Contact surface topography measurement instrument and method of mounting

Abstract

The application relates to the field of high-precision surface topography measuring instruments, and more particularly to a contact surface topography measuring instrument and a mounting method thereof. In some embodiments of the application, a probe connector connected with a fixing member is arranged on a barycentric line of the fixing member, so that Z-direction relative vibration between the probe and the fixing member is reduced, and then Z-direction relative vibration between a probe tip and a sample surface is reduced or eliminated, and the accuracy of the Z-direction height of the sample surface measured by the contact surface topography measuring instrument is improved. In some embodiments of the application, when the probe connector is arranged on the barycentric line of the fixing member, the barycenter of the probe connector and the fixing member as a whole is lowered, and is closer to the barycenter of the contact surface topography measuring instrument, so that Z-direction relative vibration between the probe and the contact surface topography measuring instrument is reduced or eliminated, and the accuracy of the measured Z-direction height is improved.

Description

Technical Field

[0001] This application relates to the field of high-precision surface topography measuring instruments, and more specifically, to a contact surface topography measuring instrument and its installation method. Background Technology

[0002] Contact surface topography measuring instruments such as atomic force microscopes, profilometers, and coordinate measuring machines typically have three sets of coarse positioning mechanisms in the X, Y, and Z directions. After coarse positioning is completed, the probe moves along the sample surface, and the trajectory of the probe tip relative to the sample reflects the contour of the sample surface.

[0003] The aforementioned contact surface topography measuring instrument is highly sensitive to mechanical vibration, and the installation method of the instrument, especially the fixing method of the probe, has a direct impact on mechanical stability. Figure 1 This is a top-view schematic diagram showing the positional relationship between the fixture and the probe connector in a contact surface topography measuring instrument of one design scheme. Figure 1 As shown, the displacement device is installed on the front side of the crossbeam in the center of the gantry frame, and the probe is hung on the front side of the displacement device, meaning the probe cantilevered forward relative to the crossbeam of the gantry frame. When environmental factors cause the gantry frame to experience pitching or vertical vibration, the probe will also vibrate in the Z-axis. Furthermore, because the probe extends forward to form a cantilever structure, the probe located at the bottom of the probe amplifies this vibration, resulting in a large relative Z-axis movement between the probe tip and the sample, which in turn increases the noise in the Z-axis height measurement. Summary of the Invention

[0004] In view of this, this application provides a Z-axis coarse positioning component and a contact surface topography measuring instrument to solve one or more technical problems in the prior art. This application achieves this as follows:

[0005] In a first aspect, embodiments of this application provide a Z-axis coarse positioning component for a contact surface topography measuring instrument, the Z-axis coarse positioning component comprising:

[0006] A fastener, the bottom end of which is used to connect to the base of a contact surface topography measuring instrument;

[0007] A displacement member, which is connected to and fixed by the fixing member, and connected to a Z-axis actuator to be driven by the Z-axis actuator to move in the Z-axis direction;

[0008] A probe connector is connected to the displacement member, and the probe connector is used to connect to the probe;

[0009] When the displacement member is driven by the Z-axis actuator, the displacement member drives the probe connector to move in the Z-axis; the probe connector is located on the center line of the fixing member to reduce or eliminate the relative Z-axis vibration between the probe tip of the probe and the surface of the sample being measured.

[0010] In some embodiments, the center line of gravity of the probe connector coincides with the center line of gravity of the fixing member, so as to reduce or eliminate the relative Z-axis vibration between the probe tip of the probe and the surface of the sample being measured.

[0011] In some embodiments, the fastener includes:

[0012] The first and second fasteners are separated from each other;

[0013] The first fixing member and the second fixing member are symmetrically arranged in the Y direction, and the probe connector is disposed between the first fixing member and the second fixing member.

[0014] In some embodiments, the displacement element includes:

[0015] The first displacement component and the second displacement component are separated from each other;

[0016] The first displacement member and the second displacement member are symmetrically arranged in the Y direction. The first displacement member is connected to the first fixing member and is fixed by the first fixing member. The second displacement member is connected to the second fixing member and is fixed by the second fixing member.

[0017] In some embodiments, the first displacement member is connected to the Z-axis actuator, and when the first displacement member is driven by the Z-axis actuator, the first displacement member drives the probe connector to move in the Z-axis; or

[0018] The second displacement member is connected to the Z-axis actuator. When the second displacement member is driven by the Z-axis actuator, the second displacement member drives the probe connector to move in the Z-axis; or

[0019] Both the first displacement member and the second displacement member are connected to the Z-axis actuator. When the first displacement member and the second displacement member are driven by the Z-axis actuator, the first displacement member and the second displacement member drive the probe connector to move in the Z-axis.

[0020] In some embodiments, the displacement member includes a slide rail and a sliding platform, the slide rail is connected to the fixing member to be fixed by the fixing member, and the slide rail is connected to the Z-axis actuator to be driven by the Z-axis actuator;

[0021] The sliding platform is connected to the slide rail and the probe connector, respectively.

[0022] When the slide rail is driven by the Z-axis actuator, the slide rail causes the sliding platform and the probe connector connected to the sliding platform to move in the Z-axis.

[0023] In some embodiments, the first displacement member includes a first slide rail and a first sliding platform, the first slide rail is connected to the first fixing member to be fixed by the first fixing member, and the first slide rail is connected to the Z-axis actuator to be driven by the Z-axis actuator;

[0024] The second displacement member includes a second slide rail and a second sliding platform, wherein the second slide rail is connected to the second fixing member and is fixed by the second fixing member;

[0025] The first sliding platform is connected to the first slide rail and the probe connector respectively, and the second sliding platform is connected to the second slide rail and the probe connector respectively;

[0026] The first slide rail is connected to the Z-axis actuator so as to be driven by the Z-axis actuator; when the first slide rail is driven by the Z-axis actuator, the first slide rail drives the first sliding platform and the probe connector connected to the first sliding platform to move in the Z-axis.

