Holding device, exposure device, and article manufacturing method

Abstract

The present application provides a holding device, an exposure device, and an article manufacturing method. The holding device holds an optical element, wherein the holding device has a base, a first holding portion that holds the optical element and the base, and a second holding portion that holds the optical element and the base at a position different from a holding position of the first holding portion that holds the optical element, and is configured to be able to change rigidity of at least one of the first holding portion and the second holding portion.

Description

Technical Field

[0001] This invention relates to a holding device, an exposure device, and a method for manufacturing an article. Background Technology

[0002] In the manufacture of liquid crystal panels, organic EL displays, or semiconductor devices, exposure apparatuses are used to expose a pattern onto a substrate coated with a photosensitive material via a projection optical system. Because these exposure apparatuses need to transfer fine patterns with high precision, they require optical elements mounted on them to maintain that precision as well.

[0003] Japanese Patent Application Publication No. 2021-005018 discloses a holding device having the following mechanism: capable of restoring the surface shape of an optical element deformed by its own weight to its state before deformation. Additionally, Japanese Patent Application Publication No. 2021-005018 discloses a method for relieving stress locally generated in an optical element. Summary of the Invention

[0004] Furthermore, the vibration modes generated by optical elements mounted in exposure apparatus due to interference can potentially affect exposure accuracy. Japanese Patent Application Publication No. 2021-005018 did not acknowledge the adverse effects of vibrations generated by optical elements on exposure accuracy and did not disclose countermeasures for such vibrations. In particular, optical elements with vibration modes that rotate around an axis perpendicular to the optical axis of the optical element are more sensitive than those with other vibration modes, thus becoming one of the main causes of deteriorated optical performance.

[0005] Therefore, the object of the present invention is to provide a holding device that is advantageous in suppressing the degradation of optical performance.

[0006] To achieve the above objectives, as one aspect of the present invention, a holding device is provided for holding an optical element, characterized in that the holding device comprises: a base; a first holding portion that holds the optical element and the base; and a second holding portion that holds the optical element and the base at a position different from the holding position of the first holding portion holding the optical element, wherein the holding device is configured to change the rigidity of at least one of the first holding portion and the second holding portion.

[0007] According to the present invention, a retaining device that helps to suppress the degradation of optical performance can be provided.

[0008] Other features of the invention will become apparent from the following description of exemplary embodiments (with reference to the accompanying drawings). Attached Figure Description

[0009] Figure 1This is a schematic diagram showing the configuration of the holding device in the first embodiment.

[0010] Figure 2 This is a diagram illustrating the configuration of the vibration sensor.

[0011] Figure 3 This is a diagram used to illustrate the rigid adjustment mechanism in the first embodiment.

[0012] Figure 4 This is a schematic diagram showing the configuration of the holding device in the second embodiment.

[0013] Figure 5 This is a diagram used to illustrate the rigid adjustment mechanism in the second embodiment.

[0014] Figure 6 This is a schematic diagram showing the configuration of a modified example of the holding device in the second embodiment.

[0015] Figure 7 This is a schematic diagram showing the configuration of the exposure apparatus. Detailed Implementation

[0016] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Furthermore, in the drawings, the same reference numerals are used to label the same components, and repeated descriptions are omitted.

[0017] <First Embodiment>

[0018] Reference Figure 1 The holding device 100 for holding optical element 1 will be described. Figure 1 (a) and Figure 1 (b) is a diagram showing the configuration of the holding device 100 of this embodiment. In this embodiment, the direction of gravity is defined as the Z-axis direction, and the directions that are perpendicular to the Z-axis direction and orthogonal to each other are defined as the X-axis direction and the Y-axis direction, respectively. Figure 1 (a) is a side view of the holding device 100 viewed from the X-axis direction. Figure 1 (b) is viewed from the Y-axis direction. Figure 1 A cross-sectional view of the dashed line A-A′ shown in (a). The holding device 100 in this embodiment is as follows... Figure 1 (a) and Figure 1 As shown in (b), in the space defined by the orthogonal coordinate system, the optical element 1 is maintained such that the surface normal of the optical surface is orthogonal to the direction of gravity.

