fourth embodiment. Detailed Implementation

[0055] [First Embodiment]

[0056] Figure 1 A surface shape measuring device 10 according to a first embodiment is schematically shown, which corresponds to the shape measuring device of the subject matter of this disclosure. For example... Figure 1As shown, the surface shape measuring device 10 measures the shape of the surface Wa of a workpiece W, specifically, the contour shape, surface roughness, etc. Here, the workpiece W corresponds to the object of measurement in this disclosure, and the surface Wa corresponds to the surface to be measured in this disclosure. The XY plane, which includes the XY direction among the mutually orthogonal XYZ directions in the figure, is a plane parallel to the horizontal direction, and the Z direction is a vertical direction perpendicular to the horizontal direction.

[0057] The surface shape measuring device 10 includes a plate-shaped measuring stage 12, a column 14, a detector moving mechanism 16, a position detection sensor 18, a displacement detector 20, a camera 22, an operation unit 25, a monitor 27, and a control device 28.

[0058] The workpiece W is disposed on the upper surface of the measuring stage 12; this upper surface is parallel to the XY plane of the measuring stage 12. A column 14 extending in the Z direction is disposed on the upper surface of the measuring stage 12. A detector moving mechanism 16 is movably attached to the column 14 in the Z direction.

[0059] The detector moving mechanism 16 corresponds to the relative moving mechanism of this disclosure and is a known brake that holds the retainer 17 so that it can move freely in the X direction. By driving the detector moving mechanism 16, the displacement detector 20 (contact 34) can move relative to the workpiece W in the X direction. The detector moving mechanism 16 is provided with a position detection sensor 18.

[0060] The position detection sensor 18 includes, for example, a linear scale 18a extending in the X direction (lateral direction); and a read head 18b that reads the linear scale 18a by any of a variety of methods such as optical or magnetic methods. The position detection sensor 18 detects the X-direction displacement (displacement direction and amount) of the holder 17, which moves in the X direction via the detector moving mechanism 16, thereby detecting the X-direction position of the displacement detector 20 (i.e., the relative position of the displacement detector 20 relative to the workpiece W in the X direction), which will be described later. The position detection sensor 18 then outputs the X-direction position detection result D1 of the displacement detector 20 to the control device 28. Known detectors other than scale-type detectors can be used as the position detection sensor 18.

[0061] The retainer 17 is equipped with a displacement detector 20 and a camera 22. Therefore, the displacement detector 20 is held by the detector moving mechanism 16 via the retainer 17 so that it can move freely in the X direction. The displacement detector 20 is held by the column 14 via the retainer 17 and the detector moving mechanism 16 so that its position is adjustable in the Z direction.

[0062] The displacement detector 20 includes a swing pivot 30, an arm 32, a contact 34, and a displacement detection sensor 36.

[0063] The swing pivot 30 supports the arm 32 so that it can swing freely about a rotation axis (swing axis) parallel to the Y direction.

[0064] The arm 32 is supported at the swing pivot 30 and is sway-free, and includes a distal end 32a extending in one direction (opposite to the column 14) along the X direction and a proximal end 32b extending in another direction along the X direction.

[0065] A contact 34 (also called a stylus or measuring element) is provided on the distal side of the distal end 32a of the arm. The contact 34 contacts the surface Wa. The arm 32 swings about the pivot 30, thereby allowing the contact 34 to be displaced in the Z direction. The displacement detector 20 moves in the X direction via the detector moving mechanism 16, thereby allowing the contact 34 to track (scan) the surface Wa in the X direction.

[0066] The proximal end 32b of the arm is pushed upward in the Z direction by a pushing member (not shown). Therefore, the distal end 32a of the arm and the contact 34 are pushed downward in the Z direction about the pivot 30. Thus, the contact 34 remains in contact with the surface Wa.

[0067] For example, a linear variable differential transformer (LVDT) is used as the displacement sensing sensor 36. In this case, although not shown, the displacement sensing sensor 36 includes a core disposed at the proximal end 32b of the arm and a coil into which the core is inserted. The displacement sensing sensor 36 detects the displacement (displacement direction and displacement amount) in the Z direction caused by the swinging of the arm 32 and the contact 34, and outputs the displacement detection result D2 (i.e., the displacement detection result) to the control device 28. A known sensor other than an LVDT (e.g., a scale-type sensor) can be used as the displacement sensing sensor 36.

[0068] Camera 22 is positioned at the retainer 17 and sequentially images the distal portion of contact 34 (capturing images of the movement of the distal portion of contact 34), continuously outputting the captured images 38 (image data) of contact 34 to control device 28. Based on the captured images 38, the presence or absence of foreign objects 59, such as dust, can be verified (see...). Figure 4 It is attached to the surface Wa and can verify the actual shape of the surface Wa.

[0069] For example, keyboards, mice, operation panels, operation buttons, etc. are used as operation units 25 to accept inputs from various operations performed by the operator.

[0070] The monitor 27 can be any of various displays, such as a known liquid crystal display. The monitor 27 displays the displacement detection signal D3 (see below), which is a result of the surface shape measuring device 10 measuring the shape of surface Wa. Figure 2(Images captured by camera 22 38, various settings screens, various operation screens, etc.)

[0071] The control device 28 includes computing circuitry composed of various processors, memories, etc. These processors include CPUs (Central Processing Units), GPUs (Graphics Processing Units), ASICs (Application-Specific Integrated Circuits), and programmable logic devices (e.g., SPLDs (Simple Programmable Logic Devices), CPLDs (Complex Programmable Logic Devices), and FPGAs (Field-Programmable Gate Arrays)). The various functions of the control device 28 can be implemented by a single processor, or by processors of the same or different types.

[0072] Figure 2 This is a block diagram illustrating the configuration of the control device 28 according to the first embodiment. (See diagram for example.) Figure 2 As shown, the detector moving mechanism 16, position detection sensor 18, displacement detection sensor 36 of displacement detector 20, camera 22, operation unit 25, monitor 27, etc., as described above, are connected to control device 28, and control device 28 controls the operation of each unit of surface shape measuring device 20 as a whole. Control device 28 synchronizes the detection of position detection sensor 18, the detection of displacement detection sensor 36, and the imaging of camera 22. In addition, each time the above detection and imaging are performed, control device 28 causes data storage 50 to store in association the X-direction position detection result D1 of displacement detector 20 detected by position detection sensor 18, the displacement detection result D2 of contact point 34 detected by displacement detection sensor 36, and the captured image 38 taken by camera 22.

[0073] The control device 28 includes a drive controller 40, a synchronization controller 42, a signal acquisition unit 44, an image acquisition unit 46, a storage controller 48, a data storage unit 50, a signal generator 52, a low-pass filter 54 (LPF), and a display controller 56.

[0074] The drive controller 40 controls the drive of the detector moving mechanism 16. In response to the measurement start operation input to the operation unit 25, the drive controller 40 drives the detector moving mechanism 16 and moves the displacement detector 20, etc., along the X direction. Therefore, the contact 34 tracks the surface Wa along the X direction. And, the shape measurement of the surface Wa is performed.

