A bottom lighting module adjustment device

By designing a six-degree-of-freedom adjustment device, the problem of insufficient accuracy in removing and resetting the bottom lighting module during maintenance and repair was solved, enabling fast and accurate adjustment and resetting, and reducing operational complexity and cost.

CN115789590BActive Publication Date: 2026-01-27BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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Patent Information

Application Number
CN202211622874.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-12-16
Publication Date
2026-01-27
Estimated Expiration
2042-12-16

AI Technical Summary

Technical Problem

The existing bottom lighting module needs to be removed as a whole during maintenance and repair, and the resetting accuracy is difficult to guarantee, resulting in cumbersome operation, high cost and long time.

Method used

A bottom lighting module adjustment device is designed, comprising a connecting mechanism, a horizontal adjustment mechanism, a Z-axis adjustment mechanism, and a positioning mechanism. This device enables six-degree-of-freedom adjustment and precise reset of the bottom lighting module. The horizontal and Z-axis adjustment mechanisms are used to achieve precise adjustment and locking of the bottom lighting module's X, Y, Z, Rx, Ry, and Rz axes.

Benefits of technology

It enables rapid and precise insertion and removal of the bottom lighting module, reducing maintenance and repair time and costs, improving reset accuracy, and simplifying the operation process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of semiconductor production, in particular to a bottom lighting module adjusting device, which comprises a connecting mechanism, a horizontal adjusting mechanism, a Z-direction adjusting mechanism and a positioning mechanism; the horizontal adjusting mechanism is arranged at the bottom of the bottom lighting module and is used for adjusting X, Y and Rz; the Z-direction adjusting mechanism is arranged at the bottom of the horizontal adjusting mechanism and is used for adjusting Z, Rx and Ry; the connecting mechanism is connected with a basic frame; after the six-degree-of-freedom adjustment and locking of the bottom lighting module, the connection between the basic frame and the horizontal adjusting mechanism and the connection between the basic frame and the bottom lighting module are established; the positioning mechanism is arranged at the bottom of the bottom lighting module and on the horizontal adjusting mechanism; the positioning mechanism and a supporting boss bear the total weight of the bottom lighting module. The device can be used for assembling and adjusting the bottom lighting module, facilitates the movement of the bottom lighting module in and out for periodical maintenance and repair, and improves the reset precision.
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Citation Information

Patent Citations

  • Bottom lighting module adjusting device

    CN114562709A

  • High integration solar simulator

    CN205807076U