Vertical probe and probe card having the same

Abstract

This invention relates to a vertical probe and a probe card. The vertical probe of this invention includes: an elastic beam portion disposed between a lower contact portion that contacts the device under test and an upper contact portion disposed at a certain interval relative to the lower contact portion and in contact with the test device, comprising a pair of elastic beams having a certain gap to be elastically deformable by external force; and an anti-detachment protrusion portion, wherein at least one of the pair of elastic beams has a protruding anti-detachment protrusion to prevent the elastic beam portion from detaching through the upper guide hole.

Description

Technical Field

[0001] The present invention relates to a vertical probe pin and a probe card having the same, and more specifically, to a vertical probe pin that prevents the vertical probe stored in the probe card from detaching from the probe card and falling out, and a probe card having the same. Background Technology

[0002] Generally, a probe card is essentially a device that effectively connects multiple contact pads of the device under test to the corresponding channels of the inspection device being inspected.

[0003] The inspection performed on the testing equipment involves detecting and separating defective or faulty components that were present during the manufacturing process. Therefore, probe cards are generally used to perform electrical testing on electronic components integrated on semiconductors or silicon wafers by contact before they are cut and assembled into chip packages.

[0004] Probe cards are broadly classified into cantilever and vertical types based on their structure. Vertical probe cards consist of a lower plate and an upper plate, which support the two ends of the vertical probe. The two ends of the vertical probe are inserted into guide holes formed in the lower and upper plates. When the probe contacts press against the terminals of the object being tested, the vertical probe moves within the guide holes, causing the elastic deformation portion of the probe to deform.

[0005] However, existing vertical probe cards have a problem where the vertical probes detach from the upper guide holes and fall out when the upper plate is flipped over for maintenance to remove the vertical probes from the guide holes.

[0006] In addition, if the vertical probe built into the probe card is damaged due to external impact, the damaged vertical probe will detach from the lower plate and fall down, which may damage the equipment under test. Summary of the Invention

[0007] Technical issues

[0008] The present invention was proposed to solve the existing problems as described above. The object of the present invention is to provide a vertical probe that prevents a vertical probe housed in a probe card from detaching from the probe card and falling out, and a probe card having the same.

[0009] Technical solution

[0010] To achieve the objectives described above, according to the present invention, a vertical probe is used as a probe in a probe card, the probe card comprising a probe sequentially coupled to an upper plate having at least one upper guide hole and a lower plate having at least one lower guide hole. The probe is characterized in that it comprises: an elastic beam portion disposed between a lower contact portion that contacts the device under test and an upper contact portion disposed at a certain interval relative to the lower contact portion and contacting the test device, formed by a pair of elastic beams with a certain gap to be elastically deformable by external force; and an anti-disengagement protrusion portion, wherein at least one of the pair of elastic beams has a protruding anti-disengagement protrusion to prevent the elastic beam portion from disengaging through the upper guide hole. The elastic beam portion is configured such that, when inserted through the upper guide hole, it is elastically deformed by the force generated by the contact between the anti-disengagement protrusion and the upper guide hole, thereby reducing the gap between the elastic beams. In the inserted and engaged state through the upper guide hole, the distance between the pair of elastic beams including the anti-disengagement protrusion is larger than the diameter of the upper guide hole.

[0011] Furthermore, the probe card according to the present invention is characterized by comprising: a lower plate having at least one lower guide hole; an upper plate, spaced apart from the lower plate, having an upper guide hole corresponding to the lower guide hole; a probe having an elastic beam portion disposed between a lower contact portion that contacts the device under test and an upper contact portion that is spaced apart from the lower contact portion and contacts the test device, the probe being composed of a pair of elastic beams with a certain gap to be elastically deformable by external force; and an anti-detachment protrusion, wherein at least one of the pair of elastic beams has a protruding anti-detachment protrusion to prevent the elastic beam portion from detaching through the upper guide hole, the elastic beam portion being formed such that when inserted through the upper guide hole, it is elastically deformed by the force generated by the contact between the anti-detachment protrusion and the upper guide hole, thereby reducing the gap between the elastic beams, and in the state of being inserted and engaged through the upper guide hole, the distance between the pair of elastic beams including the anti-detachment protrusion is larger than the diameter of the upper guide hole.

[0012] Invention Effects

[0013] The probe card according to the present invention can prevent multiple vertical probes housed in the probe card from detaching and falling out even when the probe card is flipped.

[0014] In addition, during the process of assembling the vertical probe with the anti-detachment protrusion onto the upper plate, the elastic deformation of the elastic beam can maximize the prevention of deformation and damage of the vertical probe.

