Micromirror polarization motion control method and device, calibration equipment and readable storage medium

Abstract

The embodiment of the application discloses a kind of micro mirror polarization motion control method, device, calibration equipment and readable storage medium, comprising: micro mirror is according to first amplitude and first driving frequency and carries out polarization motion;Real-time polarization motion trajectory signal of the micro mirror is obtained by photoelectric detection device;Real-time polarization motion trajectory signal is analyzed, and target driving frequency is determined, amplitude adjustment is carried out under the target driving frequency, and target amplitude is determined;The micro mirror is according to the target driving frequency and the target amplitude and carries out resonant motion.The application can quickly measure the resonant frequency of micro mirror, and automatically determine the resonant frequency and resonant amplitude of each micro mirror, avoid the process of needing to test and debug each micro mirror individually in the process of production, so as to greatly shorten the test and debug time of micro mirror product, improve work efficiency.

Description

Technical Field

[0001] This invention relates to the field of instrument control technology, and in particular to a micromirror polarization motion control method, device, calibration equipment, and readable storage medium. Background Technology

[0002] Micromirrors operate at their resonant frequency, enabling MEMS micromirrors to function at maximum vibration amplitude with minimal drive power. However, because the resonant frequency provided by micromirror manufacturers is a range, it's impossible to produce a batch of products with identical resonant frequencies; errors exist between different products. When users require large-scale applications of micromirrors, they must test the resonant frequency of each micromirror and update the data in the control system—a highly cumbersome process that significantly impacts work progress.

[0003] Therefore, there is an urgent need for an electromagnetically driven micromirror polarization motion control scheme that can automatically adjust the micromirror resonant frequency. Summary of the Invention

[0004] To address the aforementioned technical problems, this application provides a micromirror polarization motion control method, apparatus, calibration device, and readable storage medium, as detailed below:

[0005] In a first aspect, embodiments of this application provide a method for controlling the polarization motion of a micromirror, the method comprising:

[0006] The micromirror performs polarization motion based on a first amplitude and a first driving frequency, where the first amplitude is a preset value and the first driving frequency is a preset value.

[0007] The real-time polarization motion trajectory signal of the micromirror over P polarization cycles is obtained by a photoelectric detection device, where P is a positive integer;

[0008] Analyzing the real-time polarization motion trajectory signal for P polarization periods yields N second driving frequencies and the corresponding second amplitude for each second driving frequency, where N is a positive integer and N <P;

[0009] The second amplitude is iterated through, and the second driving frequency with the largest second amplitude is determined as the target driving frequency. The micromirror adjusts the amplitude at the target driving frequency to determine the target amplitude.

[0010] The micromirror resonates according to the target driving frequency and the target amplitude.

[0011] According to a specific embodiment of this application, the step of "analyzing the real-time polarization motion trajectory signal of P polarization periods to obtain N second driving frequencies and a second amplitude corresponding to each second driving frequency" includes:

[0012] Based on the real-time polarization motion trajectory signal, the real-time driving frequency and the corresponding first real-time amplitude are obtained.

[0013] The real-time driving frequency is adjusted based on a preset incremental calculation model until the real-time driving frequency equals a preset frequency threshold.

[0014] If the difference between the real-time driving frequencies within M consecutive polarization cycles meets a preset range, then the real-time driving frequency is determined as the second driving frequency, and the average value of the first real-time amplitude corresponding to the second driving frequency is determined as the second amplitude, where M is a positive integer and M≤P.

[0015] According to a specific embodiment of this application, the calculation formula of the preset incremental calculation model is as follows:

[0016] Δu(k)=(k)-(k-1)

[0017] = p (e(k)-(k-1))+K i e(k)

[0018] + d (e(k)-2e(k-1)-(k-2))

[0019] Where Δu(k) is the increment, u(k) is the drive control signal within the current micromirror polarization cycle, u(k-1) is the drive control signal of the previous micromirror polarization cycle, e(k) is the error of the current micromirror polarization cycle, e(k-1) is the error of the previous micromirror polarization cycle, e(k-2) is the error of the previous two micromirror polarization cycles, and K p For proportionality coefficient, K i K is the integral coefficient. d is the differential coefficient.

[0020] According to a specific embodiment of this application, the "acquiring the real-time polarization motion trajectory signal of the micromirror over P polarization cycles via a photodetector device" includes the following:

[0021] Two photoelectric induced currents are obtained based on the photoelectric detection device;

[0022] The polarization angle of the micromirror is obtained based on two photoelectric sensing currents.

[0023] The real-time polarization motion trajectory signal is obtained based on the continuous change of polarization angle.

