Leveling and focusing device and motion device

Abstract

The application provides a leveling and focusing device and a motion device, the leveling and focusing device comprising a first seat body, a second seat body, a third seat body, M first driving motors, a mechanical guide part, N second driving motors and N flexible guide parts, the flexible guide part comprising a flexible spring sheet structure and a flexible decoupling structure, the flexible spring sheet structure being used for guiding the movement of the third seat body in the Z direction, and the flexible decoupling structure being used for decoupling the second driving motor and the third seat body in the RX and RY directions. According to the scheme, the large position movement in the vertical direction is realized by the lower layer, and the precise small-range pose adjustment is realized by the upper layer, so that the precise adjustment operation of leveling and focusing in the vertical direction is realized, the rigidity of the whole device, that is, the ability to resist the acceleration force in the horizontal direction, is improved, and therefore the leveling and focusing device provided by the scheme further reduces the jitter error and further improves the repeat positioning precision.

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