Plasmonic optical enhancement chip system and applications thereof

Abstract

The application provides a kind of plasmonic optical enhancement chip system and its application, the system includes nanometer hole chip, optical chip group and image sensor chip, at least one reaction unit is provided in nanometer hole chip, reaction unit includes excitation light coupling grating and microcavity, and the bottom surface of microcavity is provided with nanometer opening;Optical chip group includes first integrated optical chip, relay optical chip and second integrated optical chip from bottom to top sequentially stacked to constitute at least one optical unit, for irradiating excitation light on excitation light coupling grating, receiving the optical signal excited at nanometer opening and sequentially collimating, converging, collecting, processing, output;Image sensor chip includes at least one photoelectric conversion unit.The application utilizes the amplification effect of plasmonic enhanced electric field, efficiently excites the molecule at the nanometer opening of microcavity, has super high sensitive detection capacity, can realize the super high sensitive optical detection of minimum single molecule, and can be applied to single molecule detection and DNA / RNA sequencing field.

Description

Technical Field

[0001] This invention belongs to the field of biochip technology and relates to a plasmonic optical enhancement chip system and its application. Background Technology

[0002] Biochips have a wide range of applications, finding broad use in life science research and practice, medical research and clinical practice, drug design, environmental protection, agriculture, military and other fields, and have broad economic, social and scientific prospects. Improving the detection sensitivity of biochips has become an important technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0003] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a plasmonic optical enhancement chip system and its application, which solves the problem of low detection sensitivity of biochips in the prior art.

[0004] To achieve the above and other related objectives, the present invention provides a plasmonic optical enhancement chip system, comprising:

[0005] A nanoporous chip includes a nanoporous chip body and a metal film. The nanoporous chip body has at least one reaction unit. The reaction unit includes an excitation light coupling grating and a microcavity arranged at intervals in the horizontal direction. The microcavity opens from the top surface of the nanoporous chip body and extends to the bottom surface of the nanoporous chip body to form a nano-opening. The metal film is located on the upper surface of the nanoporous chip body and covers the surface of the excitation light coupling grating and the surface of the microcavity.

[0006] An optical chip assembly is located above the nanopore chip. The optical chip assembly includes a first integrated optical chip, a relay optical chip, and a second integrated optical chip stacked sequentially from bottom to top to form at least one optical unit. It is used to irradiate the excitation light onto the excitation light coupling grating, receive the optical signal excited at the nanopore, collimate and converge it sequentially, collect the converged optical signal, process it, and then output it.

[0007] An image sensor chip is located above the optical chipset. The image sensor chip includes at least one photoelectric conversion unit for receiving optical signals output by the optical chipset and converting them into electrical signals.

[0008] Optionally, the relay optical chip includes at least one lens group, which includes a first lens and a second lens spaced apart in a vertical direction. The first lens is used to collimate the optical signal excited at the nano-aperture, and the second lens is used to converge the optical signal collimated by the first lens to the second integrated optical chip.

[0009] Optionally, the first lens includes a microlens or a Fresnel lens, and the second lens includes a microlens or a Fresnel lens.

[0010] Optionally, the excitation light coupling grating includes a Bragg reflector.

[0011] Optionally, the reaction unit further includes a reflective structure spaced apart from the microcavity, and the microcavity is located between the excitation light coupling grating and the reflective structure.

[0012] Optionally, the reflective structure includes a Bragg reflector.

[0013] Optionally, the opening area of ​​the microcavity gradually decreases from top to bottom.

[0014] Optionally, the shape of the nano-opening includes one of rectangle, square and circle.

[0015] Optionally, the optical unit includes a single-mode waveguide and a focusing grating coupler located in the first integrated optical chip, and a collecting grating coupler, a planar waveguide, a multimode waveguide, and a static interferometer located in the second integrated optical chip. The single-mode waveguide is used to transmit excitation light to the focusing grating coupler, the focusing grating coupler is used to focus the excitation light downwards and project it onto the excitation light coupling grating, the collecting grating coupler is used to collect the optical signal converged by the relay optical chip and transmit it sequentially through the planar waveguide and the multimode waveguide to the static interferometer, and the static interferometer is used to generate an interference signal and project it into the image sensor chip.

[0016] Optionally, the optical unit further includes a microring resonator structure located in the second integrated optical chip, the microring resonator structure being disposed next to the multimode waveguide to filter out excitation light.