[0024] According to a specific embodiment of this application, the "obtaining the polarization angle of the micromirror based on two photoelectric sensing currents" includes:

[0025]

[0026]

[0027] Where L is the length from the center point to the edge of the photodetector, I2 is the current output when the light spot hits one side of the photodetector, I1 is the current output when the light spot hits the other side of the photodetector, x is the distance from the center point of the photodetector to the position where the light spot hits the photodetector, r is the perpendicular distance between the lens and the photodetector, and β is the polarization angle.

[0028] According to a specific embodiment of this application, the step of "the micromirror adjusting its amplitude at the target driving frequency to determine the target amplitude" includes:

[0029] The micromirror is polarized based on the target driving frequency to obtain the corresponding second real-time amplitude.

[0030] The second real-time amplitude is adjusted based on a preset incremental calculation model until the second real-time amplitude equals the preset amplitude threshold.

[0031] According to a specific embodiment of this application, the step of "the micromirror adjusting its amplitude at the target driving frequency to determine the target amplitude" further includes:

[0032] The position of the micromirror in a static state is defined as the 0-degree position;

[0033] The motion data of the micromirror resonant motion based on the target driving frequency and the target amplitude are collected.

[0034] Determine whether the median value of the motion data corresponds to the 0-degree position;

[0035] If they do not correspond, adjust the driving signal that drives the micromirror to resonate so that the midpoint of the motion data corresponds to the 0-degree position.

[0036] Secondly, embodiments of this application provide a micromirror polarization motion control device, the device comprising:

[0037] The first driving module is used to perform polarization motion from the micromirror according to a first amplitude and a first driving frequency, wherein the first amplitude is a preset value and the first driving frequency is a preset value;

[0038] The photoelectric detection module is used to acquire the real-time polarization motion trajectory signal of the micromirror over P polarization cycles through a photoelectric detection device, where P is a positive integer;

[0039] The attitude analysis module is used to analyze the real-time polarization motion trajectory signal for P polarization periods to obtain N second driving frequencies and the second amplitude corresponding to each second driving frequency, where N is a positive integer and N <P;

[0040] The calibration module is used to traverse all second amplitude values ​​and determine the second driving frequency corresponding to the largest second amplitude value as the target driving frequency. The micromirror adjusts the amplitude at the target driving frequency to determine the target amplitude.

[0041] The second driving module is used for the micromirror to resonate according to the target driving frequency and the target amplitude.

[0042] Thirdly, embodiments of this application provide a calibration device, which includes a processor and a memory. The memory stores a computer program, and the computer program executes the micromirror polarization motion control method described in the first aspect and any embodiment of the first aspect when it is run on the processor.

[0043] Fourthly, embodiments of this application provide a computer-readable storage medium storing a computer program, which, when run on a processor, executes the micromirror polarization motion control method described in the first aspect and any embodiment of the first aspect.

[0044] This application provides a micromirror polarization motion control method, device, calibration equipment, and readable storage medium, comprising: a micromirror performing polarization motion according to a first amplitude and a first driving frequency; acquiring a real-time polarization motion trajectory signal of the micromirror through a photodetector; analyzing the real-time polarization motion trajectory signal and determining a target driving frequency, adjusting the amplitude at the target driving frequency, and determining a target amplitude; and the micromirror performing resonant motion according to the target driving frequency and the target amplitude.

[0045] This invention can quickly measure the resonant frequency of a micromirror and automatically determine the resonant frequency and amplitude of each micromirror, avoiding the need to test and debug each micromirror individually during the manufacturing process. This significantly shortens the testing and debugging time for micromirror products and improves work efficiency. Attached Figure Description

[0046] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope of protection of the present invention. In the various drawings, similar components are numbered similarly.

[0047] Figure 1This paper shows a schematic flowchart of a micromirror polarization motion control method provided in an embodiment of this application.

[0048] Figure 2 This paper shows a schematic diagram of the system modules of a micromirror polarization motion control system provided in an embodiment of this application;

[0049] Figure 3 This paper shows a schematic diagram of the structure of a direct digital frequency synthesizer for a micromirror polarization motion control system provided in an embodiment of this application;

[0050] Figure 4 A schematic diagram of a micromirror polarization motion control device provided in an embodiment of this application is shown. Detailed Implementation

[0051] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0052] The components of the embodiments of the invention described and illustrated herein can typically be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0053] In the following, the terms “comprising,” “having,” and their cognates, which may be used in various embodiments of the invention, are intended only to indicate a particular feature, number, step, operation, element, component, or combination thereof, and should not be construed as excluding, firstly, the presence of one or more other features, numbers, steps, operations, elements, components, or combinations thereof, or adding the possibility of one or more features, numbers, steps, operations, elements, components, or combinations thereof.

