A bare die level filter package system

CN115910841BActive Publication Date: 2026-10-23BEIJING ZHONGKE FEIHONG SCI&TECH CO LTD
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Patent Information

Application Number
CN202210846954.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-07-06
Publication Date
2026-10-23
Estimated Expiration
2042-07-06

AI Technical Summary

Technical Problem

[0004]本申请实施例通过提供一种裸芯片级滤波器封装系统,解决了现有技术中无尘环境中空气内的灰尘颗粒会对滤波器的封装造成影响的技术问题,实现了向封装箱内填充保护气体,将封装箱内的空气排出,以提高封装箱内的清洁度,减少对滤波器的封装造成影响

Benefits of technology

[0013]本申请实施例中提供的一个或多个技术方案,至少具有如下技术效果或优点:由于采用了换气装置,在对滤波器封装之前,打开保护气体存储罐,使得保护气体存储罐中的保护气体进入封装箱中,保护气体驱替封装箱中原有的空气从出气阀一中排出,从而可以提高封装箱内的清洁度,减少对滤波器的封装造成影响。

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Abstract

The application relates to the field of filter packaging technology and discloses a bare-chip-level filter packaging system, which comprises a packaging device, the packaging device comprises a packaging box and a glove operation port, the glove operation port is arranged on a glass of the packaging box and extends into the packaging box, the packaging system further comprises a ventilation device, the ventilation device comprises an air outlet valve one mounted on the packaging box, a protective gas storage tank mounted on the outer sidewall of the packaging box, a gas conveying pipeline one communicated between the protective gas storage tank and the packaging box and an adjusting valve one mounted on the gas conveying pipeline one, and the protective gas in the protective gas storage tank is used for discharging air in the packaging box. The application solves the technical problem that dust particles in air in a dust-free environment can affect the packaging of a filter in the prior art, air in the packaging box is filled with protective gas, air in the packaging box is discharged, the cleanliness of the packaging box is improved, and the packaging of the filter is affected.
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Description

Technical Field

[0001] This application relates to the field of filter packaging, and more particularly to a bare-chip-level filter packaging system. Background Technology

[0002] A filter is a filtering circuit composed of capacitors, inductors, and resistors. A filter can effectively filter out specific frequencies or frequencies outside of those frequencies in a power supply line, resulting in a power signal of a specific frequency, or eliminating a power signal of a specific frequency. Filter housings require encapsulation during manufacturing. Encapsulation of the power filter makes it waterproof, provides better grounding, and protects the internal components. However, filter encapsulation is typically performed in a sealed environment to achieve dust-free encapsulation.

[0003] The aforementioned technologies have at least the following technical problems: different dust particles still exist in the air within the sealed environment, which can still affect the packaging of the filter. Summary of the Invention

[0004] This application provides a bare chip-level filter packaging system that solves the technical problem in the prior art where dust particles in the air in a clean environment can affect the packaging of the filter. It achieves the filling of the packaging box with protective gas and the exhaust of the air inside the packaging box, thereby improving the cleanliness of the packaging box and reducing the impact on the filter packaging.

[0005] This application provides a bare chip-level filter packaging system, including a packaging device. The packaging device includes a packaging box and a glove operating port. The glove operating port is disposed on the glass of the packaging box and extends into the packaging box. The packaging system also includes a ventilation device, which includes an exhaust valve installed on the packaging box, a protective gas storage tank installed on the outer wall of the packaging box, a gas supply pipe connecting the protective gas storage tank and the packaging box, and a regulating valve installed on the gas supply pipe. The protective gas in the protective gas storage tank is used to exhaust the air inside the packaging box.

[0006] Furthermore, the packaging box is equipped with a feeding device at the inlet. The feeding device includes a support platform horizontally fixed below the inlet of the packaging box and a feeding box installed on the support platform. The feeding box is connected to the inlet of the packaging box. Two side walls of the feeding box that are perpendicular to the inlet of the packaging box are open, and a left sealing plate and a right sealing plate are vertically slidably installed thereon. A feeding plate is installed inside the feeding box, and a driving mechanism is installed inside the feeding box to drive the feeding plate to move toward the inlet of the packaging box. A lifting mechanism is installed on the top of the feeding box to lift the left sealing plate and the right sealing plate. A second gas supply pipe is connected between the first gas supply pipe and the feeding box. A second regulating valve is installed on the second gas supply pipe, and a second vent valve is installed on the packaging box.

