charging cylinder
Patent Information
- Application Number
- CN202211529137.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-11-30
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2042-11-30
AI Technical Summary
但是二次加料时石英坩埚在边缘至中心的位置容易形成低-高-低的情况,导致硅液熔化的过程中,中心比次边缘的位置更先被硅液浸润;当所加硅料为颗粒硅时,颗粒硅释放氢气,从中心液体溢出,带出硅颗粒和硅液滴跃出液面(氢跳),严重时颗粒硅和硅液滴会黏附整个水冷屏和加热器上,引放加热器打火,从而引发设备异常停炉
[0005]根据本发明实施例的加料筒,通过在筒体的第一端的内周壁位置设有环形凸起,在盖体上具有导向斜面,环形凸起上具有与导向斜面配合的配合斜面,导向斜面在连杆至盖体的方向上朝向远离盖体轴线方向倾斜,配合斜面在第二端至第一端的方向上朝向远离筒体轴线方向倾斜,盖体上还具有通孔,通孔的另一端延伸至盖体的远离环形凸起的一端,在配合状态下,导向斜面与配合斜面贴合,导向斜面上的通孔被配合斜面封堵,硅料被封堵在筒体内,避免筒体内的硅料流出,在非配合状态下,硅料可以从盖体边缘与通孔中流出,使流入下方石英坩埚中的硅料较为均匀,提高单晶炉的可靠性。
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Figure CN115928193B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of photovoltaic technology, and more specifically, to a feeding cylinder. Background Technology
[0002] Currently, the monocrystalline silicon industry generally uses the Czochralski method to produce monocrystalline silicon rods. To improve the utilization rate of quartz crucibles, a secondary feeding device is often used to repeatedly feed the quartz crucible, thereby enabling the production of multiple monocrystalline silicon rods from a single crucible. However, during secondary feeding, the quartz crucible is prone to a low-high-low pattern from the edge to the center, causing the center to be wetted by the molten silicon before the edges during the melting process. When the added silicon material is granular silicon, the granular silicon releases hydrogen gas, which overflows from the center of the liquid, carrying silicon particles and silicon droplets that jump out of the liquid surface (hydrogen jump). In severe cases, the granular silicon and silicon droplets can adhere to the entire water-cooled screen and heater, triggering the heater to ignite and causing abnormal equipment shutdown. Summary of the Invention
[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, the present invention proposes a feeding cylinder that can make the silicon material flowing out of the cylinder more uniformly distributed in the crucible, thereby improving the reliability of the single crystal furnace.
[0004] According to an embodiment of the present invention, a feeding cylinder includes a cylinder body, a connecting rod, and a cover. The cylinder body has a first end and a second end at its two axial ends. An annular protrusion extending circumferentially along the cylinder body is provided on the inner peripheral wall of the first end. In the direction from the second end to the first end, the surface of the annular protrusion away from the second end is inclined in a direction away from the cylinder body axis to form a mating inclined surface. The connecting rod is movably disposed within the cylinder body along the axial direction of the cylinder body. The cover is connected to one end of the connecting rod. The outer peripheral wall of the cover includes a guide inclined surface adapted to fit against the mating inclined surface. A through hole is provided on the guide inclined surface, and the other end of the through hole extends to the end of the cover away from the annular protrusion. When the guide inclined surface fits against the mating inclined surface, the mating inclined surface blocks the through hole.
[0005] According to an embodiment of the present invention, the feeding cylinder has an annular protrusion on the inner circumferential wall at the first end of the cylinder body, a guide slope on the cover body, and a mating slope on the annular protrusion that cooperates with the guide slope. The guide slope is inclined away from the axis of the cover body in the direction from the connecting rod to the cover body, and the mating slope is inclined away from the axis of the cylinder body in the direction from the second end to the first end. The cover body also has a through hole, the other end of which extends to the end of the cover body away from the annular protrusion. In the mating state, the guide slope and the mating slope fit together, and the through hole on the guide slope is blocked by the mating slope, thus sealing the silicon material inside the cylinder body and preventing the silicon material inside the cylinder body from flowing out. In the non-matting state, the silicon material can flow out from the edge of the cover body and the through hole, making the silicon material flowing into the quartz crucible below more uniform and improving the reliability of the single crystal furnace.