[0054] Furthermore, the terms "first," "second," and "third" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0055] Unless otherwise specified, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which the various embodiments of the invention pertain. Terms (such as those defined in commonly used dictionaries) shall be interpreted as having the same meaning as in their contextual meaning in the relevant technical field and shall not be interpreted as having an idealized or overly formal meaning, unless clearly defined in the various embodiments of the invention.

[0056] Microelectromechanical systems (MEMS) are micro-electromechanical systems with dimensions below the centimeter level. From an integration perspective, MEMS are micro-systems or devices that integrate microstructures, micro-sensors, and signal processing and control circuits.

[0057] MEMS micromirrors refer to the overall structure of microelectromechanical devices and micro-optical devices controlled by them. They achieve the control of light beam reflection, diffraction, and other behaviors through regular high-frequency vibrations. They are characterized by high integration, small size, low power consumption, and fast response speed, and can be used for light imaging, scanning, and other applications.

[0058] MEMS micromirrors (hereinafter referred to as "micromirrors") are affected by system damping, torque changes, and external environmental changes during operation. Therefore, under the same driving power, when the driving angular frequency approaches the undamped natural angular frequency of the system, the amplitude of the micromirror will suddenly increase; when the driving angular frequency equals the undamped natural angular frequency of the system, the amplitude of the micromirror is at its maximum. This phenomenon is called resonance. The vibration frequency of the system when resonance occurs is called the resonant frequency.

[0059] Existing micromirror products suffer from manufacturing errors in their resonant frequencies, resulting in variations in the actual resonant frequency of each micromirror and making it impossible to produce a batch of products with identical resonant frequencies. Therefore, manufacturers can only provide a resonant frequency range for a given batch of micromirrors. To ensure a micromirror is in a resonant state, manual testing is required to determine the resonant frequency within this range. Thus, with current technology, ensuring that all micromirrors in a batch are in a resonant state necessitates testing each micromirror individually, significantly extending the production cycle and hindering rapid improvements in production efficiency.

[0060] The polarization motion control method provided in this embodiment is a control method that can adaptively adjust the resonant frequency of an electromagnetically driven micromirror. The method provided in this embodiment can automatically determine the resonant frequency and resonant amplitude of each micromirror, thereby avoiding the process of testing and debugging each micromirror, greatly shortening the overall testing and debugging time, and improving work efficiency.

[0061] refer to Figure 1 This is a schematic flowchart of a micromirror polarization motion control method provided in an embodiment of this application. The polarization motion control method provided in this embodiment of the application, such as... Figure 1 As shown, the method includes:

[0062] Step S101: The micromirror performs polarization motion according to the first amplitude and the first driving frequency, where the first amplitude is a preset value and the first driving frequency is a preset value.

[0063] Specifically, the polarization motion method provided in this embodiment can be applied to a polarization motion controller, which is used to control an electromagnetically driven micromirror, wherein a photodetector is provided at the backlight end of the mirror surface of the electromagnetically driven micromirror.

[0064] Specifically, the polarization motion controller and the photodetector can be integrated into a polarization motion control system, and the polarization motion control system is configured on the calibration device proposed in this embodiment.

[0065] The electromagnetically driven micromirror includes specific structures such as a drive coil and a micromirror. This embodiment does not limit the structure of the electromagnetically driven micromirror, and a suitable micromirror can be selected according to the actual application scenario.

[0066] Specifically, the polarization motion controller can be a field-programmable gate array (FPGA) controller, such as... Figure 2 As shown, the FPGA controller may include a frequency adjustment module, a drive signal generator, an incremental self-calibration control module, a signal spectrum analysis module, a signal amplitude analysis module, and an angle position calculation module.

[0067] The driving signal generator can be a direct digital synthesizer (DDS).

[0068] In a specific implementation, a first amplitude value and a first frequency control word are written from an external memory to the frequency adjustment module, and the frequency adjustment module generates a corresponding first driving frequency based on the first frequency control word.

[0069] The frequency adjustment module sends the first amplitude and the first driving frequency to the incremental self-calibration control module. After the incremental self-calibration control module calibrates the first amplitude and the first driving frequency according to the preset incremental calculation model, it writes the first amplitude and the first driving frequency into the DDS so that the DDS can perform integrated calculation to generate the first driving signal.