[0007] Furthermore, the lifting mechanism includes a U-shaped frame vertically fixed to the top surface of the packaging box, a support plate fixed between the two U-shaped frames, a screw vertically threaded to the left sealing plate and the right sealing plate respectively, and a rotating bevel gear coaxially connected to the top of the screw. The support plate is provided with a power mechanism that drives the rotating bevel gears on both sides to rotate.

[0008] Furthermore, the power mechanism includes support seats symmetrically arranged on both sides of the support plate, rotating rods respectively horizontally rotatably arranged on the support seats on both sides, fixed bevel gears coaxially connected to the rotating rods and meshing with the rotating bevel gears, and sliding rods slidably arranged at the end of the rotating rods away from the fixed bevel gears. The end of the sliding rod away from the rotating rods is coaxially connected to a movable bevel gear. A power motor is arranged between the movable bevel gears on both sides, and an output bevel gear is coaxially connected to the output shaft of the power motor. A pushing mechanism is arranged between the sliding rods on both sides to make the movable bevel gears on both sides interlock and mesh with the output bevel gears.

[0009] Furthermore, the pushing mechanism includes a mounting cover located between the two sliding rods and fixed to a support plate, and rack one and rack two slidably disposed in the mounting cover. Rack one and rack two are parallel to each other and slide in the same direction as the sliding rod. A rotating gear rotatably disposed on the mounting cover meshes between rack one and rack two. A cylinder for pushing rack one to move is disposed on the support plate. A sleeve is sleeved on the sliding rod. Rotating rings fixed to the sliding rod are rotatably disposed on both sides of the sleeve. The rotation direction of the rotating rings is the same as the rotation direction of the sliding rod. A connecting rod is connected between the sleeve and the end of rack two.

[0010] Furthermore, the driving mechanism includes mounting plates symmetrically fixed to the bottom of the feeding box, a lead screw rotatably disposed between the two mounting plates, a guide rod fixed between the two mounting plates, a movable plate threadedly connected to the lead screw and sleeved on the guide rod, the feeding plate being fixed to the movable plate, the lead screw being perpendicular to the left and right sealing plates on both sides, and a drive motor for driving the lead screw to rotate being installed at the bottom of the feeding box.

[0011] Furthermore, two guide rods are provided, located on both sides of the lead screw.

[0012] Furthermore, the second vent valve is located above the feeding plate.

[0013] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages: Due to the use of a ventilation device, before the filter is packaged, the protective gas storage tank is opened, allowing the protective gas in the protective gas storage tank to enter the packaging box. The protective gas displaces the original air in the packaging box and is discharged from the exhaust valve, thereby improving the cleanliness inside the packaging box and reducing the impact on the packaging of the filter. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the filter packaging system in the embodiments of this application;

[0015] Figure 2 This is another perspective schematic diagram of the filter packaging system in the embodiments of this application;

[0016] Figure 3 for Figure 2 A schematic diagram of the middle section, mainly illustrating the structure of the feeding device;

[0017] Figure 4 for Figure 3 A schematic diagram of the middle section, mainly illustrating the structure of the power mechanism and the propulsion mechanism;

[0018] Figure 5 for Figure 4 The enlarged schematic diagram of part A mainly illustrates the structure of the sliding rod;

[0019] Figure 6 for Figure 3 The schematic diagram of the middle part mainly illustrates the construction of the drive mechanism.

[0020] In the diagram: 100, Packaging device; 11, Packaging box; 12, Glove operating port; 2, Ventilation device; 21, Outlet valve 1; 22, Protective gas storage tank; 23, Gas pipeline 1; 24, Regulating valve 1; 3, Feeding device; 31, Support platform; 32, Feeding box; 321, Left sealing plate; 322, Right sealing plate; 323, Feeding plate; 33, Drive mechanism; 331, Mounting plate; 332, Lead screw; 333, Guide rod; 334, Moving plate; 335, Drive motor; 34, Lifting mechanism; 341, U 342. Frame; 343. Support plate; 344. Screw; 345. Rotating bevel gear; 35. Gas pipeline II; 356. Regulating valve II; 37. Gas outlet valve II; 48. Power mechanism; 49. Support base; 40. Rotating rod; 41. Fixed bevel gear; 42. Sliding rod; 43. Moving bevel gear; 444. Sleeve; 445. Rotating ring; 46. Power motor; 47. Output bevel gear; 58. Pushing mechanism; 59. Mounting cover; 50. Rack I; 51. Rack II; 52. Rotating gear; 53. Cylinder; 54. Connecting rod. Detailed Implementation

