A process for the preparation of a high voltage piezoelectric actuator

Abstract

The application discloses a high-voltage piezoelectric actuator preparation process and relates to the field of high-voltage piezoelectric actuator preparation processes. In view of the problems of high production cost and large product size of the existing piezoelectric actuator preparation process, the following scheme is provided. The scheme comprises the following steps: S1, uniformly mixing piezoelectric ceramic powder with a bonding agent, a lubricant and deionized water to obtain a uniformly mixed material block; S2, placing the material block in S1 into an 80-150 DEG C extrusion film machine to prepare a piezoelectric ceramic film strip with a corresponding thickness; and S3, punching the film strip obtained in S2 to obtain a single green wafer. The preparation process does not need a metal sheet, does not increase the total height of the actuator, and does not affect the expansion ratio, can guarantee the energy conversion effect of the actuator, is simple in process and low in cost, the end electrode printing equipment of the preparation process can automatically and efficiently complete end electrode printing of the ceramic sheet, and meets the production demand of process innovation.

Description

Technical Field

[0001] This invention relates to the field of high-voltage piezoelectric actuator manufacturing process, and more particularly to a high-voltage piezoelectric actuator manufacturing process. Background Technology

[0002] Currently, there are two main methods for fabricating high-voltage piezoelectric ceramic multilayer actuators:

[0003] Silver paste is printed between ceramic sheets, and multiple ceramic sheets are stacked and assembled. Then, the multi-layer ceramic sheets are tightly stacked and fixed by a silver firing process. The advantage of this method is that the process is simple and the cost is low. The disadvantage is that the silver paste layer is too thin and gaps are easily generated in the middle, which affects the energy conversion effect of the actuator and the service life.

[0004] Individual ceramic sheets are first made into piezoelectric ceramic sheets through silver printing, silver baking, and silver firing processes. A thin metal sheet (copper, stainless steel, or nickel alloy) is inserted between two piezoelectric ceramic sheets. The piezoelectric ceramic sheets and metal sheets are bonded and fixed together with high-temperature epoxy adhesive. Multiple layers of piezoelectric ceramic sheets and multiple layers of thin metal sheets are stacked alternately and assembled, and a high-temperature curing adhesive is used to achieve a tight stacking and fixation. The advantages of this method are good energy conversion efficiency of the actuator and a robust and reliable product. The disadvantages are that the process is complex, the addition of metal sheets leads to higher product costs, and the thin metal sheets increase the overall height of the actuator, affecting the extension ratio.

[0005] In summary, to address the technological shortcomings of the two mainstream high-voltage piezoelectric ceramic stacked actuators mentioned above, we propose a high-voltage piezoelectric actuator fabrication process. Summary of the Invention

[0006] The present invention proposes a high-voltage piezoelectric actuator manufacturing process, which solves the problems mentioned in the background art.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A high-voltage piezoelectric actuator fabrication process includes the following operations:

[0009] S1. Mix the piezoelectric ceramic powder with binder, lubricant and deionized water evenly to obtain a uniformly mixed block;

[0010] S2. Place the material block from S1 into an extruder at 80℃~150℃ to prepare a piezoelectric ceramic film strip of the corresponding thickness.

[0011] S3. The membrane strip obtained in S2 is punched to obtain a single green sheet;

[0012] S4. The green sheet obtained in S3 is debinded and sintered to obtain a single ceramic sheet;

[0013] S5. Clean and visually inspect the single ceramic piece obtained in S4.

[0014] S6. The ceramic sheet obtained in S5 is shaped and sent to the production line for single-sided surface electrode silver paste printing and drying.

[0015] S7. Print end electrodes on both ends of the ceramic sheet obtained in S6 and dry it;

[0016] S8. Print surface electrodes on the other side of the ceramic sheet obtained in S7 and dry it.

[0017] S9. Silver is burned onto the printed ceramic sheet. After completion, the continuity between the end electrode and the surface electrode of the piezoelectric sheet is checked and a withstand voltage test is performed.

[0018] S10. Plate a thin layer of solder onto the piezoelectric electrode obtained in S9.

[0019] S11. The piezoelectric sheets obtained in S10 are printed with adhesive and stacked.

[0020] S12. Clean the adhesive off the surface of the ceramic column obtained in S11;

[0021] S13. Bond and cure the ceramic pillars obtained in S12.

