Fluid actuator

Abstract

The present application relates to the technical field of fluid control, in particular to a fluid actuator, comprising a plurality of variable-volume chambers, the chambers are communicated through communication chambers, the chambers and the communication chambers jointly form a closed working chamber, the working chamber is filled with fluid working medium, at least one of the plurality of chambers forms an actuating chamber, the rest of the chambers are execution chambers, the actuating chamber is correspondingly provided with an actuating unit, the actuating unit is used to drive the actuating chamber to change the volume and make the fluid working medium flow into or out of each execution chamber, so as to control the volume change of the execution chamber, the volume of the plurality of chambers can be driven to change in a specific rule or time sequence by fewer or even a single actuating unit, and then a predetermined actuating effect is provided to the fluid or components outside the chambers, compared with multiple chambers and multiple actuating units, the structure is more compact, and it is easy to realize higher degree of thinning and miniaturization.

Description

Technical Field

[0001] This invention relates to the field of fluid control technology, and in particular to a fluid actuator. Background Technology

[0002] With the development of technology, fluid control technology is showing an increasingly diversified trend in applications, expanding from its initial uses in industrial production, biomedicine, and healthcare products to electronic heat dissipation, portable wearable devices, and even cutting-edge VR, AR, and MR technologies. Fluid actuators, as key components of fluid control technology, play an increasingly important role. Fluid actuators utilize the interaction and constraints of various factors, such as the historical process of unsteady fluid flow and the phase difference of flow parameters in time and space, to achieve flow control and improve flow characteristics.

[0003] Array-type multi-point controlled fluid actuators are a typical structure for fluid actuators or fluid pumps, typically containing multiple interconnected cavities, each with a corresponding actuation unit. For example, in a piezoelectric-driven array-type distributed controlled fluid actuator, the actuation unit is a piezoelectric oscillator. The vibration and deformation of the piezoelectric oscillator causes a change in the volume of the corresponding cavity. In a closed flow control system, the volume change of the corresponding cavity can be controlled by controlling the excitation of each piezoelectric oscillator as needed, thereby outputting actuation force and displacement. In an open flow control system, such as a peristaltic pump, by matching the timing of the excitation of multiple piezoelectric oscillators, the timing of the volume changes of multiple corresponding pump cavities is created, thereby achieving continuous unidirectional pumping of fluid. For example, patent number US20020184907A1, "MEMS HEAT PUMPS FOR INTEGRATED CIRCUITHEAT," is relevant. The structure described in "DISSIPATION" involves cavities and connecting channels between them built on an integrated circuit board. Each cavity is covered with a piezoelectric vibrator. The continuous, sequential vibration of the multi-cavity piezoelectric vibrators directly drives the circulation of the heat dissipation medium inside the heat dissipation channel. Similarly, patent CN110639075A, "A Piezoelectric Peristaltic Pump for Blood Transport," also includes multiple pump cavities and corresponding piezoelectric vibrators for each cavity. The difference is that the piezoelectric vibrators do not directly drive the fluid within the pump cavities. Instead, a medium cavity is placed between the piezoelectric vibrators and the pump cavities, separated by a flexible membrane. The vibration of the piezoelectric vibrators causes volumetric flow of the medium within the medium cavity, leading to deformation of the flexible membrane and transmission of pressure. By matching the sequential excitation of multiple piezoelectric vibrators, the sequential deformation of the corresponding flexible membrane is caused, simultaneously transmitting pressure and promoting the sequential change of volume in the corresponding multiple cavities, thereby achieving continuous pumping of the liquid. The above-mentioned structural forms all contain multiple cavities and multiple actuation units. Each actuation unit requires a separate excitation control. First, both the structure and the actuation process control are relatively complex. At the same time, the size is limited by the multiple actuation units, and the degree of thinning and miniaturization is limited. Second, the manufacturing cost is high and the power consumption is large. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the problems of complex structure and actuation process control, low degree of thinness and miniaturization, high cost and high power consumption of the array-type multi-point control fluid actuator in the prior art, and to provide a fluid actuator.

