Conveying structure and grinding equipment
By designing a detachable transport structure, the problem of requiring transport structures of various sizes was solved, enabling transport to adapt to different wafer sizes, reducing costs and improving reliability and convenience.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HEYUAN AIFO LIGHT COMM TECH CO LTD
- Filing Date
- 2022-12-26
- Publication Date
- 2026-07-17
AI Technical Summary
In existing CMP processes, the transport structure needs to be available in multiple sizes to accommodate different wafers, which increases the cost for companies.
Design a detachable conveying structure that allows for adjustment of the outlet position to accommodate different wafer sizes through detachable connections and combinations between conveying components, thereby achieving length and position adjustment of the conveying structure.
It improves the application range and practicality of the conveyor structure, reduces enterprise usage costs, enhances reliability and convenience, and is suitable for wafers of different sizes.
Smart Images
Figure CN115870886B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of precision instrument and equipment technology, and in particular to conveying structures and grinding equipment. Background Technology
[0002] Chemical mechanical polishing (CMP) is a key process for achieving wafer surface planarization in integrated circuit manufacturing. Unlike traditional purely mechanical or chemical polishing methods, CMP combines surface chemical action and mechanical abrasion to remove micron / nanoscale materials from the wafer surface, achieving nanoscale surface planarization and enabling subsequent photolithography processes. However, delivering the polishing slurry, which serves as the chemical reagent, requires a delivery structure on the CMP machine. The size of this delivery structure is tailored to the wafer size, necessitating the stock of delivery structures in various sizes, thus increasing the company's operating costs. Summary of the Invention
[0003] Therefore, it is necessary to provide a conveying structure and grinding equipment that can be adjusted according to the wafer size to address the above problems.
[0004] A conveying structure includes a conveying member with a conveying channel formed thereon. The conveying channel extends through both sides of the conveying member and forms an inlet and an outlet. The conveying member also has an outlet connected to the conveying channel, located between the inlet and the outlet. The number of conveying members is at least two, with one conveying member detachably connected to the other. The inlet or outlet of at least one conveying member is used to input polishing fluid, the outlet is connected to the inlet of the other conveying member, and the other outlet is used to output polishing fluid.
[0005] In one embodiment, a connecting groove is provided at the input port, and a connecting protrusion is formed at the output port. The connecting protrusion of one of the conveying components can be engaged in the connecting groove of another conveying component, so that the output port of one conveying component is connected to the input port of the other conveying component.
[0006] In one embodiment, the number of connecting protrusions is at least two, and the at least two connecting protrusions are circumferentially spaced along the outer edge of the output port, and the number of connecting slots is spaced out in relation to the number of connecting protrusions.
[0007] In one embodiment, the connecting protrusion is an annular protrusion, which is disposed along the edge of the output port, and the shape of the connecting groove is adapted to the shape of the connecting protrusion.
[0008] In one embodiment, the conveying component is a cylindrical structure, a rectangular structure, or an arc-shaped structure.
[0009] In one embodiment, the conveying component is a flexible structural component that can undergo elastic deformation under stress.
[0010] In one embodiment, there are multiple conveying components, and the inlet and outlet of two adjacent conveying components are connected. The inlet of the first conveying component and the outlet of the last conveying component are connected, so that the multiple conveying components form a ring structure. The outlet of one conveying component is used to input the grinding fluid, and the outlets of the other conveying components are used to output the grinding fluid.
[0011] A grinding apparatus includes a mounting component and a conveying structure as described above. An output channel is formed on the mounting component for discharging grinding fluid. The conveying structure is mounted on the mounting component, and the output channel is connected to the conveying channel through the input port or the outlet port.
[0012] In one embodiment, the number of output channels is at least two, and the at least two output channels are spaced apart on the mounting component. The number of conveying structures corresponds to the number of output channels, and each output channel can be connected to a conveying channel of one of the conveying structures.
[0013] In one embodiment, the number of transport structures is at least two, and the transport channel lengths of adjacent transport structures are not identical, so that the outlet on any of the transport structures is used for different locations on the wafer.
[0014] The aforementioned conveying structure and grinding equipment include at least two detachably connected conveying components, with one output port connected to the other input port. One conveying component connects to an output channel on a mounting component via its input port or outlet. The output channel outputs grinding slurry, which flows through the input port or outlet into the conveying channel of one conveying component, then through the output port to the input port of the other conveying component, and finally exits through the outlet. The detachability of the conveying components allows for adjustment of the overall length of the conveying structure, enabling the outlet to correspond to different positions on the wafer. This allows the grinding slurry to be delivered to different locations on the wafer or makes the conveying structure suitable for wafers of different sizes. This further improves the application range, practicality, and reliability of the conveying structure. The conveying structure can be disassembled and reassembled between the conveying components according to different wafer sizes, adjusting the position of the outlet and reducing enterprise operating costs. Attached Figure Description
[0015] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.
