一种加热盘对中调节装置及调节方法
By combining the robotic arm with the tooling, the chamber reference tooling, and the heating plate reference tooling with the automatic teaching system, the error problem of the heating plate's centering adjustment under vacuum was solved, achieving high-precision and high-efficiency multi-chamber adjustment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- PIOTECH CO LTD
- Filing Date
- 2022-10-20
- Publication Date
- 2026-07-17
AI Technical Summary
Existing methods for adjusting the heating plate are performed in an atmospheric environment, which leads to errors in the adjustment under vacuum. The operator's technique has a significant impact, making it difficult to achieve precise positioning, and the adjustment time for multi-chamber equipment is long.
By employing a robotic arm with adaptable tooling, a chamber reference tooling, and a heating plate reference tooling, combined with an automated teaching system, positioning information is collected through a wafer-type center calibration chip to achieve vacuum-based centering adjustment of the heating plate and the chamber.
It improves the adjustment accuracy and efficiency of heating plate alignment, and can adjust multiple chambers at once under vacuum, reducing the rework time.
Smart Images
Figure CN115642107B_ABST