[0027] In some embodiments, the sliding platform includes a first sliding platform and a second sliding platform symmetrically arranged in the Y direction. The first sliding platform and the second sliding platform are respectively connected to two opposite sides of the probe connector in the Y direction to limit the movement direction of the probe connector to the Z direction.

[0028] In some embodiments, the probe connector has a groove extending in the X direction at its bottom end, and an X-direction moving block is provided at the top of the probe. The X-direction moving block is embedded in the groove to provide displacement of the probe in the X direction.

[0029] Secondly, embodiments of this application provide a contact surface topography measuring instrument including a Z-axis coarse positioning component in any implementation of the first aspect.

[0030] In some embodiments, the contact surface topography measuring instrument includes:

[0031] Base;

[0032] Z-axis coarse positioning component, the Z-axis coarse positioning component comprising:

[0033] A fastener, the bottom end of which is used to connect to the base of a contact surface topography measuring instrument;

[0034] A displacement member, which is connected to and fixed by the fixing member, and connected to a Z-axis actuator to be driven by the Z-axis actuator to move in the Z-axis direction;

[0035] A probe connector is connected to the displacement member, and the bottom end of the probe connector is used to connect to the probe.

[0036] The Z-axis coarse positioning component is located on the center line of gravity of the base to reduce the relative Z-axis vibration between the Z-axis coarse positioning component and the base.

[0037] When the displacement member is driven by the Z-axis actuator, the displacement member drives the probe connector to move in the Z-axis; the probe connector is located on the center line of the fixing member to reduce or eliminate the relative Z-axis vibration between the probe tip of the probe and the surface of the sample being measured.

[0038] In some embodiments, the probe connector has a groove extending in the X direction at its bottom end, and an X-direction moving block is provided at the top of the probe. The X-direction moving block is embedded in the groove to provide displacement of the probe in the X direction.

[0039] In some embodiments, the fastener includes:

[0040] The first and second fasteners are separated from each other;

[0041] The first fixing member and the second fixing member are symmetrically arranged in the Y direction, and the probe connector is disposed between the first fixing member and the second fixing member.

[0042] In some embodiments, the displacement element includes:

[0043] The first displacement component and the second displacement component are separated from each other;

[0044] The first displacement member and the second displacement member are symmetrically arranged in the Y direction. The first displacement member is connected to the first fixing member and is fixed by the first fixing member. The second displacement member is connected to the second fixing member and is fixed by the second fixing member.

[0045] In some embodiments, the first displacement member is connected to the Z-axis actuator, and when the first displacement member is driven by the Z-axis actuator, the first displacement member drives the probe connector to move in the Z-axis; or

[0046] The second displacement member is connected to the Z-axis actuator. When the second displacement member is driven by the Z-axis actuator, the second displacement member drives the probe connector to move in the Z-axis; or

[0047] Both the first displacement member and the second displacement member are connected to the Z-axis actuator. When the first displacement member and the second displacement member are driven by the Z-axis actuator, the first displacement member and the second displacement member drive the probe connector to move in the Z-axis.

[0048] In some embodiments, the displacement member includes a slide rail and a sliding platform, the slide rail is connected to the fixing member to be fixed by the fixing member, and the slide rail is connected to the Z-axis actuator to be driven by the Z-axis actuator;

[0049] The sliding platform is connected to the slide rail and the probe connector, respectively.

[0050] When the slide rail is driven by the Z-axis actuator, the slide rail causes the sliding platform and the probe connector connected to the sliding platform to move in the Z-axis.

[0051] In some embodiments, the first displacement member includes a first slide rail and a first sliding platform, the first slide rail is connected to the first fixing member to be fixed by the first fixing member, and the first slide rail is connected to the Z-axis actuator to be driven by the Z-axis actuator;

[0052] The second displacement member includes a second slide rail and a second sliding platform, wherein the second slide rail is connected to the second fixing member and is fixed by the second fixing member;

[0053] The first sliding platform is connected to the first slide rail and the probe connector respectively, and the second sliding platform is connected to the second slide rail and the probe connector respectively;

[0054] The first slide rail is connected to the Z-axis actuator so as to be driven by the Z-axis actuator; when the first slide rail is driven by the Z-axis actuator, the first slide rail drives the first sliding platform and the probe connector connected to the first sliding platform to move in the Z-axis.

[0055] In some embodiments, the sliding platform includes a first sliding platform and a second sliding platform symmetrically arranged in the Y direction. The first sliding platform and the second sliding platform are respectively connected to two opposite sides of the probe connector in the Y direction to limit the movement direction of the probe connector to the Z direction.

[0056] In some embodiments, the probe connector is symmetrically arranged in the Y direction, and the left and right sides of the probe connector in the Y direction are respectively connected to the first displacement member and the second displacement member, so as to reduce the relative vibration in the Z direction between the probe connector and the sample surface being measured.

[0057] Thirdly, embodiments of the third aspect of this application also provide a method for installing a contact surface topography measuring instrument according to any of the technical solutions of the second aspect. In some embodiments, the method for installing the contact surface topography measuring instrument includes:

[0058] The base is placed in the middle of the vibration isolation table;

[0059] The gantry frame, consisting of the first gantry frame and the second gantry frame that are separated from each other, is placed in the middle of the base;

[0060] The probe connector is placed in the middle between the first gantry frame and the second gantry frame.

[0061] The beneficial effects of some embodiments of this application are as follows: This application sets the probe connector connected to the fixing member on the center line of the fixing member, which reduces the relative vibration in the Z direction between the probe and the fixing member, thereby reducing or eliminating the relative vibration in the Z direction between the probe tip and the sample surface, and improving the accuracy of the Z direction height of the sample surface measured by the contact surface topography measuring instrument.

[0062] In some embodiments of this application, when the probe connector is located on the center line of gravity of the fixing member, the center of gravity of the probe connector and the fixing member as a whole is lowered and closer to the center of gravity of the contact surface topography measuring instrument. This reduces or eliminates the relative Z-axis vibration between the probe and the contact surface topography measuring instrument, and reduces or eliminates the relative Z-axis vibration between the probe tip and the sample surface, thereby improving the accuracy of the Z-axis height of the sample surface measured by the contact surface topography measuring instrument. The lowered center of gravity of the probe connector and the fixing member as a whole also provides better stability.