[0015] In addition, when a vertical probe is damaged by an external impact, the damaged vertical probe is prevented from falling through the lower guide hole. Attached Figure Description

[0016] Figure 1 This is a schematic diagram illustrating the structure of a probe card according to an embodiment of the present invention.

[0017] Figure 2 This is a diagram that schematically illustrates the state of operation of a probe card according to an embodiment of the present invention.

[0018] Figure 3 This is a cross-sectional view showing a state in which a vertical probe is attached to an upper plate and a lower plate according to an embodiment of the present invention.

[0019] Figure 4 This is a perspective view showing the structure of a vertical probe according to an embodiment of the present invention.

[0020] Figure 5 This is a diagram illustrating the structure of a vertical probe that is prevented from falling due to an expansion portion according to an embodiment of the present invention.

[0021] Figure 6 This is a diagram illustrating the process by which the anti-detachment protrusion passes through the upper plate according to an embodiment of the present invention.

[0022] Figure 7 This diagram illustrates a structure that prevents a vertical probe from falling through the upper guide hole by utilizing an anti-detachment protrusion according to an embodiment of the present invention. Detailed Implementation

[0023] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be noted that the same constituent elements in the drawings are indicated by the same reference numerals as much as possible. Furthermore, detailed descriptions of well-known functions and configurations that could obscure the essence of the invention will be omitted.

[0024] The following is for reference only. Figures 1 to 7 This describes a probe card according to an embodiment of the present invention.

[0025] Figure 1 This is a schematic diagram illustrating the structure of a probe card according to an embodiment of the present invention. Figure 2 This is a diagram that schematically illustrates the state of operation of a probe card according to an embodiment of the present invention. Figure 3 This is a cross-sectional view showing a state in which a vertical probe is attached to an upper plate and a lower plate according to an embodiment of the present invention.

[0026] Then, Figure 4 This is a perspective view showing the structure of a vertical probe according to an embodiment of the present invention. Figure 5This diagram illustrates the structure by which a broken vertical probe is prevented from falling due to an expansion portion according to an embodiment of the present invention. Figure 6 This diagram illustrates the process by which the anti-detachment protrusion passes through the upper plate according to an embodiment of the present invention. Figure 7 This diagram illustrates a structure that prevents a vertical probe from falling through the upper guide hole by utilizing an anti-detachment protrusion according to an embodiment of the present invention.

[0027] refer to Figure 1 as well as Figure 2 According to an embodiment of the present invention, a probe card is used as a card for performing inspections on a device 10 to be tested. The probe card may include a printed circuit board G and probes 100.

[0028] The printed circuit board G may include circuitry that receives electrical signals sent by an equipment inspection device (not shown), transmits them to probe 100, and simultaneously transmits the signals transmitted by probe 100 in reverse to a semiconductor inspection device.

[0029] According to an embodiment of the present invention, the probe 100 can be connected to the lower part of a printed circuit board G or a space transformer S connected to the bottom surface of the printed circuit board G.

[0030] At this time, the probe 100 performs the following function: it sends an electrical signal to the device under test 10 that is in contact with the plurality of vertical probes 200 formed by vertical protrusions, and responds to it by transmitting the received electrical signal in reverse to the printed circuit board G above.

[0031] Recently, as the device under test 10 has been formed into a fine structure, the spacing of the multiple vertical probes 200 also needs to be finely configured. In this case, a space transformer S providing electrical connection can be configured between the printed circuit board G and the probes 100 to change the spacing of the dense vertical probes 200 as needed.

[0032] Multiple contact pads S1 can be provided on the bottom surface of the space transformer S, and multiple vertical probes 200 are electrically connected to the multiple contact pads S1.

[0033] The following is for reference Figures 2 to 7 In a probe card according to an embodiment of the present invention, the description will focus on the probe 100 mounted on the bottom surface of the space transformer S.

[0034] refer to Figure 2 as well as Figure 3 According to an embodiment of the present invention, the probe 100 may include: a main body 110, mounted on the bottom surface of the space transformer S; and at least one vertical probe 200, mounted inside the main body 110.

[0035] The main body 110 can be configured at the upper part of the device under test 10. The main body 110 may include a lower plate 111, an upper plate 112 and a vertical support 113.

[0036] The lower plate 111 can be formed into a plate shape with a certain thickness and is disposed at the upper position of the device under test 10. At least one lower guide hole 111a can be formed in the lower plate 111 at a position corresponding to the contact surface of the device under test 10.

