A mask and a method of manufacturing the same

Abstract

This invention relates to the field of display technology and discloses a photomask, comprising a photomask substrate, a metal strip snapped onto the inner side of the photomask substrate, the metal strip being fixed to the photomask substrate by resin, a coating layer on the photomask substrate, an effective graphic area, a graphic indication area, and a sensing area on the outer side of the photomask substrate. This invention enables rapid photomask fabrication, is simple in method, and uses convenient equipment, thereby effectively improving the photomask fabrication progress and efficiency. Furthermore, it reduces photomask costs while ensuring product performance, resulting in low fabrication costs.

Description

Technical Field

[0001] This invention relates to the field of display technology, and in particular to a photomask and its preparation method. Background Technology

[0002] With the development of science and technology, smart handheld electronic devices such as mobile phones and tablets are ubiquitous in our lives. These devices mostly use touchscreen displays for data acquisition and recognition for interaction. As an important tool for touchscreen display fabrication, the mask needs to have the following characteristics:

[0003] 1. It has good rigidity, and its own weight cannot cause deformation that would affect its performance and thus the pattern;

[0004] 2. Good flatness ensures that no refraction or diffuse reflection occurs after light is irradiated, so that the overall light transmittance is at a uniform level;

[0005] 3. High transmittance and low reflectance ensure high light transmittance, thereby extending the lifespan of the exposure lamp within a certain range;

[0006] 4. Thermal insulation performance: During continuous operation, the exposure lamp intermittently irradiates the mask substrate, preventing thermal expansion and contraction from affecting the pattern;

[0007] 5. Low expansion rate: When the temperature of the mask changes, the change in the mask itself due to thermal expansion and contraction will not affect the pattern.

[0008] Considering the above characteristics, existing photomask products are expensive and the substrate is specialized and cannot be recycled. Therefore, to reduce the cost of photomasks while ensuring product performance, we propose a photomask and its preparation method. Summary of the Invention

[0009] To address the technical problem of high prices for existing photomask products, this invention provides a photomask and its preparation method.

[0010] This invention is achieved using the following technical solution: a photomask, comprising a photomask substrate, a metal strip snapped onto the inner side of the photomask substrate, the metal strip being fixed to the photomask substrate with resin, a coating layer on the photomask substrate, an effective graphic area and a graphic indication area on the photomask substrate, and a sensing area on the outer side of the photomask substrate. The metal strip increases the strength of the photomask substrate, and the four corners of the photomask substrate are non-right angles to avoid collisions. The sensing area can identify whether a photomask is present and determine whether to expose it. After the light source illuminates the coating layer, the pattern can be accurately transferred to the photomask, and the unexposed parts can be cleaned away, thus completing the photomask fabrication.

[0011] A method for preparing a photomask further includes the following preparation steps:

[0012] S1: Make a groove on the back of the photomask substrate and put the metal strip into the groove;

[0013] S2: Use resin to seal the groove and use a polishing device to polish the resin to make the filled resin smooth. The resin is a transparent adhesive material.

[0014] S3: Apply a layer to the photomask substrate;

[0015] S4: Use a light source to illuminate the layer to obtain the desired pattern;

[0016] S5: Clean the photomask after irradiation using cleaning equipment, leaving the desired pattern on the photomask.

