An assembly tool for a swing-type vacuum rectangular valve

Abstract

The application discloses an assembly tool for a swing type vacuum rectangular valve, which comprises a spring compression holding tool, a transmission shaft assembly non-twisting tool, a piston rod length holding tool and a cavity connecting plate of the rectangular valve; the spring compression holding tool comprises a supporting shaft, a first adapter plate, a connecting plate and a screw rod. The spring compression holding tool greatly improves the spring installation efficiency and safety, thereby providing a good assembly environment and basis for subsequent assembly. In addition, the application has the advantages of simple structure and convenient operation. The transmission shaft assembly non-twisting tool ensures the accuracy and precision of the movement component assembly and guarantees the mutual cooperation relationship of the components in the assembly process. The piston rod length holding tool is designed to have a specific length structure, which ensures the assembly of the two piston rods at the longest stroke, guarantees the stable closing and opening of the valve and reduces the internal stress of the mechanism after initial assembly.

Description

Technical Field

[0001] This invention relates to the field of vacuum rectangular valve assembly technology, specifically to an assembly fixture for a swing-type vacuum rectangular valve. Background Technology

[0002] In the semiconductor industry, swing-type vacuum rectangular valves account for a significant proportion, primarily used to connect transfer chambers and reaction chambers. Powered by pneumatic or electric actuators, these valves open and close. Suitable for the semiconductor industry, vacuum rectangular valves feature low vibration, accurate movement, excellent sealing, and long lifespan. However, since valves are generally assembled from multiple parts, including compressible components such as bellows and springs, a certain amount of compression is required during assembly. Therefore, ensuring assembly accuracy is crucial for guaranteeing the valve's critical characteristics.

[0003] However, in practical applications, the existing technology has high requirements for the coaxiality of the dual cylinders, the force of the spring compression, and the accuracy of the valve plate drive shaft assembly during the valve assembly process, making it difficult to guarantee the overall reliability and assembly accuracy of the valve assembly. Summary of the Invention

[0004] The purpose of this invention is to provide an assembly fixture for a swing-type vacuum rectangular valve to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: including a spring compression retaining fixture, a transmission shaft assembly non-torsion fixture, a piston rod length retaining fixture, and a cavity connecting plate for a rectangular valve;

[0006] The spring compression retaining fixture includes a support shaft, a first adapter plate, a connecting plate, a screw, a locking nut, a washer, a compression nut, a piston rod connecting plate, a cam groove, a spring, a limiting groove, a bearing, and a limiting block. The support shaft is fixedly disposed at the bottom of the first adapter plate, the connecting plate is fixedly disposed at the bottom of the support shaft, the locking nut is fixedly disposed at the middle of the connecting plate, and the inner wall of the locking nut is threaded to the surface of the screw. The compression nut is threaded at the top of the screw surface, the washer is movably disposed at the top of the compression nut, and the piston rod connecting plate is movably disposed at the top of the washer. The spring is movably disposed at the top of the piston rod connecting plate, and the cam groove is fixedly disposed at the top of the piston rod connecting plate.

[0007] The non-torsional tooling of the drive shaft assembly includes an integrated bearing, a drive shaft seat, a fixing screw, and a guide plate. The drive shaft seat is fixedly mounted on the inner wall of the limiting groove, the integrated bearing is fixedly mounted on the surface of the drive shaft seat, and the guide plate is threaded onto the surface of the cavity connecting plate of the rectangular valve by the fixing screw.

[0008] The piston rod length holding fixture includes a second adapter plate, a support rod, a pneumatic assembly, and a piston rod. The pneumatic assembly is fixedly installed at the bottom of the cavity connecting plate of the rectangular valve. The second adapter plate is fixedly installed to the inner threaded hole of the pneumatic assembly by bolts. The piston rod is fixedly installed at the top of the piston rod connecting plate, and the support rod is fixedly installed at the bottom of the second adapter plate.