[0075] During the movement of the displacement detector 20 in the X direction performed by the detector moving mechanism 16, that is, during the shape measurement of surface Wa by the surface shape measuring device 10 (hereinafter referred to as "during surface shape measurement"), the synchronization controller 42 outputs a synchronization signal CL to the position detection sensor 18, the displacement detection sensor 36, and the camera 22. The synchronization signal CL is a signal used to synchronize the detection performed by the position detection sensor 18, the detection performed by the displacement detection sensor 36, and the imaging performed by the camera 22. For example, a clock signal is used as the synchronization signal CL. Therefore, during surface shape measurement, three actions (hereinafter referred to as "three actions") are repeatedly performed synchronously according to the synchronization signal CL: the detection of the X-direction position of the displacement detector 20 by the position detection sensor 18, the detection of the displacement of the contact point 34 by the displacement detection sensor 36, and the imaging of the contact point 34 by the camera 22.

[0076] The signal acquisition unit 44 is a connection interface connected to the position detection sensor 18 and the displacement detection sensor 36. During surface shape measurement, the signal acquisition unit 44 performs the following actions: acquiring the X-direction position detection result D1 of the displacement detector 20 from the position detection sensor 18 and outputting the X-direction position detection result D1 to the storage controller 48; and acquiring the displacement detection result D2 of the contact 34 from the displacement detection sensor 36 and outputting the displacement detection result D2 to the storage controller 48.

[0077] The image acquisition unit 46 is a connection interface connected to the camera 22. During surface shape measurement, the image acquisition unit 46 repeatedly acquires captured images 38 from the camera 22 and outputs the captured images 38 to the storage controller 48.

[0078] Figure 3 The illustration schematically shows saved data 51 stored in data storage 50 by storage controller 48. For example... Figure 3 And the aforementioned Figure 2 As shown, data storage 50 corresponds to the storage unit of the subject matter of this disclosure and is any of a variety of known storage media (memory, storage device, etc.) capable of persistently (temporarily) storing data.

[0079] During surface shape measurement, the storage controller 48 stores the saved data 51 in the data storage 50. During surface shape measurement, the saved data 51 is obtained by continuously storing in a correlated manner the X-direction position detection result D1, displacement detection result D2, and captured image 38 obtained by using the synchronization signal CL to synchronize three actions.

[0080] Specifically, each time the three actions are performed synchronously using the synchronization signal CL, the storage controller 48 causes the data storage 50 to store the X-direction position detection result D1 and displacement detection result D2 input from the position detection sensor 18 and displacement detection sensor 36 via the signal acquisition unit 44, and the captured image 38 input from the camera 22 via the image acquisition unit 46 in an associated manner. Therefore, each time the three actions are performed, the X-direction position detection result D1, displacement detection result D2, and captured image 38 are repeatedly stored in the data storage 50 in an associated state.

[0081] return Figure 2 The signal generator 52 references the stored data 51 in the data storage 50 to generate the displacement of the contact 34 in the Z direction relative to each X-direction position of the displacement detector 20 (contact 34) (i.e., the displacement detection signal D3 indicating the surface shape of surface Wa), and outputs the displacement detection signal D3 to the low-pass filter 54. The signal generator 52 can generate the displacement detection signal D3 by directly and continuously obtaining the X-direction position detection result D1 and the displacement detection result D2 from the signal acquisition unit 44 during surface shape measurement, and output the signal to the low-pass filter 54.

[0082] The low-pass filter 54 applies a low-pass filter to the displacement detection signal D3 output from the signal generator 52 based on a preset cutoff value, and removes high-frequency noise from the displacement detection signal D3. The displacement detection signal D3 output from the low-pass filter 54 is input to the display controller 56.

[0083] Display controller 56 causes monitor 27 to display the displacement detection signal D3 input from low-pass filter 54. In response to a specified operation input to operation unit 25 (mentioned later), display controller 56 causes monitor 27 to display the captured image 38 corresponding to the specified operation.

[0084] Figure 4 This is a diagram used to illustrate the display of the captured image 38 on the monitor 27 in response to a specified operation. For example... Figure 4 The symbol 4A in the above refers to and is the same as the one mentioned above. Figure 2 As shown, the operation unit 25 accepts input from the operator to specify an arbitrary position SP on the waveform of the displacement detection signal D3 displayed on the monitor 27. Therefore, for example, when the waveform of the displacement detection signal D3 on the monitor 27 includes an abnormal waveform ER, the operator can specify the abnormal waveform ER as the specified position SP.

[0085] like Figure 4As indicated by symbol 4B, firstly, based on the specified operation of the operation unit 25 for a specified position SP, the display controller 56 determines the X-direction position of the displacement detector 20 corresponding to the specified position SP. Next, based on the determined X-direction position, the display controller 56 references the data storage 50 and obtains the captured image 38 corresponding to the X-direction position from the stored data 51.

[0086] like Figure 4 As indicated by symbol 4C, in addition to the displacement detection signal D3, the display controller 56 causes the monitor 27 to display the captured image 38 obtained from the saved data 51. Therefore, the operator can verify the captured image 38 corresponding to the specified position SP. The captured image 38 corresponding to the specified position SP described herein refers to the captured image 38 taken by the camera 22 in synchronization with the displacement detector 20's detection of the X-direction position corresponding to the specified position SP.

[0087] When the display controller 56 causes the monitor 27 to display the waveform of the displacement detection signal D3 together with the captured image 38, the unit causes the monitor 27 to display the cursor Cu indicating the specified position SP on the waveform of the displacement detection signal D3 in an overlay manner.

[0088] Figure 5 This is a diagram used to illustrate the display switching of captured image 38 on monitor 27 in response to an operation to change the specified position SP. (See diagram for example.) Figure 5 As indicated by symbol 5A, when a specified position change operation C1 for moving the cursor Cu (specified position SP) in the X direction is input to the operation unit 25, the display controller 56 re-determines the X-direction position of the displacement detector 20 corresponding to the moved cursor Cu. Then, as... Figure 5 As indicated by symbol 5B, based on the re-determination result of the X-direction position of displacement detector 20, display controller 56 obtains a captured image 38 corresponding to the X-direction position from the saved data 51.

[0089] like Figure 5 As indicated by symbol 5C, the display controller 56 then updates the captured image 38 displayed on the monitor 27 based on the captured image 38 obtained from the saved data 51. In the following text, each time a specified position change operation C1 is performed for the cursor Cu (specified position SP), the X-direction position of the displacement detector 20 is re-determined, the captured image 38 is obtained from the saved data 51, and the updated display of the captured image 38 on the monitor 27 is repeatedly performed. Therefore, the operator can thus verify the captured image 38 corresponding to the desired position of the cursor Cu (specified position SP).

[0090] Each time the cursor Cu is moved, a coupled image (so-called panoramic image) can be generated that couples the captured images 38 before and after the specified position SP indicated by the cursor Cu, and this coupled image can be displayed on the monitor 27. Instead of displaying the captured image 38 and the displacement detection signal D3 on the monitor 27 simultaneously, either one of them can be displayed selectively.

[0091] [Operation of the First Embodiment]

[0092] Figure 6 This is a flowchart illustrating the process of measuring the shape of the surface Wa of a workpiece W by a surface shape measuring device 10, according to the method for controlling a shape measuring device based on the subject matter of this disclosure. Figure 6 As shown, the operator places the workpiece W on the measuring stage 12 and brings the distal end of the contact 34 into contact with the surface Wa, and then performs the measurement start operation via the operation unit 25. In response to this operation, the drive controller 40 drives the detector moving mechanism 16 and moves the displacement detector 20 in the X direction (step S1). Therefore, the contact 34 tracks the surface Wa in the X direction.