[0017] As a further improvement to the above solution, the cleaning equipment includes a fixed frame and a cleaning chamber fixed inside the fixed frame. A delivery pump is fixed to the outside of the cleaning chamber. The input end of the delivery pump is connected to a water inlet pipe, and the output end of the delivery pump is connected to a water outlet pipe. The end of the water outlet pipe away from the delivery pump extends into the interior of the cleaning chamber and is closed. The water outlet pipe located inside the cleaning chamber is fixed to the inner wall of the top of the cleaning chamber. Multiple nozzles with downward-facing output ends are installed on the water outlet pipe located on the inner wall of the cleaning chamber. Two mounting blocks are provided at each end of the cleaning chamber. One of the mounting blocks at each end of the cleaning chamber slides inside the cleaning chamber. Mounting grooves are opened on opposite sides of the two mounting blocks at both ends of the cleaning chamber. Openings are opened on both sides of the cleaning chamber. Loading blocks for closing adjacent openings are rotatably connected inside the mounting grooves. A sliding groove is opened on the side of the loading block away from the adjacent mounting block. A connecting sleeve is slidably connected inside the sliding groove outside the cleaning chamber. The internal thread of the connecting sleeve passes through... A screw is rotatably connected inside the sliding groove. A connecting block is slidably connected inside the sliding groove inside the cleaning chamber. A clamping plate is fixed between two mounting blocks at both ends of the cleaning chamber. A clamping plate is fixed on the outside of the connecting sleeve, above the clamping plate. The end of the clamping plate away from the connecting sleeve is fixed to the adjacent connecting block. Slots are opened on the opposite sides of the clamping plates. A drive column is fixed inside the loading block outside the cleaning chamber. The end of the drive column away from the loading block passes through the outside of the adjacent mounting block and is fixedly sleeved with a drive gear. A rack plate that meshes with the drive gear is provided on one side of the drive gear. A hydraulic cylinder is fixed on the mounting block near the rack plate. The piston end of the hydraulic cylinder is fixed to the adjacent rack plate. Through the operation of the cleaning equipment, the mask can be cleaned. During the cleaning process, the mask to be processed can be loaded quickly. During the cleaning process, the mask can be rotated to ensure full contact between the mask and the cleaning liquid.

[0018] As a further improvement to the above solution, a motor is fixed to one side of the mounting bracket, and an output shaft is driven to the output end of the motor. The end of the output shaft away from the motor is rotatably connected to the inner wall of the other side of the mounting bracket. Drive sleeves are embedded at both ends of the mounting block located outside the cleaning chamber. A lead screw with one end rotatably connected to the cleaning chamber is threaded through the internal thread of the drive sleeve, and the other end of the lead screw is rotatably connected to the mounting bracket. Sprockets are fixedly sleeved on the outer walls of the output shaft and the lead screw. Chain one is sleeved on the sprocket on one side of the cleaning chamber, and chain two is sleeved on the sprocket on the other side of the cleaning chamber. The sprocket on one side of the cleaning chamber meshes with chain one, and the sprocket on the other side of the cleaning chamber meshes with chain two. Through the coordinated operation of the above components, the mask loading assembly can be driven to move flexibly.

[0019] As a further improvement to the above solution, a worm is provided on one side of the screw end, with one end rotatably connected to the inner wall of the sliding groove. A worm wheel that meshes with the worm is fixedly sleeved on the outer wall of the screw. The other end of the worm extends through to the outside of the loading block and is fixedly sleeved with a handle. By rotating the handle, the worm can be driven to rotate. Through the cooperation of the worm and the worm wheel, the drive screw can be driven to rotate.

[0020] As a further improvement to the above solution, the mounting groove is a circular groove, the loading block is a circular block, and multiple stabilizing blocks are fixedly sleeved on the outer wall of the loading block. An annular groove is opened on the inner wall of the mounting groove, and the stabilizing blocks slide inside the adjacent annular grooves. Through the cooperation of the stabilizing blocks and the annular grooves, the loading block can be confined inside the mounting groove.

[0021] As a further improvement to the above solution, the clamping plate 2 is slidably engaged with the adjacent sliding groove opening, the opening is a circular structure, and the inner wall of the opening is provided with a sealing ring along the circumference. The sealing performance of the opening can be increased by the sealing ring.

[0022] As a further improvement to the above solution, a movable door is hinged to one side of the cleaning chamber, and a rubber ring is provided around the outer side of the movable door. An observation window is installed on the other side of the cleaning chamber. By opening the movable door, users can easily inspect and maintain the components inside the cleaning chamber.

[0023] As a further improvement to the above solution, a drain pipe is installed at the bottom of the cleaning tank, and a butterfly valve is installed on the drain pipe. When the butterfly valve is opened, the cleaning liquid inside the cleaning tank will be discharged through the drain pipe.

