An airtight electrode structure for arc plasma

Abstract

The application relates to the technical field of plasma application, in particular to a gas-tight electrode structure for arc plasma, which comprises a flange assembly, a bottom cover assembly and an electrode assembly; the flange assembly is connected with the bottom cover assembly through a bridging assembly, and the electrode assembly is connected on the bottom cover assembly; the application discloses a gas-tight electrode structure for arc plasma; the flange assembly, the bottom cover assembly, the electrode assembly and the bridging assembly are used in cooperation, so that the normal function use of the arc plasma torch is ensured, meanwhile, the welding seam is ensured to be a vacuum gas-tight welding seam, air leakage at the electrode support rod thread is prevented, the formation of the arc plasma is ensured, and the accuracy and precision of the arc plasma test are greatly improved.

Description

Technical Field

[0001] This invention relates to the field of plasma application technology, specifically to a gas-tight electrode structure for arc plasma. Background Technology

[0002] Arc plasma is generated by the discharge between electrodes to produce an electric arc, and the gas is ionized by the electric arc to produce plasma.

[0003] It can be widely used in various industrial fields such as metal welding, cutting, material surface treatment, sewage treatment, plasma propulsion and auxiliary combustion.

[0004] As plasma applications become more widespread, higher requirements are being placed on arc plasma torches.

[0005] The electrode support rods of current arc plasma torches are adjusted by rotating via threads, which lacks airtightness and is prone to leakage. This affects both the formation of arc plasma and the accuracy of arc plasma experiments.

[0006] Especially during high-power arc plasma experiments, the leakage from the electrode support thread becomes more severe as the pressure inside the plasma chamber increases.

[0007] This greatly limits the accuracy and precision of arc plasma experiments. Summary of the Invention

[0008] The purpose of this invention is to provide a hermetically sealed electrode structure for arc plasma with good hermetically sealed properties.

[0009] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0010] A hermetically sealed electrode structure for electric arc plasma includes a flange assembly, a bottom cover assembly, and an electrode assembly.

[0011] The flange assembly is connected to the bottom cover assembly via a bridging assembly, and the electrode assembly is connected to the bottom cover assembly;

[0012] The electrode assembly includes a movable electrode, which is connected to an electrode support rod; the electrode support rod is disposed through the bottom cover assembly.

[0013] The flange assembly includes a first base; the first base is connected to the bottom cover assembly via a bridging assembly;

[0014] The bottom cover assembly includes a bottom cover; the bottom cover and the first base are distributed at a distance from each other.

[0015] The bridging assembly includes a ceramic electron gun housing;

[0016] The first base is connected to the bottom cover via a ceramic electron gun shell.

[0017] The first base is connected to the bridging component via a connecting mechanism; the connecting mechanism includes a first pipe disposed on the first base, and the first pipe is connected to the bridging component via a first connecting plate.

[0018] A second pipe is provided on the first pipe, and a water nozzle is provided at the end of the second pipe away from the first pipe.

[0019] The bottom cover assembly also includes a connecting cylinder disposed on the bottom cover, through which the electrode support rod passes; the electrode support rod passes through the connecting cylinder and is connected to the movable electrode.

[0020] The bottom cover has a bottom cover through hole, and a connecting cylinder is provided in the bottom cover through hole; the connecting cylinder has a limiting ring rib; the limiting ring rib on the connecting cylinder fits into the bottom cover, and the connecting cylinder is disposed through the bottom cover; the limiting ring rib fits into the outer side of the bottom cover, and the connecting cylinder is connected to the inner side of the bottom cover by welding.

[0021] The first connecting plate in the flange assembly is connected to the bottom cover in the bottom cover assembly via a ceramic electron gun housing.

[0022] The ceramic electronic gun housing includes a housing ceramic ring.

[0023] The ceramic ring of the gun casing is provided with a gun casing cup; the gun casing cup is inverted and placed on the bottom cover.

[0024] The ceramic ring of the gun casing is also provided with a support ring; the support ring includes a first support ring and a second support ring, which are distributed at intervals.

[0025] A gun gasket is provided between the support ring and the gun shell cup component and the gun shell ceramic ring; the support ring and the gun shell cup component are connected to the gun shell ceramic ring by a solder sheet.