[0093] In response to the start of the measurement operation, the synchronization controller 42 outputs a synchronization signal CL to the position detection sensor 18, the displacement detection sensor 36, and the camera 22 (step S2; corresponding to the synchronization control steps in this disclosure). Thus, three actions are performed synchronously: detection of the X-direction position of the displacement detector 20 by the position detection sensor 18 (step S3A), detection of the displacement of the contact point 34 by the displacement detection sensor 36 (step S3B), and imaging of the contact point 34 by the camera 22 (step S3C). Step S3A corresponds to the position detection step in this disclosure, step S3B corresponds to the displacement detection step in this disclosure, and step S3C corresponds to the imaging step in this disclosure.

[0094] Next, the X-direction position detection result D1 detected by the position detection sensor 18 and the displacement detection result D2 detected by the displacement detection sensor 36 are input to the storage control 48 via the signal acquisition unit 44. The captured image 38 taken by the camera 22 is input to the storage control 48 via the image acquisition unit 46. As described above. Figure 3 As shown, the storage controller 48 then stores the X-direction position detection result D1, displacement detection result D2, and captured image 38 obtained through the three actions synchronized together in the storage data 51 in an associated manner (step S4).

[0095] Subsequently, the process from steps S2 to S4 is repeated until the movement of the displacement detector 20 is completed (step S5). Therefore, during the surface shape measurement, the three actions are synchronously repeated together according to the synchronization signal CL, and each time the three actions are performed, the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 are repeatedly stored in the storage data 51 in a correlated state.

[0096] Figure 7 This is a flowchart illustrating the process by which the surface shape measuring device 10 displays the displacement detection signal D3 and captures the image 38. (See attached flowchart.) Figure 7 As shown, after completing the shape measurement of surface Wa, the operator performs an operation to display the displacement detection signal D3 on the operation unit 25, and then the signal generator 52 references the saved data 51 and generates the displacement detection signal D3. A low-pass filter is applied to the displacement detection signal D3 through a low-pass filter 54, and then the signal is input to the display controller 56. The display controller 56 causes the monitor 27 to display the low-pass filtered displacement detection signal D3 (step S10).

[0097] After displaying the displacement detection signal D3 on monitor 27, as described above... Figure 4 As shown, the operator inputs a specified operation to the operation unit 25 at any specified position SP (e.g., any point in the abnormal waveform ER) in the displacement detection signal D3 on the specified monitor 27 (step S11). In response to this operation, the display controller 56 determines the X-direction position of the displacement detector 20 corresponding to the specified position SP (step S12) and obtains the captured image 38 corresponding to the X-direction position from the saved data 51 (step S13).

[0098] Next, the display controller 56 causes the monitor 27 to display the displacement detection signal D3 and the captured image 38 obtained from the saved data 51, and displays the cursor Cu on the waveform of the displacement detection signal D3 in a superimposed manner (step S14). Therefore, when the operator designates the abnormal waveform ER as a designated position SP, based on the captured image 38 corresponding to the designated position SP, the operator can easily determine whether the abnormal waveform ER is caused by a foreign object 59 attached to the surface Wa or a scratch on the surface Wa.

[0099] Next, as mentioned above Figure 5As shown, the operator performs a specified position change operation C1 on the cursor Cu through the operation unit 25, and repeatedly executes the aforementioned steps S12 to S14, thereby allowing the monitor 27 to display a captured image 38 (step S15) corresponding to the position of the cursor Cu (specified position SP) that has been changed. Therefore, the operator can verify the captured images 38 before and after the abnormal waveform ER, which can easily detect the cause of the abnormal waveform ER.

[0100] [Beneficial effects of the first embodiment]

[0101] As described above, according to the first embodiment, during surface shape measurement, three actions (X-direction position detection, contact point 34 displacement detection, and contact point 34 imaging) are performed synchronously and repeatedly. Therefore, each time these three actions are performed, the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 can be stored in the storage data 51 in a correlated manner. As a result, the operator can verify the captured image 38 corresponding to the desired position on the waveform of the displacement detection signal D3. Therefore, the cause of anomalies in the shape measurement of surface Wa can be detected effectively and easily.

[0102] [Second Embodiment]

[0103] Figure 8 This is a block diagram showing the configuration of the control device 28 of the surface shape measuring device 10 according to the second embodiment. Figure 9 This is a diagram illustrating the waveform of the displacement detection signal D3 displayed on the monitor 27 and the captured image 38 according to the second embodiment. Note that, except for the method of displaying the displacement detection signal D3 on the monitor 27, the surface shape measuring device 10 according to the second embodiment has a configuration substantially the same as that of the first embodiment. Therefore, parts that are functionally or component-like in the first embodiment are assigned the same symbols, and their descriptions are omitted.

[0104] According to the first embodiment described above, the display controller 56 causes the monitor 27 to display the displacement detection signal D3, which has been low-pass filtered by the low-pass filter 54. In this case, it is difficult to determine the projected shape (erroneous shape) of the waveform caused by foreign objects 59 or the like attached to the surface Wa from the waveform of the displacement detection signal D3.

[0105] like Figure 8 and Figure 9 As indicated by symbol 9A, the display controller 56 in the second embodiment has a superimposed display mode for displaying the displacement detection signal D3 before and after low-pass filtering by the low-pass filter 54 on the monitor 27 in a superimposed manner. Therefore, the error shape that was difficult to determine due to low-pass filtering can be easily determined.

[0106] like Figure 9 As shown by symbols 9B and 9C, the cursor Cu (specified position SP) is set at the location where the erroneous shape appears on the waveform of the displacement detection signal D3, allowing the monitor 27 to display the captured image 38 in its vicinity. Therefore, the cause of the anomaly in the shape measurement of surface Wa can be identified more accurately, which improves the reliability of the shape measurement.

[0107] [Third Embodiment]

[0108] Figure 10 This is a block diagram illustrating the configuration of the control device 28 of the surface shape measuring device 10 according to the third embodiment. The surface shape measuring device 10 according to the third embodiment determines whether an anomaly exists in the shape measurement of surface Wa based on the displacement detection signal D3. When the device determines that an anomaly exists in the shape measurement, it performs a remeasurement of the shape of surface Wa.

[0109] Except that the control device 28 includes an abnormal waveform detector 60, an anomaly determination unit 62, a remeasurement controller 64, and a notification controller 66, the surface shape measuring device 10 according to the third embodiment has a configuration that is substantially the same as that in the embodiments described above. Therefore, parts that have the same function or components as those in the embodiments described above are assigned the same symbols, and their descriptions are omitted.

[0110] The abnormal waveform detector 60 detects the abnormal waveform ER from the waveform of the displacement detection signal D3 generated by the signal generator 52.

[0111] Figure 11 This is a diagram used to illustrate the first to third examples of abnormal waveforms ER detected by the abnormal waveform detector 60.

[0112] like Figure 11 As indicated by the symbol XIA, in the first example, the abnormal waveform detector 60 determines the presence or absence of an abnormal waveform ER based on the displacement detection signal D3, depending on whether the displacement of the contact 34 in the Z direction is greater than a predetermined abnormality determination threshold ET or falls within the normal range NR (below the abnormality determination threshold ET). When the abnormal waveform detector 60 determines that an abnormal waveform ER exists, the unit outputs range information 67 (corresponding to the first range of the subject matter of this disclosure) indicating the X-direction position range of the abnormal waveform ER to the abnormality determination unit 62.