[0005] The technical solution adopted by this invention to solve its technical problem is as follows: a fluid actuator includes multiple variable-volume cavities, which are connected by a connecting cavity. The cavities and the connecting cavity together form a closed fluid cavity, which is filled with a fluid working medium. At least one of the multiple cavities forms an actuation cavity, and the remaining cavities are execution cavities, with the number of execution cavities being ≥1. Each actuation cavity is correspondingly provided with an actuation unit, which is used to drive the actuation cavity to produce a volume change, thereby causing the fluid working medium to flow into or out of each execution cavity, in order to control the volume change of the execution cavity. It can drive the volume of multiple cavities to change in a specific pattern or sequence with fewer or even a single actuation unit, thereby providing a predetermined actuation effect on the fluid or components outside the cavity. Compared with multi-cavity multi-actuation unit, the structure is more compact and easier to achieve a higher degree of thinness and miniaturization. The actuation process is simple to control. By matching the number and arrangement of actuation cavities and execution cavities, it is easier to achieve array-type multi-point control. It is suitable for current VR, AR, MR haptic feedback, micro-robot gripping, walking, and handling processes, as well as the construction of micro-valve containing time-sequential actions.

[0006] The outer wall of the actuation cavity is partially or entirely formed as a soft membrane, which is deformable as the fluid flows into or out of the actuation cavity.

[0007] The outer wall of the cavity is further configured as a soft membrane, which is deformable as the fluid flows into or out of the cavity.

[0008] The actuation cavity is further connected to the execution cavity via a connecting cavity.

[0009] It further includes a connection between two adjacent execution cavities via a connecting cavity.

[0010] The actuation unit may be a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator, or a mechanical actuator.

[0011] The fluid working medium within the volumetric cavity may be compressible or incompressible.

[0012] The beneficial effects of this invention are: the fluid actuator provided by this invention, (1) It can enable fewer or even a single actuation unit to drive the volume of multiple cavities to change in a specific pattern or sequence, thereby providing a predetermined actuation effect on the fluid or components outside the cavity. When a specific sequence is formed on a single path or multiple paths, it can be used to build a fluid pump. (2) Compared with multi-cavity multi-actuator units, the structure is more compact, making it easier to achieve a higher degree of thinness and miniaturization, and the actuation process is simple to control; (3) By matching the number and arrangement of actuation chambers and execution chambers, it is easier to realize array-type multi-point control, which is applicable to the flow control processes of current VR, AR, MR haptic feedback, micro-robot clamping, walking, and handling, as well as the construction of micro-valve containing time-sequenced actions. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0014] Figure 1 This is a schematic diagram of the series-type fluid actuator in Embodiment 1 of the present invention; Figure 2 This is a schematic diagram of another series-type fluid actuator in Embodiment 1 of the present invention; Figure 3 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (a). Figure 4 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (b). Figure 5 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (c). Figure 6 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (d). Figure 7 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (e). Figure 8 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (f). Figure 9 This is a schematic diagram of the (g) state of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention; Figure 10 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (h). Figure 11 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (i). Figure 12 This is a schematic diagram of the volume change of each cavity during the cyclic operation of the fluid actuator in Embodiment 1 of the present invention, under state (j). Figure 13This is a schematic diagram of the parallel fluid actuator in Embodiment 2 of the present invention; Figure 14 This is a schematic diagram of the structure of the multipath fluid actuator in Embodiment 3 of the present invention; Figure 15 This is a schematic diagram of the array-type multi-point controlled fluid actuator in Embodiment 4 of the present invention; Figure 16 This is a schematic diagram of the multi-cavity series fluid actuator in Embodiment 5 of the present invention; Figure 17 This is a schematic diagram of the multi-actuation cavity parallel fluid actuator in Embodiment 5 of the present invention; Figure 18 This is a schematic diagram of the structure of the multi-cavity array type multi-point controlled fluid actuator in Embodiment 5 of the present invention; Figure 19 This is a schematic diagram of the structure of a fluid actuator in Embodiment Six of the present invention, in which the actuation cavity itself can provide an actuation effect; Figure 20 This is a schematic diagram of the structure of the fluid actuator capable of bidirectional actuation control in Embodiment 7 of the present invention.

