一种双极脉冲电源、单极脉冲电源和限流灭弧方法

By using a topology-limited current bipolar pulse power supply and a current-limited arc extinguishing method, the shortcomings of existing high-power pulsed magnetron sputtering systems in hybrid film deposition are solved, achieving efficient electron ionization and arc control, and improving coating quality and equipment stability.

CN115912980BActive Publication Date: 2026-07-17SONGSHAN LAKE MATERIALS LAB
View PDF 2 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SONGSHAN LAKE MATERIALS LAB
Filing Date
2022-11-04
Publication Date
2026-07-17

Smart Images

  • Figure CN115912980B_ABST
    Figure CN115912980B_ABST
Patent Text Reader

Abstract

本申请涉及高能脉冲电源领域，公开一种双极脉冲电源、单极脉冲电源和限流灭弧的方法。该双极脉冲电源包括：AC‑DC转换器、变压模块、储能模块、全桥拓扑脉冲电路和设有变压器的变电感限流模块；AC‑DC转换器用于将接入的交流电转为直流电；储能模块用于能量储能；全桥拓扑脉冲电路用于正负极波形变换和连接负载；变压模块用于对直流电进行升压，并利用升压后的电压在负载两端产生高压；全桥拓扑脉冲电路和变压模块通过储能模块存储的能量向负载提供脉冲信号。变电感限流模块用于当全桥拓扑脉冲电路正向导通时，控制变压器两端电压，以控制施加至双极脉冲电源负载两端的电压。本申请能快速限流灭弧，提高镀膜膜层性能。
Need to check novelty before this filing date? Find Prior Art