[0113] like Figure 11As indicated by symbol XIB, in the second example, if the displacement of contact 34 in the Z direction exceeds the anomaly determination threshold ET for a predetermined period of time or longer, the anomaly waveform detector 60 determines the presence of an abnormal waveform based on the displacement detection signal D3 and outputs information 67 about the range of the abnormal waveform ER to the anomaly determination unit 62. This prevents the erroneous detection of the presence of the abnormal waveform ER due to noise in the displacement detection signal D3.

[0114] like Figure 11 As indicated by the symbol XIC, in the third example, the abnormal waveform detector 60 calculates the moving average MA of the displacement of the contact 34 in the Z direction based on the displacement detection signal D3. When the deviation of the displacement from the moving average MA exceeds the anomaly determination threshold ET, the state returns to its original state (the state at the anomaly determination threshold ET), the abnormal waveform detector 60 determines that an abnormal waveform ER has appeared, and outputs the range information 67 of the abnormal waveform ER to the anomaly determination unit 62. Therefore, the drift of the displacement detection signal D3 can be determined from the abnormal waveform ER, which can improve the detection accuracy of the abnormal waveform detector 60.

[0115] Figure 12 This is a diagram used to illustrate the process by which the anomaly determination unit 62 determines whether an anomaly exists or not in the shape measurement of surface Wa. For example... Figure 12 As shown, the anomaly determination unit 62 corresponds to the first anomaly determination unit of this disclosure subject matter. Based on the range information 67 of the anomaly waveform ER input from the anomaly waveform detector 60, it refers to the saved data 51 (captured image 38) and determines whether an anomaly exists or does not exist in the shape measurement of surface Wa.

[0116] Specifically, based on the range information 67 input from the abnormal waveform detector 60, the anomaly determination unit 62 obtains a captured image 38 from the stored data 51 corresponding to the X-direction position (range) indicated by the range information 67 of the displacement detector 20, that is, a captured image 38 corresponding to the position where the abnormal waveform ER appears. Then, the anomaly determination unit 62 applies image analysis to the captured image 38 corresponding to the position where the abnormal waveform ER appears using a known method (pattern matching, etc.), and determines whether an anomaly exists or does not exist in the shape measurement of surface Wa based on whether the captured image 38 includes an object 59 or a scratch (not shown).

[0117] return Figure 10When the anomaly determination unit 62 determines that an anomaly exists in the shape measurement, the remeasurement controller 64 drives the detector moving mechanism 16 through the drive controller 40, and moves the displacement detector 20 in the X direction, thereby performing a remeasurement of the area to be measured on the surface Wa by retracing along the X direction through the contact point 34. Therefore, similar to the embodiments described above, the aforementioned three actions are repeated synchronously, and each time these three actions are performed, the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 are stored in the storage data 51 in a correlated manner. According to this embodiment, the entire area of ​​the area to be measured on the surface Wa is remeasured. Alternatively, based on the range information 67, only the location where the abnormal waveform ER appears in the area to be measured can be remeasured.

[0118] When the remeasurement controller 64 performs a remeasurement, the generation of the displacement detection signal D3 by the signal generator 52, the detection of the abnormal waveform ER by the abnormal waveform detector 60, and the determination by the anomaly determination unit 62 are repeatedly performed. Thereafter, each time the anomaly determination unit 62 determines that an anomaly exists in the shape measurement, the remeasurement performed by the remeasurement controller 64, the generation of the displacement detection signal D3 by the signal generator 52, the detection of the abnormal waveform ER by the abnormal waveform detector 60, and the determination by the anomaly determination unit 62 are repeatedly performed within a specific number of times, as described later.

[0119] Figure 13 This is a diagram illustrating a notification of warning information 68 made by the notification controller 66 according to a third embodiment. Figure 13 And the aforementioned Figure 10 As shown, the notification controller 66, together with the monitor 27, constitutes the notification unit of the subject matter of this disclosure. When the number of remeasurements performed by the remeasurement controller 64 exceeds a predetermined certain number, the notification controller 66 causes the monitor 27 to display a warning message 68 indicating this fact. Thus, the operator can be notified that an abnormality has occurred in the shape measurement of the workpiece W (surface Wa). Instead of having the monitor 27 display the warning message 68, the monitor 27 can display the warning message 68, and this warning message 68 can be audio output via a speaker (not shown) (corresponding to the notification unit).

[0120] Figure 14 This is a flowchart illustrating the remeasurement process and warning process performed by the surface shape measuring device 10 according to the third embodiment. The process for measuring the shape of the surface Wa of the workpiece W in steps S1 to S5 is the same as described above. Figure 6 The process in the first embodiment shown is similar. Therefore, a detailed description is omitted here.

[0121] After completing the first shape measurement of surface Wa, signal generator 52 references and saves data 51 to generate displacement detection signal D3 (step S21). After generating displacement detection signal D3, as described above... Figure 11 As shown, the abnormal waveform detector 60 detects the abnormal waveform ER in the waveform of the displacement detection signal D3, and when the displacement detection signal D3 includes the abnormal waveform ER, the unit outputs the range information 67 to the abnormal determination unit 62 (step S22).

[0122] Next, based on the range information 67 input from the abnormal waveform detector 60, the anomaly determination unit 62 obtains the anomaly determination information from the stored data 51 that corresponds to the anomaly as described above. Figure 12 The captured image 38 corresponds to the position of the abnormal waveform ER shown (step S23). Then, the anomaly determination unit 62 uses a known image analysis method to determine whether the captured image 38 includes an image of a foreign object 59 or a scratch (not shown), thus determining whether an anomaly exists or does not exist in the shape measurement of surface Wa (step S24).

[0123] When the anomaly determination unit 62 determines that an anomaly exists in the shape measurement ("Yes" in step S24; "No" in step S25), the remeasurement controller 64 drives the detector moving mechanism 16 through the drive controller 40 to perform a remeasurement of the shape of surface Wa (step S26). Therefore, the aforementioned three actions are repeated synchronously, and each time the three actions are performed, the X-direction position detection result D1, displacement detection result D2, and captured image 38 can be stored in the storage data 51 in a correlated manner.

[0124] After the remeasurement is completed, steps S21 to S24 are repeated. When the anomaly determination unit 62 determines that there is an anomaly in the shape measurement and the number of remeasurements is less than the specified number, steps S26 and S21 to S24 are repeated again ("Yes" in step S24; "No" in step S25). Thereafter, the above process is repeated each time the anomaly determination unit 62 determines that there is an anomaly in the shape measurement, until the number of remeasurements reaches the specified number. Even if an erroneous shape caused by a foreign object 59 attached to surface Wa appears in the displacement detection signal D3, the repeated execution of remeasurements reduces the risk of using an erroneous shape as the measurement result.

[0125] When the number of remeasurements exceeds a certain limit, the controller 66 is notified to display a warning, which causes the monitor 27 to display the warning as described above. Figure 13 The warning message 68 shown indicates the fact ("Yes" in step S25; step S27). Therefore, the operator can be notified that an anomaly has occurred in the shape measurement of surface Wa. As a result, the operator can identify the occurrence of the anomaly and quickly perform verification of the factors contributing to the anomaly.

[0126] As described above, according to the third embodiment, the presence or absence of anomalies in the shape measurement of surface Wa is determined based on the waveform of the displacement detection signal D3, and when an anomaly occurs in the shape measurement, a re-measurement is performed, which can more accurately determine whether the anomaly is caused by the actual shape of surface Wa or by external environmental factors (foreign objects 59, etc.).