[0022] S14. Use tin-plated wires to solder to the two poles of the ceramic pillar respectively;

[0023] S15. The product obtained in S14 is plastic-sealed;

[0024] S16. Perform polarization testing on the final product obtained in S15.

[0025] Preferably, in S1, the binder is carboxymethyl cellulose, the lubricant is glycerin, and the mass ratio of powder, carboxymethyl cellulose, glycerin and deionized powder is 1.0:0.02~0.04:0.02~0.04:0.08~0.10.

[0026] The thickness of the extruded membrane strip in S2 is 0.15mm to 0.35mm;

[0027] The dimensions of the stamped part in S3 are: 19.2mm x 19.2mm;

[0028] The debinding temperature in S4 is 600℃, and the sintering temperature is 1230℃~1280℃;

[0029] In S5, clean the surface of the ceramic tile to remove the protective powder, and check whether the ceramic tile is intact, whether the thickness is uniform, and whether there are any discolored spots, etc.

[0030] In S6 and S8, the printed electrode material is silver paste with a solid content of 45% to 53%, and the electrode printing thickness is moderate.

[0031] The printed terminal electrode material in S7 uses silver paste with a solid content of 60%;

[0032] The silver burning temperature in S9 is 800℃. When testing, a multimeter in the short-circuit setting should be used.

[0033] In S10, use a soldering iron to apply solder. Apply a small amount of solder to the tip of the soldering iron and gently spread it onto the end electrode.

[0034] In S11, the adhesive is epoxy resin, and the capacitor structure is stacked and pressed together with flat-nose pliers.

[0035] In S12, the cleaning agent is anhydrous ethanol. Use cotton soaked in anhydrous ethanol to clean the epoxy resin on the surface of the ceramic column.

[0036] In S13, the ceramic column, along with flat-nose pliers, is placed in an oven for epoxy resin curing at a curing temperature of 60℃~130℃.

[0037] In S14, dip the soldering iron tip in a small amount of solder and use a thin wire to solder the end electrodes, connecting the entire end face into a whole.

[0038] S15 uses epoxy resin for surface sealing;

[0039] In S16, a withstand voltage tester is used to polarize the ceramic column. The polarization voltage is 1.5 times the operating voltage. The electric displacement, maximum output, and other performance of the actuator are tested.

[0040] A high-voltage piezoelectric actuator end electrode printing equipment is applied to the above-mentioned high-voltage piezoelectric actuator manufacturing process. The equipment includes an end electrode printing device, which is composed of a robot arm, a dipping mechanism, and a frame. An upstream feed conveyor is provided for the robot arm, and a downstream discharge conveyor is provided for the robot arm.

[0041] Preferably, the robotic arm includes a turntable, a first motor, and a second motor. The turntable is rotatably connected to the frame. The housing of the second motor is connected to the bottom of the turntable. The output shaft of the second motor passes through the turntable. A coupling is fixedly sleeved at the end of the output shaft of the second motor. A material-picking tee is coaxially connected to the top of the coupling. A suction cup is sleeved at the top of the material-picking tee.

[0042] Preferably, the feed conveyor has baffles on both sides of the discharge port, and a spring is provided at the bottom of the baffle at the discharge port of the feed conveyor. The end of the spring closer to the feed conveyor is slightly bent downwards, and the end of the spring away from the feed conveyor is bent upwards. The two sets of baffles and springs are symmetrically arranged about the feed conveyor.

[0043] Preferably, bearing seats are provided at both ends of the turntable, and bearings are provided in the bearing seats. The bearing at one end of the first motor is thin-walled. The housing of the first motor is fixedly connected to the frame, and the output shaft of the first motor passes through the frame, the bearing and connects to the turntable housing.

[0044] Preferably, the dipping mechanism consists of a sliding cylinder and a swing cylinder, wherein the housing of the sliding cylinder is fixedly connected to the frame, the housing of the swing cylinder is fixedly connected to the slider of the sliding cylinder, and the output shaft of the swing cylinder is connected to a temporary silver paste dispersing box. A feeding tee for feeding silver paste is connected to one side of the box, and a cotton strip for dipping is connected to the side of the box away from the feeding tee.