[0070] Specifically, the first amplitude and the first driving frequency are the initial amplitude and initial driving frequency set in advance by the user when starting the electromagnetically driven micromirror. The first amplitude can be set to the ideal driving amplitude required by the user, and the first driving frequency can be set to the minimum value of the resonant frequency range of the electromagnetically driven micromirror product.

[0071] The specific values ​​of the first amplitude and the first driving frequency are determined according to the product characteristics of the electromagnetically driven micromirror, and this embodiment does not limit them.

[0072] like Figure 2 As shown, the first driving signal is a continuous digital signal generated by the driving signal generator according to the first amplitude and the first driving frequency.

[0073] The first driving signal converts the continuous digital signal into a continuous analog signal through a digital-to-analog converter circuit, and then increases the power of the analog signal through a power amplifier circuit so that the analog signal meets the requirements for driving an electromagnetically driven micromirror.

[0074] The amplified continuous analog signal is input to the drive coil of the electromagnetically driven micromirror, which generates a continuously and uniformly changing magnetic field. The magnetic field characteristics drive the micromirror to perform continuous and uniform vertical polarization motion.

[0075] Step S102: Obtain the real-time polarization motion trajectory signal of the micromirror over P polarization cycles using a photodetector device, where P is a positive integer;

[0076] Specifically, after the electromagnetically driven micromirror begins to polarize, the light signal reflected by the micromirror is collected by a photodetector device disposed on the back surface of the electromagnetically driven micromirror.

[0077] The photoelectric detector (Position Sensitive Detector, or PSD) can be a spot position sensor used to convert the light signal reflected by the micromirror into two electrical signals.

[0078] Specifically, such as Figure 2 As shown, the light spot position sensor converts the light signal into an electrical signal, amplifies the electrical signal through a preamplifier circuit, and then converts the electrical signal into a digital signal through an analog-to-digital converter circuit for transmission to the polarization motion controller for polarization motion trajectory analysis.

[0079] The real-time polarization motion trajectory signal includes a first electrical signal and a second electrical signal.

[0080] In the specific implementation process, at least the real-time polarization motion trajectory signal of the micromirror in P polarization cycles is acquired. The number of P can be adaptively set according to the actual application scenario. This embodiment does not make a specific limitation on this.

[0081] According to a specific embodiment of this application, the "acquiring the real-time polarization motion trajectory signal of the micromirror over P polarization cycles via a photodetector device" includes the following:

[0082] Two photoelectric induced currents are obtained based on the photoelectric detection device;

[0083] The polarization angle of the micromirror is obtained based on two photoelectric sensing currents.

[0084] The real-time polarization motion trajectory signal is obtained based on the continuous change of polarization angle.

[0085] In a specific embodiment, the angle position calculation module calculates the polarization angle of the electromagnetically driven micromirror based on the working principle of the PSD and by combining the current values ​​of the first and second electrical signals. The specific calculation formula is as follows:

[0086]

[0087]

[0088] In this system, the lens of the electromagnetically driven micromirror is placed vertically above the center point of the PSD. R1 and R2 are the resistance values ​​at both ends of the spot position on the PSD. The resistance values ​​at both ends are proportional to the length from the point where the spot hits the PSD to the two ends of the PSD. x is the distance from the spot position on the PSD to the center point of the PSD. L is the length from the center point of the PSD to the edge. The length of the PSD is 2L. I2 is the current output on one side of the spot hitting the PSD. I1 is the current output on the other side of the spot hitting the PSD. The vertical distance between the lens and the PSD is fixed at r. β is the polarization angle.

[0089] Step S103: Analyze the real-time polarization motion trajectory signal for P polarization periods to obtain N second driving frequencies and the second amplitude corresponding to each second driving frequency, where N is a positive integer and N <P;

[0090] In a specific embodiment, the polarization motion controller performs attitude analysis on the lens of the electromagnetically driven micromirror based on the first electrical signal and the second electrical signal to obtain the angle transformation trajectory of the micromirror, thereby calculating the corresponding second driving frequency and second amplitude based on the continuously changing angle values ​​in the angle transformation trajectory.

[0091] Specifically, the second driving frequency and the second amplitude corresponding to each second driving frequency need to be calculated from real-time polarization motion trajectory signals of at least two polarization cycles.

