A vacuum rectangular valve suitable for semiconductor industry

Abstract

The application discloses a vacuum rectangular valve suitable for the semiconductor industry, which comprises a valve fixing mechanism, a cylinder assembly and a setting piece, a guide assembly, a lifting assembly and an external air circuit; the valve fixing mechanism comprises a vacuum cavity, a cavity connecting plate and a fixing base, the vacuum cavity is fixed on the top of the cavity connecting plate through bolts, and the fixing base is fixed on the bottom of the cavity connecting plate; the application selects a standard cylinder assembly as a power source, designs an auxiliary guide mechanism according to the characteristic that the piston rod cannot bear radial impact load, and transmits the radial force to the mounting base, so as to protect the lifting assembly; the valve lifting and closing stroke and the cam groove are designed in the application, so that friction is not generated when the valve is closed, and the low vibration in the action cycle is ensured through the lifting and closing stroke ratio, so that the generation of micro particles is greatly reduced.

Description

Technical Field

[0001] This invention relates to the field of valve technology, specifically a vacuum rectangular valve suitable for the semiconductor industry. Background Technology

[0002] In the semiconductor industry, valves in each chamber are of paramount importance. Their sealing performance, stability, low vibration, and ease of maintenance have a significant impact on the efficiency and yield of the entire process.

[0003] However, in actual use, current valves are generally driven by self-designed cylinders and the valve lifting and lowering actions are completed by designing corresponding air circuits. Such valves are complicated to assemble, and the valves are scrapped after the air circuit fails. In addition, there will be some friction on the sealing surface when closing and opening, which can easily generate tiny particles and contaminate the chamber environment. Summary of the Invention

[0004] The purpose of this invention is to provide a vacuum rectangular valve suitable for the semiconductor industry, in order to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: including a valve fixing mechanism, a cylinder assembly and mounting components, a guide assembly, a lifting assembly, and an external air passage;

[0006] The valve fixing mechanism includes a vacuum chamber, a chamber connecting plate, and a fixing seat. The vacuum chamber is fixedly mounted on the top of the chamber connecting plate by bolts, and the fixing seat is fixedly mounted on the bottom of the chamber connecting plate.

[0007] The cylinder assembly and its components include a cylinder assembly, a guide support, a bottom connecting plate, and a connecting seat. The cylinder assembly is fixedly mounted on the bottom of the fixed seat by bolts. The guide support is fixedly mounted on the outside of the cylinder assembly. The bottom connecting plate is fixedly mounted on the bottom of the guide support. The connecting seat is fixedly mounted on the bottom of the output end of the cylinder assembly, and the connecting seat is movably mounted on the inner wall of the guide support.

[0008] The guide assembly includes a cam groove, a left guide block, a right guide block, and a limiting block. The cam groove is fixedly installed on the top of the connecting seat. There are two cam grooves. The left guide block and the right guide block are respectively fixedly installed on the opposite sides of the two cam grooves. A limiting block is fixedly installed at one end of the opposite side of the left guide block and the right guide block by bolts.

[0009] The lifting assembly includes a valve, bearing screw, bearing, drive shaft nut, drive shaft, drive shaft seat, bellows pressure block, bellows, and spring. The spring is fixedly mounted in the middle of the top of the connecting seat. The top of the connecting seat is movably mounted to the inner wall of the drive shaft seat. The drive shaft is fixedly mounted in the middle of the drive shaft seat. The bearing screw is fixedly mounted on the surface of the drive shaft seat, and the bearing is rotatably mounted on the surface of the bearing screw. The bearing screw passes through the drive shaft seat and is fixedly mounted on the surface of the drive shaft. The drive shaft is fixedly passed through and extends to the top of the cavity connecting plate. The valve is fixedly mounted on the top of the drive shaft. The bellows pressure block is fixedly mounted at one end of the drive shaft corresponding to the position of the cavity connecting plate, and the bellows is fixedly mounted at the bottom of the bellows pressure block. The bellows is fixedly mounted on the top of the drive shaft seat. The drive shaft nut is fixedly mounted at one end of the two cam grooves facing each other.