[0015] In the diagram: 1. Cavity, 11. Actuation cavity, 12. Execution cavity, 2. Connecting cavity, 3. Soft membrane, 4. Cavity cavity. Detailed Implementation

[0016] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention, and therefore only show the components relevant to the invention.

[0017] like Figure 1This is a schematic diagram of the structure of the present invention. A fluid actuator includes multiple variable-volume cavities 1, which are connected by a connecting cavity 2. The cavities 1 and the connecting cavity 2 together form a closed fluid cavity 4, which is filled with a fluid working medium. At least one of the multiple cavities 1 forms an actuation cavity 11, and the remaining cavities 1 are execution cavities 12. The number of execution cavities 12 is ≥1. Each actuation cavity 11 is correspondingly provided with an actuation unit. The actuation unit is used to drive the actuation cavity 11 to produce a volume change, thereby causing the fluid working medium to flow into or out of each execution cavity 12, so as to control the volume change of the execution cavity 12. It can realize that fewer or even a single actuation unit drives the volume of multiple cavities to change in a specific pattern or sequence, thereby providing a predetermined actuation effect to the fluid or components outside the cavity. Compared to multi-cavity multi-actuator units, it has a more compact structure, making it easier to achieve a higher degree of thinness and miniaturization. The actuation process is simple to control. By matching the number and arrangement of actuation cavities and execution cavities, it is easier to achieve array-type multi-point control. It is suitable for current VR, AR, MR haptic feedback, micro-robot gripping, walking, and handling flow control processes, as well as the construction of micro-valve containing time-sequential actions. The present invention provides a fluid actuator that enables fewer or even a single actuation unit to drive the volume of multiple cavities to change in a specific pattern or sequence, thereby providing a predetermined actuation effect on the fluid or components outside the cavities. When a specific sequence is formed on a single path or multiple paths, it can be used to construct a fluid pump.

[0018] The actuation unit causes the volume of the actuation cavity to change under the excitation. The change in the volume of the actuation cavity causes the fluid working medium in the volume cavity to flow and transmit pressure, thereby driving the volume of the execution cavity to change. By adjusting the excitation of the actuation unit, the flow resistance of the connecting cavity, and the size of the volume cavity, each volume cavity is caused to change in a specific pattern or sequence, thereby forming a predetermined actuation effect.

[0019] The outer wall of the execution cavity 12 is partially or entirely formed as a soft membrane 3, and the outer wall of the cavity 1 is partially or entirely formed as a soft membrane 3. The soft membrane 3 can deform as the fluid working medium flows into or out of the cavity 1 in which it is located.

[0020] The actuation cavity 11 is connected to the execution cavity 12 through the connecting cavity 2. Two adjacent execution cavities 12 are connected through the connecting cavity 2. The soft membrane 3 can deform as the fluid flows into or out of the execution cavity 12 in which it is located.

[0021] The actuation unit provides power for the volume change of the actuation cavity 11. That is, the actuation unit causes the volume of the actuation cavity 11 to change under the excitation. The actuation unit is fixedly connected to the actuation cavity 11, or the actuation unit is formed as part of the actuation cavity 11, or the actuation unit is arranged near or around the actuation cavity 11. The actuation unit is a piezoelectric actuator, electrostatic actuator, electromagnetic actuator, shape memory metal actuator, gas actuator, thermal actuator or mechanical actuator.

[0022] When the actuation unit is a piezoelectric actuation, shape memory metal actuation, or mechanical actuation, the driving force needs to be applied to the actuation cavity 11 through direct contact with the structural components. In this case, the actuation unit needs to be fixedly connected to the actuation cavity 11, or the actuation unit can even be part of the actuation cavity 11. When the actuation unit is an electrostatic actuation, electromagnetic actuation, gas actuation, or thermal actuation, the driving force does not need to be transmitted through direct contact with the structural components. In this case, the actuation unit can be arranged near or around the actuation cavity. It should be noted that the form of the actuation unit, in addition to the above-mentioned types, also includes any other driving form that can cause the component to move or deform. Its purpose is mainly to cause the volume of the actuation cavity to change.