[0127] [Fourth Embodiment]

[0128] Figure 15 This is a block diagram illustrating the configuration of the control device 28 of the surface shape measuring device 10 according to the fourth embodiment. The anomaly determination unit 62 in the third embodiment above determines whether an anomaly exists or not in the shape measurement of surface Wa based on the displacement detection signal D3. The anomaly determination unit 62 in the fourth embodiment determines whether an anomaly exists or not in the shape measurement based on the captured image 38 stored in the saved data 51.

[0129] like Figure 15 As shown, the surface shape measuring device 10 according to the fourth embodiment has a configuration substantially the same as that of the surface shape measuring device 10 in the third embodiment. Therefore, parts that have the same functions and components as those in the third embodiment described above are assigned the same symbols, and their descriptions are omitted.

[0130] Figure 16 This is a diagram illustrating the process by which the anomaly determination unit 62 in the fourth embodiment (corresponding to the second anomaly determination unit of the subject matter of this disclosure) determines whether an anomaly exists or not in the shape measurement of surface Wa.

[0131] like Figure 16 And the aforementioned Figure 15 As shown, in the fourth embodiment, the anomaly determination unit 62 applies image analysis individually to each captured image 38 stored in the saved data 51 using a known method similar to that in the third embodiment. Specifically, for each captured image 38 in the saved data 51, the anomaly determination unit 62 determines whether an anomaly exists in the shape measurement based on whether the captured image 38 includes an object 59 or a scratch (not shown). Therefore, similar to the third embodiment, when the anomaly determination unit 62 determines that an anomaly exists in the shape measurement, a remeasurement is performed by the remeasurement controller 64. The entire area to be measured on the surface Wa can be remeasured. Alternatively, based on the range information 67A described later, only the location where the abnormal waveform ER appears in the area to be measured can be remeasured.

[0132] When the anomaly determination unit 62 determines that an anomaly exists in the shape measurement of surface Wa, the unit refers to the stored data 51 and generates range information 67A (corresponding to the second range of the subject matter of this disclosure) indicating the X-direction position range of the displacement detector 20 corresponding to the captured image 38 determined to have a shape measurement anomaly. The anomaly determination unit 62 outputs the range information 67A to the display controller 56.

[0133] Furthermore, when the anomaly determination unit 62 determines that an anomaly exists in the shape measurement of surface Wa, it extracts data of the abnormal waveform ER corresponding to the range information 67A from the displacement detection signal D3 generated by the signal generator 52, based on the aforementioned range information 67A. Additionally, based on the image analysis results of the captured image 38 determined to have a shape measurement anomaly, the anomaly determination unit 62 generates anomaly detail information 69 indicating details of the shape measurement anomaly (e.g., attachment of foreign matter 59, etc.). The anomaly determination unit 62 generates a warning message 70 including the range information 67A, the abnormal waveform ER data, the anomaly detail information 69, and the captured image 38 determined to have a shape measurement anomaly (see...). Figure 18 ), and output warning message 70 to notification controller 66.

[0134] Figure 17 This is a diagram illustrating an example of the displacement detection signal D3 displayed on monitor 27 when the anomaly determination unit 62 determines that an anomaly exists in the shape measurement of surface Wa. (See diagram for example.) Figure 17 As shown, when the anomaly determination unit 62 determines that there is an anomaly in the shape measurement, the display controller 56 causes the monitor 27 to display the displacement detection signal D3.

[0135] At this time, based on the range information 67A input from the anomaly determination unit 62, the display controller 56 displays the waveform region WR corresponding to the range information 67A in a recognizable manner (e.g., by color) within the waveform of the displacement detection signal D3 to be displayed on the monitor 27. Therefore, the location and range of the range information 67A, indicating an anomaly in the shape measurement, can be communicated to the operator. There are no particular limitations on the display mode, as long as the waveform region WR is recognizable.

[0136] Figure 18 This is a diagram illustrating a notification of warning information 70 made by the notification controller 66 according to the fourth embodiment. Figure 18As shown, when the anomaly determination unit 62 determines that an anomaly exists in the shape measurement of surface Wa, the notification controller 66 in the fourth embodiment controls the display controller 56 and causes the monitor 27 to display the warning information 70 based on the warning information 70 input from the anomaly determination unit 62. Therefore, the operator can be notified of the occurrence of the shape measurement anomaly of surface Wa, the location (range) and details of the anomaly, the anomaly waveform ER, and the captured image 38 at the location of the anomaly.

[0137] As described above, according to the fourth embodiment, based on the captured image 38 (saved data 51) stored in the data storage 50, it can be determined whether an anomaly exists or not in the shape measurement. Therefore, similar beneficial effects as in the third embodiment can be achieved.

[0138] [Fifth Embodiment]

[0139] Figure 19 A roundness measuring device 100 corresponding to the shape measuring device of the subject matter of this disclosure is schematically shown. For example... Figure 19 As shown, the roundness measuring device 100 (including a cylindrical shape measuring device) uses contact 132 to measure the roundness of the outer peripheral surface Wb (outer peripheral surface and inner peripheral surface) of a workpiece W having a solid cylindrical shape or a hollow cylindrical shape. Note that the outer peripheral surface Wb corresponds to the surface to be measured.

[0140] The roundness measuring device 100 includes a measuring table 102, a rotary table 104, a motor 106, a rotation angle detection sensor 108, a column 110, a horizontal arm 112, a displacement detector 114, a camera 116, an operation unit 118, a monitor 120, and a control device 122.

[0141] The measuring stage 102 is a support platform (base) that supports each component of the roundness measuring device 100. The rotary table 104 and the column 110 are disposed on the upper surface of the measuring stage 102. The motor 106 and the rotation angle detection sensor 108 are disposed in the measuring stage 102.

[0142] The workpiece W is mounted on the upper surface of the rotary table 104. The rotary table 104 is rotatably mounted on the measuring table 102 with a rotation center RC (rotation axis) parallel to the Z direction.

[0143] The motor 106, corresponding to the relative movement mechanism of the subject matter of this disclosure, rotates the rotary table 104 about the rotation center RC under the control of the control device 122, which will be described later. By rotating the rotary table 104 as described above, the displacement detector 114 (contact 132) can move relative to the outer peripheral surface Wb in the circumferential direction (hereinafter referred to as the workpiece circumferential direction).

[0144] The rotation angle detection sensor 108 corresponds to the position detection sensor of the subject matter of this disclosure. For example, a rotary encoder is used. The rotation angle detection sensor 108 detects the rotation angle of the rotary table 104, which can detect the relative position of the displacement detector 114 with respect to the outer peripheral surface Wb in the circumferential direction of the workpiece. Then, the rotation angle detection sensor 108 outputs the rotation angle detection result Dθ of the rotary table 104 to the control device 122.

[0145] A column 110 is disposed on the upper surface of the measuring stage 102 at a position offset from the rotary table 104 in the X direction, and has a shape extending in the Z direction. The column 110 holds the horizontal arm 112 via a bracket (not shown) so that it can move freely in the Z and X directions. A displacement detector 114 is attached to the distal portion of the horizontal arm 112.

[0146] The displacement detector 114 includes an arm 130, a contact 132, and a displacement detection sensor 134. The arm 130 is supported freely on a pivot located at the displacement detector 114 and parallel to the Y direction.

[0147] Contact 132 is located at the distal end of arm 130 and contacts the outer peripheral surface Wb. Arm 130 swings, which allows contact 132 in this embodiment to shift in the X direction indicated by arrow AX in the figure. Rotary stage 104 and workpiece W rotate relative to displacement detector 114 via motor 106, thereby allowing contact 132 to track (scan) the outer peripheral surface Wb along the circumferential direction of the workpiece.