[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the conveying structure in one embodiment;
[0018] Figure 2 This is a schematic diagram of the mounting component in one embodiment.
[0019] The components in the diagram are labeled as follows:
[0020] 100. Conveying structure; 110. Conveying component; 111. Connecting protrusion; 112. Connecting groove; 113. Outlet; 200. Mounting component; 210. Output channel. Detailed Implementation
[0021] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.
[0022] See Figure 1 and Figure 2In one embodiment of the grinding apparatus, the grinding apparatus includes a conveying structure 100 and a mounting member 200. The mounting member 200 has an output channel 210 for outputting grinding fluid. The conveying structure 100 is mounted on the mounting member 200. The conveying structure 100 includes a conveying member 110, on which a conveying channel is formed. The conveying channel extends through both sides of the conveying member 110, forming an inlet and an outlet. The conveying member 110 also has an outlet 113 communicating with the conveying channel, located between the inlet and the outlet. There are at least two conveying members 110, one of which is detachably connected to the other. The inlet or outlet 113 of at least one conveying member 110 is used to input grinding fluid, and its outlet is connected to the inlet of the other conveying member 110. The other outlet 113 is used to output grinding fluid. The output channel 210 is connected to the conveying channel through the input port or the outlet 113.
[0023] At least two conveyor components 110 are detachably connected, with one output port communicating with the other input port. One conveyor component 110 is connected via an input port or outlet port 113 to an output channel 210 on the mounting component 200. The output channel 210 outputs polishing slurry, which flows through the input port or outlet port 113 into the conveying channel of one conveyor component 110, then through the output port to the input port of the other conveyor component 110, and finally out through the outlet port 113. The detachability of the conveyor components 110 allows for adjustment of the overall length of the conveyor structure 100, enabling the outlet port 113 to correspond to different positions on the wafer. This allows the polishing slurry to be delivered to different positions on the wafer or makes the conveyor structure 100 suitable for wafers of different sizes. This further improves the application range, practicality, and reliability of the conveyor structure 100. The conveyor structure 100 can be assembled and disassembled between the conveyor components 110 according to different wafer sizes, adjusting the position of the outlet port 113 and reducing enterprise operating costs.
[0024] In one embodiment, the number of output channels 210 is at least two, and the at least two output channels 210 are spaced apart on the mounting member 200. The number of conveying structures 100 corresponds to the number of output channels 210, and each output channel 210 can be connected to a conveying channel of a conveying structure 100. This can further increase the output volume of the polishing slurry. Alternatively, the outlets 113 on different conveying structures 100 can be corresponding to different wafers, further improving the efficiency and practicality of the conveying structures 100.
[0025] In one embodiment, the number of conveying structures 100 is at least two, and the conveying channel lengths of adjacent conveying structures 100 are inconsistent, so that the outlet 113 on any one of the conveying structures 100 can be used for different positions on the wafer. The different lengths of the conveying structures 100 or the different lengths of the conveying channels allow the outlet 113 to be used for different positions on the wafer, or to be applicable to wafers of different sizes. This avoids the step of disassembling and reassembling the conveying structure 100 from the mounting component 200, further improving the ease of use and practicality of the conveying structure 100.
[0026] In one embodiment, a connecting groove 112 is provided at the input port, and a connecting protrusion 111 is formed at the output port. The connecting protrusion 111 of one conveyor 110 can be engaged within the connecting groove 112 of another conveyor 110, thereby connecting the output port of one conveyor 110 with the input port of the other conveyor 110. The cooperation of the connecting groove 112 and the connecting protrusion 111 allows the two conveyors 110 to be detachably connected, and connects the output port of one conveyor 110 with the input port of the other conveyor 110, further improving the reliability and practicality of the conveying structure 100.
[0027] In one embodiment, the number of connecting protrusions 111 is at least two, and the at least two connecting protrusions 111 are circumferentially spaced along the outer edge of the output port. The number of connecting grooves 112 is spaced corresponding to the number of connecting protrusions 111. The cooperation between the at least two connecting protrusions 111 and the connecting grooves 112 can further increase the contact area between the two conveying components 110, thereby ensuring the connection stability between the two conveying components 110. At the same time, the at least two connecting protrusions 111 also have the function of installation and positioning.
[0028] In one embodiment, at least two of the connecting protrusions 111 are arranged symmetrically along an axis. The opening of the connecting groove 112 corresponds to the arrangement of the connecting protrusions 111. Thus, when some of the outlets 113 are not required to output grinding fluid, the outlets 113 of the conveyor 110 can be arranged facing upwards, while the outlets 113 of the conveyor 110 that require the output of grinding fluid can be arranged facing downwards. This facilitates the installation and use of the conveyor 110.