[0037] The lower guide hole 111a can be formed as a through hole that vertically penetrates the lower plate 111. The lower end of the vertical probe 200, described later, protrudes towards the lower end of the lower guide hole 111a and contacts the upper surface of the device under test 10.

[0038] The upper plate 112 may be formed in the same shape as the lower plate 111, having a certain thickness, thereby being spaced apart from the upper part of the lower plate 111. At least one upper guide hole 112a is formed at a position corresponding to at least one guide hole 111a formed on the lower plate 111.

[0039] The upper guide hole 112a can be the same as the lower guide hole 111a and be formed as a through hole that vertically penetrates the upper plate 112. A portion of the upper end of the vertical probe 200 is exposed towards the upper end of the upper guide hole 112a and contacts the contact pad S1 mounted on the space transformer S.

[0040] At this time, the vertical probe 200 can be inserted from the upper part of the upper guide hole 112a downwards and penetrates the lower guide hole 111a in sequence, and is then housed in the main body 110.

[0041] The vertical support 113 can be disposed on the side of the lower plate 111 and the upper plate 112, maintaining the gap between the lower plate 111 and the upper plate 112, thereby forming an internal space 110a between the lower plate 111 and the upper plate 112.

[0042] The upper end of the vertical support 113 can be attached to the lower part of the space transformer S for support.

[0043] An upper space 112b can be formed between the top surface of the upper plate 112 and the bottom surface of the space transformer S. The upper space 112b can cause the upper part of the vertical probe 200 to rise vertically as the device under test 10 is raised. At this time, the upper space 112b can be adjusted by the height difference between the top surface of the upper plate 112 and the top surface of the vertical support 113.

[0044] On the one hand, an internal space 110a can be formed between the bottom surface of the upper plate 112 and the top surface of the lower plate 111. The internal space 110a can be used to generate elastic force by applying force to the vertical probe 200 as the test device 10 is raised. The elastic beam portion 230 of the vertical probe 200 located in the internal space 110a can exert elastic force.

[0045] refer to Figure 4 According to an embodiment of the present invention, a vertical probe 200 may include: a lower contact portion 220 for contacting the device under test 10; an upper contact portion 210 for contacting the contact pad S1 of the space transformer S; and an elastic beam portion 230 disposed between the lower contact portion 220 and the upper contact portion 210.

[0046] The upper contact portion 210 can be formed extending from the upper end of the elastic beam portion 230, and an upper contact 211 can be provided at its upper end. At this time, a part of the upper contact portion 210 can be configured to penetrate the upper guide hole 112a of the upper plate 112. During equipment inspection, the upper contact 211 contacts the contact pad S1 of the space transformer S, thereby electrically connecting the device under test 10 and the vertical probe 200 to the printed circuit board G.

[0047] On the one hand, an upper locking protrusion 212 can be provided in the upper contact portion 210. The upper locking protrusion 212 protrudes from the exposed part of the upper guide hole 112a in the upper contact portion 210, thereby locking onto the upper plate 112 on which the upper guide hole 112a is formed.

[0048] The upper locking protrusion 212 prevents the upper contact part 210 from disengaging from the upper guide hole 112a and falling downwards when the vertical probe 200 is mounted on the main body 110.

[0049] The lower contact portion 220 can be formed by extending from the lower end of the elastic beam portion 230, and a lower contact 221 can be provided at the lower end.

[0050] At this time, a portion of the lower contact portion 220 can be configured to pass through the lower guide hole 111a of the lower plate 111. When the equipment is inspected, the lower contact 221 contacts the device under test 10, thereby electrically connecting the device under test 10 and the vertical probe 200.

[0051] On the one hand, refer to Figure 5 The width W1 of the lower contact portion 220 is formed to be larger than the diameter D1 of the lower guide hole 111a, and an expansion portion 240 may be formed to be the same as the overall width W2 of the elastic beam portion 230.

[0052] More specifically, the expansion portion 240 can be formed at the upper end of the lower contact portion 220 and the connection point of the elastic beam portion 230, thereby preventing the lower contact portion 220 disposed in the lower guide hole 111a from disengaging from the lower guide hole 111a.

[0053] As an example, such as Figure 5 As shown, when the vertical probe 200 breaks due to an external impact, the broken part of the vertical probe 200 falls through the lower guide hole 111a and damages the device under test 10. At this time, since the width W1 of the expansion portion 240 is formed to be larger than the diameter D1 of the lower guide hole 111a, it acts as a stopper to prevent the broken vertical probe 200 from falling. Thus, the broken vertical probe 200 can be prevented from falling, thereby preventing damage to the device under test 10.