[0026] The advantages of this invention are:

[0027] This invention discloses a gas-tight electrode structure for electric arc plasma. Through the coordinated use of flange assembly, bottom cover assembly, electrode assembly and bridging assembly, this invention not only ensures the normal function of the electric arc plasma torch, but also ensures that the weld is a vacuum-tight weld to prevent air leakage at the electrode support thread. In other words, it not only ensures the formation of electric arc plasma, but also greatly improves the accuracy and precision of electric arc plasma testing. Attached Figure Description

[0028] The following is a brief explanation of the contents of each of the accompanying drawings and the markings in the drawings:

[0029] Figure 1 This is a schematic diagram of the airtight electrode structure of the arc plasma of the present invention;

[0030] Figure 2 This is a front view of the flange assembly of the present invention;

[0031] Figure 3 This is a top view of the flange assembly of the present invention;

[0032] Figure 4 This is a schematic diagram of the structure of the ceramic electron gun housing of the present invention;

[0033] Figure 5 This is a schematic diagram of the bottom cover assembly of the present invention;

[0034] The markings in the above figures are all:

[0035] 1. Flange assembly, 2. Bridging assembly, 3. Bottom cover assembly, 4. Electrode assembly. Detailed Implementation

[0036] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings and the description of the preferred embodiments.

[0037] An airtight electrode structure for arc plasma includes a flange assembly 1, a bottom cover assembly 3, and an electrode assembly 4. The flange assembly 1 is connected to the bottom cover assembly 3 via a bridging assembly 2, and the electrode assembly 4 is connected to the bottom cover assembly 3. This invention discloses an airtight electrode structure for arc plasma. By using the flange assembly 1, the bottom cover assembly 3, the electrode assembly 4, and the bridging assembly 2 in combination, this invention not only ensures the normal function of the arc plasma torch but also ensures that the weld is a vacuum-tight weld, preventing air leakage at the thread of the electrode support rod 42. In other words, it ensures the formation of arc plasma and greatly improves the accuracy and precision of arc plasma testing.

[0038] This invention optimizes the structure of traditional electric arc plasma, ensuring the airtightness of the electrodes to a certain extent.

[0039] Specifically, the electrode assembly 4 in this invention includes a movable electrode 41, which is connected to an electrode support rod 42. The electrode support rod 42 facilitates subsequent connection to a high-voltage power supply. In this invention, the movable electrode 41 (electrode support rod 42) forms plasma by connecting to the power supply, facilitating subsequent use. Furthermore, the electrode support rod 42 penetrates the bottom cover assembly 3. This arrangement facilitates the placement of the electrode support rod 42 on the bottom cover assembly 3. Additionally, the flange assembly 1 in this invention includes a first base 11. The first base 11 is connected to the bottom cover assembly 3 via a bridging assembly 2. The flange assembly 1 facilitates the connection between the arc plasma torch and the reforming reaction chamber, thus constituting the assembly connection of the reforming device. The system includes a first base 11, which serves as a basic connecting seat, facilitating connection with the reforming reaction chamber shell. Additionally, the bottom cover assembly 3 includes a bottom cover 31, which is spaced apart from the first base 11. The bottom cover 31 provides a good bridging function, facilitating the placement of the electrode support rod 42, and also acts as a sealant, effectively sealing the electrode structure. Furthermore, the bridging assembly 2 includes a ceramic electron gun housing 2-1, which provides a good connection, facilitating the connection between the flange assembly 1 and the bottom cover assembly 3. Specifically, the first base 11 is connected to the bottom cover 31 via the ceramic electron gun housing 2-1, which provides a side seal, ensuring the sealing of the electrode structure.

[0040] Furthermore, in this invention, the first base 11 is connected to the bridging assembly 2 via a connecting mechanism; the connecting mechanism includes a first pipe 12 disposed on the first base 11, and the first pipe 12 is connected to the bridging assembly 2 via a first connecting plate 13; the first pipe 12 is disposed perpendicular to the first base 11, which is equivalent to longitudinally increasing the flange assembly 1; this facilitates subsequent docking with the bridging assembly 2. In addition, the first pipe 12 is connected to the bridging assembly 2 via the first connecting plate 13; the first connecting plate 13 also acts as a connecting structure, facilitating subsequent docking with the ceramic electron gun housing 2-1; this greatly ensures the connection between the bridging assembly 2 and the flange assembly 1.