[0029] In one embodiment, the connecting protrusion 111 is an annular protrusion, which is disposed along the edge of the output port, and the shape of the connecting groove 112 is adapted to the shape of the connecting protrusion 111. The annular connecting protrusion 111 and the connecting groove 112 can further increase the contact area between the two conveying components 110, thereby ensuring the connection stability between the two conveying components 110. When some of the outlets 113 are not required to output grinding fluid, the conveying component 110 can be rotated so that its outlet 113 faces upward, while the outlet 113 of the conveying component 110 that needs to output grinding fluid faces downward. This makes it easier to install and use the conveying component 110, further improving the ease of use of the conveying component 110.
[0030] In one embodiment, the conveying member 110 is a cylindrical, rectangular, or arc-shaped structure. Optionally, the shape of the conveying member 110 can be replaced and changed according to actual needs, and is not limited to the shape in this embodiment.
[0031] In one embodiment, the conveying component 110 is a flexible structural component, capable of elastic deformation under stress. Therefore, the conveying component 110 can deform according to actual needs, further improving the reliability and practicality of the conveying structure 100.
[0032] In one embodiment, there are multiple conveying components 110. The input and output ports of two adjacent conveying components 110 are connected, with the input port of the first conveying component 110 and the output port of the last conveying component 110 connected, forming a ring structure. One conveying component 110's outlet 113 is used to input the grinding fluid, while the outlets 113 of the other conveying components 110 are used to output the grinding fluid. When multiple conveying components 110 are connected end-to-end to form a ring structure, i.e., the conveying structure 100 is a ring structure, one outlet 113 is connected to the output channel 210 and conveys the grinding fluid into the conveying channel, while the grinding fluid flows out through the other outlets 113. This further improves the practicality of the conveying structure 100 and broadens its application range. It should be noted that any outlet 113 on the multiple conveying components 110 can be connected to the output channel 210. Furthermore, if there are multiple output channels 210, then there can be multiple outlets 113 connected to the multiple output channels 210 in a one-to-one correspondence.
[0033] In one embodiment, there are two conveying members 110, both of which are semi-circular arc-shaped structures. This allows the two conveying members 110 to also form a ring-shaped structure.
[0034] In other embodiments, some conveyors 110 may not have outlets 113.
[0035] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.
[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0037] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.
[0038] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first and second features directly abut each other, or that the first and second features indirectly abut each other through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0039] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.
[0040] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0041] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.
Claims
1. A conveying structure, characterized in that, The conveying structure includes a conveying component with a conveying channel formed thereon. The conveying channel extends through both sides of the conveying component and forms an inlet and an outlet. The conveying component also has an outlet connected to the conveying channel, which is located between the inlet and the outlet. There are at least two conveying components, with one conveying component detachably connected to the other. The inlet or outlet of at least one conveying component is used to input polishing fluid, the outlet is connected to the inlet of the other conveying component, and the other outlet is used to output polishing fluid. A connecting groove is provided at the input port, and a connecting protrusion is formed at the output port. The connecting protrusion of one of the conveying components can be engaged in the connecting groove of another conveying component, so that the output port of one conveying component is connected to the input port of another conveying component.
2. The conveying structure according to claim 1, characterized in that, The number of connecting protrusions is at least two, and the at least two connecting protrusions are arranged circumferentially along the outer edge of the output port. The number of connecting slots is arranged at intervals corresponding to the number of connecting protrusions.
3. The conveying structure according to claim 1, characterized in that, The connecting protrusion is an annular protrusion, and the annular connecting protrusion is arranged along the edge of the output port. The shape of the connecting groove is adapted to the shape of the connecting protrusion.
4. The conveying structure according to any one of claims 1-3, characterized in that, The conveying component is a cylindrical, rectangular, or arc-shaped structural component.
5. The conveying structure according to claim 4, characterized in that, The conveying component is a flexible structural component, and it can undergo elastic deformation when subjected to force.
6. The conveying structure according to claim 5, characterized in that, The number of conveying components is multiple, and the input port and output port of two adjacent conveying components are connected. The input port of the conveying component at the first end and the output port of the conveying component at the last end are connected, so that the multiple conveying components form a ring structure. The outlet of one conveying component is used to input the grinding fluid, and the outlets of the other conveying components are used to output the grinding fluid.
7. A grinding apparatus, characterized in that, The grinding equipment includes: A mounting component having an output channel for discharging polishing slurry; and The conveying structure as described in any one of claims 1-6, wherein the conveying structure is mounted on the mounting member, and the output channel is connected to the conveying channel through the input port or the outlet port.
8. The grinding equipment according to claim 7, characterized in that, The number of output channels is at least two, and the at least two output channels are spaced apart on the mounting component. The number of conveying structures corresponds to the number of output channels, and each output channel can be connected to a conveying channel of a conveying structure.
9. The grinding equipment according to claim 8, characterized in that, The number of the conveying structures is at least two, and the lengths of the conveying channels of two adjacent conveying structures are not the same, so that the outlet on any of the conveying structures is used for different locations on the wafer.