[0045] Preferably, the feeding conveyor and the dipping mechanism are distributed on both sides of the robot arm, and the discharging conveyor is located at the bottom of the robot arm, with the feeding conveyor and the discharging conveyor arranged in parallel to each other.

[0046] Preferably, the two ends of the feeding tee are away from the suction cup, one end of which is used to connect to the negative pressure source, and the other end is sealed with the coupling. Two ends of the feeding tee are connected to the two ends of the material box, and the other end of the feeding tee is connected to the silver paste feeding device.

[0047] Preferably, both the first motor and the second motor are closed-loop stepper motors.

[0048] The beneficial effects of this invention are as follows:

[0049] 1. The manufacturing process of this piezoelectric actuator differs from conventional manufacturing processes in that end electrodes are printed at both ends of a single ceramic sheet. The end electrodes printed at both ends of the ceramic sheet are connected to the surface electrodes on both sides of the ceramic sheet, serving as the two poles of a single ceramic sheet. Thus, the end electrodes play the role of bringing out the surface electrodes that are hidden by multiple stacked ceramic sheets. This allows the stacked ceramic sheets to be connected in series via wires and then welded together with the end electrodes. The piezoelectric ceramic sheets are directly bonded and fixed with high-temperature epoxy adhesive. This method does not require metal sheets, does not increase the overall height of the actuator, and does not affect the extension ratio. This method can ensure the energy conversion effect of the actuator and is simple and low in cost.

[0050] 2. In the terminal electrode printing equipment of this process, a slide is made of spring sheet between the material handling robot and the feeding conveyor at the feeding point. Through the elastic deformation of the spring sheet, the robot can directly pick up the ceramic sheet without ignoring structural conflicts. The structure is simple and the cost is extremely low.

[0051] 3. The dipping mechanism of this device controls the movement of the material box and cotton strip through the sliding table cylinder and the swing cylinder. Together with the robot, it dips the two ends of the ceramic sheet into silver paste, automatically and efficiently completing the printing of the end electrodes of the ceramic sheet, meeting the production needs of process innovation.

[0052] In summary, this fabrication process does not require metal sheets, does not increase the overall height of the actuator, and does not affect the scaling ratio. It can ensure the energy conversion effect of the actuator, and the process is simple and low-cost. The end electrode printing equipment of this fabrication process can automatically and efficiently complete the end electrode printing of ceramic sheets, meeting the production needs of process innovation. Attached Figure Description

[0053] Figure 1 This is a schematic diagram of the device structure of the present invention.

[0054] Figure 2 For the present invention Figure 1 A structural diagram from another perspective.

[0055] Figure 3 This is a schematic diagram of the structure of the feeding conveyor and the robot arm of the present invention.

[0056] Figure 4 For the present invention Figure 3 The structure explodes.

[0057] Figure 5 This is a schematic diagram of the structure of the dipping mechanism and the robotic arm of the present invention.

[0058] Figure 6 This is a schematic diagram of the structure of the robotic arm and dipping mechanism of the present invention after dipping.

[0059] Figure 7 This is a front view of the monolithic piezoelectric ceramic sheet of the present invention.

[0060] Figure 8 This is a schematic diagram of the reverse side of the monolithic piezoelectric ceramic sheet of the present invention.

[0061] Figure 9 This is a schematic diagram of the stacked structure of the piezoelectric ceramic sheet of the present invention.

[0062] Figure 10 This is a schematic diagram of the structure of a single product according to the present invention.

[0063] The following are the labels in the diagram: 1. Feeding conveyor; 101. Stop bar; 102. Spring; 2. Discharge conveyor; 3. Robot arm; 301. Turntable; 302. Bearing seat; 303. Bearing; 304. First motor; 305. Second motor; 306. Coupling; 307. Material picking tee; 308. Suction cup; 4. Dipping mechanism; 401. Slide cylinder; 402. Swing cylinder; 403. Material box; 404. Feeding tee; 405. Cotton strip; 5. Frame; 6. Ceramic sheet. Detailed Implementation

[0064] The technical solution of the invention will now be clearly and completely described in conjunction with the accompanying drawings. In the description of the invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, not to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying their relative importance.

[0065] In the description of the invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the invention based on the specific circumstances.