[0054] According to an embodiment of the present invention, the elastic beam portion 230 can be composed of a pair of elastic beams with a certain gap, and the gap formed between the pair of elastic beams can be reduced by elastic deformation under external force. In this case, the elastic beam portion 230 can be disposed in the internal space 110a formed between the upper plate 112 and the lower plate 111 through the upper guide hole 112a. The elastic beam portion 230 may include a first elastic beam 231, a second elastic beam 232, and an elastic gap 233.

[0055] One end of the first elastic beam 231 may be connected to one side of the lower end of the upper contact portion 210 and the other end may be connected to one side of the upper end of the lower contact portion 220. The second elastic beam 232 may be separated from the first elastic beam 231 by a certain interval, with one end connected to the other side of the lower end of the upper contact portion 210 and the other end connected to the other side of the upper end of the lower contact portion 220.

[0056] An elastic gap 233 with a certain width is formed in the space separated by the first elastic beam 231 and the second elastic beam 232.

[0057] The elastic beam portion 230 will be described in detail together with the anti-detachment protrusion 250, which will be explained below.

[0058] According to an embodiment of the present invention, the anti-detachment protrusion 250 may include an anti-detachment protrusion protruding on at least one of a pair of elastic beams 231, 232, which may protrude on the outside of the elastic beam portion 230, thereby preventing the vertical probe 200 from detaching and falling through the upper guide hole 112a.

[0059] The anti-detachment protrusion 250 may include a first anti-detachment protrusion 251 and a second anti-detachment protrusion 252, each protruding from a pair of elastic beams 231, 232.

[0060] The first anti-detachment protrusion 251 can be formed by protruding horizontally from the outside of the first elastic beam 231, and the second anti-detachment protrusion 252 can be formed by protruding from the outside of the second elastic beam 232 and protruding in the opposite direction to the first anti-detachment protrusion 251.

[0061] On the one hand, the first anti-disengagement protrusion 251 and the second anti-disengagement protrusion 252 are preferably formed in opposite positions, but are not limited thereto.

[0062] At this time, the length L between one end of the first anti-detachment protrusion 251 and one end of the second anti-detachment protrusion 252 is preferably formed to be larger than the diameter D2 of the upper guide hole to prevent detachment through the upper guide hole.

[0063] Therefore, the anti-detachment protrusion 250 can be locked onto the bottom surface of the upper plate 112 through the upper guide hole 112a by the width W3 of the elastic gap 233 reduced by the elastic deformation of the pair of elastic beams 231, 232, and the anti-detachment protrusion 250 through the upper guide hole 112a by the width W3 of the elastic gap 233 restored by the elastic restoring force of the elastic beam 230, thereby preventing the vertical probe 200 from detaching and falling through the upper guide hole 112a.

[0064] refer to Figure 6 as well as Figure 7 The function of the anti-detachment protrusion 250 is explained in detail.

[0065] like Figure 6 As shown, during the process of the elastic beam portion 230 with the anti-detachment protrusion 250 passing through the upper guide hole 112a, the first anti-detachment protrusion 251 and the second anti-detachment protrusion 252 contact the inner side of the upper guide hole 112a while passing through the upper guide hole 112a. At this time, the width W3 of the elastic gap 233 formed between the first elastic beam 231 and the second elastic beam 232 shrinks, causing elastic deformation.

[0066] At this time, the first anti-disengagement protrusion 251 and the second anti-disengagement protrusion 252 are not deformed or damaged when passing through the upper guide hole 112a due to the elastic deformation of the first elastic beam 231 and the second elastic beam 232, which makes the width W3 of the elastic gap 233 smaller.

[0067] When the width W3 of the elastic gap 233 formed between the first anti-detachment protrusion 251 and the second anti-detachment protrusion 252 through the upper guide hole 112a is restored, the length L between the first anti-detachment protrusion 251 and the second anti-detachment protrusion 252 will be greater than the diameter D2 of the upper guide hole 112a.

[0068] Therefore, as Figure 7As shown, when the main body 110 of the probe card is separated from the space transformer S for maintenance, or when the upper plate 112 is flipped to remove the vertical probe 200 from the main body 110, the first anti-detachment protrusion 251 and the second anti-detachment protrusion are locked onto the bottom surface of the upper plate 112, thereby preventing the vertical probe 200 stored in the main body 110 from detaching and falling off.

[0069] As described above, the probe card according to the present invention can prevent multiple vertical probes stored in the probe card from detaching from the probe card and falling out even when the probe card is flipped over.

[0070] In addition, during the assembly of the vertical probe with anti-detachment protrusions onto the upper plate, the elastic deformation of the elastic beam can prevent the vertical probe from deforming and being damaged to the greatest extent.