[0024] As a further improvement to the above solution, the mounting block located outside the cleaning tank has a rotating hole, and the drive column rotates inside the adjacent rotating hole. Through the rotating hole, the drive column can rotate flexibly.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0026] 1. This invention can quickly prepare photomasks. Not only is the preparation method simple, but the equipment used in the preparation process is also convenient to use, thereby effectively improving the preparation progress of photomasks, increasing the preparation efficiency, and reducing the cost of photomasks while ensuring product performance.

[0027] 2. This invention can quickly assist in the cleaning of photomasks, and can quickly load the photomasks to be processed during the cleaning process, avoiding the need to disassemble the cleaned photomasks before loading the new ones. This effectively improves the processing progress of the photomasks. Furthermore, the invention can rotate the photomasks during the cleaning process, allowing them to fully contact the cleaning liquid, thereby effectively improving the cleaning efficiency of the photomasks. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of a mask structure;

[0029] Figure 2 This is a schematic diagram of a photomask.

[0030] Figure 3 This is a schematic diagram of the cleaning equipment used in a method for preparing a photomask.

[0031] Figure 4 This is a schematic diagram of the cleaning chamber in the cleaning equipment;

[0032] Figure 5 This is a schematic diagram of the loading block in the cleaning equipment;

[0033] Figure 6 for Figure 4 Enlarged view of point A in the middle;

[0034] Figure 7 for Figure 4 Enlarged view of point B in the middle;

[0035] Figure 8 This is a schematic diagram of the loading blocks in the cleaning equipment;

[0036] Figure 9 This is a schematic diagram of the cleaning equipment.

[0037] Explanation of key symbols:

[0038] 1. Mask substrate; 2. Metal strip; 3. Resin; 4. Layer; 5. Effective graphic area; 6. Graphic schematic area; 7. Sensing area; 8. Fixture; 9. Cleaning chamber; 10. Delivery pump; 11. Inlet pipe; 12. Outlet pipe; 13. Nozzle; 14. Mounting block; 15. Loading block; 16. Sliding groove; 17. Connecting block; 18. Connecting sleeve; 19. Screw; 20. Lead screw; 21. Motor; 22. Output shaft; 23. Chain 1; 24. Slot; 25. Opening; 26. Drive column; 27. Rack plate; 28. Hydraulic cylinder; 29. ​​Observation window; 30. Drive sleeve. Detailed Implementation

[0039] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0040] Example 1:

[0041] Combination Figure 1-2 A mask according to this embodiment includes a mask substrate 1, a metal strip 2 snapped onto the inner side of the mask substrate 1, the metal strip 2 being fixed to the mask substrate 1 by resin 3, a layer 4 being coated on the mask substrate 1, an effective graphic area 5 being provided on the mask substrate 1, a graphic schematic area 6 being provided on the mask substrate 1, and a sensing area 7 being provided on the outer side of the mask substrate 1.

[0042] The implementation principle of a mask in this application embodiment is as follows: the metal strip 2 can increase the strength of the mask substrate 1. The four corners of the mask substrate 1 are not right angles, which can avoid collision. The sensing area 7 can identify whether there is a mask and decide whether to expose. After the light source illuminates the layer 4, the pattern can be accurately transferred to the mask. The unilluminated parts are cleaned up, and the mask is made.

[0043] Example 2:

[0044] The method for preparing a mask according to this embodiment further includes the following preparation steps:

[0045] S1: Make a groove on the back of the mask substrate 1 and put the metal strip 2 into the groove;

[0046] S2: Use resin 3 to seal the groove and use a polishing device to polish the resin 3 to make the filled resin 3 smooth. The resin 3 is a transparent adhesive material.

[0047] S3: Apply layer 4 onto the mask substrate 1;

[0048] S4: Use a light source to illuminate layer 4 to obtain the desired pattern;

[0049] S5: Clean the photomask after irradiation using cleaning equipment, leaving the desired pattern on the photomask.

[0050] The implementation principle of a mask preparation method in this application embodiment is as follows: a groove is made on the back of the mask substrate 1, a metal strip 2 is placed in the groove, the groove is sealed with resin 3, and the resin 3 is polished with a polishing device to make the filled resin 3 smooth. The resin 3 is a transparent adhesive material. A layer 4 is coated on the mask substrate 1, and the layer 4 is irradiated with a light source to obtain the desired pattern. The mask is cleaned with a cleaning device after irradiation, leaving the desired pattern on the mask. There are two types of coating characteristics: one is dissolving during cleaning after irradiation; the other is retaining during cleaning after irradiation. The light source is a parallel light source composed of small light sources forming a large light source. The diameter of each small light source is less than 5nm. The brightness and darkness of each small light source are determined by the desired pattern and coating characteristics. The specific wavelength refers to the wavelength at which the coating can react after irradiation.

