用于具有部分漏极侧选择栅极的存储器设备的经改善的编程技术

By electrically floating the unselected portion of the SGD transistors in the NAND memory device and utilizing the capacitive coupling effect to reduce the voltage difference, the interference effect of adjacent SGDs caused by shallow etched feature cutting is solved, improving device performance and reliability and saving resources.

CN115910164BActive Publication Date: 2026-07-17SANDISK TECH

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SANDISK TECH
Filing Date
2022-05-25
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In NAND memory devices, when shallow etched features cut through memory holes, the exposure of some drain-side gate select (SGD) transistors causes adjacent SGDs to be unintentionally turned on, resulting in current leakage and damage to programming sensing operations. Existing technologies have difficulty effectively solving the adjacent SGD interference (NSI) problem.

Method used

By implementing electrical floating in the unselected portion of the SGD transistors and utilizing the capacitive coupling effect to reduce the voltage difference between adjacent transistors or memory cells, the use of negative voltage pumps/sources is avoided, thus preventing the NSI effect.

Benefits of technology

It effectively prevents the selected SGD from being accidentally turned on, reduces current leakage, improves the performance and reliability of memory devices, and saves resource usage.

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Abstract

本发明提供了一种操作存储器设备的方法。该方法包括制造存储器设备的步骤,该存储器设备包括具有全SGD晶体管的第一组存储器孔和具有部分SGD晶体管的第二组存储器孔。该第二组包括一组所选择的部分SGD晶体管和一组未选择的部分SGD晶体管两者。该方法继续进行使该组未选择的部分SGD晶体管中的第一未选择的部分SGD晶体管电浮动。在至少一个第一未选择的部分SGD晶体管电浮动的情况下,该方法继续减小施加到邻近第一未选择的部分SGD晶体管的至少一个晶体管或存储器单元的电压,使得第一未选择的部分SGD晶体管的电压通过电容耦合效应降低。
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