[0017] Optionally, the microring resonator structure includes a ring waveguide, a strip waveguide, and a metal block, wherein the ring waveguide is located between the multimode waveguide and the strip waveguide, and the metal block is connected to the output end of the strip waveguide.

[0018] Optionally, the plasmonic optical enhancement chip system further includes a laser and an optical fiber, wherein the first integrated optical chip is connected to the laser via the optical fiber.

[0019] Optionally, the excitation light generated by the laser enters the first integrated optical chip through the optical fiber in an end-face coupling or grating coupling manner.

[0020] Optionally, the plasmonic optical enhancement chip system includes multiple reaction units, multiple optical units, and multiple photoelectric conversion units to form multiple detection units, and one detection unit includes one reaction unit, one optical unit, and one photoelectric conversion unit.

[0021] Optionally, the first integrated optical chip further includes a multi-stage multimode interference coupler, which is used to split the excitation light in the first integrated optical chip into multiple beams for input to different optical units.

[0022] The present invention also provides an application of a plasmonic optical enhancement chip system, which utilizes the plasmonic optical enhancement chip system described in any of the above claims to detect the optical signals of molecules.

[0023] Optionally, an optical signal with single-molecule sensitivity can be obtained.

[0024] Optionally, the optical signal includes at least one of a spectral signal and a fluorescence signal.

[0025] Optionally, the plasmonic optical enhancement chip system can be used for DNA sequencing or RNA sequencing.

[0026] As described above, the plasmonic optical enhancement chip system of the present invention possesses ultra-high sensitivity detection capability, enabling ultra-high sensitivity optical detection down to the lowest single molecule level. The principle is based on utilizing the amplification effect of the plasmonic enhanced electric field to efficiently excite molecules within the optical enhancement antenna structure, thereby obtaining an optical signal with single-molecule sensitivity. This optical signal includes spectral signals and / or fluorescence. The plasmonic optical enhancement chip system of the present invention can be applied to single-molecule detection and DNA / RNA sequencing fields. Attached Figure Description

[0027] Figure 1a The diagram shows an architecture and schematic of the plasmonic optical enhancement chip system of the present invention.

[0028] Figure 1b This diagram shows another architecture and schematic of the plasmonic optical enhancement chip system of the present invention.

[0029] Figure 2 This is a partial top view of the nanopore chip.

[0030] Figure 3 This is another partial top view of the nanoporous chip.

[0031] Figure 4 The diagram shown illustrates the working principle of the nanopore chip.

[0032] Figure 5This is a schematic diagram of an end-face coupling method.

[0033] Figure 6 This is a schematic diagram of a grating coupling method.

[0034] Figure 7 The diagram shows a rectangular grating structure used in the coupling grating.

[0035] Figure 8 The diagram shows a fan-shaped grating used in the grating structure of a coupled grating.

[0036] Figure 9 The diagram shows a subwavelength grating used in the coupling grating structure.

[0037] Figure 10 The diagram shows the semi-elliptical shape of the collecting grating coupler.

[0038] Figure 11 The diagram shows the semi-circular shape of the collecting grating coupler.

[0039] Figure 12 The diagram shown is a schematic of a micro-ring resonator structure.

[0040] Figure 13 The diagram shows a chip-type spectrometer formed by packaging a static interferometer and an image sensor chip.

[0041] Figure 14 The diagram shows a multi-array configuration of the plasmonic optical enhancement chip system.

[0042] Figure 15 The diagram shown is a schematic of a multimode interference coupler structure.

[0043] Figure 16 The diagram shown is a schematic of a multi-stage multimode interference coupler structure.

[0044] Figure 17 The diagram shows the structure of the second type of static interferometer.

[0045] Figure 18 The diagram shown is a structural schematic of the third type of static interferometer.

[0046] Figure 19 The diagram shown is a structural schematic of the fourth type of static interferometer.

[0047] Figure 20 The diagram shown is a structural schematic of the fifth type of static interferometer.