[0051] Example 3:

[0052] Combination Figure 3-9This embodiment, based on embodiment 2, further improves upon the following: the cleaning equipment includes a fixed frame 8 and a cleaning chamber 9 fixed inside the fixed frame 8. A delivery pump 10 is fixed to the outside of the cleaning chamber 9. The input end of the delivery pump 10 is connected to a water inlet pipe 11, and the output end of the delivery pump 10 is connected to a water outlet pipe 12. The end of the water outlet pipe 12 away from the delivery pump 10 extends into the interior of the cleaning chamber 9 and is closed. The water outlet pipe 12 located inside the cleaning chamber 9 is fixed to the inner wall of the top of the cleaning chamber 9. Multiple nozzles 13 with downward-facing output ends are installed on the water outlet pipe 12 located on the inner wall of the cleaning chamber 9. Two mounting blocks 14 are provided at both ends of the cleaning chamber 9. One of the mounting blocks 14 at each end of the cleaning chamber 9 slides inside the cleaning chamber 9. Mounting slots are provided on opposite sides of two mounting blocks 14 at both ends of the cleaning chamber 9. Openings 25 are provided on both sides of the cleaning chamber 9. Loading blocks 15 for closing adjacent openings 25 are rotatably connected inside the mounting slots. A sliding groove 16 is provided on the side of the loading block 15 away from the adjacent mounting block 14. A connecting sleeve 18 is slidably connected inside the sliding groove 16 outside the cleaning chamber 9. A screw 19 rotatably connected inside the sliding groove 16 is threaded through the internal thread of the connecting sleeve 18. A connecting block 17 is slidably connected inside the sliding groove 16 inside the cleaning chamber 9. A clamping plate 1 is fixed between the two mounting blocks 14 at both ends of the cleaning chamber 9. A clamping plate 2 is fixed on the outside of the connecting sleeve 18, located above the clamping plate 1. The end of the clamping plate 2 away from the connecting sleeve 18 is fixed to the opposite side. On the adjacent connecting block 17, slots 24 are provided on opposite sides of clamping plates one and two. A drive column 26 is fixed inside the loading block 15 located outside the cleaning chamber 9. The end of the drive column 26 away from the loading block 15 extends through the outside of the adjacent mounting block 14 and is fixedly sleeved with a drive gear. A rack plate 27 that meshes with the drive gear is provided on one side of the drive gear. A hydraulic cylinder 28 is fixed on the mounting block 14 near the rack plate 27. The piston end of the hydraulic cylinder 28 is fixed on the adjacent rack plate 27. A motor 21 is fixed on one side of the fixing frame 8. The motor 21 is a forward and reverse motor. The output end of the motor 21 is driven by an output shaft 22. The end of the output shaft 22 away from the motor 21 is rotatably connected to the inner wall of the other side of the fixing frame 8. Drive sleeves 30 are embedded at both ends of block 14. A lead screw 20, one end of which is rotatably connected to the cleaning chamber 9, is threaded through the internal threads of the drive sleeve 30. The other end of the lead screw 20 is rotatably connected to the fixed frame 8. Sprockets are fixedly sleeved on the outer walls of the output shaft 22 and the lead screw 20. A chain 23 is sleeved on the sprocket on one side of the cleaning chamber 9, and a chain 2 is sleeved on the sprocket on the other side. The sprocket on one side of the cleaning chamber 9 meshes with chain 23, and the sprocket on the other side meshes with chain 2. When cleaning the mask is required, the screw 19 located outside the cleaning chamber 9 can be rotated. Through the threaded engagement between the screw 19 and the connecting sleeve 18, the connecting sleeve 18 is driven to move vertically, thereby causing the clamping plate 2 to move vertically.When the distance between clamping plate 2 and clamping plate 1 is sufficient to accommodate the mask, place the mask inside the slot 24 on clamping plate 2. Rotate the screw 19 located outside the cleaning chamber 9. Through the threaded engagement of screw 19 and connecting sleeve 18, drive connecting sleeve 18 to move vertically, thereby causing clamping plate 2 to move vertically. After the slot 24 on clamping plate 2 is engaged with the mask, the output shaft 22 is driven to rotate by the operation of motor 21. At this time, the corresponding lead screw 20 is driven to rotate through the engagement of chain 2 and sprocket. The rotating lead screw 20 is then driven to move the mounting block 14 through the threaded engagement of drive sleeve 30. The moving mounting block 14 will then move the loading block 15, thereby moving clamping plate 2 and clamping plate 1, and the mask on clamping plate 2 and clamping plate 1. After the mask enters the cleaning chamber 9, the port of water inlet pipe 11 can be placed inside the container of cleaning liquid, and then transported... The operation of pump 10 drives the delivery pump 10 to draw cleaning liquid into the outlet pipe 12. The cleaning liquid entering the outlet pipe 12 is then sprayed out through nozzle 13. This cleaning liquid sprayed from nozzle 13 cleans the mask plate inside the cleaning tank 9. While the cleaning liquid is cleaning the mask plate, the operation of hydraulic cylinder 28 causes the piston end of hydraulic cylinder 28 to move, which in turn moves rack plate 27. This moving rack plate 27 drives the drive gear to rotate, which in turn drives drive column 26 to rotate. The rotating drive column 26 then drives loading block 15 to rotate, which in turn drives clamping plates two and one to rotate. These rotating clamping plates two and one then rotate the mask plates on them, allowing the rotating mask plates to receive the cleaning liquid evenly, thus effectively improving the cleaning efficiency of the mask plates.