[0006] According to some embodiments of the present invention, the through holes are a plurality of holes spaced apart along the circumferential direction of the cover.
[0007] According to some embodiments of the present invention, the through hole includes a first hole segment and a second hole segment connected together. The first hole segment is disposed on the side of the second hole segment facing the annular protrusion. The first hole segment extends along the axial direction of the cylinder, and the second hole segment is inclined in a direction away from the annular protrusion toward a direction close to the axial direction of the cylinder.
[0008] According to some embodiments of the present invention, in the direction from the first end to the second end, the surface of the annular protrusion facing the second end is inclined in a direction away from the axis of the cylinder.
[0009] According to some embodiments of the present invention, the cover is a quartz component or a silicon component.
[0010] According to some embodiments of the present invention, the connecting rod is a metal connecting rod, and the feeding cylinder further includes a protective sleeve, which is sleeved outside the connecting rod, and the protective sleeve is a quartz tube or a silicon tube.
[0011] According to some embodiments of the present invention, the protective sleeve includes a plurality of sub-segments arranged axially.
[0012] According to some embodiments of the present invention, an annular gasket is provided between each pair of adjacent sub-pipe segments.
[0013] According to some embodiments of the present invention, the protective sleeve is an integrally molded part.
[0014] According to some embodiments of the present invention, the inner diameter of the protective sleeve is 10-20 mm, and the wall thickness of the protective sleeve is 7-13 mm.
[0015] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0016] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:
[0017] Figure 1 This is a cross-sectional view of the feeding cylinder according to an embodiment of the present invention;
[0018] Figure 2 This is a perspective view of the cover of the feeding cylinder according to an embodiment of the present invention;
[0019] Figure 3 This is a cross-sectional view of the cover of the feeding cylinder according to an embodiment of the present invention.
[0020] Figure label:
[0021] 100. Feeding cylinder;
[0022] 1. Cylinder body; 11. First end; 12. Second end; 13. Annular protrusion; 131. Mating inclined surface;
[0023] 2. Cover body; 21. Guide slope; 211. Through hole; 2111. First hole section; 2112. Second hole section;
[0024] 3. Connecting rod; 4. Protective sleeve. Detailed Implementation
[0025] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0026] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.
[0027] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0028] The following is for reference. Figures 1-3 A feeding cylinder 100 according to an embodiment of the present invention is described.
[0029] like Figure 1 As shown, the feeding cylinder 100 according to an embodiment of the present invention includes a cylinder body 1, a connecting rod 3, and a cover body 2.
[0030] Specifically, the two axial ends of the cylinder 1 are a first end 11 and a second end 12, respectively. The inner circumferential wall of the first end 11 is provided with an annular protrusion 13 extending in the circumferential direction of the cylinder 1. In the direction from the second end 12 to the first end 11, the surface of the annular protrusion 13 away from the second end 12 is inclined in a direction away from the axis of the cylinder 1 to form a mating inclined surface 131. The connecting rod 3 is movably disposed inside the cylinder 1 in the axial direction of the cylinder 1.
[0031] The cover 2 is connected to one end of the connecting rod 3 and is located at the end of the annular protrusion 13 away from the second end 12. The cover 2 and the connecting rod 3 are connected by fasteners, so that the cover 2 can move together with the connecting rod 3 when it moves. The outer peripheral wall of the cover 2 includes a guide slope 21 adapted to fit with the mating slope 131. The guide slope 21 is inclined in the direction away from the axis of the cover 2 in the direction from the connecting rod 3 to the cover 2. The inclination angle of the guide slope 21 is the same as the inclination angle of the mating slope 131 on the annular protrusion 13. The guide slope 21 is provided with a through hole 211. The other end of the through hole 211 extends to the end of the cover 2 away from the annular protrusion 13, so that silicon material can flow out from the feeding cylinder 100 through the through hole 211 and enter the quartz crucible below the feeding cylinder 100. When the guide slope 21 fits with the mating slope 131, the mating slope 131 blocks the through hole 211 and prevents the silicon material from falling.