[0009] Preferably, the first adapter plate is fixedly connected to the bottom of the cavity connecting plate of the rectangular valve by bolts, and threaded holes are provided at corresponding positions on the first adapter plate and the rectangular valve.

[0010] Preferably, the limiting groove is formed in the middle of the bottom of the cavity connecting plate of the rectangular valve, the limiting block is fixedly connected to both ends of the transmission shaft seat, and the end of the limiting block away from the transmission shaft seat is rotatably connected to a bearing, and the middle of the transmission shaft seat is fixedly connected to the transmission shaft of the rectangular valve.

[0011] Preferably, the guide plate has a mounting hole, a connecting groove and a guide groove at one end corresponding to the position of the transmission shaft seat, and the fixing screw fixes the guide plate to the surface of the cavity connecting plate of the rectangular valve through the mounting hole.

[0012] Preferably, the inner wall of the connecting groove is movably connected to the surface of the cavity connecting plate of the rectangular valve, and the width of the inner wall of the guide groove is adapted to the diameter of the integrated bearing.

[0013] Preferably, the support rod is located directly above the piston rod connecting plate, and the piston rod is fixedly connected to the top of the piston rod connecting plate.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] This invention significantly improves spring installation efficiency and safety by designing a spring compression retaining fixture, thus providing a good assembly environment and foundation for subsequent assembly. Furthermore, the invention has a simple structure and is easy to operate. By designing a non-twisting fixture for the transmission shaft assembly, the accuracy and precision of the moving parts assembly are ensured, guaranteeing the cooperative relationship between various components during the assembly process. By designing a piston rod length retaining fixture and a structural component of a specific length, the two piston rods are ensured to be assembled at their longest stroke, guaranteeing stable valve closure and opening, while simultaneously reducing the internal stress on the mechanism after initial assembly. Attached Figure Description

[0016] Figure 1 This is a front view of the spring compression retaining fixture structure for the assembly tooling of a swing-type vacuum rectangular valve according to the present invention.

[0017] Figure 2 This is a front view of the spring compression retaining fixture structure of the assembly tooling for a swing-type vacuum rectangular valve according to the present invention before compression.

[0018] Figure 3 This is a cross-sectional view of the spring compression retaining fixture structure of the assembly tooling for a swing-type vacuum rectangular valve according to the present invention after compression.

[0019] Figure 4 This is a partially exploded view of the non-torsional tooling structure of the assembly tooling drive shaft assembly for a swing-type vacuum rectangular valve according to the present invention.

[0020] Figure 5 This is a schematic diagram of the non-torsional tooling structure of the assembly tooling drive shaft assembly for a swing-type vacuum rectangular valve according to the present invention.

[0021] Figure 6 This is a schematic diagram of the assembly tooling guide plate structure for a swing-type vacuum rectangular valve according to the present invention;

[0022] Figure 7 This is a schematic diagram of the assembly fixture for a swing-type vacuum rectangular valve according to the present invention, showing the piston rod length retention fixture structure. Figure 1 ;

[0023] Figure 8 This is a schematic diagram of the assembly fixture for a swing-type vacuum rectangular valve according to the present invention, showing the piston rod length retention fixture structure. Figure 2 .

[0024] In the diagram: 1. Support shaft; 2. First adapter plate; 3. Connecting plate; 4. Screw; 5. Locking nut; 6. Washer; 7. Compression nut; 8. Piston rod connecting plate; 9. Cam groove; 10. Spring; 11. Limiting groove; 12. Bearing; 13. Limiting block; 21. Second adapter plate; 22. Support rod; 23. Pneumatic assembly; 24. Piston rod; 31. Integrated bearing; 32. Drive shaft seat; 33. Fixing screw; 34. Guide plate; 341. Mounting hole; 342. Connecting groove; 343. Guide groove. Detailed Implementation