[0066] Reference Figures 1-10 A high-voltage piezoelectric actuator fabrication process includes the following operations:

[0067] S1. Mix the piezoelectric ceramic powder with binder, lubricant and deionized water evenly to obtain a uniformly mixed block;

[0068] S2. Place the material block from S1 into an extruder at 80℃~150℃ to prepare a piezoelectric ceramic film strip of the corresponding thickness.

[0069] S3. The membrane strip obtained in S2 is punched to obtain a single green sheet;

[0070] S4. The green sheet obtained in S3 is debinded and sintered to obtain a single ceramic sheet 6.

[0071] S5. Clean and visually inspect the single ceramic piece 6 obtained in S4.

[0072] S6. The ceramic sheet 6 obtained in S5 is shaped and sent to the production line for single-sided surface electrode silver paste printing and drying.

[0073] S7. Print end electrodes on both ends of the ceramic sheet 6 obtained in S6 and dry it.

[0074] S8. Print a surface electrode on the other side of the ceramic sheet 6 obtained in S7 and dry it.

[0075] S9. Silver is burned onto the printed ceramic sheet 6. After completion, the continuity between the end electrode and the surface electrode of the piezoelectric sheet is checked and a withstand voltage test is performed.

[0076] S10. Plate a thin layer of solder onto the piezoelectric electrode obtained in S9.

[0077] S11. The piezoelectric sheets obtained in S10 are printed with adhesive and stacked.

[0078] S12. Clean the adhesive off the surface of the ceramic column obtained in S11;

[0079] S13. Bond and cure the ceramic pillars obtained in S12.

[0080] S14. Use tin-plated wires to solder to the two poles of the ceramic pillar respectively;

[0081] S15. The product obtained in S14 is plastic-sealed;

[0082] S16. Perform polarization testing on the final product obtained in S15.

[0083] In S1, the binder is carboxymethyl cellulose, the lubricant is glycerin, and the mass ratio of powder, carboxymethyl cellulose, glycerin and deionized powder is 1.0:0.02~0.04:0.02~0.04:0.08~0.10.

[0084] The thickness of the extruded membrane strip in S2 is 0.15mm to 0.35mm;

[0085] The dimensions of the stamped part in S3 are: 19.2mm x 19.2mm;

[0086] The debinding temperature in S4 is 600℃, and the sintering temperature is 1230℃~1280℃;

[0087] In S5, clean the surface of the ceramic tile to remove the protective powder, and check whether the ceramic tile is intact, whether the thickness is uniform, and whether there are any discolored spots, etc.

[0088] In S6 and S8, the printed electrode material is silver paste with a solid content of 45% to 53%, and the electrode printing thickness is moderate.

[0089] The printed terminal electrode material in S7 uses silver paste with a solid content of 60%;

[0090] The silver burning temperature in S9 is 800℃. When testing, a multimeter in the short-circuit setting should be used.

[0091] In S10, use a soldering iron to apply solder. Apply a small amount of solder to the tip of the soldering iron and gently spread it onto the end electrode.

[0092] In S11, the adhesive is epoxy resin, and the capacitor structure is stacked and pressed together with flat-nose pliers.

[0093] In S12, the cleaning agent is anhydrous ethanol. Use cotton soaked in anhydrous ethanol to clean the epoxy resin on the surface of the ceramic column.

[0094] In S13, the ceramic column, along with flat-nose pliers, is placed in an oven for epoxy resin curing at a curing temperature of 60℃~130℃.

[0095] In S14, dip the soldering iron tip in a small amount of solder and use a thin wire to solder the end electrodes, connecting the entire end face into a whole.

[0096] S15 uses epoxy resin for surface sealing;

[0097] In S16, a withstand voltage tester is used to polarize the ceramic column. The polarization voltage is 1.5 times the operating voltage. The electric displacement, maximum output, and other performance of the actuator are tested.

[0098] The significant difference between the above-mentioned preparation process and existing commercially available processes lies in the location and method of printing silver paste onto individual ceramic sheets 6. The most notable difference is the printing of end electrodes onto the ceramic sheets 6, such as... Figures 8-10 As shown, the end electrodes printed at both ends of the ceramic sheet 6 are connected to the surface electrodes on both sides of the ceramic sheet 6 respectively, serving as the two poles of a single ceramic sheet 6. Thus, the end electrodes play the role of bringing out the surface electrodes that are hidden by the superposition of multiple sets of ceramic sheets 6, so that the superposition of ceramic sheets 6 can be connected in series by welding the end electrodes with wires later.