[0032] Understandably, when the quartz crucible does not require feeding, the guide slope 21 on the cover 2 fits against the mating slope 131 on the annular protrusion 13, and the silicon material is confined within the cylinder 1. When feeding is required into the quartz crucible, after the cylinder 1 of the feeding cylinder 100 is fixed, the connecting rod 3 moves within the cylinder 1 along the direction from the second end 12 to the first end 11, causing the cover 2 to move away from the first end 11. At this time, the guide slope 21 on the cover 2 separates from the mating slope 131.
[0033] This application forms a feeding port between the mating inclined surface 131 and the guide inclined surface 21, and the upper end of the through hole 211 is open. The silicon material located in the cylinder 1 flows out of the cylinder 1 along the guide inclined surface 21 and flows to the periphery of the crucible. Some of the silicon material flows down from the through hole 211 to the center of the crucible, avoiding the silicon material in the quartz crucible from the edge to the center in a low-high-low pattern. This avoids the center being wetted by the silicon liquid before the edge during the melting process, thus preventing hydrogen jumping. It also avoids the adhering of particulate silicon and silicon droplets to the entire water-cooled screen and heater, preventing the heater from igniting and thus avoiding abnormal equipment shutdown.
[0034] According to an embodiment of the present invention, the feeding cylinder 100 has an annular protrusion 13 on the inner peripheral wall of the first end 11 of the cylinder 1, a guide slope 21 on the cover 2, and a mating slope 131 on the annular protrusion 13 that cooperates with the guide slope 21. The guide slope 21 is inclined away from the axis of the cover 2 in the direction from the connecting rod 3 to the cover 2, and the mating slope 131 is inclined away from the axis of the cylinder 1 in the direction from the second end 12 to the first end 11. The cover 2 also has The through hole 211 extends to the end of the cover 2 away from the annular protrusion 13. In the mating state, the guide slope 21 fits against the mating slope 131, and the through hole 211 on the guide slope 21 is blocked by the mating slope 131. The silicon material is blocked inside the cylinder 1 to prevent the silicon material inside the cylinder 1 from flowing out. In the non-matting state, the silicon material can flow out from the edge of the cover 2 and the through hole 211, so that the silicon material flowing into the quartz crucible below is more uniform and the reliability of the single crystal furnace is improved.
[0035] In some embodiments of the present invention, such as Figure 2 and Figure 3 As shown, the through holes 211 are multiple holes spaced apart along the circumferential direction of the cover body 2. Multiple through holes 211 allow more silicon material to flow out from the off-center region, which can better achieve uniform distribution of silicon material in the quartz crucible, reduce the probability of hydrogen jumping, and increase the reliability of the single crystal furnace.
[0036] In some embodiments of the present invention, such as Figure 3 As shown, the through-hole 211 includes a first segment 2111 and a second segment 2112 connected together. The first segment 2111 is located on the side of the second segment 2112 facing the annular protrusion 13. The first segment 2111 extends along the axial direction of the cylinder 1, allowing silicon material rolling down the guide slope 21 to fall into the first segment 2111 under gravity. At this time, the opening of the first segment 2111 on the guide slope 21 is relatively large, allowing more silicon material to flow into the first segment 2111. The second segment 2112 is inclined in a direction away from the annular protrusion 13 and towards the direction closer to the axial direction of the cylinder 1. At this time, more silicon material can flow into the first segment 2111, and the inclined second segment 2112 makes the silicon material flowing into the through-hole 211 more inclined to the center position when flowing into the quartz crucible, increasing the height of the silicon material in the central region, reducing the possibility of hydrogen jumping, and contributing to the production safety of the single crystal furnace.
[0037] In some embodiments of the present invention, such as Figure 1As shown, in the direction from the first end 11 to the second end 12, the surface of the annular protrusion 13 facing the second end 12 is inclined away from the axis of the cylinder 1. Therefore, when the silicon material in the cylinder 1 moves towards the first end 11, it will accelerate and fall to the position where the mating inclined surface 131 on the annular protrusion 13 and the guide inclined surface 21 on the cover 2 meet, which facilitates the guidance of the silicon material in the cylinder 1.