[0063] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this application, nor is it intended to limit the scope of this application. Other features of this application will become readily apparent from the following description. Those skilled in the art will gain a greater understanding of the above and other objects, advantages, and features of this application from the following detailed description of specific embodiments of this application in conjunction with the accompanying drawings. Attached Figure Description

[0064] The following sections will describe some specific embodiments of this application in detail by way of example and not limitation, with reference to the accompanying drawings. The drawings are provided for a better understanding of the present invention and do not constitute a limitation thereof. The same reference numerals in the drawings indicate the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0065] Figure 1 This is a top-view schematic diagram showing the positional relationship between the fixture and the probe connector in a contact surface topography measuring instrument of one design scheme.

[0066] Figure 2 This is a top view schematic diagram showing the positional relationship between the fixing member and the probe connector in some embodiments of this application;

[0067] Figure 3 This diagram illustrates the distance between the center of gravity of the probe and the center of gravity of the fixing component when the fixing component and the probe connector are in different positional relationships.

[0068] Figure 4 This is a top view schematic diagram showing the positional relationship of the base, fixing member, and probe connector in some embodiments of this application;

[0069] Figure 5 This is a schematic diagram showing the positional relationship between the fixing member, the displacement member, and the probe connector in some embodiments of this application;

[0070] Figure 6 This is a schematic diagram showing the positional relationship between the fixing member and the probe connector in some embodiments of this application;

[0071] Figure 7 A schematic diagram comparing the structure of a contact surface topography measuring instrument of one design scheme with that of a contact surface topography measuring instrument of some embodiments of this application;

[0072] Figure 8 for Figure 7 Side view;

[0073] Figure 9 This is a top view schematic diagram of a contact surface topography measuring instrument involved in some embodiments of this application;

[0074] Figure 10 This is a schematic diagram showing the connection relationship between the fixing component, displacement component, probe connector, and probe in some embodiments of this application;

[0075] Figure 11 This is a schematic diagram showing the connection relationship between the Z-axis actuator, the first fixing member, and the first displacement member in some embodiments of this application;

[0076] Figure 12 This is a schematic diagram showing the connection relationship between the Z-axis actuator, the second fixing member, and the second displacement member in some embodiments of this application;

[0077] Figure 13 This is a schematic diagram of the probe connector structure in some embodiments of this application;

[0078] Figure 14 This is a schematic diagram of the probe structure in some embodiments of this application;

[0079] Figure 15 This is a schematic diagram showing the connection relationship between the probe connector and the probe in some embodiments of this application;

[0080] Figure 16 A simulation comparison diagram of a contact surface topography measuring instrument of one design scheme and a contact surface topography measuring instrument of some embodiments of this application;

[0081] Figure 17 This is a schematic flowchart illustrating the installation method of a contact surface topography measuring instrument according to some embodiments of this application.

[0082] Explanation of key component symbols:

[0083] 1-Contact surface morphology measuring instrument;

[0084] 10-Z coarse positioning component;

[0085] 100 - Fastener, 110 - First fastener, 120 - Second fastener;

[0086] 200-Displacement component, 210-First displacement component, 210a-First slide rail, 210b-First sliding platform, 220-Second displacement component, 220a-Second slide rail, 220b-Second sliding platform;

[0087] 300 - Probe connector, 310 - Groove;

[0088] 400 - Probe, 410 - Probe, 420 - X-axis moving block;

[0089] 20-Base;

[0090] 30-Z direction actuator;

[0091] TS - Sample surface, G - Center of gravity of the fixture

[0092] S1 - The distance between the probe tip and the center of gravity of the fixture when the probe connector is located on the center line of gravity of the fixture;

[0093] S2 - The distance between the probe tip and the center of gravity of the fixture when the probe connector is located on the front side of the fixture. Detailed Implementation

[0094] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings, including many details of the embodiments of this application to aid understanding. The described embodiments are only possible technical implementations of this application and should be considered merely exemplary, not all possible implementations. Similarly, for clarity and conciseness, some descriptions of well-known functions and structures are omitted in the following description.

[0095] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects, not to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate, and the objects distinguished by "first," "second," etc., are generally of the same class, not limited in number; for example, a first object can be one or more. In this application, "or / and," "and / or," and "or" indicate that the object is at least one of them, while "or" indicates that the object is one of them. The term "multiple" means two or more.

[0096] In this application, the center of gravity line is a vertical line drawn from the center of gravity point. This application uses industry-standard terminology to describe orientations: X-axis represents the direction between the front and rear sides, Y-axis represents the direction between the left and right sides, and Z-axis represents the direction between the upper and lower sides. The descriptions of orientations in this application are primarily for better describing this application and its embodiments, and are not intended to limit the indicated devices, components, or parts to having a specific orientation, or to be constructed and operated in a specific orientation. Unless otherwise specified, in this application, the sample surface TS is positioned on the center of gravity line of the fixing member 100, and / or the center of gravity line of the Z-axis coarse positioning component 10, and / or the center of gravity line of the base 20, which can be distinguished according to the specific description. In the description of this application, the fixing member 100 can be a gantry frame; of course, the fixing member 100 can also be other suitable structures that support the displacement member 200.

[0097] The contact surface topography measuring instrument 1 has a probe connector 300 connected to a probe 400. The probe 400 includes a cantilever and a probe 410. When the contact surface topography measuring instrument 1 is working, one end of the cantilever is fixed and the other end is equipped with the probe 410. The probe 410 is used to scan the sample. Figure 1 This is a top view schematic diagram showing the positional relationship between the fixture 100 and the probe connector 300 in one design scheme, as shown below. Figure 1 As shown, the displacement element 200 is installed on the front side of the crossbeam in the center of the gantry frame, and the probe 400 is hung on the front side of the displacement element 200, that is, the probe 400 is suspended forward relative to the crossbeam of the gantry frame. The inventors found that when the gantry frame experiences pitching or vertical vibration, the probe 400 will also exhibit Z-axis vibration. Furthermore, since the end of the probe 410 is fixed to the cantilever, and the probe tip is a free end, the vibration at the probe tip is amplified, resulting in relative Z-axis vibration between the probe tip and the sample surface TS. Although the vibration isolation table can effectively reduce the cantilever vibration caused by external factors, the inventors also found that the vibration isolation table has a poor attenuation effect on low-frequency vibrations and cannot achieve the effect of reducing the relative Z-axis vibration between the probe tip and the sample surface TS. In this case, since the force on the sample surface TS and the Z-axis vibration are superimposed to form the displacement of the probe 410, an error occurs in the Z-axis height of the sample measured by the contact surface topography measuring instrument 1.