[0019] The holding device 100 includes a base 2, a fixing part 5 for fixing and holding an optical element 1, a connecting part 13 (first holding part), a connecting part 10 (second holding part), and vibration sensors 20, 21, and 22. The fixing part 5 is connected to the base 2 via the connecting parts 10 and 13. The fixing part 5 is not a necessary component; it can also be configured such that the connecting parts 10 and 13 are directly connected to the optical element 1. At least one of the connecting parts 10 and 13 is configured to change the holding force of the base 2 in holding the optical element 1. That is, at least one of the connecting parts 10 and 13 has a rigidity adjustment mechanism that can change the rigidity imparted to the optical element 1 by holding the optical element 1 through the base 2.

[0020] like Figure 1 As shown in (b), in order to measure the deformation shape of the optical element 1 vibrating at its inherent vibration frequency, the fixing part 5 is provided with vibration sensors 20, 21, and 22 (vibration detection part) for detecting the vibration generated in the optical element 1. Figure 2 This diagram shows in detail the configuration positions of vibration sensors 20, 21, and 22 in this embodiment. Vibration sensor 20 detects the vibration component in the Y-axis direction of optical element 1, vibration sensor 21 detects the vibration component in the X-axis direction of optical element 1, and vibration sensor 22 detects the vibration component in the Z-axis direction of optical element 1.

[0021] In this embodiment, three vibration sensors 20 are provided to measure the vibration component in the Y direction in each region of the optical element 1. This allows for the measurement of parallel vibrations in the Y direction.

[0022] Furthermore, the rotational component ωX around the X-axis and the rotational component ωZ around the Z-axis can be calculated from the vibration components measured by the vibration sensors 20, 21, and 22 respectively using known methods. Additionally, the number and position of the vibration sensors 20, 21, and 22 can be arbitrarily set based on the vibration components to be measured.

[0023] Reference Figure 3 The structure of the connecting part 13 will be described in detail. Figure 3 This diagram shows the configuration of the connecting portion 13 of the retaining device 100. In the following description, an example of the connecting portion 13 having a rigid adjustment mechanism will be given, but the connecting portion 10 can also have a rigid adjustment mechanism with the same configuration as the connecting portion 13. Alternatively, only the connecting portion 10 may have a rigid adjustment mechanism with the configuration described below.

[0024] The connecting part 13 includes connecting members 11a and 11b and a leaf spring 12 (rigid adjustment mechanism). Connecting member 11a fixes one part of the fixing part 5 and is connected to the base 2 via the leaf spring 12 and connecting member 11b. Connecting member 11b fixes two parts of the base 2. The leaf spring 12 is arranged via connecting members 11a and 11b, spanning between the fixing part 5 and the base 2 in the Y direction. The leaf spring 12 can be configured to be changeable even after the optical element 1 is installed. By changing the material, thickness, number, etc. of the leaf spring 12, the holding force for holding the optical element 1 and the base 2 can be adjusted.

[0025] In this embodiment, the connecting parts 10 and 13 are as follows: Figure 1 As shown in (a), the optical element 1 is held in a region that does not contain the optical axis of the optical element 1. The optical axis passes through the center of the optical element 1, and the direction of the optical axis is parallel to the Y-axis direction. In this embodiment, the base 2 and the fixing part 5 are fixed via multiple connecting parts, and the connecting part 10 holds the optical element 1 and the base 2 at a position different from the holding position of the optical element 1 held by the connecting part 13.

[0026] However, in the case where multiple connecting parts are configured as in this embodiment, if the holding forces of each connecting part for holding the optical element 1 are different, a vibration mode may be generated in the tilt ωX direction (rotation about the X-axis, which is perpendicular to the optical axis of the optical element 1) of the optical element 1.

[0027] The connecting parts 10 and 13 are configured to avoid generating rotational vibration modes that are likely to affect optical performance during the design phase. However, due to tolerances in the components of the holding device 100 or manufacturing errors during the assembly of the holding device 100, there is a possibility that rotational vibration modes larger than the design value may occur.

[0028] For the rotational vibration mode, the rotational vibration mode is generated based on the difference in rigidity between the connecting portion 10 and the connecting portion 13. Therefore, it is preferable to configure the connecting portion 10 and the connecting portion 13 to reduce the difference in the holding force of the connecting portion 10 and the holding force of the connecting portion 13. In this embodiment, at least one of the connecting portion 10 and the connecting portion 13 is configured such that its material, thickness, number, etc., can be changed after installation.