[0048] Component designation explanation

[0049] 1 Nanopore chip

[0050] 101 nanopore chip body

[0051] 102 metal film

[0052] 103 Excitation Optical Coupler Grating

[0053] 104 microcavities

[0054] 105 nanometer opening

[0055] 106 Reflective Structure

[0056] 2a First integrated optical chip

[0057] 2b Relay Optical Chip

[0058] 2c Second integrated optical chip

[0059] 201 base

[0060] 202 Optical Waveguide

[0061] 203 Grating Structure

[0062] 204 waveguide

[0063] 204a planar waveguide

[0064] 204b single-mode waveguide

[0065] 205 Single-mode waveguide

[0066] 206 Focusing grating coupler

[0067] 207 Collection grating coupler

[0068] 208 Planar Waveguide

[0069] 209 Multimode Waveguide

[0070] 210 Static Interferometer

[0071] 210a Multimode Interference Coupler Structure

[0072] 210b grating structure

[0073] 210c Multi-stage Multimode Interference Coupler Structure

[0074] 210d interferometer unit structure

[0075] 210e multimode waveguide

[0076] 210F reflector

[0077] 210g multimode interference coupler

[0078] 210h loop waveguide

[0079] 210i Incident Waveguide

[0080] 210j input coupler

[0081] 210k array waveguide

[0082] 210L Output Coupler

[0083] 210m outgoing waveguide

[0084] 210n microlens array

[0085] 211 Microring Resonator Structure

[0086] 211a Ring Waveguide

[0087] 211b strip waveguide

[0088] 211c metal block

[0089] 212 Multi-stage multimode interference coupler

[0090] 213 First Lens

[0091] 214 Second Lens

[0092] 3 Image sensor chip

[0093] 4. Laser

[0094] 5 optical fibers

[0095] 501 single-mode fiber

[0096] 6. Chip-based spectrometer

[0097] 7 molecules

[0098] 8. Data processing equipment

[0099] M surface plasmons Detailed Implementation

[0100] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0101] Please see Figures 1a to 20It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0102] This invention provides a plasmonic optical enhancement chip system; please refer to [link / reference]. Figure 1a The diagram shows an architecture and schematic of a plasmonic optical enhancement chip system, including a nanopore chip 1, an optical chipset, and an image sensor chip 3. The nanopore chip 1 comprises a nanopore chip body 101 and a metal film 102. The nanopore chip body 101 contains at least one reaction unit, which includes an excitation light coupling grating 103 and a microcavity 104 spaced apart in a horizontal direction. The microcavity 104 opens from the top surface of the nanopore chip body 101 and extends to the bottom surface of the nanopore chip body 101 to form a nano-opening 105. The metal film 102 is located on the upper surface of the nanopore chip body 101 and covers the surface of the Bragg reflector 103 and the microcavity 104. The optical chip group is located above the nanopore chip 1 and includes a first integrated optical chip 2a, a relay optical chip 2b, and a second integrated optical chip 2c stacked sequentially from bottom to top. The first integrated optical chip 2a, the relay optical chip 2b, and the second integrated optical chip 2c constitute at least one optical unit for irradiating the excitation light onto the excitation light coupling grating 103, receiving the optical signal excited at the nano-aperture 105 and collimating and converging it sequentially, collecting the converged optical signal, processing it, and then outputting it. The image sensor chip 3 is located above the optical chip group and includes at least one photoelectric conversion unit for receiving the optical signal output by the optical chip group and converting it into an electrical signal.

[0103] As an example, the image sensor chip 3 is connected to the data processing device 8.

[0104] As an example, the nanoporous chip body 101 can be made of a rigid or flexible material. The rigid material can be silicon, silicon nitride, silicon dioxide, aluminum nitride, hafnium dioxide, glass, or other suitable materials. The flexible material can be polymethyl methacrylate (PMMA), polydimethylsiloxane (PDMS), or other suitable materials. The metal film 102 includes at least one of gold, silver, copper, and platinum films.

[0105] As an example, the opening area of ​​the microcavity 104 gradually decreases from top to bottom, and the nano-opening 105 at the bottom of the microcavity 104 has a size at least in one dimension that is at the nanometer level (e.g., 0.1-1000 nm).

[0106] As an example, the excitation light coupling grating 103 includes a Bragg mirror, which includes a plurality of grating grooves formed in the nanopore chip body 101. The grating grooves open from the top surface of the nanopore chip body 101 and extend toward the bottom surface of the nanopore chip body 101, but do not penetrate the bottom surface of the nanopore chip body 101.

[0107] As an example, the reaction unit further includes a reflective structure 106 spaced apart from the microcavity 104, and the microcavity 104 is located between the excitation light coupling grating 103 and the reflective structure 106. The reflective structure 106 is used to reflect the propagating plasmon light wave back, reducing loss. In this embodiment, the reflective structure 106 includes a Bragg reflector.