[0099] Considering the characteristics of the aforementioned preparation process, its production equipment is generally compatible with existing equipment. However, it requires specialized terminal electrode printing equipment to address the processing needs of this innovative process. Therefore, a high-voltage piezoelectric actuator terminal electrode printing device is proposed:

[0100] The terminal electrode printing equipment consists of a robot arm 3, a dipping mechanism 4, and a frame 5. The upstream of the robot arm 3 is a feeding conveyor 1, and the downstream of the robot arm 3 is a discharging conveyor 2.

[0101] The robotic arm 3 includes a turntable 301, a first motor 304, and a second motor 305. The turntable 301 is rotatably connected to the frame 5. The housing of the second motor 305 is connected to the bottom of the turntable 301, and the output shaft of the second motor 305 passes through the turntable 301. A coupling 306 is fixedly sleeved at the end of the output shaft of the second motor 305, and a material-receiving tee pipe 307 is coaxially connected to the top of the coupling 306. A suction cup 308 is sleeved at the top of the material-receiving tee pipe 307. Baffles 101 are provided on both sides of the discharge port of the feeding conveyor 1, and the discharge port of the feeding conveyor 1 is located at the bottom of the baffles 101. A spring sheet 102 is provided, with the end of the spring sheet 102 near the feed conveyor 1 slightly bent downwards and the end of the spring sheet 102 away from the feed conveyor 1 bent upwards. The two sets of stop bars 101 and spring sheets 102 are symmetrically arranged about the feed conveyor 1. Both ends of the turntable 301 are provided with bearing seats 302, and each bearing seat 302 is provided with a bearing 303. The bearing 303 located at one end of the first motor 304 is thin-walled. The housing of the first motor 304 is fixedly connected to the frame 5, and the output shaft of the first motor 304 passes through the frame 5, the bearing 303 and connects to the housing of the turntable 301.

[0102] like Figure 3 As shown, the ceramic sheet 6 needs to have one side of the surface electrode printed first, and then be fed into the device by the feeding conveyor 1. Under the action of inertia and the guidance of the stop bar 101, the ceramic sheet 6 slides along the upper surface of the spring sheet 102 until it is stopped by the bending of the end of the spring sheet 102. The first motor 304 drives the turntable 301 and the suction cup 308 to deflect to the vertical upward, so that the suction cup 308 is placed on the bottom surface of the ceramic sheet 6. The negative pressure makes the suction cup 308 firmly stick to the ceramic sheet 6. Then, it returns to the zero position directly under the drive of the first motor 304. The elastic deformation of the spring sheet 102 makes the suction cup 308 smoothly remove the ceramic sheet 6.

[0103] The dipping mechanism 4 is composed of a sliding cylinder 401 and a swing cylinder 402. The housing of the sliding cylinder 401 is fixedly connected to the frame 5, and the housing of the swing cylinder 402 is fixedly connected to the slider of the sliding cylinder 401. The output shaft of the swing cylinder 402 is connected to a material box 403 for temporarily dispersing silver paste. A feeding tee pipe 404 for feeding silver paste is connected to one side of the material box 403, and a cotton strip 405 for dipping is connected to the side of the material box 403 away from the feeding tee pipe 404.

[0104] like Figure 5As shown, when the robotic arm 3 picks up the ceramic sheet 6, driven by the first motor 304, one edge of the ceramic sheet 6 gently touches the cotton strip 405 once to dip in a layer of silver paste, initially forming an end electrode. The first motor 304 drives the ceramic sheet 6 to deflect upwards, and then the second motor 305 drives the ceramic sheet 6 to rotate 180 degrees, and the action of dipping in silver paste is repeated. After completion, the swing cylinder 402 drives the material box 403 and the cotton strip 405 to deflect away from the ceramic sheet 6. Then, the sliding cylinder 401 pushes the swing cylinder 402, material box 403, etc. away from the ceramic sheet 6. At this time, the silver paste feeder in the factory can replenish the silver paste into the material box 403 and the cotton strip 405 through the hose and the feeding tee 404 for the next dipping.

[0105] The feeding conveyor 1 and the dipping mechanism 4 are distributed on both sides of the robot arm 3, and the discharging conveyor 2 is located at the bottom of the robot arm 3. The feeding conveyor 1 and the discharging conveyor 2 are arranged in parallel to each other.