[0092] According to a specific embodiment of this application, the step of "analyzing the real-time polarization motion trajectory signal of P polarization periods to obtain N second driving frequencies and a second amplitude corresponding to each second driving frequency" includes:

[0093] Obtaining a real-time driving frequency and a corresponding first real-time amplitude based on a real-time polarization motion trajectory signal;

[0094] Adjusting the real-time driving frequency based on a preset incremental calculation model until the real-time driving frequency is equal to a preset frequency threshold;

[0095] If the difference between real-time driving frequencies in consecutive M polarization periods meets a preset range, determining the real-time driving frequency as a second driving frequency, and determining the average value of the first real-time amplitudes corresponding to the second driving frequency as a second amplitude, wherein M is a positive integer and M≤P.

[0096] Specifically, after calculating polarization angle data of P polarization periods, the signal spectrum analysis module receives continuously changing polarization angle data, and uses an internally packaged FFT (Fast Fourier Transform) IP core to calculate a corresponding angle change frequency according to the continuously changing polarization angle data, wherein the angle change frequency is the real-time driving frequency.

[0097] The signal amplitude analysis module receives continuously changing polarization angle data, performs polling comparison on the parsed polarization angle data, determines a maximum polarization angle and a minimum polarization angle within a fixed time period, calculates a difference between the maximum polarization angle and the minimum polarization angle to obtain a peak-to-peak value, which is the first real-time amplitude.

[0098] In an actual application process, if the current polling comparison method is polling comparison in a fixed window mode, that is, in two comparison processes, when consecutive polarization periods participating in the comparison do not overlap, M*N≤P. An example is given below for description. A real-time polarization motion trajectory signal of 20 polarization periods is analyzed, assuming the sequence is M1 to M 20 , with a fixed window mode adopted and a window length of 5, there are a total of 4 groups, which are M1 to M5; M6 to M 10 ; M 11 to M 15 ; M 16 to M 20 ; if a difference of real-time driving frequencies within 5 polarization periods in one group meets the preset range, one second driving frequency is obtained, and a maximum of 4 second driving frequencies can be generated from 20 real-time polarization motion trajectory signals.

[0099] If the current polling comparison method is polling comparison in a sliding window mode, that is, in two comparison processes, when consecutive polarization periods participating in the comparison can overlap, M<P and N<P. An example is given below for description. A real-time polarization motion trajectory signal of 20 polarization periods is analyzed, assuming the sequence is M1 to M 20Using a sliding window model, with a window length of 5 and a sliding length of 2, there are a total of 16 groups, namely M1~M5; M3~M7; ...; M 15 ~M 19 M 16 ~M 20 If the real-time driving frequency difference within 5 polarization cycles in a group meets the preset range, a second driving frequency is obtained. A maximum of 16 second driving frequencies can be generated from 20 real-time polarization motion trajectory signals.

[0100] This embodiment does not specifically limit the polling comparison method, and can be adaptively selected according to the actual application scenario.

[0101] After acquiring the real-time drive frequency and the first real-time amplitude, the incremental self-calibration control module begins to incrementally adjust the first real-time amplitude and the real-time drive frequency according to a preset incremental calculation model.

[0102] The increment of the real-time drive frequency is calculated by a preset incremental calculation model. Specifically, the size of the DDS frequency control word is adjusted in real time according to the difference between the detected real-time drive frequency and the preset frequency threshold set in the frequency adjustment module, so as to ensure that the real-time frequency is stably maintained at the preset frequency threshold.

[0103] When the difference between the real-time driving frequencies in the incremental self-calibration control module is detected to be 0 within M consecutive polarization cycles, the frequency adjustment module saves the current real-time driving frequency and the average amplitude corresponding to the current real-time driving frequency. The current real-time driving frequency is the second driving frequency, and the corresponding average amplitude is the second amplitude corresponding to the second driving frequency.

[0104] In the specific implementation process, each time the second driving frequency and the second amplitude are saved, the incremental self-calibration control module increases the preset frequency threshold according to the increment calculated by the preset incremental calculation model, so as to continue to increase the real-time driving frequency until the real-time frequency reaches the maximum value of the resonant frequency range of the electromagnetically driven micromirror product.

[0105] According to a specific embodiment of this application, the polarization motion controller is used to communicate with an external memory, and the external memory is used to store the first driving frequency, the first amplitude, the real-time driving frequency, the first real-time amplitude, the second driving frequency, and the second amplitude.

[0106] In a specific embodiment, each time the frequency adjustment module generates a second driving frequency and a second amplitude, it stores the second driving frequency and the second amplitude in the external memory.

[0107] The external memory can be any type of memory, and this embodiment does not limit it.