[0098] Based on the above considerations, this application provides a redesigned Z-axis coarse positioning component 10 for a contact surface topography measuring instrument 1, comprising:

[0099] The bottom end of the fastener 100 is used to connect to the base 20 of the contact surface topography measuring instrument 1.

[0100] The displacement element 200 is connected to and fixed by the fixing element 100, and is also connected to the Z-axis actuator 30 to be driven by the Z-axis actuator 30 to move in the Z-axis direction. For example, the Z-axis drive element is a Z-axis motor, and the displacement element 200 moves in the Z-axis direction under the drive of the Z-axis motor. The Z-axis drive element can also be a lead screw, and the displacement element 200 moves in the Z-axis direction under the drive of the lead screw.

[0101] The probe connector 300 is connected to the displacement component 200, and the probe connector 300 is used to connect to the probe 400.

[0102] When the displacement element 200 is driven by the Z-axis actuator 30, the displacement element 200 drives the probe connector 300 to move in the Z-axis. Figure 2 This is a top view schematic diagram showing the positional relationship between the fixing member 100 and the probe connector 300 in some embodiments of this application, such as... Figure 2 As shown, the probe connector 300 is located on the center line of the fixing member 100 to reduce or eliminate the relative vibration in the Z direction between the probe tip of the probe 400 and the sample surface TS being measured.

[0103] Figure 3 This diagram illustrates the distance between the probe 410 and the center of gravity of the fixture 100 and the probe connector 300 at different positional relationships. When measuring the same sample surface TS, the distance S1 between the probe tip and the center of gravity of the fixture is smaller when the probe connector is located on the center of gravity line of the fixture than when the probe connector is located on the front side of the fixture. The vibration of an unconstrained device or system is minimal near its center of gravity and gradually increases with distance from the center of gravity. This application positions the probe connector 300, connected to the fixture 100, on the center of gravity line of the fixture 100, reducing or eliminating the relative vibration in the Z-direction between the probe 400 and the fixture 100. This suppresses the increase in the vibration of the probe tip in the Z-direction, reducing or eliminating the relative vibration in the Z-direction between the probe tip and the sample surface TS, and improving the accuracy of the Z-direction height of the sample surface TS measured by the contact surface topography measuring instrument 1. It should be noted that... Figure 3 For illustrative purposes only, when the probe connector 300 is located on the center of gravity line of the fixture 100, the probe connector 300 and the fixture 100 as a whole have a lower center of gravity, closer to the center of gravity of the contact surface topography measuring instrument 1. This reduces or eliminates the relative Z-axis vibration between the probe and the contact surface topography measuring instrument, and reduces or eliminates the relative Z-axis vibration between the probe tip and the sample surface TS, thus improving the accuracy of the Z-axis height of the sample surface TS measured by the contact surface topography measuring instrument 1. The lower center of gravity of the probe connector 300 and the fixture 100 as a whole also provides better stability.

[0104] Figure 4This is a top view schematic diagram showing the relative positions of the base 20, the fixture 100, and the probe connector 300 in some embodiments of this application. It illustrates that the center of gravity of the probe connector 300 coincides with the center of gravity of the fixture 100, thereby reducing or eliminating the relative Z-axis vibration between the probe tip of the probe 400 and the sample surface TS being measured. It also shows that the Z-axis coarse positioning component 10 is located on the center of gravity of the base 20. After the probe connector 300 is positioned on the center of gravity of the fixture 100, the components connected to the fixture 100, as a whole, have a lower center of gravity and are located on the center of gravity of the base 20, resulting in better stability. This reduces or eliminates the relative Z-axis vibration between the probe tip and the sample surface TS, improving the accuracy of the Z-axis height of the sample surface TS measured by the contact surface topography measuring instrument 1.

[0105] Figure 5 This is a schematic diagram showing the positional relationship between the fixing member 100, the displacement member 200, and the probe connector 300 in some embodiments of this application. Figure 2 and Figure 4 The difference lies in Figure 5 In the illustrated embodiment, the fixing member 100 includes a first fixing member 110 and a second fixing member 120 that are separated from each other. The first fixing member 110 and the second fixing member 120 are symmetrically arranged in the Y direction, and the probe connector 300 is disposed between the first fixing member 110 and the second fixing member 120. On the one hand, the separate arrangement of the first fixing member 110 and the second fixing member 120 facilitates manufacturing, and the distance between the first fixing member 110 and the second fixing member 120 can be adjusted as needed to facilitate the installation of the probe connector 300. On the other hand, the symmetrical arrangement of the first fixing member 110 and the second fixing member 120 in the Y direction makes it easy to visually locate the center line of gravity of the fixing member 100 composed of the first fixing member 110 and the second fixing member 120. This facilitates the adjustment of the positions of the first fixing member 110 and the second fixing member 120 on the base 20, and allows for easy alignment of the center line of gravity of the fixing member 100 with the center line of gravity of the base 20.