[0021] This application discloses a bare chip-level filter packaging system. By delivering protective gas from the protective gas storage tank 22 to the packaging box 11, the original air in the packaging box 11 is discharged through the exhaust valve 21, thereby improving the cleanliness inside the packaging box 11 and reducing the impact on the filter packaging. When it is necessary to deliver items into the packaging box 11, material feeding and air exchange can be achieved in the feeding box 32, so that the gas in the packaging box 11 is always protective gas. Moreover, since the feeding box 32 has a small volume, the amount of protective gas used can be reduced.

[0022] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0023] Reference Figure 1 A bare-chip-level filter packaging system includes a packaging device 100, a ventilation device 2, and a feeding device 3. The packaging device 100 includes a packaging box 11 and a glove-operated opening 12, the glove-operated opening 12 being disposed on the glass of the packaging box 11 and extending into the packaging box 11. The ventilation device 2 is installed on the outer wall of the packaging box 11. The feeding device 3 is installed at the inlet of the packaging box 11 and is used to transport the materials required for filter packaging into the packaging box 11.

[0024] Reference Figure 1 and Figure 2The ventilation device 2 includes an outlet valve 21, a protective gas storage tank 22, a gas supply pipe 23, and a regulating valve 24. The outlet valve 21 is installed on the sealing box 11, near its bottom; the protective gas storage tank 22 is installed on the outer wall of the sealing box 11; the gas supply pipe 23 connects the protective gas storage tank 22 and the sealing box 11; and the regulating valve 24 is installed on the gas supply pipe 23. The protective gas in the protective gas storage tank 22 is used to expel the air from the sealing box 11.

[0025] Before encapsulating the filter, the protective gas storage tank 22 is opened, allowing the protective gas in the protective gas storage tank 22 to enter the encapsulation box 11. The protective gas displaces the original air in the encapsulation box 11 and is discharged through the vent valve 21, thereby improving the cleanliness inside the encapsulation box 11 and reducing the impact on the encapsulation of the filter.

[0026] Reference Figure 2 and Figure 3 The feeding device 3 includes a support platform 31, a feeding box 32, a drive mechanism 33, a lifting mechanism 34, an air supply pipe 35, and an air outlet valve 36. The support platform 31 is horizontally fixed below the inlet of the packaging box 11; the volume of the feeding box 32 is smaller than that of the packaging box 11. The two side walls of the feeding box 32 that are perpendicular to the inlet of the packaging box 11 are open, and a left sealing plate 321 and a right sealing plate 322 are vertically slidably provided to seal the openings of the feeding box 32. The right sealing plate 322 is used to seal the inlet of the packaging box 11. A feeding plate 323 is provided inside the feeding box 32; the drive mechanism 33 is used to move the feeding plate 323 toward the inlet of the packaging box 11; the lifting mechanism 34 is used to lift the left sealing plate 321 and the right sealing plate 322; the second air supply pipe 35 is connected between the first air supply pipe 23 and the feeding box 32; the second air outlet valve 36 is installed on the feeding box 32 and is used to exhaust the air in the feeding box 32.

[0027] When it is necessary to convey items into the packaging box 11, the right sealing plate 322 of the inlet of the packaging box 11 can be sealed first, then the left sealing plate 321 can be opened, and the items can be placed on the feeding plate 323. Then the left sealing plate 321 can be lowered to seal the feeding box 32. Next, protective gas is conveyed into the feeding box 32 to expel the air inside the feeding box 32. After the air is expelled, the right sealing plate 322 is opened, and the feeding plate 323 is conveyed into the packaging box 11 by the drive mechanism 33. Therefore, during feeding, the gas in the feeding box 32 can be ventilated first, so that the gas in the packaging box 11 is always protective gas. And because the volume of the feeding box 32 is small, the amount of protective gas used can be reduced.