[0041] Furthermore, in this invention, a second pipe 14 is provided on the first pipe 12, and a water nozzle 15 is provided at the end of the second pipe 14 away from the first pipe 12; in this invention, the second pipe 14 plays a good bridging and connecting role, which facilitates subsequent air intake operation.

[0042] Furthermore, in this invention, the bottom cover assembly 3 also includes a connecting cylinder 32 disposed on the bottom cover 31, through which the electrode support rod 42 passes; the electrode support rod 42 passes through the connecting cylinder 32 and is connected to the movable electrode 41; in this invention, the connecting cylinder 32 plays a good bridging and supporting role, which not only ensures the stability of the electrode support rod 42 arrangement, but also acts as a connector, facilitating the fixed connection between the electrode support rod 42 and the bottom cover 31.

[0043] Furthermore, in this invention, the bottom cover 31 is provided with a bottom cover through hole, and a connecting cylinder 32 is provided inside the bottom cover through hole; the bottom cover through hole facilitates the connection and arrangement of the connecting cylinder 32 on the bottom cover 31, and also facilitates the arrangement and placement of the electrode support rod 42; in addition, in this invention, the connecting cylinder 32 is required to be provided with a limiting ring rib 33; the limiting ring rib 33 on the connecting cylinder 32 fits against the bottom cover 31, and the connecting cylinder 32 is disposed through the bottom cover 31; the invention, through the setting of the limiting ring rib 33, plays a good limiting role, greatly ensuring the stability and accuracy of the connection between the connecting cylinder 32 and the bottom cover 31; in addition, in this invention, the limiting ring rib 33 fits against the outer side of the bottom cover 31, and the connecting cylinder 32 is connected to the inner side of the bottom cover 31 by welding; the invention, through this setting, greatly ensures the stability of the connection between the connecting cylinder 32 and the bottom cover 31.

[0044] Furthermore, in this invention, the first connecting plate 13 in the flange assembly 1 is connected to the bottom cover 31 in the bottom cover assembly 3 via the ceramic electron gun housing 2-1; this arrangement facilitates the connection between the bottom cover assembly 3 and the flange assembly 1; in this invention, the ceramic electron gun housing 2-1 is a circular sleeve structure, and the ceramic electron gun housing 2-1 also plays a good role in isolation and protection.

[0045] Furthermore, the ceramic electronic gun housing 2-1 described in this invention includes a housing ceramic ring 21; through the setting of the housing ceramic ring 21, the basic function of the housing ceramic ring 21 is to serve as a bridge, facilitating the connection between the flange assembly 1 and the bottom cover 31.

[0046] In addition, the gun shell ceramic ring 21 described in this invention is provided with a gun shell cup 22; the gun shell cup 22 is upside down on the bottom cover 31; the gun shell cup 22 facilitates the connection between the gun shell ceramic ring 21 and the bottom cover 31.

[0047] Furthermore, the ceramic ring 21 of the gun casing in this invention is also provided with a support ring 23. The provision of the support ring 23 not only ensures the structural strength of the ceramic electronic gun casing 2-1, but also facilitates the connection with adjacent components. Specifically, the support ring 23 in this invention includes a first support ring 231 and a second support ring 232, which are spaced apart. The first support ring 231 and the second support ring 232 divide the ceramic ring 21 of the gun casing into multiple segments, which facilitates subsequent connection with adjacent flange assembly 1 or bottom cover assembly 3 as needed.

[0048] Furthermore, in this invention, a gun gasket 24 is provided between the support ring 23 and the gun shell cup member 22 and the gun shell ceramic ring 21; the support ring 23 and the gun shell cup member 22 and the gun shell ceramic ring 21 are connected by a solder sheet 24; the gun gasket 24 and the solder sheet 24 provided in this invention can be used to buffer stress and increase the reliability of the weld structure between the support ring 23 and the gun shell cup member 22 and the gun shell ceramic ring 21.

[0049] specific:

[0050] This invention discloses a gas-tight electrode structure for electric arc plasma; the gas-tight electrode structure disclosed in this invention mainly includes a flange assembly 1, a ceramic electron gun housing 2-1, a bottom cover assembly 3, a movable electrode 41, and an electrode support rod 42.