[0106] Figure 6 This is a schematic diagram showing the positional relationship between the fixing member 100 and the probe connector 300 in some embodiments of this application. The fixing member 100 includes a first fixing member 110 and a second fixing member 120 that are separated from each other, and the displacement member 200 includes a first displacement member 210 and a second displacement member 220 that are separated from each other. Wherein, as... Figure 6As shown, the first displacement member 210 and the second displacement member 220 are symmetrically arranged in the Y direction. The first displacement member 210 is connected to and fixed by the first fixing member 110, and the second displacement member 220 is connected to and fixed by the second fixing member 120. Similarly, on the one hand, the separate arrangement of the first displacement member 210 and the second displacement member 220 facilitates manufacturing, and the distance between them can be adjusted as needed to facilitate connection of the probe connector 300. On the other hand, the symmetrical arrangement of the first displacement member 210 and the second displacement member 220 in the Y direction allows for visual identification of the center line of gravity of the displacement member 200 composed of the first displacement member 210 and the second displacement member 220. This facilitates adjustment of the connection positions of the first displacement member 210 and the second displacement member 220 with the fixing member 100, making it easy to align the center line of gravity of the displacement member 200 with the center line of gravity of the fixing member 100. The relationship between the first displacement member 210 and the second displacement member 220 and the Z-axis actuator 30 can be as follows: the first displacement member 210 is connected to the Z-axis actuator 30, and when the first displacement member 210 is driven by the Z-axis actuator 30, the first displacement member 210 drives the probe connector 300 to move in the Z-axis. Alternatively, the second displacement member 220 is connected to the Z-axis actuator 30, and when the second displacement member 220 is driven by the Z-axis actuator 30, the second displacement member 220 drives the probe connector 300 to move in the Z-axis. Alternatively, both the first displacement member 210 and the second displacement member 220 are connected to the Z-axis actuator 30, and when the first displacement member 210 and the second displacement member 220 are driven by the Z-axis actuator 30, the first displacement member 210 and the second displacement member 220 drive the probe connector 300 to move in the Z-axis. When the first displacement member 210 is connected to the Z-axis actuator 30, the second displacement member 220 is driven. Specifically, the first displacement member 210 drives the probe connector 300 to move in the Z-axis, and the probe connector 300 drives the second displacement member 220 to move in the Z-axis. When the second displacement member 220 is connected to the Z-axis actuator 30, the first displacement member 210 is driven. Specifically, the second displacement member 220 drives the probe connector 300 to move in the Z-axis, and the probe connector 300 drives the first displacement member 210 to move in the Z-axis.

[0107] Figure 6The document also illustrates that in some embodiments of this application, the probe connector 300 is symmetrically arranged in the Y direction. The three-dimensional structure of the sample surface TS is measured via the probe tip, and the measurement accuracy between the probe tip and the sample surface TS is down to the sub-nanometer level. Even minute vibrations transmitted to the base 20 can affect the measurement accuracy. In this application, the probe connector 300 is connected to the first displacement member 210 and the second displacement member 220 on its left and right sides in the Y direction, respectively. The probe connector 300 is fixed in the Y direction without any free ends, thus preventing increased vibration caused by free ends and reducing the relative vibration of the probe connector 300 in the X, Y, and Z directions. This, in turn, also reduces the relative vibration of the probe 400 connected to the probe connector 300 in the X, Y, and Z directions.

[0108] exist Figure 7 , Figure 8 , Figure 9 In some embodiments shown, the Z-axis actuator 30 can be a Z-axis motor. In some embodiments of this application illustrated in these figures, the Z-axis motor is placed on a first displacement member 210, which is connected to a first fixing member 110. The first fixing member 110 includes a transverse beam and a longitudinal beam, which can be a combined structure or an integral structure. When the Z-axis motor is placed on the first displacement member 210, an equal weight can be placed on the second displacement member 220. This counterweight adjustment method maintains the symmetry of the Z-axis motor, the equal weight, the first displacement member 210, and the second displacement member 220, making it easier to find the center of gravity line. The equal weight can be, for example, another Z-axis motor.

[0109] Figure 10This is a schematic diagram showing the connection relationship between the fixing member 100, the displacement member 200, the probe connector 300, and the probe 400 in some embodiments of this application. The displacement member 200 includes a slide rail and a sliding platform. The slide rail is connected to the fixing member 100 and fixed by the fixing member 100. The slide rail is also connected to the Z-axis actuator 30 and driven by the Z-axis actuator 30. The sliding platform is connected to both the slide rail and the probe connector 300. When the slide rail is driven by the Z-axis actuator 30, the slide rail drives the sliding platform and the probe connector 300 connected to the sliding platform to move in the Z-axis. Specifically, the displacement member 200 includes a first displacement member 210 and a second displacement member 220. The first displacement member 210 includes a first slide rail 210a and a first sliding platform 210b. The second displacement member 220 includes a second slide rail 220a and a second sliding platform 220b. The first slide rail 210a is connected to and fixed by the first fixing member 110, and is also connected to and driven by the Z-axis actuator 30. The first sliding platform 210b is connected to both the first slide rail 210a and the probe connector 300. The second sliding platform 220b is connected to both the second slide rail 220a and the probe connector 300, and is located on two opposite sides of the probe connector 300. Figure 10 The middle section represents the left and right sides. The first slide rail 210a is connected to the Z-axis actuator 30 and is driven by the Z-axis actuator 30. When the first slide rail 210a is driven by the Z-axis actuator 30, the first slide rail 210a drives the first sliding platform 210b and the probe connector 300 connected to the first sliding platform 210b to move in the Z-axis.

[0110] Figure 11 This is a schematic diagram showing the connection relationship between the Z-axis actuator 30, the first fixing member 110, and the first displacement member 210 in some embodiments of this application; Figure 12 This is a schematic diagram showing the connection relationship between the Z-axis actuator 30, the second fixing member 120, and the second displacement member 220 in some embodiments of this application. (Reference) Figure 10 , Figure 11 and Figure 12 The first sliding platform 210b and the second sliding platform 220b are symmetrically arranged in the Y direction. The first sliding platform 210b and the second sliding platform 220b are respectively connected to two opposite sides of the probe connector 300. Figure 10 The middle section consists of the left and right sides, which limit the movement direction of the probe connector 300 to the Z direction.