[0038] In some embodiments of the present invention, the cover 2 is a quartz component or a silicon component. This can prevent parts of the cover 2 from being worn by the silicon material as it flows over it, causing it to fall into the quartz crucible with the silicon material, thus affecting the purity of the silicon material and consequently the quality of the single crystal silicon rod.
[0039] In some embodiments of the present invention, such as Figure 1 As shown, the connecting rod 3 is a metal connecting rod 3. The metal connecting rod 3 has good strength and stability, which is beneficial to the reliability of the joint movement of the cover 2 and the connecting rod 3. During the movement, the metal connecting rod 3 is not prone to breakage or deformation. The feeding cylinder 100 also includes a protective sleeve 4, which is sleeved on the outside of the connecting rod 3. The protective sleeve 4 is a quartz tube or a silicon tube, which avoids direct contact between the metal connecting rod 3 and the silicon material in the feeding cylinder 100, thereby avoiding affecting the quality of the single crystal silicon rod.
[0040] Furthermore, the protective sleeve 4 includes multiple sub-segments arranged axially. The multiple sub-segments reduce the processing difficulty of the sub-segments and facilitate the control of the quality and strength of the protective sleeve 4.
[0041] Furthermore, an annular gasket is provided between each pair of adjacent sub-pipe sections. The annular gasket can provide a certain buffering effect and has better wear resistance and heat resistance than the metal connecting rod 3, which can prevent damage caused by mutual friction between adjacent sub-pipe sections.
[0042] In addition, such as Figure 1 As shown, the protective sleeve 4 is a one-piece molded part. This simplifies the assembly process of the protective sleeve 4 and improves its manufacturing efficiency.
[0043] Furthermore, the inner diameter of the protective sleeve 4 is 10-20 mm, and the wall thickness of the protective sleeve 4 is 7-13 mm. Specifically, the inner diameter of the protective sleeve 4 can be 10 mm, 11 mm, 12 mm, 13 mm, 14 mm, 15 mm, 16 mm, 17 mm, 18 mm, 19 mm, or 20 mm, and the wall thickness of the protective sleeve 4 can be 7 mm, 8 mm, 9 mm, 10 mm, 11 mm, 12 mm, or 13 mm. The inner diameter of the protective sleeve 4 needs to be greater than or equal to the diameter of the metal connecting rod 3, while the wall thickness of the protective sleeve 4 is determined by considering the inner diameter of the protective sleeve 4 while ensuring the strength of the protective sleeve 4, and minimizing the volume occupied by the protective sleeve 4 in the cylinder 1.
[0044] The feeding cylinder 100 according to a specific embodiment of the present invention is described below with reference to the accompanying drawings. It is to be understood that the following description is merely exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.
[0045] Specifically, such as Figures 1-3 As shown, the feeding cylinder 100 includes a cylinder body 1, a connecting rod 3, a protective sleeve 4, and a cover 2. The two axial ends of the cylinder body 1 are a first end 11 and a second end 12, respectively. An annular protrusion 13 extending along the circumferential direction of the cylinder body 1 is provided on the inner peripheral wall of the first end 11. The surface of the annular protrusion 13 facing the second end 12 is inclined away from the axis of the cylinder body 1 in the direction from the first end 11 to the second end 12. The surface of the annular protrusion 13 away from the second end 12 is inclined away from the axis of the cylinder body 1 in the direction from the second end 12 to the first end 11 to form a mating inclined surface 131.
[0046] Connecting rod 3 is movably disposed within cylinder 1 along the axial direction. Connecting rod 3 is a metal connecting rod, which offers good strength and stability, contributing to the reliability of the joint movement of cover 2 and connecting rod 3. During movement, metal connecting rod 3 is less prone to breakage or deformation. Protective sleeve 4 is fitted over connecting rod 3. Protective sleeve 4 is a quartz tube or silicon tube, preventing direct contact between the metal connecting rod 3 and the silicon material inside the feeding cylinder 100, thus avoiding impact on the quality of the single-crystal silicon rod. Protective sleeve 4 is a one-piece molded component, simplifying the assembly process and improving manufacturing efficiency. The inner diameter of protective sleeve 4 is 10-20 mm, and the wall thickness is 7-13 mm.