[0148] The displacement detection sensor 134 is, for example, a linear variable differential transformer or a scale-type sensor similar to the displacement detection sensor 36 in the above embodiments, and detects the displacement of the contact 132 in the X direction and outputs the displacement detection result D2 to the control device 122.

[0149] The camera 116 is mounted on the horizontal arm 112 and sequentially images the distal portion of the contact 132 (capturing moving images of the distal portion of the contact 132), and continuously outputs the captured images 38 of the contact 132 to the control device 122.

[0150] For example, keyboards, mice, operation panels, operation buttons, etc. are used as operation units 118 to accept various operations inputs from the operator.

[0151] The monitor 120 can be any type of display, such as a known liquid crystal display. The monitor 120 displays the displacement detection signal D3, which is the result of measuring the shape of the outer peripheral surface Wb, the captured image 38 of the camera 116, various setting screens, various operation screens, etc.

[0152] Control device 122 controls the operation of each unit of the roundness measuring device 100 as a whole. Control device 122 has a configuration substantially the same as that of control device 28 in the above embodiments, and synchronizes three actions: detection by rotation angle detection sensor 108, detection by displacement detection sensor 134, and imaging by camera 116. Furthermore, each time these three actions are performed synchronously, control device 28 stores data 50 (see...). Figure 2 The rotation angle detection result Dθ detected by the rotation angle detection sensor 108, the displacement detection result D2 detected by the displacement detection sensor 134, and the captured image 38 taken by the camera 116 are stored in an associated manner.

[0153] The control device 122 generates a displacement signal D3 in the X direction relative to each rotational angular position of the rotary table 104, that is, a displacement detection signal D3 indicating the surface shape (roundness) of the outer peripheral surface Wb, and displays the signal on the monitor 120. Furthermore, when a specified operation is performed via the operation unit 118 to specify any specified position SP in the displacement detection signal D3 displayed on the monitor 120, the control device 122 causes the monitor 120 to display a captured image 38 corresponding to the specified position SP.

[0154] As described above, the roundness measuring device 100 in the fifth embodiment also synchronously repeats these three actions. Therefore, each time these three actions are performed, the rotation angle detection result Dθ, the displacement detection result D2, and the captured image 38 can be stored in the storage data 51 in a correlated manner. As a result, advantageous effects similar to those in the aforementioned embodiments are achieved. Similar to the second embodiment described above, the displacement detection signal D3 before and after low-pass filtering can be displayed on the monitor 120. Furthermore, similar to the third and fourth embodiments described above, it is possible to determine whether an anomaly exists or not in the shape measurement of the outer peripheral surface Wb, and when an anomaly exists, re-measurement, notification, warning display, etc., can be performed.

[0155] Figure 20 This diagram illustrates the beneficial effects achieved by imaging the contact point 132 via camera 116 during the rotation of the rotary table 104 and the workpiece W. (See diagram for example.) Figure 20As shown, if the foreign object 59 is attached to the outer peripheral surface Wb, the image of the foreign object 59 moves in the direction indicated by arrow AY in each captured image 38 taken at each rotation angle relative to the rotary table 104, etc. At this time, the image of the foreign object 59 is focused at the position where it contacts the contact point 132, and conversely, is out of focus at the position where it is offset laterally (Y direction) from the contact point 132. The amount of blur in the image of the foreign object 59 is the equivalent amount of blur in the reference contact point 132 at the corresponding lateral position. Therefore, based on the size (blur amount) of the image of the foreign object 59 in each captured image 38, the position (rotation angle) of the contact point 132 beyond the foreign object 59 can be determined.

[0156] [Modification Example]

[0157] According to the above embodiment, each time the three actions are performed, the associated X-direction position detection result D1, displacement detection result D2, and captured image 38 storage data 51 are repeatedly stored in the data storage 50. However, the subject matter of this disclosure is not limited thereto. For example, the storage data 51 obtained each time the three actions are performed can be temporarily stored in a buffer memory (e.g., a ring buffer memory, etc.). Only a portion of the storage data 51 temporarily stored in the buffer memory (e.g., only the storage data item 51 determined by the anomaly determination unit 62 to have an anomaly) can be selectively stored in the data storage 50.

[0158] [Modification Example 1]

[0159] Figure 21 This is a block diagram illustrating a modified example of a surface shape measuring apparatus according to a third embodiment of the subject matter of this disclosure. Figure 21 Only the storage control within the configuration elements of the surface shape measuring device 10 is shown. In the following description, only the storage control is described, and descriptions of other components are omitted.

[0160] like Figure 21 As shown, the surface shape measuring device 10 according to Modified Example 1 includes ring-shaped buffer memories 200A to 200C.

[0161] The ring buffer memories 200A to 200C correspond to the buffer memory, which is a configuration element of the storage cell of the subject matter of this disclosure, and are storage media (memory, level, etc.) capable of storing data in a so-called ring buffer form.

[0162] The ring buffer memory 200A to 200C includes n (n>1) storage areas A1 to An.

[0163] Each time these three actions are performed, the signal acquisition unit 44 will sequentially store the X-direction position detection result D1 and displacement detection result D2 obtained from the position detection sensor 18 and displacement detection sensor 36 into the storage areas A1 to An of the ring buffer memory 200A and 200B.

[0164] Each time three actions are performed, the image acquisition unit 46 stores the captured image 38 obtained from the camera 22 sequentially in the storage areas A1 to An of the ring buffer memory 200C.

[0165] After storing the data items (D1, D2, and 38) in storage area An in the ring buffers 200A to 200C, the subsequently obtained data items (D1, D2, and 38) are stored in storage area A1 (rewritten and stored).

[0166] As described above, the data items (D1, D2, and 38) obtained each time the three actions are performed are stored in the ring buffer memory 200A to 200C within the most recent specific time period.

[0167] The signal generator 52 references the X-direction position detection result D1 and displacement detection result D2 temporarily stored in the ring buffer memory 200A and 200B, and generates the displacement of the contact 34 in the Z-direction relative to each X-direction position of the displacement detector 20 (contact 34), that is, the displacement detection signal D3 indicating the surface shape of the surface Wa.

[0168] The abnormal waveform detector 60 detects the abnormal waveform ER from the waveform of the displacement detection signal D3 generated by the signal generator 52. When the abnormal waveform detector 60 determines that the abnormal waveform ER exists, the unit outputs range information 67 (first range) indicating the X-direction position range of the abnormal waveform ER to the abnormal determination unit 62 (see [link]). Figure 11 ).

[0169] Based on the range information 67 input from the abnormal waveform detector 60, the anomaly determination unit (first anomaly determination unit) 62 obtains the captured image 38 (i.e., the captured image 38 corresponding to the position (range) of the X-direction indicated by the range information 67 of the displacement detector 20) from the ring buffer 200C, and applies image analysis to the image. When the anomaly determination unit 62 determines that there is an anomaly in the shape measurement of surface Wa, the unit then refers to the ring buffers 200A to 200C and generates range information 67 indicating the range of the X-direction position of the displacement detector 20 corresponding to the captured image 38 determined to have an anomaly in the shape measurement, and outputs this information to the storage controller 48.

[0170] The storage controller 48 stores and saves data 51 in the data storage 50, wherein the X-direction position detection result D1, displacement detection result D2 and captured image 38 corresponding to the range information 67 are associated among the data items temporarily stored in the ring buffers 200A to 200C.

