Double-tube synchronous control tube furnace control device and method

Abstract

The application provides a double-tube synchronous control tube furnace control device and method, relates to the field of solar cell manufacturing, and comprises a vacuum system, an RF power supply system, a gas control system and a temperature control system. The temperature control system controls two furnace tubes in a row to simultaneously perform a process. The method is applicable to single-row multi-layer and double-row multi-layer furnace tube arrangements. The double-row multi-layer furnace tube arrangement further comprises a sheet inserting machine, a connection table, a three-degree-of-freedom boat pushing mechanism and a double-layer boat carrying manipulator. The single-row multi-layer furnace tube arrangement further comprises a sheet inserting machine, a connection table, an upper and lower synchronous boat pushing module and a double-layer boat carrying manipulator. The application adopts an upper and lower two-tube simultaneous process scheme. When the furnace tubes are arranged in a double-row multi-layer manner, the two rows of furnace tubes independently work. A three-degree-of-freedom boat pushing mechanism is adopted. When the furnace tubes are arranged in a single-row multi-layer manner, the upper and lower two furnace tubes adopt the same set of RF power supply system, gas control system and vacuum system, and an upper and lower integrated boat pushing mechanism is simultaneously adopted. The method improves the equipment utilization rate, reduces the equipment cost and volume.

Description

Technical Field

[0001] This application relates to the field of solar cell manufacturing, and in particular to a control device and method for a tube furnace with dual-tube synchronous control. Background Technology

[0002] Tube furnaces are used in the thermal processes of solar cell manufacturing, including ALD, PECVD, LPCVD, and diffusion. Currently, there are two main control schemes for tube furnaces: single-row multilayer and double-row multilayer.

[0003] When the tube furnace control scheme is a dual-tube machine, control defects may lead to relatively high production reduction costs. If one of the two automated inserters on the left and right sides malfunctions, it will affect the shutdown of one side of the furnace. Simultaneous control of the left and right sides would require a complete shutdown of the equipment, wasting capacity. The dual-row tube furnace uses a set of synchronous boat-pushing mechanisms to move multiple layers along the equipment's height, which severely impacts capacity. Currently, the scheme using one pusher mechanism per layer results in an overly compact cleanroom space, requiring space to be reserved for quartz tube maintenance from the gas source cabinet direction, leading to a longer gas source cabinet and consequently a longer overall equipment length and larger footprint. The synchronous boat-pushing mechanism for each layer uses a combination of two pusher mechanisms, which is relatively expensive. The synchronous pusher module needs to remain idle until the process is complete and the boats are unloaded before the next loading and pushing can begin.

[0004] Because each furnace tube in a single-row machine corresponds one-to-one with the temperature control, RF power supply, vacuum, and gas control systems, and because a single-row machine typically uses one pusher module for each furnace tube, the pusher module needs to remain idle until the process is complete after pushing the tube out of the furnace. Only after the tube is unloaded can the next loading and pushing process begin. This results in high costs and low utilization rates for existing single-tube machines. Summary of the Invention

[0005] This application aims to at least partially address one of the technical problems in the related art.

[0006] Therefore, this application proposes a control device and method for a tubular furnace with dual-tube synchronous control.

[0007] This invention is achieved using the following technical solution:

[0008] The first aspect of this application proposes a tube furnace control device with dual-tube synchronous control, including a vacuum system, a radio frequency power supply system, a gas control system and a temperature control system. The temperature control system controls two furnace tubes in a row to perform simultaneous processing. The device is applicable to single-row multi-layer and double-row multi-layer furnace tube arrangements.

[0009] The structure of the double-row multi-layer furnace tube arrangement also includes a plate inserter, a docking platform, a three-degree-of-freedom boat pushing mechanism, and a double-layer boat handling robot.

[0010] The structure of the single-row multi-layer furnace tube arrangement also includes a plate inserter, a connecting platform, an upper and lower set of synchronous boat pushing modules, and a double-layer boat moving robot.