[0010] Preferably, an O-ring is provided between the vacuum chamber and the chamber connecting plate, and there are two fixing seats, which are symmetrically arranged about the vertical axis of the midpoint of the chamber connecting plate. The bottom of the fixing seat is designed with a guide structure and a rotary joint structure.

[0011] Preferably, the guide support has a guide groove and a sensor mounting slide inside, and distance sensors are installed at both ends of the connecting seat.

[0012] Preferably, the two cam grooves are symmetrically arranged about the vertical axis of the midpoint of the connecting seat, the left guide block and the right guide block are of equal size, and the left guide block and the right guide block are symmetrically arranged about the vertical axis of the midpoint of the connecting seat.

[0013] Preferably, the drive shaft seat has a hollow structure in the middle, and the valve surface is provided with a sealing ring.

[0014] Preferably, the external air circuit includes a gas branching pressure control instrument. The surface of the gas branching pressure control instrument is connected to a three-way adapter via a flexible hose. There are two three-way adapters, and the output ends of the two three-way adapters are respectively fixedly connected to an upper air intake pipe and a lower air intake pipe. The upper air intake pipe is fixedly connected to the air intake port at the top of the cylinder assembly, and the lower air intake pipe is fixedly connected to the air outlet port at the bottom of the cylinder assembly.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] 1. This invention selects a standard cylinder assembly as the power source and designs an auxiliary guide mechanism to address the characteristic that the piston rod cannot withstand radial impact loads. By transmitting the radial force to the mounting seat, the lifting assembly is protected. This invention also ensures that the valve does not generate friction when it is closed by designing the valve's rising and closing strokes and cam groove. Furthermore, the rising and closing stroke ratio ensures low vibration during the operating cycle, thereby greatly reducing the generation of microparticles.

[0017] 2. This invention also offers advantages in terms of economy by using standard cylinder components, and avoids radial impact loads on the piston rod during the stroke through related structural design, thereby improving the service life of the cylinder components. The invention also ensures the accuracy of the valve in the closed position through the designed cam groove structure, and obtains the contour curve through calculation and analysis, and adds a buffer curve based on the actual movement. The invention avoids friction and reduces the generation of contaminant particles through the swing closing method. Attached Figure Description

[0018] Figure 1 This is an exploded view of the overall structure of a vacuum rectangular valve suitable for the semiconductor industry according to the present invention;

[0019] Figure 2 This is an assembly diagram of the overall structure of a vacuum rectangular valve suitable for the semiconductor industry according to the present invention;

[0020] Figure 3 This is a cross-sectional view along the initial position of AA of the overall structure of a vacuum rectangular valve applicable to the semiconductor industry according to the present invention;

[0021] Figure 4 This is a cross-sectional view along the middle position of AA, showing the overall structure of a vacuum rectangular valve applicable to the semiconductor industry according to the present invention.

[0022] Figure 5 This is a cross-sectional view along the closed position of AA, showing the overall structure of a vacuum rectangular valve applicable to the semiconductor industry according to the present invention.

[0023] Figure 6 This is a schematic diagram of an external gas path structure for a vacuum rectangular valve suitable for the semiconductor industry according to the present invention.