[0108] For example, please refer to Figure 2 The image shows a partial top view of the nanoporous chip 1, wherein the nano-openings 105 are in the form of nano-slits. Please refer to... Figure 3 The image shows another partial top view of the nanopore chip 1, wherein the nano-apertures 105 are in the form of nanopores. It should be noted that the shape of the nano-apertures 105 can be adjusted as needed, including but not limited to rectangles, squares, and circles. The arrangement of the multiple grating grooves of the Bragg reflector 103 can also be adjusted as needed, without being limited to... Figure 2 and Figure 3 The above is the limit.

[0109] Please see Figure 4 The diagram shows the working principle of the nanopore chip 1. Excitation light (as indicated by multiple parallel solid arrows in the diagram) irradiates the excitation light coupling grating 103. The incident photons of the excitation light interact with the free electrons on the surface of the metal film 102, generating surface plasmon resonance (surface plasmon M is shown in the diagram), and producing a surface plasmon enhanced electric field. This surface plasmon electric field can propagate on the chip surface. When it propagates to the nano-opening 105 at the bottom of the microcavity 104, a stronger antenna enhancement effect occurs, resulting in a highly localized plasmon enhanced electric field. Figure 4The image shows multiple diverging dashed arrows illustrating the molecular optical signals excited by the plasmon electric field. This enhanced electric field, localized at the location of the nano-opening 105, can excite the fluorescence / Raman / vibrational / rotational / absorption / reflection spectra of molecule 7 within the nano-opening 105, exhibiting a very high-efficiency enhancement effect and enabling single-molecule detection sensitivity (e.g., it can produce 10...). 5 -10 20 (This enhances the signal intensity by a factor of two). The reflective structure 106 acts as a reflector, reflecting back a portion of the optical signal generated within the nanopore chip 105, thereby reducing the propagation loss of signal photons on the surface and enhancing the intensity of the optical signal. The detected molecule 7 can be transported to the nanopore chip 105 from above or below.

[0110] For example, please refer back to [link / reference]. Figure 1a The plasmonic optical enhancement chip system further includes a laser 4 and an optical fiber 5. The first integrated optical chip 2a is connected to the laser 4 via the optical fiber 5. The laser 4 and the optical fiber 5 are essential optical components outside the chip architecture, providing the optical excitation function in the chip. The laser 4 outputs an excitation light source through the optical fiber 5, and the excitation light is coupled into the first integrated optical chip 2a through grating coupling or end-face coupling.

[0111] As an example, the optical fiber 5 can be a single-mode optical fiber or a single-mode optical fiber lens.

[0112] For example, please refer to Figure 5 The diagram shows a schematic of an end-face coupling method, in which the excitation light is directly and closely aligned with the end face of the optical waveguide 202 on the substrate 201 of the integrated optical chip 2 through a single-mode optical fiber 501. The light emitted from the single-mode optical fiber 501 can be coupled into the optical waveguide 202 for further transmission.

[0113] For example, please refer to Figure 6 The diagram illustrates a schematic of a grating coupling method, in which excitation light is emitted through a single-mode fiber 501 to a grating structure 203 on the substrate 201 of the first integrated optical chip 2a, and coupled into a waveguide 204 by the grating structure 203 for further propagation. The central axis of the single-mode fiber 501 is offset from the normal by a preset angle θ.

[0114] For example, please refer to Figures 7 to 9 The diagram shows top views of several common coupling gratings, among which... Figure 7 The diagram shows a rectangular grating used in the coupling grating structure 203. Figure 8The diagram shows a sector grating used in the coupling grating structure 203. Figure 9 The diagram shows a subwavelength grating as the grating structure 203 in the coupling grating. In this embodiment, the overall structure of the coupling grating includes the periodic grating structure 203 and a planar waveguide 204a and a single-mode waveguide 204b connected to the output end of the grating structure 203. After the excitation light from outside the integrated optical chip 2 is coupled into the grating, it continues to be transmitted through the single-mode waveguide 204b.

[0115] Please refer back to this. Figure 1a In the optical chipset, the relay optical chip 2b includes at least one lens group. As part of the optical unit, the lens group helps to reduce the size of the collection coupling grating in the second optical integrated chip 2c, reduce the chip manufacturing cost, and the lens group has higher collection efficiency, which can improve the collection efficiency of the entire chip structure for optical signals.

[0116] As an example, the lens group includes a first lens 213 and a second lens 214 spaced apart in the vertical direction. The first lens 213 is used to collimate the optical signal excited at the nano-aperture 105, and the second lens 214 is used to converge the optical signal collimated by the first lens 213 to the second integrated optical chip 2c.

