Integrated measurement systems and methods for synchronous and accurate measurement of material properties.
The integrated measurement system enables accurate and reliable measurement of material and device properties in high-noise and interference environments, solving the problem of noise and interference that is difficult to mitigate in existing technologies and improving the accuracy and consistency of the measurement system.
CN115667946BActive Publication Date: 2026-05-26LAKE SHORE CRYOTRONICS INC
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- LAKE SHORE CRYOTRONICS INC
- Filing Date
- 2021-04-27
- Publication Date
- 2026-05-26
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Figure CN115667946B_ABST
Abstract
A measurement system includes: a source unit for providing a source signal to a sample; a voltage source and / or a current source; and a memory. The system further includes: a measurement unit configured to acquire a measurement signal from the sample that is responsive to the source signal; a voltage measurement unit, a current measurement unit, and / or a capacitance measurement unit; and the memory. The system also includes a control unit comprising a digital signal processing unit, a source converter, and a measurement converter. The system further includes: a synchronization unit configured to synchronize the clocks of the digital signal processing unit, the source converter, the measurement converter, the source unit, and the measurement unit; a calibration unit for calibrating aspects of the system including the control unit; and a reference voltage source configured to supply a common reference voltage to the control unit.
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