[0023] The actuation cavity 11 undergoes a volume change under the driving force of the actuation unit. It can either provide an actuation effect on external fluids or components, just like the execution cavity 12 connected to it, in which case part or all of the outer wall of the cavity 1 (including the actuation cavity 11 and the execution cavity 12) forms a soft membrane 3; or it can simply serve as a condition for each execution cavity 12 connected to it to provide an actuation effect on external fluids or components, without participating in the actuation itself. In this case, part or all of the outer wall of at least one execution cavity 12 forming the cavity 1 forms a soft membrane 3. In short, at least two of the cavities 1 need to provide an actuation effect on external fluids or components to form an effective specific pattern or sequence.

[0024] In addition, the material of the soft membrane 3 can be a metal membrane, a polymer membrane, or a composite material membrane composed of metal and polymer. There are no restrictions here. The characteristic of the soft membrane is that it is easy to deform under pressure.

[0025] During the process where the volume change of the actuation chamber 11 causes the fluid working medium in the volume chamber 4 to flow, the connecting chamber 2 between each volume chamber 1 itself has flow resistance. By adjusting characteristic parameters such as the cross-sectional shape, size, and length of the connecting chamber 2, the flow resistance of the connecting chamber 2 can be controlled. Simultaneously, a flow resistance regulator can be installed in the connecting chamber 2 to further control the flow resistance between each volume chamber 1. And / or by rationally configuring the size of each volume chamber 1 and the ease of its volume change (specifically, the ease of soft membrane deformation and deformation displacement), the volume change of each volume chamber 1 can be achieved according to a specific pattern or sequence, thereby forming a predetermined actuation effect.

[0026] The fluid working medium filled in the volumetric cavity 4 is compressible, weakly compressible, or incompressible, and can be high-pressure oil, water, air, or others, without limitation. The fluid working medium in the volumetric cavity 4 flows under the driving force of the actuation unit. This process is accompanied by pressure transmission, thereby causing changes in the volume of each volumetric cavity connected by the flow channel.

[0027] A fluid actuator of the present invention can be configured with different numbers and connection forms of actuation chambers 11 and execution chambers 12 depending on the application scenario. Embodiments of the present invention are described in detail below, with examples of the embodiments shown in the accompanying drawings. Throughout the drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. Example 1:

[0028] like Figures 1-12 As shown, this embodiment uses a cavity 1 containing one actuating cavity 11 and three execution cavities 12 as an example for explanation. The outer wall surrounding the execution cavity 12 is partially or entirely formed as a soft membrane 3. The three connecting cavities 2, from left to right, are the first connecting cavity, the second connecting cavity I, and the second connecting cavity II. The actuating cavity 11 is connected to its adjacent execution cavity 12 through the first connecting cavity, and adjacent execution cavities 12 are connected to each other through the second connecting cavity I and the second connecting cavity II in sequence, forming a single connection path. Its working process is as follows: When the actuation unit is excited, causing the volume of the actuation cavity 11 to decrease, the working fluid flows out of the actuation cavity 11, causing the soft membrane 3 of each execution cavity 12 to expand. Since the volume of each execution cavity 12 is variable and each connecting cavity has a pre-set flow resistance, the expansion speed of the soft membrane 3 of each execution cavity 12 is different. Specifically, the speed difference is determined by the ease of expansion of the soft membrane 3 of the execution cavity 12, the deformation displacement, and the flow resistance of the working fluid flowing through the connecting cavity.

[0029] In this embodiment, Figure 3In the initial state, the three actuation chambers 12 are, from left to right, actuation chamber I, actuation chamber II, and actuation chamber III. When the working fluid enters actuation chamber I, because the soft membrane 3 is designed to deform easily, and the flow resistance of the second connecting chamber I is designed to be relatively large, the working fluid tends to drive the soft membrane 3 of actuation chamber I to expand. At this time, less working fluid flows through the second connecting chamber I. When the soft membrane 3 of actuation chamber I expands to a certain extent, the difficulty of expansion increases, leading to a continuous increase in pressure within the chamber, thus reducing the amount of working fluid flowing through the second connecting chamber I. The increase in the amount of working fluid, specifically the increase in the amount of working fluid flowing into actuator chamber II, creates a dynamic change in the flow distribution of the working fluid. This results in a situation where the instantaneous flow rate of the working fluid entering actuator chamber I is much greater than that entering actuator chamber II. Consequently, the expansion rate of the soft membrane 3 in actuator chamber I is greater than that in actuator chamber II, and so on. The expansion rate of the soft membrane 3 in actuator chamber II is greater than that in actuator chamber III. Therefore, it can be observed that the soft membranes 3 in the three actuator chambers 12 expand sequentially according to the order in which the working fluid flows in. Figures 4-6 .

