一种基于空间成像系统的高精度光斑测试系统及方法

By using a spot measurement method based on a space imaging system, and utilizing a lens combination and a CCD camera to measure the far-field divergence angle of the spot, the problem of inaccurate measurement of the emitted spot in optical communication is solved, high-precision spot measurement is achieved, and the coupling efficiency and signal-to-noise ratio of the optical communication system are improved.

CN115628686BActive Publication Date: 2026-07-17LIOBATE TECH LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
LIOBATE TECH LTD
Filing Date
2022-09-27
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies make it difficult to accurately measure the size of the emitted light spot, resulting in low coupling efficiency, high energy consumption, and reduced signal-to-noise ratio in optical communication systems. This is mainly due to the mismatch between the emitted light spot and the designed light spot caused by differences in materials, processes, and environment.

Method used

A high-precision spot testing method based on a spatial imaging system is adopted. By selecting appropriate lens combinations and calibration processes, the far-field divergence angle of the spot is measured using a CCD camera, and the Gaussian spot size is derived. This includes the parameter configuration of high-magnification objectives, Fourier lenses, imaging lenses, and CCD cameras. Stray light is filtered out by combining variable apertures and Kohler lenses.

Benefits of technology

It enables precise measurement of light spots of micron-scale light-emitting elements, with a measurement range covering sub-millimeter to sub-micron and wavelengths covering visible light to near-infrared. The measurement error is within 5%, and it is applicable to both active and passive optical devices, improving the accuracy of optical research and engineering design.

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Abstract

本发明提供一种基于空间成像系统的高精度光斑测试系统及方法,系统包括:宽谱光源、光纤、光源聚焦透镜、科勒透镜、分束器、高倍率物镜、样品、六轴载物台、傅里叶透镜、可变光阑、二次聚焦透镜、成像透镜、可变中性密度滤光片、CCD相机、计算机。测试时将样品放置在高精度六轴载台上,首先利用宽谱照明光对样品成反射实像的方法寻找出光口,然后再通过傅里叶成像将样品自身发光光斑的远场像投射到相机上,最后对图像进行数据处理得到样品光斑发散角后推算出光斑尺寸。本发明广泛适用于微米尺度的发光元件的光斑测量,如光纤、激光器、光芯片等,测量误差在5%以内,且测试波长可覆盖可见光至近红外波段。
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