[0111] Figure 13 This is a schematic diagram of the structure of the probe connector 300 in some embodiments of this application; Figure 14 This is a schematic diagram of the structure of the probe 400 in some embodiments of this application; Figure 15This is a schematic diagram illustrating the connection relationship between the probe connector 300 and the probe 400 in some embodiments of this application. For example... Figure 13 , Figure 14 and Figure 15 As shown, the probe connector 300 has a groove 310 extending along the X-direction at its bottom end, and an X-direction moving block 420 is provided at the top of the probe 400. The X-direction moving block 420 is embedded in the groove 310 to provide displacement of the probe 400 in the X-direction. Specifically, it can be used for coarse adjustment in the X-direction and to facilitate placing or removing the probe 400 from the groove 310. The probe connector 300 has a hollow structure, and related components can be installed inside to adapt to other types of microscopes, such as white light interference microscopes.

[0112] Based on the same concept, embodiments of the second aspect of this application also provide a contact surface topography measuring instrument 1 that includes the Z-axis coarse positioning component 10 of any of the technical solutions in the first aspect. The contact surface topography measuring instrument 1 also has the technical effects of the flexible track transition component of any of the technical solutions in the first aspect, which will not be described in detail here.

[0113] Figure 7 This is a schematic diagram comparing the structure of a contact surface topography measuring instrument 1 as described in one design scheme with that of a contact surface topography measuring instrument 1 in some embodiments of this application. Figure 8 for Figure 7 Side view. Figure 9 This is a top view schematic diagram of a contact surface topography measuring instrument 1 according to some embodiments of this application. Figure 7 , Figure 8 , Figure 9 In this design, the fixing component 100 is a gantry frame, which is actually manufactured into two inverted L-shaped blocks and then assembled with the probe connector 300 in the middle. Displacement components 200 and sliding platforms are installed on the two sections of the gantry frame, respectively. The displacement components 200 and sliding platforms on both sides are rigidly connected by the probe connector 300, with the probe 400 hanging at the bottom of the probe connector 300. The probe connector 300 is fixed to the sliding platform with screws and moves up and down with the probe 400 driven by the displacement components 200. Since the probe 400 does not protrude outwards, the pitch and vertical vibrations of the gantry frame are not amplified. Furthermore, the new design has a lower center of gravity for the entire frame, located at the center of the platform, resulting in better stability.

[0114] Figure 16This is a simulation comparison diagram of a contact surface topography measuring instrument 1 with some embodiments of the contact surface topography measuring instrument 1 in this application. For comparison, with the span of the gantry frame, the width and thickness of the beams set to the same values, and a Z-axis vibration excitation of 1 μm amplitude and 20 Hz frequency applied to the bottom surface, the probe 400 in this design exhibits a Z-axis vibration of 1.81 nm relative to the sample placement stage. In some embodiments of this application, the Z-axis vibration amplitude of the probe 400 relative to the sample placement stage is 1.44 nm, achieving the technical effect of reducing the relative Z-axis vibration between the probe tip of the probe 400 and the sample surface TS being measured.

[0115] It should be noted that, unless otherwise specified, the various embodiments and features in these embodiments can be combined with each other. This application provides illustrative examples of such combinations to illustrate possible combinations:

[0116] The bottom end of the gantry frame is used to connect to the base 20 of the contact surface topography measuring instrument 1.

[0117] The displacement component 200 is connected to the gantry frame and fixed by the gantry frame. The displacement component 200 is connected to the Z-axis motor and driven by the Z-axis motor to move in the Z-axis direction.

[0118] The probe connector 300 is in the shape of a U-shape and is connected to the displacement member 200. The probe connector 300 is also used to connect to the probe 400.

[0119] When the displacement component 200 is driven by the Z-axis motor, the displacement component 200 drives the probe connector 300 to move in the Z-axis; the probe connector 300 is located on the center line of the gantry frame to reduce or eliminate the relative vibration in the Z-axis between the probe tip of the probe 400 and the sample surface TS being measured.

[0120] The center of gravity of the probe connector 300 coincides with the center of gravity of the gantry frame to reduce or eliminate the relative vibration in the Z direction between the probe tip of the probe 400 and the sample surface TS being measured.

[0121] Specifically, the gantry frame includes a first gantry frame and a second gantry frame that are separate from each other, namely Figure 7 The first gantry frame and the second gantry frame are symmetrically arranged in the Y direction, with the probe connector 300 disposed between the first gantry frame and the second gantry frame.

[0122] Specifically, the displacement member 200 includes a first displacement member 210 and a second displacement member 220 that are separated from each other. The first displacement member 210 and the second displacement member 220 are symmetrically arranged in the Y direction. The first displacement member 210 is connected to and fixed by the first gantry frame, and the second displacement member 220 is connected to and fixed by the second gantry frame. The first displacement member 210 is connected to a Z-axis motor. When the first displacement member 210 is driven by the Z-axis motor, it drives the probe connector 300 to move in the Z direction. The displacement member 200 includes a slide rail and a sliding platform. The slide rail is connected to and fixed by the gantry frame, and is also connected to and driven by the Z-axis motor. The sliding platform is connected to both the slide rail and the probe connector 300. When the slide rail is driven by the Z-axis motor, it drives the sliding platform and the probe connector 300 connected to the sliding platform to move in the Z direction. Specifically, the first displacement member 210 includes a first slide rail 210a and a first sliding platform 210b. The first slide rail 210a is connected to and fixed by the first gantry frame, and is also connected to a Z-axis motor for being driven by the Z-axis motor. The second displacement member 220 includes a second slide rail 220a and a second sliding platform 220b. The second slide rail 220a is connected to and fixed by the second gantry frame. The first sliding platform 210b is connected to the first slide rail 210a and the probe connector 300, respectively. The second sliding platform 220b is also connected to the second slide rail 220a and the probe connector 300, respectively. The first slide rail 210a is connected to the Z-axis motor for being driven by the Z-axis motor. When the first slide rail 210a is driven by the Z-axis motor, the first slide rail 210a drives the first sliding platform 210b and the probe connector 300 connected to the first sliding platform 210b to move in the Z-axis direction.

[0123] Specifically, the sliding platform includes a first sliding platform 210b and a second sliding platform 220b symmetrically arranged in the Y direction. The first sliding platform 210b and the second sliding platform 220b are respectively connected to two opposite sides of the probe connector 300 in the Y direction to limit the movement direction of the probe connector 300 to the Z direction.