[0029] Next, the adjustment method for adjusting the rigid adjustment mechanism in this embodiment will be described. First, vibration components are obtained from vibration sensors 20, 21, and 22. The rotational vibration mode is calculated from the vibration components obtained from vibration sensors 20, 21, and 22. As a result of calculating the rotational vibration mode, for example, if a rotational vibration mode in the ωX direction is generated, it can be considered that a difference exists between the holding force of the connecting part 10 holding the optical element 1 and the holding force of the connecting part 13 holding the optical element 1.

[0030] Therefore, in this embodiment, the leaf spring 12 is adjusted to reduce the difference between the holding force of the connecting portion 10 and the holding force of the connecting portion 13 in holding the optical element 1. Specifically, when the holding force of the connecting portion 13 in holding the optical element 1 is smaller than that of the connecting portion 10, the material of the leaf spring 12 is changed to a material with less deformation. This improves the holding force. Alternatively, the holding force can be improved by increasing the thickness of the leaf spring 12 to reduce the deformation, or by increasing the number of leaf springs 12 to reduce the deformation.

[0031] By performing the above adjustments, the rotational vibration mode of the optical element 1 can be reduced. More specifically, the rotational vibration mode of the optical element 1 can be transformed into a parallel vibration mode. The sensitivity of the parallel vibration mode of the optical element 1 is less than that of the rotational vibration mode. Therefore, the holding device 100 in this embodiment can suppress the degradation of optical performance.

[0032] <Second Implementation>

[0033] In the first embodiment, an example of a rigidity adjustment mechanism using a leaf spring was described. In this embodiment, a rigidity adjustment mechanism other than a leaf spring will be described. (Refer to...) Figure 4 The holding device 200 for holding optical element 1 will be described. Figure 4 (a) and Figure 4 (b) is a diagram showing the configuration of the holding device 200 of this embodiment. In this embodiment, the direction of gravity is defined as the Z-axis direction, and the directions that are perpendicular to the Z-axis direction and orthogonal to each other are defined as the X-axis direction and the Y-axis direction, respectively. Figure 4 (a) is a front view of the retaining device 200 viewed from the Y-axis direction. Figure 4 (b) is viewed from the X-axis direction. Figure 4 A cross-sectional view of the dashed line B-B′ shown in (a). The holding device 200 in this embodiment is as follows... Figure 4 (a) and Figure 4 As shown in (b), in the space defined by the orthogonal coordinate system, the optical element 1 is maintained such that the surface normal of the optical surface is orthogonal to the direction of gravity.

[0034] The holding device 200 includes bases 2a and 2b, a connecting portion 16 (first holding portion) on which an optical element 1 is mounted, a mounting portion 17 (second holding portion), and vibration sensors 20, 21, and 22. The optical element 1 is held by the base 2a via the mounting portion 17. Additionally, the optical element 1 is held by the base 2b via the connecting portion 16. At least one of the connecting portion 16 and the mounting portion 17 is configured to change the holding force of the bases 2a and 2b in holding the optical element 1. That is, at least one of the connecting portion 16 and the mounting portion 17 has a rigidity adjustment mechanism that can change the rigidity imparted to the optical element 1 by holding it by the bases 2a and 2b.

[0035] like Figure 4 As shown in (a), on the back side of the optical element 1, vibration sensors 20, 21, and 22 (vibration detection units) are provided to detect the vibration generated in the optical element 1 in order to measure the deformation shape of the optical element 1 vibrating at its natural vibration frequency. Vibration sensor 20 detects the vibration component in the Y-axis direction of the optical element 1, vibration sensor 21 detects the vibration component in the X-axis direction of the optical element 1, and vibration sensor 22 detects the vibration component in the Z-axis direction of the optical element 1.

[0036] The base 2b is mounted on the upper part of the base 2a and is configured to serve as a cover inside the base 2a. The connecting part 16 directly holds one part at the upper center of the optical element 1 and is rigidly connected to the base 2b. The mounting part 17 supports the weight of the optical element 1 at two lower parts that are in contact with the outer periphery of the optical element 1 in positions symmetrical with respect to the Y-Z plane formed by the optical axis (Y-axis) and the Z-axis. The mounting part 17 is configured to clamp the surface and back of the optical element 1 in a manner that restricts the Y-direction of the optical element 1.