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] Please see Figure 1-8 The present invention provides a technical solution comprising a spring compression retaining fixture, a transmission shaft assembly non-torsion fixture, a piston rod length retaining fixture, and a cavity connecting plate for a rectangular valve;

[0027] The spring compression retaining fixture includes a support shaft 1, a first adapter plate 2, a connecting plate 3, a screw 4, a locking nut 5, a washer 6, a compression nut 7, a piston rod connecting plate 8, a cam groove 9, a spring 10, a limiting groove 11, a bearing 12, and a limiting block 13. The support shaft 1 is fixedly installed at the bottom of the first adapter plate 2, the connecting plate 3 is fixedly installed at the bottom of the support shaft 1, the locking nut 5 is fixedly installed in the middle of the connecting plate 3, and the inner wall of the locking nut 5 is threadedly connected to the surface of the screw 4. The compression nut 7 is threadedly connected to the top of the surface of the screw 4. The washer 6 is movably connected to the top of the compression nut 7, and the piston rod connecting plate 8 is movably connected to the top of the washer 6. The spring 10 is movably connected to the top of the piston rod connecting plate 8, and the cam groove 9 is fixedly installed on the top of the piston rod connecting plate 8.

[0028] The non-torsion tooling for the drive shaft assembly includes an integrated bearing 31, a drive shaft seat 32, a fixing screw 33, and a guide plate 34. The drive shaft seat 32 is fixedly installed on the inner wall of the limiting groove 11, the integrated bearing 31 is fixedly installed on the surface of the drive shaft seat 32, and the guide plate 34 is threadedly connected to the surface of the cavity connecting plate of the rectangular valve by the fixing screw 33.

[0029] The piston rod length holding fixture includes a second adapter plate 21, a support rod 22, a pneumatic assembly 23, and a piston rod 24. The pneumatic assembly 23 is fixedly installed at the bottom of the cavity connecting plate of the rectangular valve. The second adapter plate 21 is fixedly installed to the inner threaded hole of the pneumatic assembly 23 by bolts. The piston rod is fixedly installed at the top of the piston rod connecting plate, and the support rod 22 is fixedly installed at the bottom of the second adapter plate 21.

[0030] The first adapter plate 2 is fixedly installed on the bottom of the cavity connecting plate of the rectangular valve by bolts, and the first adapter plate 2 and the rectangular valve are provided with threaded holes at corresponding positions. The screw 4 and the connecting plate 3 are locked together by the locking nut 5 to keep them relatively stationary.

[0031] The limiting groove 11 is opened in the middle of the bottom of the cavity connecting plate of the rectangular valve. The limiting block 13 is fixedly installed at both ends of the transmission shaft seat 32, and the end of the limiting block 13 away from the transmission shaft seat 32 is rotatably connected to the bearing 12. The middle part of the transmission shaft seat 32 is fixedly installed with the transmission shaft of the rectangular valve. By turning the compression nut 7, the washer 6 and the piston rod connecting plate 8 are pushed to move upward, thereby compressing the spring 10 and holding it. When the spring 10 is compressed, the bearing 12 is placed between the cam groove 9 and the limiting groove 11, and other parts are assembled.

[0032] The guide plate 34 has a mounting hole 341, a connecting groove 342 and a guide groove 343 respectively at one end of the corresponding position of the transmission shaft seat 32. The fixing screw 33 fixes the guide plate 34 to the surface of the cavity connecting plate of the rectangular valve through the mounting hole 341.

[0033] The inner wall of the connecting groove 342 is movably connected to the surface of the cavity connecting plate of the rectangular valve. The width of the inner wall of the guide groove 343 is adapted to the diameter of the integrated bearing 31. The outer diameter of the integrated bearing 31 contacts the guide groove 343 on the guide plate 34 and forms a left and right limit. When the transmission shaft seat 32 moves up and down, the integrated bearing 31 slides in the guide groove 343 of the screw 4.