[0124] Specifically, the probe connector 300 has a groove 310 extending in the X direction at its bottom end, and an X-direction moving block 420 is provided on the top of the probe 400. The X-direction moving block 420 is embedded in the groove 310 to provide displacement of the probe 400 in the X direction.

[0125] This embodiment has the following effects: By setting the probe connector 300 on the center line of the fixing member 100, the relative vibration in the Z direction between the probe 400 and the fixing member 100 is reduced. This suppresses the increase of the vibration of the probe tip in the Z direction. When the sample surface TS is also set on the center line of the fixing member 100, the relative vibration in the Z direction between the probe tip and the sample surface TS can be reduced or eliminated, thereby improving the accuracy of the Z-direction height of the sample surface TS measured by the contact surface topography measuring instrument 1.

[0126] In this embodiment, the gantry frame, displacement member 200, and probe connector 300 are symmetrically arranged in the Y direction. The center line of gravity of the device composed of the gantry frame, displacement member 200, and probe connector 300 can be visually located, which facilitates the adjustment of the position of the center line of gravity of the device on the base 20. This allows the center line of gravity of the device to coincide with the center line of gravity of the base 20, thereby reducing or eliminating the relative vibration in the Z direction between the probe tip and the sample surface TS, and improving the accuracy of the Z-direction height of the sample surface TS measured by the contact surface topography measuring instrument 1.

[0127] Based on the same concept, an embodiment of the second aspect of this application also provides a contact surface topography measuring instrument 1, which includes a base 20 and a Z-axis coarse positioning component 10. Here, the contact surface topography measuring instrument 1 can be an instrument such as a profilometer, a coordinate measuring machine, or an atomic force microscope. The Z-axis coarse positioning component 10 includes:

[0128] The bottom end of the fastener 100 is used to connect with the base 20 of the contact surface topography measuring instrument 1;

[0129] The displacement member 200 is connected to the fixing member 100 to be fixed by the fixing member 100, and the displacement member 200 is connected to the Z-axis actuator 30 to be driven by the Z-axis actuator 30 to move in the Z-axis.

[0130] The probe connector 300 is connected to the displacement member 200, and the bottom end of the probe connector 300 is used to connect to the probe 400;

[0131] The Z-axis coarse positioning component 10 is located on the center line of the base 20 to reduce the relative Z-axis vibration between the Z-axis coarse positioning component 10 and the base 20. When the sample surface TS is also located on the center line of the base 20, the relative Z-axis vibration between the probe tip of the probe 400 and the sample surface TS can be reduced or eliminated.

[0132] When the displacement member 200 is driven by the Z-axis actuator 30, the displacement member 200 drives the probe connector 300 to move in the Z-axis; the probe connector 300 is located on the center line of gravity of the fixed member 100, so as to reduce or eliminate the relative vibration in the Z-axis between the probe tip of the probe 400 and the sample surface TS being measured.

[0133] The second aspect of this application also provides a contact surface topography measuring instrument 1 in combination with the Z-axis coarse positioning component 10 of any of the technical solutions of the first aspect and the above embodiments. The contact surface topography measuring instrument 1 also has the technical effects of the flexible track transition component of any of the technical solutions of the first aspect, which will not be described in detail here.

[0134] For example, in some embodiments of this application, the probe connector 300 is symmetrically arranged in the Y direction, and the probe connector 300 is connected to the first displacement member 210 and the second displacement member 220 on the left and right sides in the Y direction, respectively, so as to reduce the relative vibration in the Z direction between the probe connector 300 and the sample surface TS to be measured.

[0135] Based on the same concept, embodiments of the third aspect of this application also provide an installation method for the contact surface topography measuring instrument 1 of any of the technical solutions in the second aspect. Wherein, Figure 17 This is a schematic flowchart illustrating the installation method of the contact surface topography measuring instrument 1 according to some embodiments of this application, such as... Figure 17 The installation method of the contact surface topography measuring instrument 1 shown includes:

[0136] S101, the base 20 is placed in the middle of the vibration isolation table. In this step, when the base 20 is placed in the middle of the vibration isolation table, the center line of gravity of the base 20 coincides with the center line of gravity of the vibration isolation table.

[0137] S102, the gantry frame, composed of the separated first and second gantry frames, is placed in the middle of the base 20. At this time, the center line of gravity of the gantry frame coincides with the center line of gravity of the base 20. As a preferred embodiment, the first slide rail 210a is connected to the first gantry frame and fixed by it, and the second slide rail 220a is connected to the second gantry frame and fixed by it; the first sliding platform 210b is connected to the first slide rail 210a and the probe connector 300, respectively, and the second sliding platform 220b is connected to the second slide rail 220a and the probe connector 300, respectively. The first sliding platform 210b and the second sliding platform 220b are respectively connected to the probe connector 300 on two opposite sides in the Y direction. In this way, the center line of gravity of the device composed of the gantry frame, the displacement member 200, and the probe connector 300 coincides with the center line of gravity of the base 20.

[0138] S103, the probe connector 300 is placed at the middle position between the first gantry frame and the second gantry frame. In this step, the probe connector 300 is connected to the displacement member 200, the displacement member 200 is connected to the fixing member 100 to be fixed by the fixing member 100, and the displacement member 200 is connected to the Z-axis actuator 30 to be driven by the Z-axis actuator 30 to move in the Z-axis.

[0139] With the above settings, the center lines of gravity of the base 20, sample placement platform, gantry frame, displacement component 200, and probe connector 300 of the contact surface topography measuring instrument 1 are all aligned by the position adjustment method. This setting makes the contact surface topography measuring instrument 1 more stable, reduces or eliminates the relative vibration in the Z direction between the probe tip and the sample surface TS, and improves the accuracy of the Z direction height of the sample surface TS measured by the contact surface topography measuring instrument 1.