[0037] Reference Figure 5 The structure of the connecting part 16 will be explained. Figure 5 This diagram shows the configuration of the connecting portion 16 in the holding device 200. In the following description, an example of the connecting portion 16 having a rigid adjustment mechanism will be given, but the mounting portion 17 can also have a rigid adjustment mechanism with the same configuration as the connecting portion 16. Alternatively, only the mounting portion 17 may have a rigid adjustment mechanism with the configuration described below.

[0038] The connecting part 16 includes a connecting member 14 and bolts 15 (rigid adjustment mechanism). Bolts 15 fix the base 2b and the connecting part 16 at multiple locations. The bolts 15 are configured such that their arrangement, tightening torque, and number can be changed even after the optical element 1 is installed. This configuration allows for adjustment of the holding force between the optical element 1 and the base 2b by changing the arrangement, tightening torque, and number of bolts 15.

[0039] Although the optical element 1 and the base 2b are connected by the connecting member 14, the optical element 1 is configured such that the surface normal of the optical surface is orthogonal to the direction of gravity. Therefore, it becomes a cantilever beam structure to support the upper part of the optical element 1. This configuration is the reason why the optical element 1 vibrates in the ωX direction.

[0040] The adjustment method for the rigidity adjustment mechanism in this embodiment is the same as in the first embodiment. Adjustments are made based on the vibration components measured by sensors 20, 21, and 22 to reduce rotational vibration modes. In this embodiment, the bolts 15 are adjusted to reduce the difference between the holding force of the connecting portion 16 and the holding force of the mounting portion 17. Specifically, when the holding force of the connecting portion 16 is smaller than that of the mounting portion 17, the holding force can be increased by increasing the number of bolts 15. Alternatively, the holding force can be increased by increasing the tightening torque of the bolts 15, or by studying the arrangement of the bolts 15 to reduce deformation.

[0041] Therefore, by performing the above adjustments, the rotational vibration mode of the optical element 1 can be reduced. More specifically, the rotational vibration mode of the optical element 1 can be transformed into a parallel vibration mode. The sensitivity of the parallel vibration mode of the optical element 1 is less than that of the rotational vibration mode. Therefore, the holding device 200 in this embodiment can suppress the degradation of optical performance.

[0042] Reference Figure 6 The following describes a variation of this embodiment. Figure 6 (a) and Figure 6 (b) is a diagram showing the configuration of the holding device 300 in a modified example of this embodiment. Figure 6 (a) is a front view of the retaining device 300 viewed from the Y-axis direction. Figure 6 (b) is viewed from the X-axis direction. Figure 6 A cross-section of the dotted line C-C′ shown in (a). In terms of also having dynamic vibration absorbers 30 and 31... Figure 4 The retaining device 200 is different. Regarding the configuration other than the dynamic vibration absorbers 30 and 31, it is different from... Figure 4 The holding device 200 is the same, so its description is omitted.

[0043] Dynamic vibration absorbers 30 and 31 attenuate the high-order rotational vibration modes of the optical element 1, which are known in advance during the design phase. Dynamic vibration absorbers 30 and 31 are directly mounted on the optical element 1, with two absorbers configured for the vibration modes to be attenuated. For example, dynamic vibration absorber 30 is positioned on the upper back of the optical element 1 to attenuate the rotational vibration of the optical element 1 in the ωX direction. Dynamic vibration absorber 31 is positioned on the outer periphery of the optical element 1 to attenuate the rotational vibration of the optical element 1 in the ωZ direction.

[0044] By using dynamic vibration absorbers 30 and 31, high-order rotational vibration components can be attenuated, but low-order vibration components remain due to tolerances in the components of the holding device 300 or manufacturing errors during assembly of the holding device 300. Therefore, high-order vibrations can be reduced by the dynamic vibration absorbers 30 and 31, while low-order vibrations can be mitigated by adjusting the rigid adjustment mechanism to improve optical performance degradation.

[0045] Therefore, by performing the above adjustments, the rotational vibration mode of the optical element 1 can be reduced. More specifically, the rotational vibration mode of the optical element 1 can be transformed into a parallel vibration mode. The sensitivity of the parallel vibration mode of the optical element 1 is less than that of the rotational vibration mode. Therefore, the holding device 300 in this embodiment can suppress the degradation of optical performance.