[0034] The support rod 22 is located directly above the piston rod connecting plate 8. The piston rod 24 is fixedly installed on the top of the piston rod connecting plate 8. When both connecting plates 3 are moved to their maximum stroke positions, one end of the support rod 22 is fixed on the second adapter plate 21 and the other end is supported on the piston rod connecting plate 8. The presence of the support rod 22 ensures that the spring 10 will not be compressed. At the same time, the length of the support rod 22 is designed to match the maximum extension length of the piston rod 24.

[0035] Working principle: In use, this invention implements the following steps:

[0036] 1. When the valve is first assembled, the connecting plate 3 is installed at the bottom of the support shaft 1. The compression nut 7 is turned on, and the compression nut 7 will drag the piston rod connecting plate 8 upward. When the piston rod connecting plate 8 moves upward, the spring 10 is in a continuously compressed state. When the spring 10 is compressed to the point where other parts can be assembled, the operation of turning the compression nut 7 is stopped, and the spring 10 will maintain the current compressed state. At this time, other parts are assembled.

[0037] 2. When the spring 10 is continuously compressed, the upper component is not the only degree of freedom. Therefore, when the spring 10 is compressed, a non-torsional tooling for the transmission component needs to be used. The guide plate 34 is fixed on the rectangular valve cavity connecting plate, and the integrated bearing 31 is fixed on the transmission shaft seat 32. The integrated bearing 31 and the guide groove 343 on the guide plate 34 form a hole-shaft fit. When the transmission shaft moves with the compression of the spring 10, the above fit can restrict the movement of the transmission shaft in the vertical direction, thereby ensuring assembly accuracy and other geometric tolerance requirements.

[0038] 3. When installing the dual-cylinder connecting rod assembly, it is necessary to ensure that the extension lengths of the dual cylinder rods are consistent. If there is a large height difference, the valve cannot be guaranteed to rise and fall smoothly when lifting the valve. In addition, the connecting plate 3 will have a large initial force when the piston rod 24 is not consistent in length, which will reduce the service life of the mechanism. The present invention designs a support rod 22 of a specific length and a second adapter plate 21. The second adapter plate 21 is installed on the pneumatic assembly 23. One end of the support rod 22 is fixed on the second adapter plate 21, and the other end is in contact with the connecting plate 3. When assembling, the length of the piston rod 24 will be kept at its maximum length. After the assembly is completed, the tooling is removed.

[0039] 4. The order and relationship of the use of the three tooling fixtures are as follows: The spring compression retaining fixture and the drive shaft assembly non-twisting fixture are used simultaneously. After the assembly of the components after compressing the spring 10 is completed, the spring compression retaining fixture and the drive shaft assembly non-twisting fixture are disassembled. When assembling the left and right pneumatic components 23, the piston rod length retaining fixture is fixed to allow for the assembly of the piston rods 24 on both sides with the bottom connecting plate 3. After the assembly is completed, the piston rod length retaining fixture is disassembled. The mechanism system needs to meet safety and operability requirements during assembly; therefore, tooling is necessary to assemble the spring 10 while ensuring the assembly effect of each component. This invention achieves the following effects:

[0040] The present invention, through the design of a spring compression retaining fixture, greatly improves the installation efficiency and safety of the spring 10, thereby providing a good assembly environment and foundation for subsequent assembly. In addition, the present invention has a simple structure and is easy to operate.

[0041] The first adapter plate 2 of this invention ensures the accuracy and precision of the assembly of moving parts by designing a non-twisting tooling for the transmission shaft assembly, and guarantees the mutual cooperation between the various parts during the assembly process.

[0042] The present invention, through the design of piston rod length holding fixture and structural component of specific length, ensures that the two piston rods are assembled at their longest stroke, thereby guaranteeing the stable closing and opening of the valve and reducing the internal stress of the mechanism after initial assembly.