[0051] In practical implementation:

[0052] First, the outer diameter of the first connecting plate 13 in flange assembly 1 is Φ70mm and the thickness is 1mm. It is then argon arc welded to the support ring 23 in ceramic electron gun housing 2-1 in a vacuum environment. Second, the gun housing cup 22 in ceramic electron gun housing 2-1 is then argon arc welded to the bottom cover 31 in bottom cover assembly 3 in a vacuum environment. The bottom cover 31 has an outer diameter of 59mm and a rounded corner of R0.5mm at the edge.

[0053] Argon arc welding is performed again on electrode support rod 42 and connecting cylinder 32 in bottom cover assembly 3. During welding, ensure the concentricity of movable electrode 41 with flange assembly 1, ceramic electron gun housing 2-1 and bottom cover assembly 3, and ensure that the distance between the lower end of electrode support rod 42 and the lower end of connecting cylinder 32 in bottom cover assembly 3 is within the range of 30-33mm.

[0054] When processing flange assembly 1, firstly, weld the second pipe 14 and the water nozzle 15 together; secondly, weld the second pipe 14 to the first pipe 12, ensuring that the second pipe 14 reaches the step of the first pipe 12 during welding; thirdly, weld the first base 11 to the first pipe 12, ensuring that the water nozzle 15 is between the two threaded holes of the first base 11 to facilitate the insertion and removal of the nut; finally, weld the first connecting plate 13 to the first pipe 12. Since the thickness of the first pipe 12 is 1mm, use low power during welding to avoid welding through the plate and causing air leakage.

[0055] In this invention, the ceramic electronic gun housing 2-1 includes a second support ring 232, a first support ring 231, and a gun housing cup component 22. In this invention, both sides of the second support ring 232, the first support ring 231, and the gun housing cup component 22 are welded to the ceramic ring 21 of the gun housing, and a gun gasket 24 is placed at the weld. The gasket is placed between the ceramic ring 21 of the gun housing and the support ring 23, which have different coefficients of expansion. When subjected to temperature shock, stress is generated at the weld due to the different expansion changes of the two. The gasket can buffer the stress, which can increase the reliability of the weld structure.

[0056] The coated support ring 23, ceramic, and gasket are arranged according to... Figure 3 After assembly at the indicated positions, place solder at the welding locations, place the assembly on the welding fixture, and proceed with a single welding operation in the hydrogen furnace. Upon completion of welding, a vacuum-tight integral structure is formed. The final structural diagram is shown below. Figure 3 As shown.

[0057] In this invention, the support ring 23 is nickel-plated to increase the wettability of the solder when the support ring 23 is welded to the ceramic ring 21 of the gun shell, so that the weld is completely filled with solder, thereby improving the quality of ceramic and electrode welding.

[0058] In this invention, the ceramic ring 21 of the gun shell has a multi-segment structure, consisting of a first ceramic ring 211, a second ceramic ring 212, a third ceramic ring 213, and a fourth ceramic ring 214 from top to bottom. A second support ring 232 is provided between the first ceramic ring 211 and the second ceramic ring 212, a first support ring 231 is provided between the second ceramic ring 212 and the third ceramic ring 213, and a gun shell cup 22 is provided between the third ceramic ring 213 and the fourth ceramic ring 214. This design facilitates the assembly and production of the ceramic electronic gun shell 2-1, and also facilitates the bridging between the ceramic electronic gun shell 2-1 and adjacent components.

[0059] Furthermore, in this invention, the bottom cover 31 and the connecting cylinder 32 are required to be arranged according to... Figure 4 After assembly at the indicated positions, place solder at the welding locations, place the assembly on the welding fixture, and proceed with a single welding operation in the hydrogen furnace. Upon completion of welding, a vacuum-tight integral structure is formed. The final structural diagram is shown below. Figure 4 As shown.

[0060] During actual welding, it is required to ensure the concentricity of the movable electrode 41 with the flange assembly 1, the ceramic electron gun housing 2-1 and the bottom cover assembly 3, and to ensure that the distance between the lower end of the electrode support rod 42 and the lower end of the connecting cylinder 32 in the bottom cover assembly 3 is within the range of 30-33mm; at the same time, when welding the first connecting plate 13 of the flange assembly 1 and the first pipe 12, since the thickness of the first pipe 12 is 1mm, low-power welding is used.