[0108] Step S104: Traverse the second amplitude, determine the second driving frequency with the largest second amplitude as the target driving frequency, control the micromirror to adjust the amplitude at the target driving frequency, and determine the target amplitude;

[0109] In a specific embodiment, the frequency adjustment module determines the target driving frequency with the largest second amplitude based on all the second driving frequencies and second amplitudes stored in the external memory, so as to serve as the resonant frequency of the electromagnetically driven micromirror.

[0110] And when using the target driving frequency as the DDS frequency control word, the second real-time amplitude is incrementally adjusted to obtain the extreme value of the second real-time amplitude, and the extreme value of the second real-time amplitude is taken as the target amplitude.

[0111] This embodiment, by determining the target driving frequency and target amplitude, can automatically adjust the resonant frequency and resonant amplitude of the electromagnetically driven micromirror, and achieves this quickly with strong anti-interference capability.

[0112] In practice, the frequency adjustment module determines the target driving frequency of the electromagnetically driven micromirror by polling the external memory.

[0113] According to a specific embodiment of this application, the step of "controlling the micromirror to perform amplitude adjustment at the target driving frequency and determining the target amplitude" includes:

[0114] The micromirror is controlled to polarize based on the target driving frequency to obtain the corresponding second real-time amplitude.

[0115] The second real-time amplitude is adjusted based on a preset incremental calculation model until the second real-time amplitude equals the preset amplitude threshold.

[0116] In the specific implementation process, when it is detected that the current output frequency of the frequency adjustment module is the target driving frequency and the output is stable and error-free, the adjustment step of the second real-time amplitude is started.

[0117] Specifically, such as Figure 3 As shown, the specific structure of the DDS also includes a frequency register, a DDS phase accumulator, a DDS waveform data table module, an amplitude adjustment module, a difference register, and an amplitude register.

[0118] The DDS waveform data table module generates a corresponding intermediate drive signal based on the target drive frequency, and calculates the increment of the second real-time amplitude for each time based on the preset incremental calculation model. It performs multiple incremental adjustments to the second real-time amplitude to finally obtain the target amplitude that meets the actual application requirements.

[0119] Specifically, the target amplitude can be the maximum value within a preset amplitude allowable range.

[0120] Specifically, the difference between the positive and negative values ​​of the preset amplitude threshold is 0.

[0121] According to a specific embodiment of this application, the calculation formula of the preset incremental calculation model is as follows:

[0122] Δu(k)=(k)-(k-1)

[0123] = p (e(k)-(k-1))+K i e(k)

[0124] + d (e(k)-2e(k-1)-(k-2))

[0125] Where Δu(k) is the increment, u(k) is the drive control signal within the current micromirror polarization cycle, u(k-1) is the drive control signal of the previous micromirror polarization cycle, e(k) is the error of the current micromirror polarization cycle, e(k-1) is the error of the previous micromirror polarization cycle, e(k-2) is the error of the previous two micromirror polarization cycles, and K p For proportionality coefficient, K i K is the integral coefficient. d is the differential coefficient.

[0126] Step S105: Control the micromirror to resonate according to the target driving frequency and the target amplitude.

[0127] According to a specific embodiment of this application, the "micromirror resonating according to the target driving frequency and the target amplitude" further includes:

[0128] The position of the micromirror in a static state is defined as the 0-degree position;

[0129] The motion data of the micromirror resonant motion based on the target driving frequency and the target amplitude are collected.

[0130] Determine whether the median value of the motion data corresponds to the 0-degree position;

[0131] If they do not correspond, adjust the target amplitude so that the median value of the motion data corresponds to the 0-degree position.

[0132] In a specific embodiment, the position when the micromirror does not vibrate is taken as the 0-degree position. The difference between the positive and negative amplitude values ​​is calculated to determine whether the micromirror is in a state of asymmetrical vibration angle. If the difference between the positive and negative amplitude values ​​of the target amplitude is not equal to 0, it indicates that the micromirror is in a state of asymmetrical vibration angle. At this time, the zero-point position offset of the DDS drive signal can be adjusted according to the magnitude of the difference between the positive and negative amplitude values ​​of the target amplitude to make the vertical vibration angle of the micromirror's polarization motion symmetrical.

[0133] In a specific embodiment, such as Figure 3 As shown, the amplitude control signal, frequency control signal, and positive and negative amplitude difference signal calibrated by the incremental self-calibration module are respectively entered into the register buffer of the DDS module. The output signal of the frequency register enters the DDS phase accumulator. After accumulation, a phase code is generated and read from the DDS waveform data table to generate a primary waveform signal. The amplitude adjustment module adjusts the amplitude and symmetry of the primary waveform signal according to the amplitude control word and the magnitude of the positive and negative amplitude difference to generate the output waveform signal.