[0117] As an example, the first lens 213 includes a microlens or a Fresnel lens, and the second lens 214 includes a microlens or a Fresnel lens. Figure 1a The image shows a case where both the first lens 213 and the second lens 214 are microlenses. The diameter of the microlens can be in the range of 50-5000μm, preferably 200μm, and the focal length can be in the range of 0.1-500μm, preferably 10μm.

[0118] For example, please refer to Figure 1b The diagram shows another architecture and schematic of the plasmonic optical enhancement chip system, in which the first lens 213 and the second lens 214 are both Fresnel lenses. The diameter of the Fresnel lens can be 50-5000μm, preferably 200μm, and the focal length can be 0.1-500μm, preferably 10μm.

[0119] As an example, the optical unit further includes a single-mode waveguide 205 and a focusing grating coupler 206 located in the first integrated optical chip 2a, and a collecting grating coupler 207, a planar waveguide 208, a multimode waveguide 209, and a static interferometer 210 located in the second integrated optical chip 2c. The single-mode waveguide 205 is used to transmit the excitation light to the focusing grating coupler 206. The focusing grating coupler 206 is used to focus the excitation light downwards and project it onto the excitation light coupling grating 103. The collecting grating coupler 207 is used to collect the optical signal converged by the relay optical chip 2b and transmit it sequentially through the planar waveguide 208 and the multimode waveguide 209 to the static interferometer 210. The static interferometer 210 is used to generate an interference signal and project it into the image sensor chip 3.

[0120] Specifically, the focusing grating coupler 206 and the collecting grating coupler 207 utilize the principle of a diffraction grating to control the beam propagation direction, achieving optical focusing or optical collecting effects. To increase the excitation or collection efficiency, the overall size of the focusing grating coupler 206 and the collecting grating coupler 207 can be made relatively large, with the size range controllable between 50-5000 μm.

[0121] For example, please refer to Figure 10 and Figure 11 The diagram shows the sequential connection of the collecting grating coupler 207, the planar waveguide 208, and the multimode waveguide 209. The collecting grating coupler 207 can be, for example, as shown below. Figure 10 The semi-ellipse shown can also be as follows: Figure 11 The semi-circle shown is similar in shape to the focusing grating coupler 206, which will not be described in detail here.

[0122] As an example, the optical unit further includes a microring resonator structure 211 located in the second integrated optical chip 2c, the microring resonator structure 211 being disposed next to the multimode waveguide 209 to filter out excitation light.

[0123] For example, please refer to Figure 12The diagram shows the schematic of the micro-ring resonator structure 211, which includes a ring waveguide 211a, a strip waveguide 211b, and a metal block 211c. The ring waveguide 211a is located between the multimode waveguide 209 and the strip waveguide 211b, and the metal block 211c is connected to the output end of the strip waveguide 211b. By designing the dimensions of the ring waveguide 211a, a specific wavelength can be selected. The selected wavelength photon is coupled into the ring waveguide 211a via an evanescent wave. When the optical path length of the photon in the ring waveguide 211a is equal to an integer multiple of the wavelength, interference enhancement occurs, forming a whispering gallery mode. The photon then remains within the ring waveguide 211a and propagates. The photon is then coupled out of the ring waveguide 211a through another shorter strip waveguide 211b. The photon is absorbed by the metal block 211c, thereby eliminating the photon of that wavelength from the original input photon. This allows for filtering of the excitation light of the spectral signal.

[0124] For example, please refer to Figure 13 The diagram shows a schematic of a chip-type spectrometer 6 formed by packaging the static interferometer 210 and the image sensor chip 3. The static interferometer 210 has a multimode interference coupler structure 210a at its coupling end. The spectral signal propagates through the multimode waveguide 209 and couples into the multimode interference coupler structure 210a. The signal is then split in two by the multimode interference coupler structure 210a and propagates forward through two parallel optical waveguides (which may be made of silicon nitride). The two optical waveguides are designed with different widths, resulting in a phase difference between the photons propagating in the two waveguides. Furthermore, when the two optical signals propagate within the waveguides, the evanescent fields generated by total internal reflection overlap between the two parallel waveguides, producing an interference signal. A periodic grating structure 210b is fabricated in the region between the two waveguides to diffract the interference signal upwards into the image sensor chip 3. The image sensor chip 3 can be a linear or rectangular CCD array to receive the interference signal and obtain the interference pattern. The interference pattern can be processed by Fourier transform to obtain spectral information.