[0061] The flange assembly 1, ceramic electron gun housing 2-1, and bottom cover assembly 3 are argon arc welded in a vacuum environment, and the weld is a vacuum airtight weld.

[0062] In addition, the second support ring 232, the first support ring 231, and the gun shell cup component 22 in the ceramic electronic gun shell 2-1 are nickel-plated to increase the wettability of the solder when the device is welded to the ceramic ring, so that the weld is completely filled with solder, thereby improving the quality of ceramic and electrode welding.

[0063] The welding of each part in flange assembly 1 is carried out using argon arc welding, and the weld is a vacuum-tight weld.

[0064] The welding of each component in the ceramic electronic gun housing 2-1 is required to be brazed in a hydrogen furnace, and the weld is a vacuum-tight weld.

[0065] The bottom cover assembly 3 includes a bottom cover 31, a connecting cylinder 32, and a solder 34; it is brazed in a hydrogen furnace, and the weld is a vacuum-tight weld.

[0066] During argon arc welding, the electrode support rod 42 is ensured to be concentric with the flange assembly 1, the ceramic electron gun housing 2-1, and the movable electrode 41.

[0067] Compared with existing technologies, this invention ensures the normal functioning of the arc plasma torch while guaranteeing a vacuum-tight weld to prevent air leakage at the 42 thread of the electrode support rod. It not only ensures the formation of arc plasma but also significantly improves the accuracy and precision of arc plasma testing.

[0068] Obviously, the specific implementation of this invention is not limited to the above-described manner. Any non-substantial improvements made using the inventive concept and technical solution of this invention are within the protection scope of this invention.

Claims

1. A hermetically sealed electrode structure for arc plasma, characterized in that, Includes flange assembly, bottom cover assembly, and electrode assembly; The flange assembly is connected to the bottom cover assembly via a bridging assembly, and the electrode assembly is connected to the bottom cover assembly; The electrode assembly includes a movable electrode, which is connected to an electrode support rod; the electrode support rod is disposed through the bottom cover assembly. The flange assembly includes a first base; the first base is connected to the bottom cover assembly via a bridging assembly; The bottom cover assembly includes a bottom cover; the bottom cover and the first base are distributed at intervals relative to each other; The bridging assembly includes a ceramic electron gun housing; The first base is connected to the bottom cover via a ceramic electron gun shell; The first base is connected to the bridging component via a connecting mechanism; the connecting mechanism includes a first pipe disposed on the first base, the first pipe being perpendicular to the first base; the first pipe is connected to the bridging component via a first connecting plate; A second pipe is provided on the first pipe, and a water nozzle is provided at the end of the second pipe away from the first pipe; When processing the flange assembly, firstly weld the second pipe and the water nozzle together; secondly, weld the second pipe to the first pipe together, ensuring that the second pipe hits the step of the first pipe during welding; thirdly, weld the first base to the first pipe, ensuring that the water nozzle is between the two threaded holes of the first base during welding; and finally, weld the first connecting plate to the first pipe. The ceramic electronic gun casing includes a gun casing ceramic ring; the gun casing ceramic ring is provided with a gun casing cup component; the gun casing cup component is inverted and attached to the bottom cover; The bottom cover assembly also includes a connecting cylinder disposed on the bottom cover, through which the electrode support rod passes; the bottom cover has a bottom cover through hole, and the connecting cylinder is disposed inside the bottom cover through hole; the connecting cylinder has a limiting ring rib; the limiting ring rib on the connecting cylinder fits against the bottom cover, and the connecting cylinder passes through the bottom cover; the limiting ring rib fits against the outer side of the bottom cover, and the connecting cylinder is connected to the inner side of the bottom cover by welding.

2. The hermetically sealed electrode structure for arc plasma according to claim 1, characterized in that, The first connecting plate in the flange assembly is connected to the bottom cover in the bottom cover assembly via a ceramic electron gun housing.

3. The hermetically sealed electrode structure for arc plasma according to claim 1, characterized in that, The ceramic ring of the gun casing is also provided with a support ring; the support ring includes a first support ring and a second support ring, which are distributed at intervals.

4. The hermetically sealed electrode structure for arc plasma according to claim 3, characterized in that, A gun gasket is provided between the support ring and the gun shell cup component and the gun shell ceramic ring; the support ring and the gun shell cup component are connected to the gun shell ceramic ring by a solder sheet.

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