[0043] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0044] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An assembly fixture for a swing-type vacuum rectangular valve, characterized in that: Includes a spring compression retaining fixture, a drive shaft assembly non-torsion fixture, a piston rod length retaining fixture, and a cavity connecting plate for a rectangular valve; The spring compression retaining fixture includes a support shaft (1), a first adapter plate (2), a connecting plate (3), a screw (4), a locking nut (5), a washer (6), a compression nut (7), a piston rod connecting plate (8), a cam groove (9), a spring (10), a limiting groove (11), a bearing (12), and a limiting block (13). The support shaft (1) is fixedly disposed at the bottom of the first adapter plate (2), the connecting plate (3) is fixedly disposed at the bottom of the support shaft (1), the locking nut (5) is fixedly disposed at the middle of the connecting plate (3), and the inner wall of the locking nut (5) is threaded to the surface of the screw (4). The compression nut (7) is threaded to the top of the surface of the screw (4), the washer (6) is movably disposed at the top of the compression nut (7), and the piston rod connecting plate (8) is movably disposed at the top of the washer (6). The spring (10) is movably disposed at the top of the piston rod connecting plate (8), and the cam groove (9) is fixedly disposed at the top of the piston rod connecting plate (8). The non-torsional tooling of the drive shaft assembly includes an integrated bearing (31), a drive shaft seat (32), a fixing screw (33), and a guide plate (34). The drive shaft seat (32) is fixedly disposed on the inner wall of the limiting groove (11). The integrated bearing (31) is fixedly disposed on the surface of the drive shaft seat (32). The guide plate (34) is threaded onto the surface of the cavity connecting plate of the rectangular valve by the fixing screw (33). The piston rod length holding fixture includes a second adapter plate (21), a support rod (22), a pneumatic assembly (23), and a piston rod (24). The pneumatic assembly (23) is fixedly installed at the bottom of the cavity connecting plate of the rectangular valve. The second adapter plate (21) is fixedly installed to the inner threaded hole of the pneumatic assembly (23) by bolts. The piston rod (24) is fixedly installed at the top of the piston rod connecting plate (8). The support rod (22) is fixedly installed at the bottom of the second adapter plate (21).

2. The assembly fixture for a swing-type vacuum rectangular valve according to claim 1, characterized in that: The first adapter plate (2) is fixedly connected to the bottom of the cavity connecting plate of the rectangular valve by bolts, and threaded holes are provided at corresponding positions of the first adapter plate (2) and the rectangular valve.

3. The assembly fixture for a swing-type vacuum rectangular valve according to claim 1, characterized in that: The limiting groove (11) is opened in the middle of the bottom of the cavity connecting plate of the rectangular valve. The limiting block (13) is fixedly connected to both ends of the transmission shaft seat (32), and the end of the limiting block (13) away from the transmission shaft seat (32) is rotatably connected to the bearing (12). The middle part of the transmission shaft seat (32) is fixedly connected to the transmission shaft of the rectangular valve.

4. The assembly fixture for a swing-type vacuum rectangular valve according to claim 1, characterized in that: The guide plate (34) has a mounting hole (341), a connecting groove (342) and a guide groove (343) respectively at one end of the corresponding position of the transmission shaft seat (32). The fixing screw (33) fixes the guide plate (34) to the surface of the cavity connecting plate of the rectangular valve through the mounting hole (341).

5. The assembly fixture for a swing-type vacuum rectangular valve according to claim 4, characterized in that: The inner wall of the connecting groove (342) is movably connected to the surface of the cavity connecting plate of the rectangular valve, and the width of the inner wall of the guide groove (343) is adapted to the diameter of the integrated bearing (31).

6. The assembly fixture for a swing-type vacuum rectangular valve according to claim 1, characterized in that: The support rod (22) is located directly above the piston rod connecting plate (8), and the piston rod (24) is fixedly connected to the top of the piston rod connecting plate (8).

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