一种真空室引入轴的密封装置
By introducing a combined structure of bushing, magnetohydrodynamic seal and magnetic resistance component into the power shaft of the vacuum chamber, the problem of increased load on the magnetohydrodynamic seal due to vibration is solved, the service life and sealing performance of the seal are improved, and the stability and insulation of the device are enhanced.
CN115875459BActive Publication Date: 2026-07-17QINGDAO JIUYUE NEW MATERIAL TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- QINGDAO JIUYUE NEW MATERIAL TECH CO LTD
- Filing Date
- 2022-12-28
- Publication Date
- 2026-07-17
Smart Images
Figure CN115875459B_ABST
Abstract
本发明提供了一种真空室引入轴的密封装置，包括引入轴，所述引入轴的一端外部连接有屏蔽机构，所述引入轴的另一端外部连接有机械密封机构；所述机械密封机构包括连接于所述引入轴外表面的轴套，以及套设于所述轴套的外部、且与真空壁室相连接的密封座，以及设于所述密封座的内部两端的轴承组件，所述轴承组件位于所述密封座的内壁与所述轴套的外壁之间，两个所述轴承组件之间设有磁流体密封组件。本发明能够减小轴套振动时，对磁流体密封件造成的负荷，提高磁流体密封件的使用寿命和使用效果。
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