[0140] The embodiments of this application have been described in detail above with reference to the accompanying drawings. It should be noted that implementations not illustrated or described in the drawings or the main text of the specification are forms known to those skilled in the art and are not described in detail. The shapes and dimensions of the components in the drawings do not reflect actual size and proportion, but are only illustrative of the embodiments of this application. Furthermore, any reference signs placed between parentheses in the claims should not be construed as limiting the claims. Unless otherwise stated, the positional parameters in this specification and the appended claims are approximate values ​​and can be changed according to the desired characteristics derived from the content of this application.

[0141] The above description is merely a partial embodiment of this application and an explanation of the technical principles employed, and is not intended to limit this application in any way. Those skilled in the art should understand that the scope of disclosure in this application is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-described concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application are also within the scope of protection of this application.

Claims

1. A contact surface morphology measuring instrument (1), characterized in that, include Base (20); Z-axis coarse positioning component (10), the Z-axis coarse positioning component (10) includes: A fastener (100), the bottom end of which is used to connect to the base (20) of the contact surface topography measuring instrument (1), including... The first fastener (110) and the second fastener (120) are separated from each other; The first fixing member (110) and the second fixing member (120) are symmetrically arranged in the Y direction, and the probe connector (300) is disposed between the first fixing member (110) and the second fixing member (120); A displacement member (200), which is connected to and fixed by the fixing member (100), and connected to a Z-axis actuator (30) to be driven by the Z-axis actuator (30) to move in the Z-axis direction, including... The first displacement member (210) and the second displacement member (220) are separated from each other; The first displacement member (210) and the second displacement member (220) are symmetrically arranged in the Y direction. The first displacement member (210) is connected to the first fixing member (110) and fixed by the first fixing member (110). The second displacement member (220) is connected to the second fixing member (120) and fixed by the second fixing member (120). The probe connector (300) is connected to the displacement member (200), and the bottom end of the probe connector (300) is used to connect to the probe (400); The Z-axis coarse positioning component (10) is located on the center line of gravity of the base (20) to reduce the relative Z-axis vibration between the Z-axis coarse positioning component 10 and the base 20; When the displacement member (200) is driven by the Z-axis actuator (30), the displacement member (200) drives the probe connector (300) to move in the Z-axis; the probe connector (300) is located on the center line of gravity of the fixing member (100) to reduce or eliminate the relative vibration in the Z-axis between the probe tip of the probe (400) and the sample surface (TS) being measured.

2. The contact surface topography measuring instrument (1) according to claim 1, characterized in that, The probe connector (300) has a groove (310) extending in the X direction at its bottom end, and an X-direction moving block (420) is provided on the top of the probe (400). The X-direction moving block (420) is embedded in the groove (310) to provide displacement of the probe (400) in the X direction.

3. The contact surface topography measuring instrument (1) according to claim 1, characterized in that, The first displacement member (210) is connected to the Z-axis actuator (30). When the first displacement member (210) is driven by the Z-axis actuator (30), the first displacement member (210) drives the probe connector (300) to move in the Z-axis; or The second displacement member (220) is connected to the Z-axis actuator (30). When the second displacement member (220) is driven by the Z-axis actuator (30), the second displacement member (220) drives the probe connector (300) to move in the Z-axis; or The first displacement member (210) and the second displacement member (220) are both connected to the Z-axis actuator (30). When the first displacement member (210) and the second displacement member (220) are driven by the Z-axis actuator (30), the first displacement member (210) and the second displacement member (220) drive the probe connector (300) to move in the Z direction.

4. The contact surface topography measuring instrument (1) according to claim 1, characterized in that, The displacement member (200) includes a slide rail and a sliding platform. The slide rail is connected to the fixing member (100) to be fixed by the fixing member (100), and the slide rail is connected to the Z-axis actuator (30) to be driven by the Z-axis actuator (30). The sliding platform is connected to the slide rail and the probe connector (300) respectively; When the slide rail is driven by the Z-axis actuator (30), the slide rail drives the sliding platform and the probe connector (300) connected to the sliding platform to move in the Z-axis.

5. The contact surface topography measuring instrument (1) according to claim 1, characterized in that, The first displacement member (210) includes a first slide rail (210a) and a first sliding platform (210b). The first slide rail (210a) is connected to the first fixing member (110) to be fixed by the first fixing member (110). The first slide rail (210a) is connected to the Z-axis actuator (30) to be driven by the Z-axis actuator (30). The second displacement member (220) includes a second slide rail (220a) and a second sliding platform (220b), wherein the second slide rail (220a) is connected to the second fixing member (120) and is fixed by the second fixing member (120); The first sliding platform (210b) is connected to the first slide rail (210a) and the probe connector (300) respectively, and the second sliding platform (220b) is connected to the second slide rail (220a) and the probe connector (300) respectively; The first slide rail (210a) is connected to the Z-axis actuator (30) and is driven by the Z-axis actuator (30); when the first slide rail (210a) is driven by the Z-axis actuator (30), the first slide rail (210a) drives the first sliding platform (210b) and the probe connector (300) connected to the first sliding platform (210b) to move in the Z direction.

6. The contact surface topography measuring instrument (1) according to claim 5, characterized in that, The sliding platform includes a first sliding platform (210b) and a second sliding platform (220b) symmetrically arranged in the Y direction. The first sliding platform (210b) and the second sliding platform (220b) are respectively connected to two opposite sides of the probe connector (300) in the Y direction to limit the movement direction of the probe connector (300) to the Z direction.

7. The contact surface topography measuring instrument (1) according to claim 1, characterized in that, The probe connector (300) is symmetrically arranged in the Y direction. The probe connector (300) is connected to the first displacement member (210) and the second displacement member (220) on the left and right sides in the Y direction, respectively, so as to reduce the relative vibration in the Z direction between the probe connector and the sample surface being measured.

8. A method for installing the contact surface topography measuring instrument (1) as described in claim 1, characterized in that, include: The base (20) is placed in the middle of the vibration isolation table; The gantry frame, consisting of the first gantry frame and the second gantry frame that are separated from each other, is placed in the middle of the base (20); The probe connector (300) is placed in the middle between the first gantry frame and the second gantry frame.

Images