[0134] The polarization motion control method proposed in this embodiment automatically determines and adjusts the resonant frequency and amplitude of electromagnetically driven micromirrors by setting up an incremental self-calibration module. During the manufacturing process, no manual assistance is required; the resonant frequency and amplitude of each electromagnetically driven micromirror are automatically determined, effectively improving production efficiency. Furthermore, this polarization motion control method can automatically adjust the resonant frequency and amplitude of each electromagnetically driven micromirror to the maximum value within the allowable range. This allows users to control the electromagnetically driven micromirrors according to their standard resonant frequency and amplitude without further resonance testing, effectively improving the utilization efficiency of the electromagnetically driven micromirrors.

[0135] Furthermore, the polarization motion control method proposed in this embodiment can ensure the symmetry of the lens polarization trajectory, has a fast response speed, strong anti-interference ability, and can save energy consumption of electromagnetically driven micromirrors to the greatest extent.

[0136] refer to Figure 4 This is a schematic diagram of a polarization motion control device 400 provided in an embodiment of this application. The polarization motion control device 400 provided in this embodiment is applied to a polarization motion controller, which controls an electromagnetically driven micromirror. The backlight end of the electromagnetically driven micromirror is equipped with a photodetector, such as... Figure 4 As shown, the polarization motion control device 400 includes:

[0137] The first driving module 401 is used to control the micromirror to perform polarization motion according to the first amplitude and the first driving frequency, wherein the first amplitude is a preset value and the first driving frequency is a preset value.

[0138] The photoelectric detection module 402 is used to acquire the real-time polarization motion trajectory signal of the micromirror in P polarization cycles through a photoelectric detection device, where P is a positive integer;

[0139] Attitude analysis module 403 is used to analyze the real-time polarization motion trajectory signal of P polarization cycles to obtain N second driving frequencies and the second amplitude corresponding to each second driving frequency, where N is a positive integer and N <P;

[0140] The calibration module 404 is used to traverse all second amplitude values, determine the second driving frequency corresponding to the largest second amplitude value as the target driving frequency, control the micromirror to perform amplitude adjustment at the target driving frequency, and determine the target amplitude value.

[0141] The second driving module 405 is used to control the micromirror to resonate according to the target driving frequency and the target amplitude.

[0142] In addition, this application embodiment also provides a calibration device, which includes a processor and a memory. The memory stores a computer program, and the computer program executes the polarization motion control method in the foregoing embodiment when it is run on the processor.

[0143] This application provides a computer-readable storage medium storing a computer program that executes the polarization motion control method described in the foregoing embodiments when run on a processor.

[0144] In addition, the specific implementation process of the bias control device, calibration equipment and computer-readable storage medium mentioned in the above embodiments can be found in the specific implementation process of the above method embodiments, and will not be repeated here.

[0145] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods can also be implemented in other ways. The apparatus embodiments described above are merely illustrative; for example, the flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of apparatus, methods, and computer program products according to various embodiments of the present invention. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that, as an alternative implementation, the functions marked in the blocks may occur in a different order than those marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, and combinations of blocks in the block diagram and / or flowchart, can be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.

[0146] In addition, the functional modules or units in the various embodiments of the present invention can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0147] If the aforementioned functions are implemented as software functional modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this invention, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a smartphone, personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0148] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for controlling the polarization motion of a micromirror, characterized in that, The method includes: The micromirror performs polarization motion based on a first amplitude and a first driving frequency, where the first amplitude is a preset value and the first driving frequency is a preset value. The real-time polarization motion trajectory signal of the micromirror over P polarization cycles is obtained by a photoelectric detection device, where P is a positive integer; Analyzing the real-time polarization motion trajectory signal for P polarization periods yields N second driving frequencies and the corresponding second amplitude for each second driving frequency, where N is a positive integer and N <P; The second amplitude is iterated through, and the second driving frequency with the largest second amplitude is determined as the target driving frequency. The micromirror adjusts the amplitude at the target driving frequency to determine the target amplitude. The micromirror resonates according to the target driving frequency and the target amplitude. The analysis of the real-time polarization motion trajectory signal for P polarization periods yields N second driving frequencies and a second amplitude corresponding to each second driving frequency, including: Based on the real-time polarization motion trajectory signal, the real-time driving frequency and the corresponding first real-time amplitude are obtained; The real-time driving frequency is adjusted based on a preset incremental calculation model until the real-time driving frequency equals a preset frequency threshold. If the difference between the real-time driving frequencies within M consecutive polarization cycles meets a preset range, then the real-time driving frequency is determined as the second driving frequency, and the average value of the first real-time amplitude corresponding to the second driving frequency is determined as the second amplitude, where M is a positive integer and M≤P; The calculation formula for the preset incremental calculation model is as follows: in, For increments, This is the driving control signal within the current micromirror polarization period. This is the drive control signal for the previous micromirror polarization cycle. This represents the error in the current micromirror polarization period. This represents the error of the previous micromirror polarization period. This is the error of the first two micromirror polarization periods. For proportionality coefficient, The integral coefficient is... is the differential coefficient.