[0011] The second aspect of this application provides a method for use in any of the apparatuses described in the first aspect, wherein the furnace tubes are arranged in a double-row, multi-layer configuration, comprising:

[0012] The silicon wafers are inserted into the boat by the wafer insertion machine, and the boat 1, which is filled with silicon wafers by the left-side wafer insertion robot, is transported to the left-side flow line of the clean bench.

[0013] The process line starts, transporting the boats on the process line to the double-layer boat-handling robot. The docking station transports the boat 2 with the silicon wafer inserted by the right-side wafer inserter and prepares it for placement on the process line.

[0014] The left-side double-layer boat-moving robot transports boat 1 to the double-layer boat-moving robot's workstation, and the connecting platform places the waiting boat 2 on the left-side conveyor line to be transported to the double-sided boat-moving robot.

[0015] The left-side double-layer boat-moving robot moves boat 2 to the lower workstation. A set of two synchronously controlled three-degree-of-freedom boat-pushing mechanisms moves to the left-side upper boat position to wait. The docking station waits and moves boat 3, which has been inserted by the left-side inserter, to the right-side streamline of the clean bench.

[0016] The left-side double-layer boat-moving robot places the boat on the three-degree-of-freedom boat-pushing mechanism. The right-side streamline starts and transports boat 3 to the right-side double-layer boat-moving robot. The docking station then transports boat 4, which has been inserted by the right-side inserter, to the right-side streamline of the cleanroom station to await transport.

[0017] The upper and lower three-degree-of-freedom boat pushing mechanisms send the boat into the furnace tube and exit the left boat loading position to wait. The double-layer boat moving robot moves boat 3 to the double-layer boat moving robot's working position. The docking platform places boat 4 on the right streamline and transports it to the double-layer boat moving robot.

[0018] The upper and lower sets of three-degree-of-freedom boat pushing mechanisms move laterally to the right boat pushing position to wait, and the right-side double boat moving robots move boat 4 to the lower boat moving station to prepare for loading onto the boat;

[0019] The double-layered boat-moving robot on the right places the boat onto the upper and lower sets of three-degree-of-freedom boat-pushing mechanisms;

[0020] The upper and lower three-degree-of-freedom boat pushing mechanisms push the boat into the synchronously controlled upper and lower furnace tubes, and then retreat to the right boat entry point position;

[0021] The upper and lower sets of three-degree-of-freedom boat-pushing mechanisms move laterally to the left side of the boat entry point, waiting for the process to be completed and the boat to be unloaded.

[0022] After the processes of the upper and lower tubes on the left are completed, the upper and lower boat pushing mechanism picks up the boat and returns it to the original position, and the double-layer boat-moving robot moves to the designated position to wait for boat retrieval.

[0023] The double-layered robotic arm on the left retrieves the boat and transports it to the buffer platform for cooling.

[0024] The two sets of three-degree-of-freedom boat-pushing mechanisms on the left side move laterally to the right side boat-entry origin position, waiting for the process to be completed and the boat to be unloaded;

[0025] After the processes of the upper and lower tubes on the right are completed, the upper and lower boat pushing mechanism picks up the boat and returns it to the original position, while the double-layer boat-moving robot on the right moves to the designated position to wait for the boat to be picked up.

[0026] The double-layered boat-moving robot on the right side retrieves the boat and transports it to the buffer platform for cooling;

[0027] After boats 1 and 2 on the left have cooled down, the double-layer boat-moving robot will move boats 1 and 2 to the flow line. First, boat 2 will be placed at the lower workstation and transported to the docking station on the flow line.

[0028] The docking station transports boat 2 to the inserting machine, and the double-layer boat-moving robot moves boat 1 up and down the workstation to place it on the conveyor line and transport it out.

[0029] The wafer insertion machine on the left picks up the silicon wafer from boat 2, and boat 2 proceeds to the next round of transfer. The transfer platform transports boat 1 to the wafer insertion machine.

[0030] The wafer inserter on the left takes the silicon wafer from boat 1, and boat 1 proceeds to the next round of processing.

