一种异质结、其制备方法及应用

The method of preparing MoS2/WS2-h-BN heterojunction by combining chemical vapor deposition and dry transfer method solves the problems of small sample area and poor reproducibility in the prior art, and realizes the application of heterojunction with high stability and excellent thermoelectric performance.

CN115768230BActive Publication Date: 2026-07-17HUBEI JIUFENGSHAN LAB

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HUBEI JIUFENGSHAN LAB
Filing Date
2022-11-16
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

The lack of effective methods in the existing technology to obtain MoS2/WS2-h-BN heterojunctions results in small sample area, high method instability and poor reproducibility, making it difficult to apply to the field of thermoelectric materials.

Method used

A combination of chemical vapor deposition and dry transfer methods was used to grow a MoS2/WS2 mixed layer in two steps and then transfer it to the surface of an h-BN substrate to form a heterojunction. The specific steps included depositing a thin film on the initial substrate, chemical vapor deposition treatment, and the application of dry transfer technology.

Benefits of technology

The obtained MoS2/WS2-h-BN heterojunction exhibits good stability, strong repeatability, and excellent thermoelectric performance, making it suitable for applications such as thermoelectric power generation, thermoelectric temperature control and refrigeration, temperature sensing, and MEMS thermopile sensing.

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Abstract

本发明提供了一种异质结、其制备方法及应用,采用化学气相沉积方法与干法转移法相结合的路线,首先通过化学气相沉积方法直接两步生长得到MoS2 / WS2混合层,再通过干法转移技术将其转移至h‑BN衬底表面形成异质结,或者先采用化学气相沉积分别生长MoS2和WS2,再利用干法转移技术,将MoS2层和WS2层分批次转移至h‑BN衬底表面形成异质结,得到的MoS2 / WS2‑h‑BN异质结具有优异的热电性能,且该方法对化学气相沉积方法的控制要求并不是很严格,受外界环境的影响较小,具有稳定性好、可重复性强的优点,有利于大范围推广使用。
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