[0071] In addition, when the vertical probe is damaged by external impact, it is prevented from falling through the lower guide hole.

[0072] Industrial applicability

[0073] Various modifications can be derived from the configurations and methods described and exemplified herein without departing from the scope of the invention. Therefore, all contents shown in the specification or drawings are illustrative and not intended to limit the invention. Consequently, the scope of the invention is not limited to the exemplified embodiments described above, and its scope must be determined according to the claims and their equivalents.

Claims

1. A probe for use in a probe card, the probe card comprising the probe sequentially coupled to an upper plate having at least one upper guide hole and a lower plate having at least one lower guide hole, wherein, The probe includes: An elastic beam portion, disposed between a lower contact portion that contacts the device under test and an upper contact portion that is spaced apart from the lower contact portion and contacts the test device, is composed of a pair of elastic beams with a certain gap, enabling elastic deformation under external force; and An anti-detachment protrusion is provided on at least one of the pair of elastic beams to prevent the elastic beam from detaching through the upper guide hole. The elastic beam is formed such that when inserted through the upper guide hole, it is elastically deformed by the force generated by the contact between the anti-disengagement protrusion and the upper guide hole, thereby reducing the gap between the elastic beams. In the state of being inserted and engaged through the upper guide hole, the distance between the pair of elastic beams including the anti-disengagement protrusion is larger than the diameter of the upper guide hole.

2. The probe of claim 1, wherein, The elastic beam portion includes: The first elastic beam has one end connected to one side of the upper contact portion and the other end connected to one side of the lower contact portion; A second elastic beam is arranged at a certain interval from the first elastic beam, and one end is connected to the other side of the upper contact portion, and the other end is connected to the other side of the lower contact portion; and An elastic gap is formed in the space between the first elastic beam and the second elastic beam.

3. The probe of claim 2, wherein, The anti-detachment protrusion includes: The first anti-detachment protrusion is formed by protruding horizontally from the outside of the first elastic beam; and The second anti-detachment protrusion is formed on the outside of the second elastic beam and protrudes in the opposite direction to the first anti-detachment protrusion.

4. The probe of claim 3, wherein, The first anti-detachment protrusion and the second anti-detachment protrusion are formed in opposite positions.

5. The probe according to claim 1, wherein, An expansion portion is provided at the connection between the elastic beam portion and the lower contact portion, and the expansion portion has a width larger than the diameter of the lower guide hole. The expansion section prevents the probe from falling through the guide hole when the elastic beam is damaged.

6. A probe card, comprising: The lower plate has at least one lower guide hole; The upper plate is spaced apart from the lower plate and has an upper guide hole corresponding to the lower guide hole; The probe is provided with an elastic beam portion, which is disposed between a lower contact portion that contacts the device under test and an upper contact portion that is disposed at a certain interval relative to the lower contact portion and contacts the test device. It is composed of a pair of elastic beams with a certain gap so that it can be elastically deformed by external force. as well as An anti-detachment protrusion is provided on at least one of the pair of elastic beams to prevent the elastic beam from detaching through the upper guide hole. The elastic beam is formed such that when inserted through the upper guide hole, it is elastically deformed by the force generated by the contact between the anti-disengagement protrusion and the upper guide hole, thereby reducing the gap between the elastic beams. In the state of being inserted and engaged through the upper guide hole, the distance between the pair of elastic beams including the anti-disengagement protrusion is larger than the diameter of the upper guide hole.

7. The probe card of claim 6, wherein, The elastic beam portion includes: The first elastic beam has one end connected to one side of the upper contact portion and the other end connected to one side of the lower contact portion; A second elastic beam is arranged at a certain interval from the first elastic beam, and one end is connected to the other side of the upper contact portion, and the other end is connected to the other side of the lower contact portion; and An elastic gap is formed in the space between the first elastic beam and the second elastic beam.

8. The probe card of claim 7, wherein, The anti-detachment protrusion includes: The first anti-detachment protrusion is formed by protruding horizontally from the outside of the first elastic beam; and The second anti-detachment protrusion is formed on the outside of the second elastic beam and protrudes in the opposite direction to the first anti-detachment protrusion.

9. The probe card of claim 8, wherein, The first anti-detachment protrusion and the second anti-detachment protrusion are formed in opposite positions.

10. The probe card according to claim 6, wherein, An expansion portion is provided at the connection between the elastic beam portion and the lower contact portion, and the expansion portion has a width larger than the diameter of the lower guide hole. The expansion section prevents the probe from falling through the guide hole when the elastic beam is damaged.

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