[0031] Optionally, the three-degree-of-freedom boat pushing mechanism has one station for placing boats on each layer, with the upper and lower layers forming a group and being driven simultaneously. The initial position before pushing the boat is set as the origin, and the boat is pushed to the limit position inside the tube. The double-layer boat moving robot has two stations for placing boats and simultaneously moving two boats. The upper and lower stations of the double-layer boat moving robot can be moved between stations in the Z-boat direction.

[0032] Optionally, if one row of automated inserting equipment malfunctions, the furnace tubes in that row will be shut down, while the other row of furnace tubes will continue to operate normally.

[0033] A third aspect of this application provides a method for use in any of the apparatuses described in the first aspect, wherein the furnace tubes are arranged in a single row of multiple layers, comprising:

[0034] The transfer platform facilitates the transfer of boats to the streamlined route in two stages;

[0035] The streamlined process transports the boat to the upper and lower double-layered boat-moving robotic arms in two stages.

[0036] The upper and lower double-layer boat-moving robot moves the boat to its upper and lower workstations in two steps through workstation flow, and then moves the boat to the upper and lower synchronous boat-pushing module, which pushes the boat into the furnace tube.

[0037] The beneficial effects of this application are:

[0038] The device proposed in this application is compatible with both single-row and double-row multi-layer furnace tube arrangements. When the furnace tubes are arranged in double-row multi-layer configurations, a three-degree-of-freedom pusher mechanism is adopted, with the two rows of furnace tubes operating independently, thereby improving equipment uptime and reducing equipment cost and size. When the furnace tubes are arranged in a single-row multi-layer configuration, the upper and lower furnace tubes use the same set of radio frequency power supply system, gas control system, and vacuum system, while simultaneously employing an integrated pusher mechanism, reducing the number of pusher mechanism components, reducing equipment cost, improving equipment uptime, and increasing maintenance space. Attached Figure Description

[0039] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein:

[0040] Figure 1 This is a schematic diagram of a tube furnace control device with dual-tube synchronous control proposed in this application;

[0041] Figure 2 The furnace tube arrangement proposed in this application is a single-flow, four-furnace boat process with a double-row, multi-layer, single-row furnace tube arrangement. Detailed Implementation

[0042] The embodiments of this application are described in detail below, with examples of these embodiments illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application.

[0043] like Figure 1 As shown, the device proposed in this application includes a vacuum system, a radio frequency power supply system, a gas control system and a temperature control system. The temperature control system controls two furnace tubes in a row to perform simultaneous processing. The device is applicable to single-row multi-layer and double-row multi-layer furnace tube arrangements.

[0044] like Figure 1 As shown, the modules and their corresponding numbers are as follows:

[0045] 1-Insertion machine, 2-Connecting platform, 3-Streamline, 4-Double-layer boat-moving robot, 5-Three-degree-of-freedom boat-pushing mechanism.

[0046] The structure of the double-row multi-layer furnace tube arrangement also includes a plate inserter 1, a connecting platform 2, a three-degree-of-freedom boat pushing mechanism 5, and a double-layer boat moving robot 4.

[0047] The structure of a single-row multi-layer furnace tube arrangement also includes a plate inserter 1, a connecting platform 2, an upper and lower set of synchronous boat pushing modules and a double-layer boat moving robot 4.

[0048] In this embodiment, the arrangement of the double-row multi-layer furnace tubes is first described in detail. Since each row is independent of the others, as... Figure 2 As shown, the single-flow four-furnace loading process is as follows:

[0049] Silicon wafers are inserted into the boat using the wafer inserter 1. The boat 1, filled with silicon wafers by the robotic arm of the wafer inserter 1 on the left, is then moved to the left flow line of the clean bench.

[0050] The streamline is started, and the boat on the transport line is moved to the double-layer boat handling robot 4. The docking station 2 moves the boat 2 with the silicon wafer inserted by the right-side insertion machine 1 and prepares it to be placed on the streamline.

[0051] The left-side double-layer boat-moving robot 4 transports boat 1 to the workstation on the double-layer boat-moving robot 4, and the connecting platform 2 places the waiting boat 2 on the left-side conveyor line and transports it to the double-sided boat-moving robot.