[0125] For example, please refer to Figure 14The diagram shows a multi-array configuration of the plasmonic optical enhancement chip system, comprising multiple reaction units, multiple optical units, and multiple photoelectric conversion units to form multiple detection units. Each detection unit includes one reaction unit, one optical unit, and one photoelectric conversion unit. The first integrated optical chip 2a further includes a multi-stage multimode interference coupler 212, which splits the excitation light from the first integrated optical chip 2a into multiple beams for input to different optical units. The image sensor chip 3 is connected to a data processing device 8.

[0126] For example, please refer to Figure 15 The diagram shows a schematic of a multimode interference coupler structure. Multimode interference couplers are commonly used micro / nano optical devices in integrated optics, allowing light waves to propagate and be controlled to split into two beams. An ideal 1×2 multimode interference coupler structure is a 50 / 50 beam splitter, separating the incoming light waves into two beams with a 50 / 50 ratio. (See also...) Figure 16 The diagram shows a multi-stage multimode interference coupler structure. According to the principle of splitting light into two, the multi-stage MMI structure can split the light wave into many beams of equal intensity, and then the light wave continues to propagate in the waveguide.

[0127] The working principle of the plasmonic optical enhancement chip system of the present invention is as follows: The laser 4 outputs an excitation source through the optical fiber 5. The excitation light is coupled into the multi-level multimode interference coupler 212 in the first integrated optical chip 2a through grating coupling or end-face coupling. The multi-level multimode interference coupler 212 divides the excitation light into multiple beams of equal power, which are transmitted in the single-mode waveguide 205 (the output structure of the multi-level multimode interference coupler 212 is connected to the single-mode waveguide 205). The multiple beams of parallel excitation light are transmitted forward in the single-mode waveguide 205 to the diffractive focusing grating coupler 206, which acts as an excitation grating to focus the excitation light downward onto the excitation light coupling grating 103. The incident photons of the excitation light generate a surface plasmonic enhancement electric field on the surface of the excitation light coupling grating 103. This field propagates to the nano-opening 105 at the bottom of the microcavity 104, generating a highly localized enhanced electric field of plasmonic resonance, which excites the optical signal of the molecule 7 within the nano-opening 105. The excited optical signal is scattered upwards, collected and collimated by the first lens 213. The collimated optical signal is then collected by the second lens 214 and converged to the collecting grating coupler 207, and then converged through the planar waveguide 208 into the multimode waveguide 209, and transmitted into the static interferometer 210. The micro-ring resonator structure 211 next to the multimode waveguide 209 can filter out the excitation light. The optical signal after the excitation light is filtered out enters the static interferometer 210. Photons of different wavelengths interfere in the static interferometer 210 and are projected upwards into the image sensor chip 3 by the scattering grating in the static interferometer 210, forming an interference pattern. The spectral information of the optical signal can be obtained by performing a Fourier transform on the interference pattern.

[0128] It should be noted that the static interferometer 210 is not limited to that shown in Figure 1. Figure 13 , Figure 14 The types shown, for example, can also be adopted as... Figures 17 to 20 The type presented in any given image.

[0129] Specifically, Figure 17 The presented static interferometer includes a multi-stage multimode interference coupler structure 210c and multiple interferometer unit structures 210d. Each interferometer unit structure 210d includes a Fabry-Perot interferometer cavity, and the cavity lengths of the Fabry-Perot interferometer cavities in each interferometer unit structure 210d are different. The length differences are designed using a gradient, which can ultimately acquire multiple sets of interference patterns with different fringe spacings and peak intensities, resolving precise spectra. In the chip structure, the more interferometer unit structures there are, the wider the spectral range that can be resolved.

[0130] Specifically, Figure 18The presented static interferometer includes a multimode waveguide 210e and a reflector 210f placed at the end of the multimode waveguide 210e. The spectral signal propagates forward in the multimode waveguide 210e to the reflector 210f and is reflected back. The incident signal photon and the reflected signal photon undergo standing wave interference at the center of the multimode waveguide 210e (multiple elongated ellipses are used to illustrate this in the figure). The interference pattern can be captured using a linear image sensor chip, and the spectral information is obtained after Fourier transform.