[0106] After the coating is completed, the first motor 304 drives the suction cup 308 and the ceramic sheet 6 with silver paste printed at both ends to deflect downwards and release the ceramic sheet 6 onto the discharge conveyor 2, which is then transported downstream to dry and print the electrode on the other side.

[0107] The two ends of the material feeding tee pipe 307 away from the suction cup 308 are connected, one end of which is used to connect to the negative pressure source, and the other end is sealed with the coupling 306. Two ends of the material feeding tee pipe 404 are connected to the two ends of the material box 403, and the other end of the material feeding tee pipe 404 is connected to the silver paste feeding equipment. The first motor 304 and the second motor 305 are both closed-loop stepper motors.

[0108] like Figure 7 The image shows the specific structure of the ceramic sheet 6, which includes a ceramic substrate 61, a silver layer 62 for end face electrodes, and an inner electrode 63 for the silver layer. A thin solder layer is adhered to the surface of the silver layer 62 for end face electrodes of the ceramic substrate 61, and the surface of the ceramic substrate 61 is the inner electrode 63 (surface electrode).

[0109] like Figure 9 As shown, the ceramic substrate 61 is stacked with leads connected as follows: one side is connected as the negative electrode 64, and the other side is connected as the positive electrode 65; the structure of a single product is: two approximately 1mm end face plates 66 + an 18mm effective ceramic plate 67 (e.g. Figure 10 ).

[0110] The above are merely preferred embodiments of the invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the invention. These improvements and modifications should also be considered within the scope of protection of the invention. Other parts not detailed in the invention belong to the prior art and will not be elaborated here. Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the invention and are not intended to limit it. Although the invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the invention.

Claims

1. A manufacturing process for a high-voltage piezoelectric actuator, characterized in that, Includes the following operations: S1. Mix the piezoelectric ceramic powder with binder, lubricant and deionized water evenly to obtain a uniformly mixed block; S2. Place the material block from S1 into an extruder at 80℃~150℃ to prepare a piezoelectric ceramic film strip of the corresponding thickness. S3. The membrane strip obtained in S2 is punched to obtain a single green sheet; S4. The green sheet obtained in S3 is debonded and sintered to obtain a single ceramic sheet (6). S5. Clean and inspect the appearance of the single ceramic piece (6) obtained in S4. S6. The ceramic sheet (6) obtained in S5 is shaped and sent to the production line for single-sided surface electrode silver paste printing and drying. S7. Print end electrodes on both ends of the ceramic sheet (6) obtained in S6 and dry it; S8. Print surface electrodes on the other side of the ceramic sheet (6) obtained in S7 and dry it; S9. Silver is burned onto the printed ceramic sheet (6). After completion, the continuity between the end electrode and the surface electrode of the piezoelectric sheet is checked and a withstand voltage test is performed. S10. Plate a layer of solder onto the piezoelectric end electrode obtained in S9; S11. The piezoelectric sheets obtained in S10 are printed with adhesive and stacked. S12. Clean the adhesive off the surface of the ceramic column obtained in S11; S13. Bond and cure the ceramic pillars obtained in S12. S14. Use tin-plated wires to solder to the two poles of the ceramic pillar respectively; S15. The product obtained in S14 is plastic-sealed; S16. Perform polarization testing on the final product obtained in S15; When performing step S7, the two ends of the printing end electrodes are printed, an end electrode printing device is used. The end electrode printing device consists of a robot (3), a dipping mechanism (4) and a frame (5). An upstream feed conveyor (1) is provided for the robot (3), and a downstream discharge conveyor (2) is provided for the robot (3). The robotic arm (3) includes a turntable (301), a first motor (304), and a second motor (305). The turntable (301) is rotatably connected to the frame (5). The housing of the second motor (305) is connected to the bottom of the turntable (301). The output shaft of the second motor (305) passes through the turntable (301). A coupling (306) is fixedly sleeved at the end of the output shaft of the second motor (305). A material picking tee pipe (307) is coaxially connected to the top of the coupling pipe (306). A suction cup (308) is sleeved at the top of the material picking tee pipe (307). The dipping mechanism (4) is composed of a sliding cylinder (401) and a swing cylinder (402). The housing of the sliding cylinder (401) is fixedly connected to the frame (5). The housing of the swing cylinder (402) is fixedly connected to the slider of the sliding cylinder (401). The output shaft of the swing cylinder (402) is connected to a temporary silver paste dispersing box (403). A feeding tee (404) for feeding silver paste is connected to one side of the box (403). A cotton swab (405) for dipping is connected to the side of the box (403) away from the feeding tee (404).