[0052] The left-side double-layer boat-moving robot 4 moves boat 2 to the lower workstation. A set of two synchronously controlled three-degree-of-freedom boat-pushing mechanisms 5 moves to the left-side upper boat position to wait. The docking station 2 waits and moves the boat 3 with the inserter 1 inserted on the left to the right streamline of the clean station.

[0053] The left double-layer boat-moving robot 4 places the boat on the three-degree-of-freedom boat-pushing mechanism. The right streamline starts and transports the boat 3 to the right double-layer boat-moving robot 4. The docking platform 2 transports the boat 4 with the inserter 1 inserted on the right to the right streamline of the clean table to wait for transport.

[0054] The upper and lower three-degree-of-freedom boat pushing mechanisms send the boat into the furnace tube and exit the left boat position to wait. The double-layer boat moving robot 4 transports the boat 3 to the upper work station of the double-layer boat moving robot 4. The docking platform places the boat 4 on the right streamline and transports it to the double-layer boat moving robot 4.

[0055] The two sets of three-degree-of-freedom boat pushing mechanisms 5 move laterally to the right boat pushing position to wait, and the right-side double boat moving robots move the boat 4 to the lower boat moving position, ready to be loaded onto the boat;

[0056] The right-side double-layer boat-moving robot 4 places the boat on the upper and lower sets of three-degree-of-freedom boat-pushing mechanisms 5;

[0057] The upper and lower three-degree-of-freedom boat pushing mechanisms 5 push the boat into the synchronously controlled upper and lower furnace tubes, and then retreat to the right boat entry point position;

[0058] The upper and lower sets of three-degree-of-freedom boat pushing mechanisms 5 are moved laterally to the left boat entry point position, waiting for the process to be completed and the boat to be unloaded;

[0059] After the processes of the upper and lower tubes on the left are completed, the upper and lower boat pushing mechanism picks up the boat and returns it to the original position. The double-layer boat-moving robot 4 moves to the designated position to wait for the boat to be picked up.

[0060] The left-side double-layered boat-moving robot arm 4 picks up the boat and transports it to the buffer platform for cooling;

[0061] The two sets of three-degree-of-freedom boat-pushing mechanisms on the left side move laterally to the right boat-entry origin position, waiting for the process to be completed and the boat to be unloaded.

[0062] After the processes of the upper and lower tubes on the right are completed, the upper and lower boat pushing mechanism picks up the boat and returns it to the original position, and the double-layer boat moving robot on the right moves to the designated position to wait for the boat to be picked up.

[0063] The right-side double-layered boat-moving robot arm 4 picks up the boat and transports it to the buffer platform for cooling;

[0064] After boats 1 and 2 on the left are cooled, the double-layer boat-moving robot 4 moves boats 1 and 2 to the flow line, first placing boat 2 at the lower workstation and transporting it to the docking platform 2 on the flow line.

[0065] The docking station 2 transports boat 2 to the inserting machine 1, and the double-layer boat handling robot 4 moves up and down the workstation to place boat 1 on the conveyor line and transport it out.

[0066] Left-side wafer inserter 1 picks up a silicon wafer from boat 2, boat 2 proceeds to the next round of transfer, and docking station 2 transports boat 1 to wafer inserter 1;

[0067] Left-side wafer inserter 1 picks up a silicon wafer from boat 1, and boat 1 proceeds to the next round of transfer;

[0068] The steps on the right to transport the cached boat out are the same as those on the left.

[0069] Among them, such as Figure 2 As shown, 0 indicates that there is no boat at this workstation, and 1 indicates that the boat has been completed at this workstation and is waiting to proceed to the next process.

[0070] In this embodiment, the three-degree-of-freedom boat pushing mechanism 5 has one station for placing boats on each layer, with the upper and lower layers forming a group and being driven simultaneously. The initial position before pushing the boat is set as the origin position, and the boat is pushed to the limit position inside the tube. The double-layer boat moving robot 4 has two stations for placing boats and simultaneously moving two boats. The upper and lower stations of the double-layer boat moving robot 4 can be moved through the Z-boat direction.