[0046] <Implementation of the Exposure Apparatus>

[0047] Reference Figure 7 The embodiments of applying the above-described holding devices 100, 200, and 300 to the exposure apparatus will be described. Figure 7 This is a schematic diagram showing the configuration of the exposure apparatus EXP in this embodiment. The exposure apparatus EXP includes: a master stage 40 for holding the master mask M; a projection optics system PO for projecting the pattern of the master mask M, illuminated by the illumination optics system IL, onto a substrate P; and a substrate stage 44 for holding the substrate P. Exposure light irradiated by a light source not shown is focused onto the master mask M by the illumination optics system IL.

[0048] The projection optical system PO is an optical system used to project a pattern formed on a master plate M onto a substrate P coated with a photosensitive material to transfer the pattern. In this embodiment, a projection optical system relying on an Offner-type optical system is envisioned. In the case of an Offner-type optical system, in order to ensure a good image area, the master plate M is illuminated in an arc-shaped illumination area. In addition, the illumination shape of the exposure light reaching the substrate P is also arc-shaped. The light source (not shown) is, for example, a high-pressure mercury lamp or an LED-based light source.

[0049] Light emanating from the light source passes through the illumination optical system IL and the original image M, and is reflected sequentially by the trapezoidal mirror 41, the concave mirror 42, the convex mirror 43, and the trapezoidal mirror 41 before reaching the substrate P. The pattern on the original image M is then transferred onto the substrate P. The convex mirror 43 is held, for example, by the holding device 100 described in the first embodiment.

[0050] Furthermore, since the concave mirror 42 is larger than the convex mirror 43, it is preferable to hold it more stably than the holding device 100 in the first embodiment. Therefore, it is preferable to have a configuration that supports the bottom surface of the optical element, such as the holding device 200 in the second embodiment, in a way that can support the weight of the concave mirror 42. Thus, the concave mirror 42 is held, for example, by the holding device 200 described in the second embodiment.

[0051] The above example illustrates an example of holding at least one optical element of the projection optical system PO by the holding device 100 or the holding device 200, but it is not limited thereto. For example, at least one optical element of the illumination optical system IL can also be held by the holding device 100 or the holding device 200.

[0052] By holding the concave mirror 42 or convex mirror 43 in the exposure apparatus EXP using the holding device according to the present invention, the rotational vibration mode can be reduced after the exposure apparatus EXP is set up. Therefore, the exposure process using the exposure apparatus EXP can suppress the degradation of exposure performance, and thus is advantageous in at least one aspect of article performance, quality, productivity, and production cost compared to existing methods.

[0053] <Implementation Method of Article Manufacturing Method>

[0054] The article manufacturing method according to embodiments of the present invention is suitable for manufacturing flat panel displays (FPDs), for example. The article manufacturing method of this embodiment includes: a step of obtaining an exposed substrate by forming a latent image pattern on a photosensitive material coated on a substrate through exposure using the aforementioned exposure apparatus; and a step of obtaining a developed substrate by developing the exposed substrate having formed the latent image pattern in this step. Furthermore, this manufacturing method includes other well-known steps (oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, cutting, bonding, encapsulation, etc.). The article manufacturing method of this embodiment is advantageous compared to existing methods in at least one aspect of article performance, quality, productivity, and production cost.

[0055] The preferred embodiments of the present invention have been described above, but the present invention is not limited to these embodiments and various modifications and alterations can be made within its conceptual scope.

[0056] Explanation of reference numerals in the attached figures

[0057] 1. Optical components

[0058] 2. Base

[0059] 10. Connecting part (Second retaining part)

[0060] 12. Leaf spring (rigid adjustment mechanism)

[0061] 13. Connecting part (first retaining part)

[0062] 100 Holding device

Claims

1. A holding device for holding an optical element, characterized in that, The above-mentioned holding device has: Base; The first holding part holds the optical element and the base. A second holding part holds the optical element and the base at a position different from the holding position of the first holding part; and The testing department detects vibrations generated in the aforementioned optical components. The aforementioned holding device is configured to change at least one of the holding force of the base holding the optical element via the first holding part and the holding force of the base holding the optical element via the second holding part.

2. The holding device as claimed in claim 1, characterized in that, The aforementioned holding device also includes a fixing part for fixing and holding the aforementioned optical element. The first holding part and the second holding part hold the optical element and the base via the fixing part.

