一种薄膜电阻测试设备及电阻测试方法

By designing a thin-film resistance testing device and utilizing series-parallel connection methods and pressure sensors, the high cost of resistance measurement for conductive thin-film materials such as carbon paper has been solved, enabling rapid and flexible resistance characterization. This device is suitable for resistance testing of both laboratory and commercial thin-film materials.

CN115792387BActive Publication Date: 2026-07-17BEIJING MECHANICAL EQUIP INST

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING MECHANICAL EQUIP INST
Filing Date
2022-10-27
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing resistance measurement equipment for conductive thin film materials such as carbon paper is expensive, which hinders its widespread use by researchers.

Method used

Design a thin film resistance testing device, including an upper lifting pressure head, an upper electrode, a lower electrode, a lower fixed pressure head base, a voltage display device, and a DC current source. The thin film resistance is calculated by series or parallel connection, and the pressure is detected by a pressure sensor to adjust the fixing pressure of the electrode on the thin film.

Benefits of technology

It enables rapid resistance characterization of conductive thin film materials such as carbon paper, especially the measurement of penetration resistance and contact resistance, which has important research value in physical parameters. The equipment is flexible and adjustable, and is suitable for large-area contact resistance testing of thin film materials in both laboratory and commercial settings.

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Abstract

本公开是关于一种薄膜电阻测试设备及电阻测试方法。其中,该薄膜电阻测试设备包括上升降压头、上电极、下电极、下固定压头底座、电压显示设备、直流电流源。本公开对于碳纸等导电薄膜材料类电阻测试表征设备,可以快速表征导电薄膜类材料的穿透电阻 / 接触电阻,这对于膜表面厚度、粗糙度、孔隙度、膜内部材料之间的接触位点等物理参数的研究,具有重要作用。
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