一种薄膜电阻测试设备及电阻测试方法
By designing a thin-film resistance testing device and utilizing series-parallel connection methods and pressure sensors, the high cost of resistance measurement for conductive thin-film materials such as carbon paper has been solved, enabling rapid and flexible resistance characterization. This device is suitable for resistance testing of both laboratory and commercial thin-film materials.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING MECHANICAL EQUIP INST
- Filing Date
- 2022-10-27
- Publication Date
- 2026-07-17
AI Technical Summary
Existing resistance measurement equipment for conductive thin film materials such as carbon paper is expensive, which hinders its widespread use by researchers.
Design a thin film resistance testing device, including an upper lifting pressure head, an upper electrode, a lower electrode, a lower fixed pressure head base, a voltage display device, and a DC current source. The thin film resistance is calculated by series or parallel connection, and the pressure is detected by a pressure sensor to adjust the fixing pressure of the electrode on the thin film.
It enables rapid resistance characterization of conductive thin film materials such as carbon paper, especially the measurement of penetration resistance and contact resistance, which has important research value in physical parameters. The equipment is flexible and adjustable, and is suitable for large-area contact resistance testing of thin film materials in both laboratory and commercial settings.
Smart Images

Figure CN115792387B_ABST