[0024] In the diagram: 1. Cylinder assembly; 2. Vacuum chamber; 3. Chamber connecting plate; 4. Fixing seat; 5. Valve; 6. Guide support; 7. Bottom connecting plate; 8. Connecting seat; 9. Cam groove; 10. Left guide block; 11. Right guide block; 12. Bearing screw; 13. Bearing; 14. Limiting block; 15. Drive shaft nut; 16. Drive shaft; 17. Drive shaft seat; 18. Bellows pressure block; 19. Bellows; 20. Spring; 21. Gas branch pressure control instrument; 22. T-connector; 23. Upper intake pipe; 24. Lower intake pipe. Detailed Implementation

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] Please see Figure 1-6 The present invention provides a technical solution including a valve fixing mechanism, a cylinder assembly and connecting parts, a guide assembly, a lifting assembly and an external air circuit;

[0027] The valve fixing mechanism includes a vacuum chamber 2, a chamber connecting plate 3, and a fixing seat 4. The vacuum chamber 2 is fixedly installed on the top of the chamber connecting plate 3 by bolts, and the fixing seat 4 is fixedly installed on the bottom of the chamber connecting plate 3.

[0028] The cylinder assembly and connecting parts include a cylinder assembly 1, a guide support 6, a bottom connecting plate 7 and a connecting seat 8. The cylinder assembly 1 is fixedly installed on the bottom of the fixed seat 4 by bolts. The guide support 6 is fixedly installed on the outside of the cylinder assembly 1. The bottom connecting plate 7 is fixedly installed on the bottom of the guide support 6. The connecting seat 8 is fixedly installed on the bottom of the output end of the cylinder assembly 1, and the connecting seat 8 is movably connected to the inner wall of the guide support 6.

[0029] The guide assembly includes a cam groove 9, a left guide block 10, a right guide block 11, and a limiting block 14. The cam groove 9 is fixedly installed on the top of the connecting seat 8. There are two cam grooves 9. The left guide block 10 and the right guide block 11 are respectively fixedly installed on the opposite sides of the two cam grooves 9. The limiting block 14 is fixedly installed on one end of the opposite side of the left guide block 10 and the right guide block 11 by bolts.

[0030] The lifting assembly includes a valve 5, a bearing screw 12, a bearing 13, a drive shaft nut 15, a drive shaft 16, a drive shaft seat 17, a bellows pressure block 18, a bellows 19, and a spring 20. The spring 20 is fixedly installed in the middle of the top of the connecting seat 8. The top of the connecting seat 8 is movably connected to the inner wall of the drive shaft seat 17. The drive shaft 16 is fixedly installed in the middle of the drive shaft seat 17. The bearing screw 12 is fixedly installed on the surface of the drive shaft seat 17, and the bearing 13 is rotatably connected to the surface of the bearing screw 12. The bearing screw 12 passes through the drive shaft seat 17 and is fixedly installed on the surface of the drive shaft 16. The drive shaft 16 is fixedly passed through and extends to the top of the cavity connecting plate 3. The valve 5 is fixedly installed on the top of the drive shaft 16. The bellows pressure block 18 is fixedly installed at one end of the drive shaft 16 corresponding to the position of the cavity connecting plate 3, and the bellows 19 is fixedly installed at the bottom of the bellows pressure block 18. The bellows 19 is fixedly installed on the top of the drive shaft seat 17. The drive shaft nut 15 is fixedly installed at one end of the opposite face of the two cam grooves 9.

[0031] An O-ring is provided between the vacuum chamber 2 and the chamber connecting plate 3. There are two fixing seats 4, and the two fixing seats 4 are symmetrically arranged about the vertical axis of the midpoint of the chamber connecting plate 3. The bottom of the fixing seat 4 is designed with a guide structure and a rotary joint structure.

[0032] The guide support 6 has a guide groove and a sensor mounting slide inside, and distance sensors are installed at both ends of the connecting seat 8.

[0033] The two cam grooves 9 are symmetrically arranged about the vertical axis of the midpoint of the connecting seat 8. The left guide block 10 and the right guide block 11 are of equal size and are symmetrically arranged about the vertical axis of the midpoint of the connecting seat 8. The left guide block 10 and the right guide block 11 can provide auxiliary guidance for the lifting and lowering of the valve 5. The cam groove 9 is designed with a calculated contour curve for the closing action of the valve 5.

