Method for testing high purity metal chromium debris by glow discharge mass spectrometry

By preparing high-purity chromium metal fragments into sheet-like samples and detecting them in a glow discharge mass spectrometer, the complex sample preparation problem of high-purity chromium fragment detection has been solved, achieving high resolution and high signal intensity detection results, meeting the detection needs of high-purity chromium in aerospace, automotive, semiconductor and other fields.

CN115901925BActive Publication Date: 2026-07-24CHINA WEAPON SCI ACADEMY NINGBO BRANCH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHINA WEAPON SCI ACADEMY NINGBO BRANCH
Filing Date
2022-11-30
Publication Date
2026-07-24

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Abstract

The application discloses a kind of glow discharge mass spectrometry high-purity metal chromium scrap testing method, it is characterized in that including following steps: (1) high-purity metal chromium scrap is unfolded, is laid on high-purity indium block, pressurization, multiple repetition, is made into sheet shape sample to be measured;(2) the sample to be measured obtained in step (1) is fixed with sample clamp, is placed in the sample chamber in glow discharge mass spectrometer, sample to be measured is vacuumed by ion source and is pushed into discharge chamber, discharge current is set to 1.0~1.5mA, discharge gas flow is 150~200mL / min, discharge voltage is 1~1.5kV, according to the semi-quantitative analysis principle of glow discharge mass spectrometer, the mass fraction of each element to be measured in high-purity metal chromium scrap is calculated using relative sensitivity factor.Compared with prior art, the sample preparation operation of the glow discharge mass spectrometry high-purity metal chromium scrap testing method of the application is simple and has high accuracy.
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