[0030] When the actuation unit is excited, causing the volume of the actuation cavity 11 to increase, the working fluid flows back to the actuation cavity 11, causing the soft membrane 3 of each execution cavity 12 to contract. Due to the variable volume of each execution cavity 12 and the pre-set flow resistance of each connecting cavity, the contraction speed of the soft membrane 3 in each execution cavity 12 is different. Similar to the expansion process, this speed difference is determined by the ease of contraction of the soft membrane 3 in the execution cavity 12, the deformation displacement, and the flow resistance of the working fluid flowing through the connecting cavity. In this embodiment, the working fluid in the execution cavity I, which is closest to the actuation cavity 11, flows back to the actuation cavity 11 first. Since the soft membrane 3 is designed to be relatively easy to deform, and the flow resistance of the second connecting cavity I is designed to be relatively large, the working fluid tends to drive the soft membrane 3 of the execution cavity I to contract. At this time, less working fluid flows back through the second connecting cavity I. When the soft membrane 3 of the execution cavity I contracts to a certain extent, the difficulty of contraction of the soft membrane 3 increases, causing the pressure in the cavity to continuously decrease, thereby increasing the amount of working fluid flowing through the second connecting cavity I. This means that the amount of working fluid flowing back from actuator chamber II increases. This dynamic change in the flow distribution of the working fluid objectively creates an effect where the instantaneous flow rate of the working fluid returning from actuator chamber I is much greater than that returning from actuator chamber II. Consequently, the contraction speed of the soft membrane 3 in actuator chamber I is greater than that in actuator chamber II, and so on. The contraction speed of the soft membrane 3 in actuator chamber II is greater than that in actuator chamber III. Thus, it can be observed that the soft membranes 3 in the three actuator chambers 12 contract sequentially according to the order of the working fluid return. Figures 7-9 .

[0031] When the actuation unit is excited by a periodic signal, causing the volume of the actuation cavity to change periodically, the soft diaphragms of actuation cavity I, actuation cavity II, and actuation cavity III expand and contract periodically in sequence, as shown below. Figures 6-12 .

[0032] By adjusting the ease of deformation of the soft membrane 3 surrounding each actuation cavity 12, the deformation displacement, and the flow resistance of the fluid working medium flowing through the connecting cavity, the deformation speed and displacement differences of the soft membrane 3 in each actuation cavity 12 can be adjusted, so that each actuation cavity 12 can produce volume changes in a specific pattern or sequence, thereby forming a predetermined actuation effect. Example 2:

[0033] like Figure 13 As shown, the structural principle of this embodiment is basically the same as that of Embodiment 1. The difference is that the actuation cavity 11 is connected to each execution cavity 12 through multiple first connecting cavities. Its working process is as follows: When the actuation unit is excited, causing the volume of the actuation chamber 11 to change, the working fluid flows out of or back into the actuation chamber 11, causing the soft membrane 3 of each actuation chamber 12 to expand or contract. Because the volume of each actuation chamber 12 is variable and each first connecting chamber has a pre-set flow resistance, the expansion or contraction speed of the soft membrane 3 in each actuation chamber 12 differs. Specifically, this speed difference is determined by the ease of expansion of the soft membrane 3 in the actuation chamber 12, the deformation displacement, and the flow resistance of the working fluid flowing through the connecting chamber. By adjusting the ease of deformation of the soft membrane 3 surrounding each actuation chamber 12, the deformation displacement, and the flow resistance of the working fluid flowing through each first connecting chamber, the difference in the deformation speed and displacement of the soft membrane 3 in each actuation chamber 12 can be adjusted, enabling each actuation chamber 12 to produce volume changes according to a specific pattern or sequence, thereby achieving a predetermined actuation effect. Example 3:

[0034] like Figure 14 As shown, the structural principle of this embodiment is basically the same as that of Embodiments 1 and 2. The difference is that the actuation cavity 11 and the execution cavity 12, as well as the execution cavities 12, are connected sequentially through the connecting cavity to form multiple connecting paths, thus constituting a multi-path multi-point actuation control form. Example 4:

[0035] like Figure 15 As shown, this embodiment is basically the same as the structure and principle of embodiments one to three. The difference is that the execution cavities 12 located on multiple connecting paths are connected through the connecting cavities to form an array-type multi-point actuation control form. Example 5:

[0036] like Figures 16-18As shown, the structural principle of this embodiment is basically the same as that of embodiments one to four. The difference is that at least two of the cavities 1 are formed as actuation cavities 11. When the actuation efficiency of a single actuation cavity 11 is insufficient, the actuation efficiency can be improved by setting multiple actuation cavities 11. Example 6:

[0037] like Figure 19 As shown, the structural principle of this embodiment is basically the same as that of embodiments one to five. The difference is that the outer wall of the cavity 1 (including the actuation cavity 11 and the execution cavity 12) is partially or entirely formed as a soft membrane 3. That is, the actuation cavity 11 itself can provide actuation effect to external fluids or components. Example 7:

[0038] like Figure 20 As shown, this embodiment is basically the same as the structure and principle of embodiments one to six. The difference is that one or more actuation cavities 11 are set at a position adjacent to the execution cavity III. The one or more actuation cavities 11 introduced are connected to the execution cavity III through the first connecting cavity, thereby realizing bidirectional actuation.

[0039] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A fluid actuator, characterized in that, It includes multiple variable volume cavities (1), which are connected by a connecting cavity (2). The cavities (1) and the connecting cavity (2) together form a closed fluid cavity (4). The fluid cavity (4) is filled with a fluid working medium. At least one of the multiple cavities (1) forms an actuation cavity (11), and the remaining cavities (1) are execution cavities (12). The number of execution cavities (12) is ≥1. Each actuation cavity (11) is provided with an actuation unit. The actuation unit is used to drive the actuation cavity (11) to produce a volume change, thereby causing the fluid working medium to flow into or out of each execution cavity (12) to control the volume change of the execution cavity (12). The outer wall of the cavity (1) is partially or entirely formed as a soft membrane (3), which can deform as the fluid flows into or out of the cavity (1). The actuation cavity (11) is connected to the execution cavity (12) through the connecting cavity (2); or, the actuation cavity (11) is connected to the execution cavity (12) through the connecting cavity (2) and two adjacent execution cavities (12) are connected through the connecting cavity (2); The connecting cavity (2) has a set flow resistance by means of a built-in flow resistance regulator or by adjusting the shape or size of its cross section; When the actuation unit is excited, it causes the volume of the actuation cavity (11) to decrease, and the working fluid flows out from the actuation cavity (11), causing the soft membrane (3) of each execution cavity (12) to expand. Since the volume of each execution cavity (12) is variable and each connecting cavity (2) has a pre-set flow resistance, the expansion speed of the soft membrane (3) of each execution cavity (12) is different. When the actuation unit is excited, it causes the volume of the actuation chamber (11) to increase. The working fluid flows back to the actuation chamber (11), causing the soft membrane (3) of each execution chamber (12) to contract. Since the volume of each execution chamber (12) is variable and each connecting chamber has a pre-set flow resistance, the contraction speed of the soft membrane (3) of each execution chamber (12) is different. The actuation unit drives the volume of multiple cavities (1) to change in a specific pattern or sequence, thereby providing a predetermined actuation effect to the fluid or components outside the cavities (1).

2. The fluid actuator as claimed in claim 1, characterized in that: The actuation unit is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator, or a mechanical actuator.

3. The fluid actuator as claimed in claim 1, characterized in that: The fluid working medium in the volumetric cavity (4) can be compressible or incompressible.

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