[0053] When the output shaft 22 rotates, the sprocket and chain 23 work together to drive the clamping plates 2 and 1 inside the cleaning chamber 9 to slide out of the cleaning chamber 9. At this time, the user can continue to load the mask onto the clamping plates 2 and 1, thereby effectively increasing the continuous working time of the cleaning equipment.

[0054] One side of the end of the screw 19 is provided with a worm gear that is rotatably connected to the inner wall of the sliding groove 16. A worm wheel that meshes with the worm gear is fixedly sleeved on the outer wall of the screw 19. The other end of the worm gear extends through to the outside of the loading block 15 and is fixedly sleeved with a handle. By rotating the handle, the worm gear can be driven to rotate. Through the cooperation of the worm gear and the worm wheel, the drive screw 19 can be driven to rotate.

[0055] The mounting groove is a circular groove, and the loading block 15 is a circular block. Multiple stabilizing blocks are fixedly sleeved on the outer wall of the loading block 15. An annular groove is opened on the inner wall of the mounting groove. The stabilizing blocks slide inside the adjacent annular grooves. Through the cooperation of the stabilizing blocks and the annular grooves, the loading block 15 can be confined inside the mounting groove.

[0056] The clamp plate 2 slides into the adjacent sliding groove 16. The opening 25 is circular. The inner wall of the opening 25 is provided with a sealing ring along the circumference. The sealing performance of the opening 25 can be increased by the sealing ring.

[0057] A hinged door is connected to one side of the cleaning chamber 9. A rubber ring is provided around the outside of the door. An observation window 29 is installed on the other side of the cleaning chamber 9. By opening the door, users can easily inspect and maintain the components inside the cleaning chamber 9.

[0058] A drain pipe is installed at the bottom of the cleaning chamber 9, and a butterfly valve is installed on the drain pipe. When the butterfly valve is opened, the cleaning liquid inside the cleaning chamber 9 will be discharged through the drain pipe.

[0059] The mounting block 14 located outside the cleaning chamber 9 has a rotating hole, and the drive column 26 rotates inside the adjacent rotating hole. Through the rotating hole, the drive column 26 can rotate flexibly.