[0131] Specifically, Figure 19 The presented static interferometer includes a multimode interference coupler 210g and a loop waveguide 210h. The spectral signal propagates in the multimode waveguide to the multimode interference coupler 210g, which splits the incident signal photons into two beams that enter the loop waveguide 210h. The two beams of signal photons eventually meet at the center of the loop waveguide 210h, resulting in standing wave interference (shown as multiple elongated ellipses in the figure). The interference pattern can be captured using a linear image sensor chip, and the spectral information is obtained after Fourier transform.

[0132] Specifically, Figure 20 The presented static interferometer employs an arrayed waveguide grating (AWG). Signal photons enter the input coupler 210j from the incident waveguide 210i. The input coupler 210j is a planar waveguide. Signal photons are diffracted at the interface between the input coupler 210j and the incident waveguide 210i, and their intensity in the direction perpendicular to the propagation direction enters the array waveguide 210k in a Gaussian distribution. The interface between the array waveguide 210k and the input coupler 210j is curved, ensuring that diffracted light at all positions arrives at the end face of the array waveguide 210k with the same phase. The array waveguide 210k consists of a series of similarly shaped strip waveguides with adjacent waveguides having the same length difference. Throughout the array, the total length of each waveguide increases / decreases gradually. Due to the length difference, light of different wavelengths propagates in the array waveguide 210k and possesses the same phase difference. Signal photons enter the output coupler 210l from the arrayed waveguide 210k. The output coupler 210l is also a planar waveguide structure with curved surfaces at both ends, and the two curved surfaces lie on the same circumference. The other end of the output coupler 210l is connected to the outgoing waveguide 210m. Due to the phase difference, signal photons of different wavelengths are diffracted in the planar waveguide of the output coupler 210l and focused in different outgoing waveguides 210m, achieving wavelength separation (the figure illustrates n wavelengths: λ1~λ2). nThe outgoing waveguide 210m focuses the wavelength-separated signal photons onto the linear image sensor chip 3 through the microlens array 210n to obtain an interference pattern, which is then transformed by inverse Fourier transform to obtain spectral information.

[0133] Of course, in other embodiments, the static interferometer 210 may also be of other suitable types, and the scope of protection of the present invention should not be overly limited here.

[0134] The plasmonic optical enhancement chip system of the present invention can be applied to detect the optical signals of molecules, achieving ultra-high sensitivity optical detection down to the lowest possible single molecule. The optical signals include at least one of spectral signals and fluorescence signals. Furthermore, the plasmonic optical enhancement chip system can be used for DNA sequencing or RNA sequencing.

[0135] It should be noted that the image sensor 3 may include arrayed or linear optical multiplier tubes (PMTs), single-photon avalanche diodes (SPADs), charge-coupled devices (CCDs), silicon photomultiplier tubes (SiPMs), or individual PMTs, SPADs, CCDs, SiPMs, or photodiodes. If it is a single PMT, SPAD, CCD, SiPM, or photodiode, the plasmonic optical enhancement chip system of the present invention can be used to detect the fluorescence signal intensity of a single molecule.

[0136] In summary, the plasmonic optical enhancement chip system of this invention possesses ultra-high sensitivity detection capability, enabling ultra-high sensitivity optical detection down to the lowest single molecule level. The principle is based on the amplification effect of the plasmonic enhanced electric field to efficiently excite molecules within the optical enhancement antenna structure, thereby obtaining a single-molecule sensitive optical signal, which includes spectral signals and / or fluorescence. The plasmonic optical enhancement chip system of this invention can be applied to single-molecule detection and DNA / RNA sequencing. Therefore, this invention effectively overcomes the various shortcomings of existing technologies and has high industrial applicability.