3. The holding device as claimed in claim 1, characterized in that, At least one of the first holding portion and the second holding portion is configured to reduce the difference between the holding force of the base holding the optical element via the first holding portion and the holding force of the base holding the optical element via the second holding portion.

4. A holding device for holding an optical element, characterized in that, The above-mentioned holding device has: Base; A first retaining part, which retains the aforementioned optical element and the aforementioned base; and The second holding part holds the optical element and the base at a position different from the holding position where the first holding part holds the optical element. At least one of the first holding portion and the second holding portion is configured to reduce the difference between the holding force of the base holding the optical element via the first holding portion and the holding force of the base holding the optical element via the second holding portion.

5. The holding device as claimed in claim 1, characterized in that, The first holding part and the second holding part hold the optical element in a region that does not contain the optical axis of the optical element.

6. The holding device as claimed in claim 1, characterized in that, At least one of the first holding part and the second holding part is configured to change the rigidity of the optical element given to the optical element by holding the optical element through the base.

7. The holding device as claimed in claim 6, characterized in that, At least one of the first retaining part and the second retaining part has a rigidity adjustment mechanism that can adjust the rigidity.

8. The holding device as claimed in claim 7, characterized in that, The aforementioned rigid adjustment mechanism includes a leaf spring.

9. The holding device as claimed in claim 7, characterized in that, The aforementioned rigid adjustment mechanism includes bolts.

10. The holding device as claimed in claim 1, characterized in that, At least one of the first holding part and the second holding part can be adjusted to reduce the rotational vibration mode generated in the optical element.

11. The holding device as claimed in claim 1, characterized in that, At least one of the first holding part and the second holding part can be adjusted to transform the rotational vibration mode generated by the optical element into a parallel vibration mode.

12. The holding device as claimed in claim 11, characterized in that, The aforementioned rotational vibration mode is a vibration about an axis that rotates in a direction perpendicular to the optical axis of the aforementioned optical element.

13. The holding device as claimed in claim 11, characterized in that, The aforementioned parallel vibration modes are vibrations along the optical axis of the aforementioned optical element.

14. A holding device for holding an optical element, characterized in that, The above-mentioned holding device has: Base; A first retaining part, which retains the aforementioned optical element and the aforementioned base; and The second holding part holds the optical element and the base at a position different from the holding position where the first holding part holds the optical element. The aforementioned holding device is configured to change at least one of the holding force of the base holding the optical element via the first holding portion and the holding force of the base holding the optical element via the second holding portion. At least one of the first holding part and the second holding part can be adjusted to transform the rotational vibration mode generated by the optical element into a parallel vibration mode.

15. An adjustment method, wherein in a holding device in which an optical element is held by a base via a first holding portion and a second holding portion, the holding force of the base holding the optical element is adjusted, characterized in that, The above adjustment methods include: The testing process includes a testing unit that detects vibrations generated in the aforementioned optical element; and... An adjustment process, based on the results detected in the above-mentioned detection process, changes at least one of the holding force of the base holding the optical element via the first holding part and the holding force of the base holding the optical element via the second holding part.

16. The adjustment method as described in claim 15, characterized in that, In the above adjustment process, based on the results detected in the above detection process, at least one of the first holding part and the second holding part is adjusted so that the difference between the holding force of the base holding the optical element via the first holding part and the holding force of the base holding the optical element via the second holding part is reduced.

17. The adjustment method as described in claim 15, characterized in that, In the above adjustment process, based on the results detected in the above detection process, the vibration mode of rotation generated in the above optical element is reduced.

18. An exposure apparatus that uses exposure light from a light source to expose a photosensitive material to transfer a pattern formed on a master plate onto the photosensitive material coated on a substrate, characterized in that... The above-mentioned exposure apparatus has: An illumination optical system that illuminates the original image with exposure light from the aforementioned light source; and A projection optics system that projects the exposure light transmitted through the original onto the substrate. At least one optical element included in the above-described illumination optical system and projection optical system is held by the holding device according to any one of claims 1 to 14.

19. A method for manufacturing an article, characterized in that, The methods for manufacturing the above-mentioned items include: An exposure process, wherein the exposure process uses the exposure apparatus of claim 18 to expose the substrate to obtain an exposed substrate; and The developing process involves developing the exposed substrate to obtain a developed substrate. Articles are manufactured from the aforementioned developing substrate.

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