[0060] Working principle: A groove is made on the back of the mask substrate 1. A metal strip 2 is placed into the groove, and resin 3 is used to seal the groove. The resin 3 is then polished to make it smooth. Layer 4 is applied to the mask substrate 1, and a light source is used to illuminate layer 4 to obtain the desired pattern. Then, the screw 19 located outside the cleaning chamber 9 is rotated. Through the threaded engagement between the screw 19 and the connecting sleeve 18, the connecting sleeve 18 is driven to move vertically, which in turn drives the clamping plate 2 to move vertically. When the gap between the clamping plate 2 and the clamping plate 1 is sufficient to place the mask, the mask is placed inside the slot 24 on the clamping plate 2. The screw 19 located outside the cleaning chamber 9 is rotated. Through the threaded engagement between the screw 19 and the connecting sleeve 18, the connecting sleeve 18 is driven to move vertically. Vertical displacement causes clamping plate two to move vertically. When the slot 24 on clamping plate two is engaged with the mask plate, the output shaft 22 is driven to rotate by the motor 21. At this time, the corresponding lead screw 20 is driven to rotate through the cooperation of chain two and sprocket. The rotating lead screw 20 and the threaded engagement of the drive sleeve 30 drive the mounting block 14 to move. The moving mounting block 14 will drive the loading block 15 to move, which will drive clamping plate two and clamping plate one to move, and drive the mask plate on clamping plate two and clamping plate one to move, so that the mask plate enters the interior of the cleaning chamber 9. When the output shaft 22 rotates, the cooperation of sprocket and chain one 23 will drive clamping plate two located inside the cleaning chamber 9. After the clamping plate 1 slides out of the cleaning chamber 9, the user can continue to load the mask onto clamping plates 2 and 1, thereby effectively increasing the continuous working time of the cleaning equipment. Then, the port of the inlet pipe 11 can be placed inside the container of cleaning liquid. The operation of the delivery pump 10 then draws the cleaning liquid into the outlet pipe 12. The cleaning liquid entering the outlet pipe 12 will then be sprayed out through the nozzle 13. The cleaning liquid sprayed from the nozzle 13 can then clean the mask inside the cleaning chamber 9. While the cleaning liquid is cleaning the mask, the operation of the hydraulic cylinder 28 can move the piston end of the hydraulic cylinder 28, thereby moving the rack plate 27. The rack plate 27 drives the drive gear to rotate, which in turn drives the drive column 26 to rotate. The rotating drive column 26 then drives the loading block 15 to rotate, which in turn drives the clamping plates two and one to rotate. The rotating clamping plates two and one then drive the mask plates on them to rotate, allowing the mask plates to receive the cleaning liquid evenly, thus effectively improving the cleaning efficiency. After the mask plates are cleaned, the motor 21 drives the output shaft 22 to rotate. This, in turn, drives the lead screw 20 to rotate through the cooperation of the chain two and the sprocket. The rotating lead screw 20 then engages with the threaded drive sleeve 30.The drive mounting block 14 is displaced, which in turn moves the loading block 15, causing clamping plates two and one to move, and consequently, the cleaned mask plates on clamping plates two and one to move, causing the cleaned mask plates to slide out of the cleaning chamber 9. At this point, the desired pattern is left on the mask plates, which can then be removed after cleaning.