[0034] The drive shaft seat 17 has a hollow structure in the middle. The surface of the valve 5 is provided with a sealing ring. The drive shaft 16 and the drive shaft seat 17 are fixed together by a set screw to prevent relative rotation between the drive shaft 16 and the drive shaft seat 17. The bellows 19 is fixed by the bellows pressure block 18 to keep the bellows 19 from rotating or moving.

[0035] The external air circuit includes a gas branching pressure control instrument 21. The surface of the gas branching pressure control instrument 21 is connected to a three-way adapter 22 via a flexible hose. There are two three-way adapters 22, and the output ends of the two three-way adapters 22 are respectively fixedly installed with an upper air intake pipe 23 and a lower air intake pipe 24. The upper air intake pipe 23 is fixedly installed in the air intake hole at the top of the cylinder assembly 1, and the lower air intake pipe 24 is fixedly installed in the air outlet hole at the bottom of the cylinder assembly 1.

[0036] Working principle: In use, when valve 5 is in its initial position, the upper intake pipe 23 and lower intake pipe 24 in the external air circuit connect to the intake and exhaust ports of the standard cylinder assemblies 1 on both sides. When the system starts running, cylinder assembly 1 begins to move upward, driving the connecting seat 8 to rise along with it through the fixed structure on the connecting seat 8. At this time, spring 20 is continuously compressed, and the lower bearing 13 is restricted within the contour of cam groove 9. The upper limit is restricted by the left guide block 10 and the right guide block 11. At this time, valve 5, drive shaft 16, and drive shaft seat 17 rise linearly, and bellows 19 is in a compressed state. When the upper bearing 13 in the lifting assembly reaches the upper limit position, that is, when the limit block 14 is in the restriction structure of the fixed seat 4, the lifting assembly stops. During the upward motion, the lower bearing 13 is positioned within the contour of the cam groove 9, and the bearing 13 is separated from the left guide block 10 and the right guide block 11. Due to the structural design of the cam groove 9, the cylinder assembly 1 can continue to move for a certain stroke, thereby completing the closing of the valve 5. When the cylinder assembly 1 continues to move, since the upper bearing 13 is in a rotating pair state, the valve 5, the drive shaft 16, and the drive shaft seat 17 rotate as a whole. At the same time, the lower bearing 13 is positioned within the contour of the cam groove 9, and its maximum rotation angle is determined. When the valve 5 is closed and sealed, the cylinder assembly 1 stops moving, and the cam groove 9 structure plays a role in limiting and maintaining the position. When the valve 5 is opened, its movement process is the reverse of the above sequence, that is, it swings open the valve and then descends linearly to the initial position.

[0037] 1. The present invention can use a standard cylinder assembly 1, which is economical. By designing the relevant structure, the radial impact load on the piston rod during the stroke is avoided, thereby improving the service life of the cylinder assembly 1.

[0038] Second, the present invention ensures the accuracy of valve 5 in the closed position through the designed cam groove 9 structure, and obtains the contour curve through calculation and analysis, and adds a buffer curve according to the actual movement.

[0039] Third, this invention avoids friction and reduces the generation of polluting particles by using a swing-off closing method.