[0071] In this embodiment of the application, if a row of automated inserting equipment malfunctions and shuts down, the furnace tubes in that row will stop, while the other row of furnace tubes will operate normally.

[0072] In addition, if one row of automated inserting equipment malfunctions and requires replacement of parts, the furnace tubes of the other row need to be stopped.

[0073] In this embodiment, the furnace tubes on both sides are independent of each other. The use of a three-degree-of-freedom pusher mechanism 5 can improve the utilization rate of the pusher mechanism. The three-degree-of-freedom pusher mechanism 5 reduces the cost of the pusher mechanism by eliminating one set of paddles, linear modules and paddle fixing parts. The three-degree-of-freedom pusher mechanism 5 provides space for the maintenance of the quartz tube, thereby avoiding the need to lengthen the gas source cabinet to allow space for the maintenance of the quartz tube, and significantly shortening the length of the gas source cabinet, thereby reducing the size of the equipment.

[0074] Secondly, the specific working process of the single-row multi-layer furnace tube arrangement is described in detail in this embodiment of the application:

[0075] The transfer platform facilitates the transfer of boats to the streamlined route in two separate steps.

[0076] The streamlined process transports the boat to four points on the upper and lower double-layered boat-moving robotic arms in two stages.

[0077] The double-layer boat-moving robot 4 moves the boat to its upper and lower workstations in two steps through workstation flow, and then moves the boat to the upper and lower synchronous boat-pushing module, which pushes the boat into the furnace tube.

[0078] In this embodiment, the upper and lower furnace tubes utilize the same set of RF power supply system, gas control system, and vacuum system, and employ an integrated upper and lower pusher mechanism. This reduces the number of pusher mechanism components. Furthermore, one set of upper and lower pusher mechanisms can simultaneously support multiple sets of upper and lower furnace tubes, effectively reducing equipment costs. This also reduces idle time and increases uptime. By using one set of upper and lower pusher mechanisms to support multiple sets of upper and lower furnace tubes, when a furnace tube requires maintenance, the up-and-down movement of the module creates space for maintenance, increasing maintenance capacity.

[0079] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0080] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0081] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between components; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0082] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0083] In this application, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0084] Although the above embodiments have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application. Any changes, modifications, substitutions and variations made to the above embodiments by those skilled in the art are within the protection scope of the present application.

Claims

1. A control device for a tubular furnace with dual-tube synchronous control, characterized in that, It includes a vacuum system, a radio frequency power supply system, a gas control system, and a temperature control system. The temperature control system controls two furnace tubes in a row to perform the process simultaneously. The device is applicable to single-row multi-layer and double-row multi-layer furnace tube arrangements. The structure of the double-row multi-layer furnace tube arrangement also includes a plate inserter, a docking platform, a three-degree-of-freedom boat pushing mechanism, and a double-layer boat handling robot. The structure of the single-row multi-layer furnace tube arrangement also includes a plate inserter, a connecting platform, an upper and lower set of synchronous boat pushing modules, and a double-layer boat moving robot.