[0061] The above embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of protection of the present invention. Any non-substantial changes and substitutions made by those skilled in the art based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A method for preparing a photomask, the photomask comprising a photomask substrate, a metal strip snapped onto the inner side of the photomask substrate, the metal strip being fixed to the photomask substrate by resin, a coating layer being applied to the photomask substrate, an effective graphic area being provided on the photomask substrate, a graphic schematic area being provided on the photomask substrate, and a sensing area being provided on the outer side of the photomask substrate. The method for preparing the mask includes the following steps: S1: Make a groove on the back of the photomask substrate and put the metal strip into the groove; S2: Use resin to seal the groove and use a polishing device to polish the resin to make the filled resin smooth. The resin is a transparent adhesive material. S3: Apply a layer to the photomask substrate; S4: Use a light source to illuminate the layer to obtain the desired pattern; S5: Clean the photomask after irradiation using cleaning equipment, leaving the desired pattern on the photomask; The cleaning equipment includes a fixed frame and a cleaning chamber fixed inside the fixed frame. A delivery pump is fixed to the outside of the cleaning chamber. The input end of the delivery pump is connected to a water inlet pipe, and the output end of the delivery pump is connected to a water outlet pipe. The end of the water outlet pipe away from the delivery pump extends into the interior of the cleaning chamber and is closed. The water outlet pipe located inside the cleaning chamber is fixed to the inner wall of the top of the cleaning chamber. Multiple nozzles with downward-facing output ends are installed on the water outlet pipe located on the inner wall of the cleaning chamber. Two mounting blocks are provided at each end of the cleaning chamber. One of the mounting blocks at each end of the cleaning chamber slides inside the cleaning chamber. The two mounting blocks at each end of the cleaning chamber have mounting grooves on opposite sides. Openings are provided on both sides of the cleaning chamber. Loading blocks for closing adjacent openings are rotatably connected inside the mounting grooves. The side of the loading block away from the adjacent mounting block has a sliding opening. The cleaning chamber has a sliding groove on its exterior, with a connecting sleeve slidably connected inside. A screw, rotatably connected inside the sliding groove, passes through the internal thread of the connecting sleeve. A connecting block is slidably connected inside the sliding groove inside the cleaning chamber. A clamping plate is fixed between two mounting blocks at both ends of the cleaning chamber. A clamping plate is fixed above the clamping plate on the outside of the connecting sleeve. The end of the clamping plate away from the connecting sleeve is fixed to an adjacent connecting block. Slots are formed on opposite sides of the clamping plates. A drive column is fixed inside a loading block outside the cleaning chamber. The end of the drive column away from the loading block extends through the exterior of an adjacent mounting block and is fixedly fitted with a drive gear. A rack plate meshing with the drive gear is provided on one side of the drive gear. A hydraulic cylinder is fixed on a mounting block near the rack plate, with the piston end of the hydraulic cylinder fixed to an adjacent rack plate.

2. The method for preparing a photomask as described in claim 1, characterized in that, A motor is fixed to one side of the fixed frame. The output end of the motor is connected to an output shaft. The end of the output shaft away from the motor is rotatably connected to the inner wall of the other side of the fixed frame. Drive sleeves are embedded at both ends of the mounting block located outside the cleaning chamber. A lead screw with one end rotatably connected to the cleaning chamber is threaded through the internal thread of the drive sleeve. The other end of the lead screw is rotatably connected to the fixed frame. Sprockets are fixedly sleeved on the outer walls of the output shaft and the lead screw. Chain 1 is sleeved on the sprocket on one side of the cleaning chamber, and chain 2 is sleeved on the sprocket on the other side of the cleaning chamber. The sprocket on one side of the cleaning chamber meshes with chain 1, and the sprocket on the other side of the cleaning chamber meshes with chain 2.

3. The method for preparing a photomask as described in claim 1, characterized in that, One side of the screw end is provided with a worm gear that is rotatably connected to the inner wall of the sliding groove. A worm wheel that meshes with the worm gear is fixedly sleeved on the outer wall of the screw. The other end of the worm gear extends through to the outside of the loading block and is fixedly sleeved with a handle.

4. The method for preparing a photomask as described in claim 1, characterized in that, The mounting groove is a circular groove, the loading block is a circular block, and multiple stabilizing blocks are fixedly sleeved on the outer wall of the loading block. The inner wall of the mounting groove is provided with an annular groove, and the stabilizing blocks slide inside adjacent annular grooves.

5. The method for preparing a photomask as described in claim 1, characterized in that, The second clamp plate slides into the adjacent sliding groove, the opening is circular, and the inner wall of the opening is provided with a sealing ring along the circumference.

6. The method for preparing a photomask as described in claim 1, characterized in that, A hinged door is connected to one side of the cleaning chamber, and a rubber ring is provided around the outer side of the door. An observation window is installed on the other side of the cleaning chamber.

7. The method for preparing a photomask as described in claim 1, characterized in that, A drain pipe is installed at the bottom of the cleaning tank, and a butterfly valve is installed on the drain pipe.

8. The method for preparing a photomask as described in claim 1, characterized in that, The mounting block located outside the cleaning chamber has a rotating hole, and the drive column rotates inside the adjacent rotating hole.

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