[0171] According to Modified Example 1, when the cause of an anomaly in the shape measurement of the object is detected, the saved data 51 stored in the data storage 50 can be minimized. Therefore, the cost of the surface shape measurement device 10 can be reduced.

[0172] [Modified Example 2]

[0173] Figure 22 This is a block diagram illustrating a modified example of a surface shape measuring apparatus according to a fourth embodiment of the subject matter of this disclosure. Figure 22 Only the storage control within the configuration elements of the surface shape measuring device 10 is shown. In the following description, only the storage control is described, and descriptions of other components are omitted.

[0174] like Figure 22 As shown, similar to Modified Example 1, the surface shape measuring device 10 according to Modified Example 2 includes annular buffer memories 200A to 200C. The X-direction position detection result D1, the displacement detection result D2, and the captured image 38 are temporarily stored in the annular buffer memories 200A to 200C.

[0175] The anomaly determination unit (second anomaly determination unit) 62 applies image analysis to the captured image 38 temporarily stored in the ring buffer memory 200C. When the anomaly determination unit 62 determines that there is an anomaly in the shape measurement of surface Wa, the unit refers to the ring buffer memories 200A to 200C, generates range information 67A indicating the range of the X-direction position of the displacement detector 20 corresponding to the captured image 38 determined to have an anomaly in the shape measurement, and outputs this information to the storage controller 48.

[0176] The storage controller 48 stores and saves data 51 in the data storage 50, wherein the X-direction position detection result D1, displacement detection result D2 and captured image 38 corresponding to the range information 67A are associated among the data items temporarily stored in the ring buffers 200A to 200C.

[0177] According to Modified Example 2, when the cause of an anomaly in the shape measurement of the object is detected, the saved data 51 stored in the data storage 50 can be minimized. Therefore, the cost of the surface shape measurement device 10 can be reduced.

[0178] [other]

[0179] In the above embodiments, the data storage 50 is included within the control device 28. The data storage 50 may be located separately from the surface shape measuring device 10 (e.g., an external server or database).

[0180] According to the first to fourth embodiments described above, the displacement detector 20 moves in the X direction during the shape measurement of surface Wa performed by the surface shape measuring device 10. Alternatively, the measuring stage 12 and the workpiece W can move in the X direction. That is, the method of movement is not particularly limited as long as the displacement detector 20 and the workpiece W can move relative to each other in the X direction. Instead of rotating the workpiece W in the fifth embodiment, the displacement detector 114 can rotate around the rotation center RC.

[0181] In the above embodiments, the XY plane is parallel to the horizontal plane, but it may not be parallel to the horizontal plane.

[0182] The static surface shape measuring device 10 has been illustrated and described according to the first to fourth embodiments described above. The subject matter of this disclosure also applies to the handheld surface shape measuring device 10.

[0183] In the above embodiments, the detection performed by the position detection sensor 18, the detection performed by the displacement detection sensor 36, and the imaging performed by the camera 22 are synchronized based on the synchronization signal CL output from the synchronization controller 42. Alternatively, any one of the position detection sensor 18, the displacement detection sensor 36, and the camera 22 can be used as the synchronization controller 42. In this case, the operating timing of any one of the position detection sensor 18, the displacement detection sensor 36, and the camera 22 can be used as the synchronization signal CL (trigger), and the other two components operate according to this signal.

[0184] In the above embodiments, the surface shape measuring device 10 and the roundness measuring device 100 have been illustrated and described by way of example. The subject matter of this disclosure is also applicable to various shape measuring devices that perform shape measurements of a workpiece or any of the various surfaces to be measured by using contacts that contact the workpiece (the object to be measured).

[0185] List of reference numerals

[0186] 10: Surface shape measuring device; 12: Measuring stage; 14: Column; 16: Detector moving mechanism; 17: Holder; 18: Position detection sensor; 18a: Linear scale; 18b: Reader head; 20: Displacement detector; 22: Camera; 25: Operating unit; 27: Monitor; 28: Control device; 30: Swing pivot; 32: Arm; 32a: Distal end of arm; 32b: Proximal end of arm; 34: Contact point; 36: Displacement detection sensor; 38: Image capture; 4 0: Drive controller; 42: Synchronization controller; 44: Signal acquisition unit; 46: Image acquisition unit; 48: Storage controller; 50: Data storage; 51: Data saving; 52: Signal generator; 54: Low-pass filter; 56: Display controller; 59: Foreign object; 60: Abnormal waveform detector; 62: Abnormal determination unit; 64: Remeasurement controller; 66: Notification controller; 67: Range information; 67A: Range information; 68: Warning information; 69: Abnormal details Section information; 70: Warning message; 100: Roundness measuring device; 102: Measuring table; 104: Rotary table; 106: Motor; 108: Rotation angle detection sensor; 110: Column; 112: Horizontal arm; 114: Displacement detector; 116: Camera; 118: Operating unit; 120: Monitor; 122: Control device; 130: Arm; 132: Contact; 134: Displacement detection sensor; 200A: Ring buffer memory; 200B: Ring buffer memory; 200C: Ring buffer memory; C1: Specified position change operation; CL: Synchronization signal; Cu: Cursor; D1: X-direction position detection result; D2: Displacement detection result; D3: Displacement detection signal; Dθ: Rotation angle detection result; ER: Waveform abnormality; ET: Abnormal determination threshold; MA: Moving average line; NR: Normal range; RC: Rotation center; SP: Specified position; W: Workpiece; WR: Waveform area; Wa: Surface; and Wb: Outer peripheral surface.

Claims

1. A shape measuring device for measuring the shape of an object by using contacts, the contacts being in contact with the object being measured, the shape measuring device comprising: A displacement detector is configured to detect the displacement of the contact point; The relative movement mechanism is configured to move the displacement detector relative to the object being measured and to allow the contact to track the surface of the object being measured. A position detection sensor is configured to detect the relative position of the displacement detector with respect to the object being measured; A camera is configured to image the contact point and output a captured image of the contact point; A synchronization controller is configured to synchronously and repeatedly perform three actions while the relative movement mechanism is performing relative movement, the actions including the detection of the relative position by the position detection sensor, the detection of the displacement by the displacement detector, and imaging by the camera; The storage controller is configured to store in a storage unit, in association, the relative position detected by the position detection sensor, the displacement of the contact point detected by the displacement detector, and the captured image taken by the camera, each time the three actions are executed together synchronously; A signal generator is configured to generate a displacement detection signal indicating the displacement of the contact at each relative position; A display controller is configured to cause a monitor to display the displacement detection signal generated by the signal generator; as well as The operating unit is configured to accept a specified operation at any specified position of the displacement detection signal displayed on the monitor. The display controller obtains the captured image from the storage unit, the captured image corresponding to a specified position specified by the specified operation of the operation unit, and the display controller causes the monitor to display the captured image.

2. The shape measuring device according to claim 1, wherein, The synchronization controller outputs a synchronization signal to the position detection sensor, the displacement detector, and the camera to synchronize the three actions.

3. The shape measuring device according to claim 1 or 2, wherein, Each time the specified position is changed, the display controller repeatedly performs the following operation: obtains the captured image from the storage unit; And the captured image is displayed on the monitor.

4. The shape measuring device according to claim 1 or 2, further comprising a low-pass filter configured to apply low-pass filtering to the displacement detection signal generated by the signal generator. in, The display controller has an overlay display mode for displaying the displacement detection signal before and after the low-pass filtering on the monitor.