[0137] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A plasmonic optical enhancement chip system, characterized in that, include: A nanoporous chip includes a nanoporous chip body and a metal film. The nanoporous chip body has at least one reaction unit. The reaction unit includes an excitation light coupling grating and a microcavity arranged at intervals in the horizontal direction. The microcavity opens from the top surface of the nanoporous chip body and extends to the bottom surface of the nanoporous chip body to form a nano-opening. The metal film is located on the upper surface of the nanoporous chip body and covers the surface of the excitation light coupling grating and the surface of the microcavity. An optical chip assembly is located above the nanopore chip. The optical chip assembly includes a first integrated optical chip, a relay optical chip, and a second integrated optical chip stacked sequentially from bottom to top to form at least one optical unit. It is used to irradiate the excitation light onto the excitation light coupling grating, receive the optical signal excited at the nanopore, collimate and converge it sequentially, collect the converged optical signal, process it, and then output it. An image sensor chip is located above the optical chip group. The image sensor chip includes at least one photoelectric conversion unit for receiving optical signals output by the optical chip group and converting them into electrical signals. The optical unit includes a single-mode waveguide and a focusing grating coupler located in the first integrated optical chip, and a collection grating coupler, a planar waveguide, a multimode waveguide, and a static interferometer located in the second integrated optical chip. The single-mode waveguide is used to transmit excitation light to the focusing grating coupler, the focusing grating coupler is used to focus the excitation light downwards and project it onto the excitation light coupling grating, the collection grating coupler is used to collect the optical signal converged by the relay optical chip and transmit it sequentially through the planar waveguide and the multimode waveguide to the static interferometer, and the static interferometer is used to generate an interference signal and project it into the image sensor chip. The static interferometer and the image sensor chip are packaged together to form a chip-type spectrometer; The image sensor chip is used to receive interference signals and obtain interference patterns. The interference patterns can be processed by Fourier transform to obtain spectral information.

2. The plasmonic optical enhancement chip system according to claim 1, characterized in that: The relay optical chip includes at least one lens group, which includes a first lens and a second lens spaced apart in a vertical direction. The first lens is used to collimate the optical signal excited at the nano-aperture, and the second lens is used to converge the optical signal collimated by the first lens to the second integrated optical chip.

3. The plasmonic optical enhancement chip system according to claim 2, characterized in that: The first lens includes a microlens or a Fresnel lens, and the second lens includes a microlens or a Fresnel lens.

4. The plasmonic optical enhancement chip system according to claim 1, characterized in that: The excitation light coupling grating includes a Bragg reflector.

5. The plasmonic optical enhancement chip system according to claim 1, characterized in that: The reaction unit further includes a reflective structure spaced apart from the microcavity, and the microcavity is located between the excitation light coupling grating and the reflective structure.

6. The plasmonic optical enhancement chip system according to claim 5, characterized in that: The reflective structure includes a Bragg reflector.

7. The plasmonic optical enhancement chip system according to claim 1, characterized in that: The opening area of ​​the microcavity gradually decreases from top to bottom.

8. The plasmonic optical enhancement chip system according to claim 1, characterized in that: The shape of the nano-aperture includes one of rectangle, square and circle.

9. The plasmonic optical enhancement chip system according to claim 1, characterized in that: The optical unit further includes a microring resonator structure located in the second integrated optical chip, the microring resonator structure being disposed next to the multimode waveguide to filter out excitation light.

10. The plasmonic optical enhancement chip system according to claim 9, characterized in that: The microring resonator structure includes a ring waveguide, a strip waveguide, and a metal block. The ring waveguide is located between the multimode waveguide and the strip waveguide, and the metal block is connected to the output end of the strip waveguide.

11. The plasmonic optical enhancement chip system according to claim 1, characterized in that: The plasmonic optical enhancement chip system also includes a laser and an optical fiber, with the first integrated optical chip connected to the laser via the optical fiber.

12. The plasmonic optical enhancement chip system according to claim 11, characterized in that: The excitation light generated by the laser enters the first integrated optical chip through the optical fiber in either end-face coupling or grating coupling.

13. The plasmonic optical enhancement chip system according to claim 1, characterized in that: The plasmonic optical enhancement chip system includes multiple reaction units, multiple optical units, and multiple photoelectric conversion units to form multiple detection units. Each detection unit includes a reaction unit, a optical unit, and a photoelectric conversion unit.

14. The plasmonic optical enhancement chip system according to claim 13, characterized in that: The first integrated optical chip further includes a multi-stage multimode interference coupler, which is used to split the excitation light in the first integrated optical chip into multiple beams for input to different optical units.

15. An application of a plasmonic optical enhancement chip system, characterized in that: The optical signal of a molecule is detected using the plasmonic optical enhancement chip system as described in any one of claims 1-14.

16. The application of the plasmonic optical enhancement chip system according to claim 15, characterized in that: Obtain optical signals with single-molecule sensitivity.

17. The application of the plasmonic optical enhancement chip system according to claim 15, characterized in that: The optical signal includes at least one of spectral signal and fluorescence signal.

18. The application of the plasmonic optical enhancement chip system according to claim 17, characterized in that: DNA sequencing or RNA sequencing is performed using the aforementioned plasmonic optical enhancement chip system.

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