一种正交布置的多质量MEMS陀螺
By using an orthogonally arranged multi-mass MEMS gyroscope structure, the driving/detection capacitor area and Gothic gain are increased, solving the problems of small driving/detection capacitor and low Gothic gain in the prior art, and realizing high-sensitivity gyroscope detection.
CN115876176BActive Publication Date: 2026-07-17AAC KAITAI TECHNOLOGIES (WUHAN) CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- AAC KAITAI TECHNOLOGIES (WUHAN) CO LTD
- Filing Date
- 2022-10-28
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
The existing mass-distributed gyroscopes have small drive/detection capacitors and low Gorilla gain, resulting in low gyroscope detection sensitivity.
Method used
A multi-mass MEMS gyroscope structure with orthogonal arrangement is adopted, including anchor unit, sensing unit and driving unit. Differential motion of driving mass block and sensing mass block is realized through elastic connection, which increases the driving/sensing capacitor area and improves Gothic gain.
Benefits of technology
The sensitivity of the gyroscope was improved, the arrangement area of the drive/detection transducer was increased, parasitic mode interference was reduced, orthogonal error was reduced, and mechanical sensitivity was enhanced.
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Figure CN115876176B_ABST
Abstract
本发明提供了一种正交布置的多质量MEMS陀螺，包括锚点单元、传感单元以及驱动单元；锚点单元包括位于一矩形中心的中心锚点子单元和四个分别位于矩形四角的角部锚点；传感单元包括四个呈框架结构且分别弹性连接于中心锚点子单元和各角部锚点之间并相互形成让位空间的检测质量块，以及四个分别位于各检测质量块内部的检测解耦件；驱动单元包括四个分别位于各让位空间内的驱动质量块，以及分别弹性连接于各驱动质量块的驱动解耦件。本发明的陀螺能够提高换能器的布置面积，并减小检测质量块的质量以提高哥式增益，从而提高陀螺仪的机械灵敏度。
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