[0028] Reference Figure 3 and Figure 4The lifting mechanism 34 includes a U-shaped frame 341, a support plate 342, a screw 343, rotating bevel gears 344, a power mechanism 4, and a pushing mechanism 5. Two U-shaped frames 341 are provided, located above the left sealing plate 321 and the right sealing plate 322 respectively. The openings of the U-shaped frames 341 face downwards, and both ends are fixed to the top surface of the feeding box 32. The support plate 342 is fixed between the two U-shaped frames 341. Two screws 343 are provided, threadedly connected to the left sealing plate 321 and the right sealing plate 322 respectively, and passing through the top of the U-shaped frame 341. Two rotating bevel gears 344 are provided, coaxially connected to the top of the screw 343 respectively. The power mechanism 4 is used to drive the rotating bevel gears 344 on both sides to rotate.

[0029] Reference Figure 4 The power mechanism 4 includes a support base 41, a rotating rod 42, a fixed bevel gear 43, a sliding rod 44, and a power motor 45. Two support bases 41 are provided, symmetrically arranged on both sides of the support plate 342; two rotating rods 42 are provided, each rotatably mounted on one of the support bases 41 on both sides, the rotating rods 42 are horizontally arranged and perpendicular to the screw 343; a fixed bevel gear 43 is coaxially connected to the end of the rotating rod 42 near the rotating bevel gear 344, and the fixed bevel gear 43 meshes with the rotating bevel gear 344; two sliding rods 44 are provided, each slidingly mounted on one of the two rotating rods 42, and the sliding rod 44 is located at the end of the rotating rod 42 away from the fixed bevel gear 43, the sliding direction of the sliding rod 44 is consistent with the axial direction of the rotating rod 42, and a moving bevel gear 441 is coaxially connected to the end of the sliding rod 44 away from the rotating rod 42, there is space between the moving bevel gears 441 of the two sliding rods 44, and the pushing mechanism 5 is connected to the two sliding rods 44. The two sliding rods 44 can move linearly back and forth in the same direction simultaneously, making the space between the two moving bevel teeth 441 movable. This space can be simply referred to as the moving space. The power motor 45 is mounted on the support plate 342 and is located between the two moving bevel teeth 441. The output bevel teeth 451 are coaxially connected to the output shaft of the power motor 45. The output bevel teeth 451 are located in the moving space between the two moving bevel teeth 441, and the size of the output bevel teeth 451 is smaller than the size of the moving space. When the output bevel teeth 451 are placed in the moving space, the pushing mechanism 5 can make the two moving bevel teeth 441 mesh with the output bevel teeth 451 alternately. That is to say, when the moving space is driven to move by the pushing mechanism 5, the output bevel teeth 451 cannot mesh with two moving bevel teeth 441 at the same time, but can only mesh with one of the moving bevel teeth 441 at a time.

[0030] Reference Figure 4 and Figure 5A sleeve 442 is fitted onto the sliding rod 44. Rotating rings 443, which are fixedly connected to the sliding rod 44, are rotatably mounted on both sides of the sleeve 442. The rotation direction of the rotating rings 443 is the same as the rotation direction of the sliding rod 44. The pushing mechanism 5 includes a mounting cover 51, a first rack 52, a second rack 53, a rotating gear 54, a cylinder 55, and a connecting rod 56. Mounting cover 51 is located between the two sliding rods 44 and fixed to the support plate 342; rack one 52 and rack two 53 are parallel to each other and are slidably arranged on both sides of mounting cover 51, and the sliding direction of rack one 52 and rack two 53 is consistent with the sliding direction of sliding rod 44; rotating gear 54 meshes between rack one 52 and rack two 53; cylinder 55 is mounted on support plate 342 and is used to push rack one 52 to move; two connecting rods 56 are provided and are fixed to both ends of rack two 53 respectively, and the connecting rods 56 are connected between the end of rack two 53 and sleeve 442.