5. The shape measuring device according to claim 1 or 2, further comprising: An abnormal waveform detector is configured to detect abnormal waveforms of the displacement detection signal generated by the signal generator. as well as A first anomaly determination unit is configured to determine whether an anomaly exists or not in the shape measurement based on the captured image in the storage unit and corresponding to a first range, wherein the first range is assumed to be the range of relative positions of the abnormal waveform detected by the abnormal waveform detector.

6. The shape measuring device according to claim 5, wherein, The first anomaly determination unit determines whether an anomaly exists in the shape measurement based on whether the captured image contains or does not contain foreign objects.

7. The shape measuring device according to claim 5, further comprising: The remeasurement controller is configured to perform a remeasurement that drives the relative movement mechanism and retracks the surface under test via the contacts. Specifically, each time the first anomaly determination unit determines that an anomaly exists, the remeasurement controller performs the remeasurement, the signal generator generates the displacement detection signal, the anomaly waveform detector detects the anomaly waveform, and the first anomaly determination unit determines whether an anomaly exists in the shape measurement.

8. The shape measuring device according to claim 7 further includes a notification unit configured to issue a warning message when the number of remeasurements exceeds a predetermined specific number.

9. The shape measuring device according to claim 5, wherein, The storage controller temporarily stores data in the buffer memory of the storage unit. The data includes the relative position detected by the position detection sensor, the displacement of the contact point detected by the displacement detector, and the captured image taken by the camera. The storage controller stores data that is temporarily stored in the buffer memory in the data storage of the storage unit, and the data that is determined to be abnormal by the first anomaly determination unit is also stored as abnormal data.

10. The shape measuring device according to claim 1, wherein, The relative movement mechanism causes the displacement detector to move relative to the object being measured in the horizontal direction.

11. The shape measuring device according to claim 1, wherein, While the contact point is in contact with the outer peripheral surface of the object being measured, the relative movement mechanism causes the object being measured and the displacement detector to rotate relative to each other around a rotation center. The object being measured has a solid cylindrical shape or a hollow cylindrical shape.

12. A shape measuring device for measuring the shape of an object by using contact points, wherein the contact points are in contact with the object being measured, the shape measuring device comprising: A displacement detector is configured to detect the displacement of the contact point; A relative movement mechanism is configured to move the displacement detector relative to the object being measured, and to allow the contact point to track the surface of the object being measured. A position detection sensor is configured to detect the relative position of the displacement detector with respect to the object being measured; A camera is configured to image the contact point and output a captured image of the contact point; The synchronization controller is configured to simultaneously perform three actions while the relative movement mechanism is performing relative movement: detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and imaging by the camera. The storage controller is configured to store in a storage unit, in association, the relative position detected by the position detection sensor, the displacement of the contact point detected by the displacement detector, and the captured image taken by the camera, each time the three actions are executed together synchronously; An anomaly determination unit is configured to determine whether an anomaly exists or does not exist in the shape measurement in each captured image stored in the storage unit; A signal generator is configured to generate a displacement detection signal indicating the displacement of the contact at each relative position; as well as A display controller is configured to cause a monitor to display the displacement detection signal generated by the signal generator. The display controller references the storage unit and detects a range, which is a range of relative positions corresponding to the captured image that is determined to be abnormal by the anomaly determination unit. The display controller causes the monitor to identifiablely display a waveform region corresponding to the range of relative positions in the waveform of the displacement detection signal displayed on the monitor.

13. The shape measuring device according to claim 12, wherein, The anomaly determination unit determines whether an anomaly exists in the shape measurement based on the presence or absence of foreign objects in each captured image stored in the storage unit.

14. The shape measuring device according to claim 12 or 13 further includes a notification unit configured to issue a notification of warning information when the anomaly determination unit determines that an anomaly exists.

15. The shape measuring device according to claim 12 or 13, wherein, The storage controller temporarily stores data in the buffer memory of the storage unit. The data includes the relative position detected by the position detection sensor, the displacement of the contact point detected by the displacement detector, and the captured image taken by the camera. The storage controller stores data that is temporarily stored in the buffer memory in the data storage of the storage unit, and the data that is determined to be abnormal by the anomaly determination unit is also stored as abnormal data.

16. The shape measuring device according to claim 12, wherein, The relative movement mechanism causes the displacement detector to move relative to the object being measured in the horizontal direction.

17. The shape measuring device according to claim 12, wherein, While the contact point is in contact with the outer peripheral surface of the object being measured, the relative movement mechanism causes the object being measured and the displacement detector to rotate relative to each other around a rotation center. The object being measured has a solid cylindrical shape or a hollow cylindrical shape.

18. A method for controlling a shape measuring device, the shape measuring device comprising a displacement detector and a relative movement mechanism, the displacement detector including a contact point in contact with a measured object, the relative movement mechanism being configured to move the displacement detector relative to the measured object and allow the contact point to track a surface to be measured of the measured object, and the shape measuring device performing a shape measurement of the measured object by using the contact point, the method comprising: The position detection step detects the relative position of the displacement detector with respect to the object being measured. The displacement detection step involves the displacement detector detecting the displacement of the contact point. The imaging step involves imaging the contact point and outputting a captured image of the contact point. The synchronous control step involves simultaneously and repeatedly performing three actions while the relative movement mechanism is performing relative movement. These actions include: detecting the relative position in the position detection step, detecting the displacement in the displacement detection step, and imaging in the imaging step. The storage control step, each time the three actions are executed synchronously together, stores the relative position detected in the position detection step, the displacement of the contact point detected by the displacement detector, and the captured image taken in the imaging step in a related manner in the storage unit; The signal generation step generates a displacement detection signal that indicates the displacement of the contact point at each relative position; A first display control step involves causing a monitor to display the displacement detection signal generated in the signal generation step; and The operation steps include accepting a specified operation at any specified position in the displacement detection signal displayed on the monitor; and The second display control step involves obtaining the captured image from the storage unit, the captured image corresponding to a specified position specified by the specified operation in the operation step, and causing the monitor to display the captured image.

19. A method for controlling a shape measuring device, the shape measuring device including a displacement detector and a relative movement mechanism, the displacement detector including a contact point in contact with a measured object, the relative movement mechanism being configured to move the displacement detector relative to the measured object and allow the contact point to track a surface to be measured of the measured object, and the shape measuring device performing a shape measurement of the measured object by using the contact point, the method comprising: The position detection step detects the relative position of the displacement detector with respect to the object being measured. The displacement detection step involves the displacement detector detecting the displacement of the contact point. The imaging step involves imaging the contact point and outputting a captured image of the contact point. The synchronous control step involves simultaneously executing three actions while the relative movement mechanism is performing relative movement: the relative position detection in the position detection step, the displacement detection in the displacement detection step, and the imaging in the imaging step. The storage control step, each time the three actions are executed synchronously together, stores the relative position detected in the position detection step, the displacement of the contact point detected by the displacement detector, and the captured image taken in the imaging step in a related manner in the storage unit; An anomaly determination step involves determining whether an anomaly exists or does not exist in the shape measurement for each captured image stored in the storage unit; The signal generation step generates a displacement detection signal that indicates the displacement of the contact point at each relative position; The first display control step causes the monitor to display the displacement detection signal generated in the signal generation step, and The second display control step involves referencing the storage unit and detecting a range, which is a range of relative positions corresponding to the captured image that was determined to be abnormal in the anomaly determination step, and causing the monitor to identifiablely display a waveform region corresponding to the range of relative positions in the waveform of the displacement detection signal displayed on the monitor.

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