2. A method applied to the tubular furnace control device of claim 1, characterized in that, When the furnace tubes are arranged in a double-row, multi-layer configuration, it includes: The silicon wafers are inserted into the boat by the wafer insertion machine, and the boat 1, which is filled with silicon wafers by the left-side wafer insertion robot, is transported to the left-side flow line of the clean bench. The process line starts, transporting the boats on the process line to the double-layer boat-handling robot. The docking station transports the boat 2 with the silicon wafer inserted by the right-side wafer inserter and prepares it for placement on the process line. The left-side double-layer boat-moving robot transports boat 1 to the double-layer boat-moving robot's workstation, and the connecting platform places the waiting boat 2 on the left-side conveyor line to be transported to the double-sided boat-moving robot. The left-side double-layer boat-moving robot moves boat 2 to the lower workstation. A set of two synchronously controlled three-degree-of-freedom boat-pushing mechanisms moves to the left-side upper boat position to wait. The docking station waits and moves boat 3, which has been inserted by the left-side inserter, to the right-side streamline of the clean bench. The left-side double-layer boat-moving robot places boats 1 and 2 on the three-degree-of-freedom boat-pushing mechanism. The right-side streamline starts and transports boat 3 to the right-side double-layer boat-moving robot. The docking station then transports boat 4, which has been inserted by the right-side inserter, to the right-side streamline of the cleanroom for transport. The upper and lower three-degree-of-freedom boat pushing mechanisms send boat 1 and boat 2 into the furnace tube and exit the left boat position to wait. The double-layer boat moving robot moves boat 3 to the double-layer boat moving robot's working position. The docking platform places boat 4 on the right streamline and transports it to the double-layer boat moving robot. The upper and lower sets of three-degree-of-freedom boat pushing mechanisms move laterally to the right boat pushing position to wait, and the right double-layer boat moving robot moves boat 4 to the lower boat moving station to prepare for loading onto the boat; The right-side double-layer boat-moving robot places boats 3 and 4 onto the upper and lower sets of three-degree-of-freedom boat-pushing mechanisms; The upper and lower three-degree-of-freedom boat pushing mechanisms push boats 3 and 4 into the synchronously controlled upper and lower furnace tubes, and then retreat to the right boat entry point position; The upper and lower sets of three-degree-of-freedom boat-pushing mechanisms move laterally to the left side of the boat entry point, waiting for the process to be completed and the boat to be unloaded. After the processes of the upper and lower tubes on the left are completed, the upper and lower boat pushing mechanism picks up the boat and returns it to the original position, and the double-layer boat-moving robot moves to the designated position to wait for boat retrieval. The double-layered robotic arm on the left retrieves the boat and transports it to the buffer platform for cooling. The two sets of three-degree-of-freedom boat-pushing mechanisms on the left side move laterally to the right side boat-entry origin position, waiting for the process to be completed and the boat to be unloaded; After the processes of the upper and lower tubes on the right are completed, the upper and lower boat pushing mechanism picks up the boat and returns it to the original position, while the double-layer boat-moving robot on the right moves to the designated position to wait for the boat to be picked up. The double-layered boat-moving robot on the right side retrieves the boat and transports it to the buffer platform for cooling; After boats 1 and 2 on the left have cooled down, the double-layer boat-moving robot will move boats 1 and 2 to the flow line. First, boat 2 will be placed at the lower workstation and transported to the docking station on the flow line. The docking station transports boat 2 to the inserting machine, and the double-layer boat-moving robot moves boat 1 up and down the workstation to place it on the conveyor line and transport it out. The wafer insertion machine on the left picks up the silicon wafer from boat 2, and boat 2 proceeds to the next round of transfer. The transfer platform transports boat 1 to the wafer insertion machine. The wafer inserter on the left takes the silicon wafer from boat 1, and boat 1 proceeds to the next round of processing.

3. The method according to claim 2, characterized in that, The three-degree-of-freedom boat pushing mechanism has one station for placing boats on each layer. The upper and lower layers form a group and are driven simultaneously. The initial position before pushing the boat is set as the origin. The boat is pushed to the limit position inside the tube. The double-layer boat moving robot has two stations for placing boats and simultaneously moving two boats. The upper and lower stations of the double-layer boat moving robot can rotate through the Z-axis direction.

4. The method according to claim 2, characterized in that, If one row of automated inserting equipment malfunctions, the furnace tubes in that row will stop and crash, while the other row of furnace tubes will continue to operate normally.

5. A method applied to the control device of the tubular furnace according to claim 1, characterized in that, When the furnace tubes are arranged in a single row and multiple layers, it includes: The transfer platform facilitates the transfer of boats to the streamlined route in two stages; The streamlined process transports the boat to the upper and lower double-layered boat-moving robotic arms in two stages. The upper and lower double-layer boat-moving robot moves the boat to its upper and lower workstations in two steps through workstation flow, and then moves the boat to the upper and lower synchronous boat-pushing module, which pushes the boat into the furnace tube.

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