[0031] The cylinder 55 drives rack 52 to move, which in turn drives rotating gear 54 to rotate. Rotating gear 54 then drives rack 53 to move. When rack 53 moves, one sliding rod on one side moves towards the output bevel gear 451, while the other sliding rod 44 moves away from the output bevel gear 451. The moving bevel gear 441 on the sliding rod 44 that moves towards the output bevel gear 451 eventually meshes with the output bevel gear 451. Thus, the output bevel gear 451 can drive one of the sliding rods 44 to rotate, and the sliding rod 44 will drive the rotating rod 4... 2. When the rotating rod 42 rotates, it drives the fixed bevel gear 43, which in turn drives the rotating bevel gear 344 to rotate. The rotating bevel gear 344 then drives the screw 343 to rotate, thereby lifting the sealing plate. Due to the arrangement of the pushing mechanism 5 and the power mechanism 4, it is possible to prevent the left sealing plate 321 and the right sealing plate 322 from being opened simultaneously. If the left sealing plate 321 and the right sealing plate 322 are opened simultaneously, the protective gas in the sealing box 11 will escape directly from the feeding box 32, resulting in a large amount of leakage of the protective gas and waste.

[0032] Reference Figure 6As shown, the drive mechanism 33 includes a mounting plate 331, a lead screw 332, guide rods 333, a moving plate 334, and a drive motor 335. Two mounting plates 331 are provided, symmetrically fixed to both sides of the bottom of the feeding box 32. The lead screw 332 is rotatably disposed between the two mounting plates 331, and is perpendicular to the space between the left sealing plate 321 and the right sealing plate 322. Two guide rods 333 are provided, each located at a position relative to the lead screw 331. On both sides of the feeding box 32, guide rods 333 are fixed between two mounting plates 331; a movable plate 334 is located between the two mounting plates 331, and the movable plate 334 is threadedly connected to the lead screw 332, with the two guide rods 333 passing through the movable plate 334. A feeding plate 323 is fixed on the movable plate 334, and an exhaust valve 36 is located above the feeding plate 323. A drive motor 335 is installed at the bottom of the feeding box 32, and the output shaft of the drive motor 335 is coaxially connected to one end of the lead screw 332. The drive motor 335 drives the lead screw 332 to rotate, which in turn drives the movable plate 334 to move, which in turn drives the feeding plate 323 to move.

[0033] The functional principle of this application can be explained through the following methods:

[0034] Before encapsulating the filter, the protective gas storage tank 22 can be opened to allow the protective gas in the protective gas storage tank 22 to enter the encapsulation box 11, and the original air in the encapsulation box 11 can be discharged through the vent valve 21, thereby improving the cleanliness inside the encapsulation box 11 and reducing the impact on the encapsulation of the filter.

[0035] When it is necessary to convey items into the packaging box 11, the right sealing plate 322 of the inlet of the packaging box 11 can be sealed first, then the left sealing plate 321 can be opened, and the items can be placed on the feeding plate 323. Then the left sealing plate 321 can be lowered to seal the feeding box 32. Next, protective gas is conveyed into the feeding box 32 to expel the air inside. After the air is expelled, the right sealing plate 322 is opened, and the feeding plate 323 is conveyed into the packaging box 11 by the drive mechanism 33, so that the items can be conveyed into the packaging box 11. Therefore, during feeding, the gas in the feeding box 32 can be ventilated first, so that the gas in the packaging box 11 is always protective gas. And because the volume of the feeding box 32 is small, the amount of protective gas used can be reduced.

[0036] The above description is merely a preferred embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present application, based on the technical solution and concept of the present application, should be covered within the scope of protection of the present application.