[0040] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0041] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum rectangular valve suitable for the semiconductor industry, characterized in that: This includes valve fixing mechanisms, cylinder assemblies and mounting components, guide assemblies, lifting assemblies, and external air passages; The valve fixing mechanism includes a vacuum chamber (2), a chamber connecting plate (3), and a fixing seat (4). The vacuum chamber (2) is fixedly mounted on the top of the chamber connecting plate (3) by bolts, and the fixing seat (4) is fixedly mounted on the bottom of the chamber connecting plate (3). The cylinder assembly and its components include a cylinder assembly (1), a guide support (6), a bottom connecting plate (7), and a connecting seat (8). The cylinder assembly (1) is fixedly mounted on the bottom of the fixed seat (4) by bolts. The guide support (6) is fixedly mounted on the outside of the cylinder assembly (1). The bottom connecting plate (7) is fixedly mounted on the bottom of the guide support (6). The connecting seat (8) is fixedly mounted on the bottom of the output end of the cylinder assembly (1), and the connecting seat (8) is movably mounted on the inner wall of the guide support (6). The guide assembly includes a cam groove (9), a left guide block (10), a right guide block (11), and a limiting block (14). The cam groove (9) is fixedly installed on the top of the connecting seat (8). There are two cam grooves (9). The left guide block (10) and the right guide block (11) are respectively fixedly installed on the opposite sides of the two cam grooves (9). The limiting block (14) is fixedly installed on one end of the opposite side of the left guide block (10) and the right guide block (11) by bolts. When the limit block (14) is in the limiting structure of the fixed seat (4), the lifting assembly stops rising. At this time, the lower bearing (13) is located in the contour of the cam groove (9). The lifting assembly includes a valve (5), a bearing screw (12), a bearing (13), a drive shaft nut (15), a drive shaft (16), a drive shaft seat (17), a bellows pressure block (18), a bellows (19), and a spring (20). The spring (20) is fixedly disposed at the middle of the top of the connecting seat (8). The top of the connecting seat (8) is movably disposed with respect to the inner wall of the drive shaft seat (17). The drive shaft (16) is fixedly disposed at the middle of the drive shaft seat (17). The bearing screw (12) is fixedly disposed on the surface of the drive shaft seat (17), and the bearing (13) is rotatably disposed on the surface of the bearing screw (12). The bearing screw (12) passes through the drive shaft seat (17) and is fixedly mounted on the surface of the drive shaft (16). The drive shaft (16) is fixedly passed through and extends to the top of the cavity connecting plate (3). The valve (5) is fixedly mounted on the top of the drive shaft (16). The bellows block (18) is fixedly mounted at one end of the drive shaft (16) corresponding to the position of the cavity connecting plate (3). The bellows (19) is fixedly mounted at the bottom of the bellows block (18). The bellows (19) is fixedly mounted on the top of the drive shaft seat (17). The drive shaft nut (15) is fixedly mounted at one end of the opposite face of the two cam grooves (9).

2. A vacuum rectangular valve suitable for the semiconductor industry according to claim 1, characterized in that: An O-ring is provided between the vacuum chamber (2) and the chamber connecting plate (3). There are two fixing seats (4), and the two fixing seats (4) are symmetrically arranged about the vertical axis of the midpoint of the chamber connecting plate (3). The bottom of the fixing seat (4) is designed with a guide structure and a rotating pair structure.

3. A vacuum rectangular valve suitable for the semiconductor industry according to claim 1, characterized in that: The guide support (6) is provided with a guide groove and a sensor mounting slide inside, and distance sensors are installed at both ends of the connecting seat (8).

4. A vacuum rectangular valve suitable for the semiconductor industry according to claim 1, characterized in that: The two cam grooves (9) are symmetrically arranged about the vertical axis of the midpoint of the connecting seat (8). The left guide block (10) and the right guide block (11) are equal in size and are symmetrically arranged about the vertical axis of the midpoint of the connecting seat (8).

5. A vacuum rectangular valve suitable for the semiconductor industry according to claim 1, characterized in that: The drive shaft seat (17) has a hollow structure in the middle, and the valve (5) has a sealing ring on its surface.

6. A vacuum rectangular valve suitable for the semiconductor industry according to claim 1, characterized in that: The external air circuit includes a gas branching pressure control instrument (21). The surface of the gas branching pressure control instrument (21) is connected to a three-way adapter (22) via a flexible hose. There are two three-way adapters (22), and the output ends of the two three-way adapters (22) are respectively fixedly connected to an upper air intake pipe (23) and a lower air intake pipe (24). The upper air intake pipe (23) is fixedly connected to the air intake hole at the top of the cylinder assembly (1), and the lower air intake pipe (24) is fixedly connected to the air outlet hole at the bottom of the cylinder assembly (1).

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