2. The method according to claim 1, characterized in that, The phrase "acquiring the real-time polarization motion trajectory signal of the micromirror over P polarization cycles using a photodetector device" includes the following: Two photoelectric induced currents are obtained based on the photoelectric detection device; The polarization angle of the micromirror is obtained based on two photoelectric sensing currents. The real-time polarization motion trajectory signal is obtained based on the continuous change of polarization angle.

3. The method according to claim 2, characterized in that, The aforementioned "obtaining the polarization angle of the micromirror based on two-channel photoelectric sensing current" includes: in, The length from the center point to the edge of the photodetector device. This refers to the current output when the light spot hits one side of the photodetector. This refers to the current output on the other side of the photodetector when the light spot hits it. The distance from the position where the light spot hits the photodetector to the center point of the photodetector is denoted as ... r The vertical distance between the lens and the photodetector. Polarization angle 。 4. The method according to any one of claims 1-3, characterized in that, The phrase "the micromirror adjusts its amplitude at the target driving frequency to determine the target amplitude" includes: The micromirror is polarized based on the target driving frequency to obtain the corresponding second real-time amplitude. The second real-time amplitude is adjusted based on a preset incremental calculation model until the second real-time amplitude equals a preset amplitude threshold, and then the second real-time amplitude is determined as the target amplitude.

5. The method according to any one of claims 1-3, characterized in that, The phrase "the micromirror resonates according to the target driving frequency and the target amplitude" further includes: The position of the micromirror in a static state is defined as the 0-degree position; The motion data of the micromirror resonant motion based on the target driving frequency and the target amplitude are collected. Determine whether the median value of the motion data corresponds to the 0-degree position; If they do not correspond, adjust the driving signal that drives the micromirror to resonate so that the midpoint of the motion data corresponds to the 0-degree position.

6. A micromirror polarization motion control device, characterized in that, The device includes: The first driving module is used for the micromirror to perform polarization motion according to the first amplitude and the first driving frequency, wherein the first amplitude is a preset value and the first driving frequency is a preset value; The photoelectric detection module is used to acquire the real-time polarization motion trajectory signal of the micromirror over P polarization cycles through a photoelectric detection device, where P is a positive integer; The attitude analysis module is used to analyze the real-time polarization motion trajectory signal of P polarization cycles to obtain N second driving frequencies and the second amplitude corresponding to each second driving frequency, where N is a positive integer and N <P; The calibration module is used to traverse all second amplitude values ​​and determine the second driving frequency corresponding to the largest second amplitude value as the target driving frequency. The micromirror adjusts the amplitude at the target driving frequency to determine the target amplitude. The second driving module is used for the micromirror to resonate according to the target driving frequency and the target amplitude. The analysis of the real-time polarization motion trajectory signal for P polarization periods yields N second driving frequencies and a second amplitude corresponding to each second driving frequency, including: Based on the real-time polarization motion trajectory signal, the real-time driving frequency and the corresponding first real-time amplitude are obtained; The real-time driving frequency is adjusted based on a preset incremental calculation model until the real-time driving frequency equals a preset frequency threshold. If the difference between the real-time driving frequencies within M consecutive polarization cycles meets a preset range, then the real-time driving frequency is determined as the second driving frequency, and the average value of the first real-time amplitude corresponding to the second driving frequency is determined as the second amplitude, where M is a positive integer and M≤P; The calculation formula for the preset incremental calculation model is as follows: in, For increments, This is the driving control signal within the current micromirror polarization period. This is the drive control signal for the previous micromirror polarization cycle. This represents the error in the current micromirror polarization period. This represents the error of the previous micromirror polarization period. This is the error of the first two micromirror polarization periods. For proportionality coefficient, The integral coefficient is... is the differential coefficient.

7. A calibration device, characterized in that, The calibration device includes a processor and a memory, the memory storing a computer program that, when executed on the processor, performs the micromirror polarization motion control method according to any one of claims 1 to 5.

8. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when run on a processor, executes the micromirror polarization motion control method according to any one of claims 1 to 5.

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