Claims

1. A bare-chip-level filter packaging system, characterized in that, The system includes a sealing device (100), which includes a sealing box (11) and a glove operating port (12). The glove operating port (12) is located on the glass of the sealing box (11) and extends into the sealing box (11). The sealing system also includes a ventilation device (2), which includes an exhaust valve (21) installed on the sealing box (11), a protective gas storage tank (22) installed on the outer wall of the sealing box (11), a gas transmission pipe (23) connecting the protective gas storage tank (22) and the sealing box (11), and a regulating valve (24) installed on the gas transmission pipe (23). The protective gas in the protective gas storage tank (22) is used to exhaust the air in the sealing box (11). The packaging box (11) is equipped with a feeding device (3) at the inlet. The feeding device (3) includes a support platform (31) horizontally fixed below the inlet of the packaging box (11) and a feeding box (32) installed on the support platform (31). The volume of the feeding box (32) is smaller than that of the packaging box (11). The feeding box (32) is connected to the inlet of the packaging box (11). The two side walls of the feeding box (32) that are perpendicular to the inlet of the packaging box (11) are open, and a left sealing plate (321) and a right sealing plate (322) are respectively vertically slidably installed. The feeding box (32) is provided with a feeding plate (323), and the feeding box (32) is provided with a driving mechanism (33) for driving the feeding plate (323) to move toward the inlet of the packaging box (11). The top of the feeding box (32) is provided with a lifting mechanism (34) for lifting the left sealing plate (321) and the right sealing plate (322). The first gas pipeline (23) and the feeding box (32) are connected by a second gas pipeline (35). The second gas pipeline (35) is provided with a regulating valve (351). The packaging box (11) is equipped with an exhaust valve (36). The lifting mechanism (34) includes a screw (343) that is connected to the left sealing plate (321) and the right sealing plate (322) respectively, a rotating bevel gear (344) that is coaxially connected to the top of the screw (343), and a power mechanism (4) that drives the rotating bevel gear (344) on both sides to rotate. The power mechanism (4) includes a power motor (45), an output bevel gear (451) is coaxially connected to the output shaft of the power motor (45), and a sliding rod (44) is connected to the rotating bevel gear (344) on both sides respectively. The end of the sliding rod (44) is coaxially connected to the moving bevel gear (441). A push mechanism (5) is provided between the sliding rods (44) on both sides to engage the moving bevel gear (441) on both sides with the output bevel gear (451).

2. The bare-chip-level filter packaging system as described in claim 1, characterized in that, The lifting mechanism (34) includes a U-shaped frame (341) vertically fixed to the top surface of the packaging box (11) and a support plate (342) fixed between the two sides of the U-shaped frame (341).

3. The bare-chip-level filter packaging system as described in claim 2, characterized in that, The power mechanism (4) includes support seats (41) symmetrically arranged on both sides of the support plate (342), rotating rods (42) respectively horizontally rotatably arranged on the support seats (41) on both sides, and fixed bevel teeth (43) coaxially connected to the rotating rods (42) and meshing with the rotating bevel teeth (344). The sliding rod (44) is slidably arranged at the end of the rotating rod (42) away from the fixed bevel teeth (43).

4. The bare chip-level filter packaging system as described in claim 2, characterized in that, The pushing mechanism (5) includes a mounting cover (51) located between the two sliding rods (44) and fixed on the support plate (342), a rack one (52) and a rack two (53) slidably disposed in the mounting cover (51). The rack one (52) and the rack two (53) are parallel to each other and their sliding direction is consistent with the sliding direction of the sliding rods (44). A rotating mechanism rotatably disposed on the mounting cover (51) meshes between the rack one (52) and the rack two (53). The gear (54) is provided with a cylinder (55) on the support plate (342) to push the rack (52) to move. A sleeve (442) is sleeved on the sliding rod (44). Rotating rings (443) are rotatably provided on both sides of the sleeve (442) and fixed to the sliding rod (44). The rotation direction of the rotating rings (443) is consistent with the rotation direction of the sliding rod (44). A connecting rod (56) is connected between the sleeve (442) and the end of the rack (53).

5. The bare-chip-level filter packaging system as described in claim 1, characterized in that, The drive mechanism (33) includes a mounting plate (331) symmetrically fixed to the bottom of the feeding box (32), a lead screw (332) rotatably disposed between the two mounting plates (331), a guide rod (333) fixed between the two mounting plates (331), and a movable plate (334) threadedly connected to the lead screw (332) and sleeved on the guide rod (333). The feeding plate (323) is fixed on the movable plate (334). The lead screw (332) is perpendicular to the left sealing plate (321) and the right sealing plate (322) on both sides. A drive motor (335) for driving the lead screw (332) to rotate is installed at the bottom of the feeding box (32).

6. The bare-chip-level filter packaging system as described in claim 5, characterized in that, Two guide rods (333) are provided, and are located on both sides of the lead screw (332).

7. The bare-chip-level filter packaging system as described in claim 5, characterized in that, The second vent valve (36) is located above the feed plate (323).

Citation Information

Patent Citations

  • Automatic chip packaging machine and packaging method

    CN113284829A

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