[0047] The cover 2 is made of quartz or silicon to prevent wear on the cover 2 as silicon flows over it, which would cause the silicon to fall into the quartz crucible and affect its purity, thus impacting the quality of the single-crystal silicon rod. The cover 2 is connected to one end of the connecting rod 3 and is located at the end of the annular protrusion 13 furthest from the second end 12. The outer peripheral wall of the cover 2 includes a guide slope 21 adapted to fit against the mating slope 131. The guide slope 21 is inclined away from the axis of the cover 2 in the direction from the connecting rod 3 to the cover 2. The guide slope 21 has through holes 211, which are spaced apart along the circumferential direction of the cover 2. The multiple through holes 211 allow more silicon to flow from the center. The outflow from the core area can better achieve uniform distribution of silicon material in the quartz crucible, reduce the probability of hydrogen jump, and increase the reliability of the single crystal furnace. The other end of the through hole 211 extends to the end of the cover 2 away from the annular protrusion 13. The through hole 211 includes a first hole segment 2111 and a second hole segment 2112 connected together. The first hole segment 2111 is located on the side of the second hole segment 2112 facing the annular protrusion 13. The first hole segment 2111 extends along the axial direction of the cylinder 1. The second hole segment 2112 is inclined in the direction away from the annular protrusion 13 towards the direction close to the axial direction of the cylinder 1. When the guide slope 21 is in contact with the mating slope 131, the mating slope 131 blocks the through hole 211.
[0048] Other configurations and operations of the feeding cylinder 100 according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.
[0049] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0050] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims
1. A feeding cylinder, characterized in that, include: The cylindrical body has a first end and a second end at its two axial ends. The inner circumferential wall of the first end is provided with an annular protrusion extending along the circumferential direction of the cylindrical body. In the direction from the second end to the first end, the surface of the annular protrusion away from the second end is inclined in a direction away from the axis of the cylindrical body to form a mating inclined surface. A connecting rod, which is movably disposed within the cylinder along the axial direction of the cylinder; A cover body is connected to one end of the connecting rod. The outer peripheral wall of the cover body includes a guide slope adapted to fit with the mating slope. The guide slope is provided with a through hole. The other end of the through hole extends to the end of the cover body away from the annular protrusion. When the guide slope fits with the mating slope, the mating slope blocks the through hole. The through holes are a plurality of holes spaced apart along the circumferential direction of the cover; The through hole includes a first hole segment and a second hole segment connected together. The first hole segment is located on the side of the second hole segment facing the annular protrusion. The first hole segment extends along the axial direction of the cylinder. The opening size of the first hole segment on the guide slope is larger than its opening size at the connection point of the second hole segment. The through hole includes a first hole segment and a second hole segment connected together. The first hole segment is located on the side of the second hole segment facing the annular protrusion. The first hole segment extends along the axial direction of the cylinder, and the second hole segment is inclined in a direction away from the annular protrusion toward a direction closer to the axial direction of the cylinder. In the direction from the first end to the second end, the surface of the annular protrusion facing the second end is inclined in a direction away from the axis of the cylinder. The cover is made of quartz or silicon. The feeding cylinder further includes a protective sleeve, which is sleeved on the outside of the connecting rod, and the protective sleeve is a quartz tube or a silicon tube; The protective sleeve includes multiple sub-segments arranged axially; the connecting rod is a metal connecting rod.
2. The feeding cylinder according to claim 1, characterized in that, An annular gasket is provided between each pair of adjacent sub-pipe sections.
3. The feeding cylinder according to claim 1, characterized in that, The protective sleeve is a one-piece molded part.
4. The feeding cylinder according to claim 1, characterized in that, The inner diameter of the protective sleeve is 10-20 mm, and the wall thickness of the protective sleeve is 7-13 mm.
Citation Information
Patent Citations
Silicon material feeding method
CN113430639A
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CN203295666U
Doping device for czochralski silicon
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Feeding cylinder of single crystal furnace
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