2. The manufacturing process of a high-voltage piezoelectric actuator according to claim 1, characterized in that, In S1, the binder is carboxymethyl cellulose, the lubricant is glycerin, and the mass ratio of powder, carboxymethyl cellulose, glycerin and deionized powder is 1.0:0.02~0.04:0.02~0.04:0.08~0.

10. The thickness of the extruded membrane strip in S2 is 0.15mm~0.35mm; The dimensions of the stamped part in S3 are: 19.2mm x 19.2mm; The debinding temperature in S4 is 600℃, and the sintering temperature is 1230℃~1280℃; S5 cleans the surface of the ceramic tile to remove the protective powder, and checks whether the ceramic tile is intact, whether the thickness is uniform, and whether there are any discolored spots. In S6 and S8, the printed electrode material is silver paste with a solid content of 45%~53%, and the electrode printing thickness is moderate. The printed terminal electrode material in S7 uses silver paste with a solid content of 60%; The silver burning temperature in S9 is 800℃. When testing, a multimeter in the short-circuit setting should be used. In S10, use a soldering iron to apply solder. Apply a small amount of solder to the tip of the soldering iron and gently spread it onto the end electrode. In S11, the adhesive is epoxy resin, and the capacitor structure is stacked and pressed together with flat-nose pliers. In S12, the cleaning agent is anhydrous ethanol. Use cotton soaked in anhydrous ethanol to clean the epoxy resin on the surface of the ceramic column. In S13, the ceramic column, along with flat-nose pliers, is placed in an oven for epoxy resin curing at a curing temperature of 60℃~130℃. In S14, dip the soldering iron tip in a small amount of solder and use a thin wire to solder the end electrodes, connecting the entire end face into a whole. S15 uses epoxy resin for surface sealing; In S16, a withstand voltage tester is used to polarize the ceramic column. The polarization voltage is 1.5 times the operating voltage. The electric displacement and maximum output performance of the actuator are then tested.

3. The manufacturing process of a high-voltage piezoelectric actuator according to claim 1, characterized in that, Both sides of the discharge port of the feed conveyor (1) are provided with baffles (101), and the discharge port of the feed conveyor (1) is provided with a spring piece (102) at the bottom of the baffle (101). The end of the spring piece (102) near the feed conveyor (1) is slightly bent downwards, and the end of the spring piece (102) away from the feed conveyor (1) is bent upwards. The two sets of baffles (101) and spring pieces (102) are symmetrically arranged about the feed conveyor (1).

4. The manufacturing process of a high-voltage piezoelectric actuator according to claim 1, characterized in that, Both ends of the turntable (301) are provided with bearing seats (302), and each bearing seat (302) is provided with a bearing (303). The bearing (303) located at one end of the first motor (304) is thin-walled. The housing of the first motor (304) is fixedly connected to the frame (5), and the output shaft of the first motor (304) passes through the frame (5), the bearing (303) and connects to the housing of the turntable (301).

5. The manufacturing process of a high-voltage piezoelectric actuator according to claim 1, characterized in that, The feeding conveyor (1) and the dipping mechanism (4) are distributed on both sides of the robot (3), and the discharging conveyor (2) is located at the bottom of the robot (3). The feeding conveyor (1) and the discharging conveyor (2) are arranged in parallel to each other.

6. The manufacturing process of a high-voltage piezoelectric actuator according to claim 1, characterized in that, The two ends of the feeding tee (307) away from the suction cup (308) are connected, one end of which is used to connect to the negative pressure source, and the other end is sealed with the coupling (306). Two ends of the feeding tee (404) are connected to the two ends of the material box (403), and the other end of the feeding tee (404) is connected to the silver paste feeding equipment.

7. The manufacturing process of a high-voltage piezoelectric actuator according to claim 1, characterized in that, Both the first motor (304) and the second motor (305) are closed-loop stepper motors.

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