Bidirectional sealing waterway joint for vacuum

Abstract

The application provides a bidirectional sealing waterway joint for vacuum, which comprises an inflow joint, an outflow joint connected to one side of the inflow joint through a nut, an inflow side connecting pipe connected to the side of the inflow joint away from the outflow joint, and an outflow side connecting pipe connected to the side of the outflow joint away from the inflow joint; a first sealing ring is connected to the water inlet end of the inflow joint, and an inflow side one-way mechanism connected to the first sealing ring is arranged in the inflow joint; an outflow side water ring is connected to the water outlet end of the outflow joint, a sliding rod is slidably connected to the shell of the outflow side water ring, a first outflow side sealing disc is connected to the outer surface of one end of the sliding rod, and a second outflow side sealing disc is connected to the other end of the sliding rod and penetrates the outflow side water ring. The application seals the water on both sides of the waterway joint, prevents the water in the pipeline from flowing into the vacuum chamber, and solves the problem of difficult vacuum pumping in the next working cycle.

Description

Technical Field

[0001] This invention relates to the technical field of vacuum evaporation coating, specifically to a bidirectional sealed water circuit connector for vacuum applications. Background Technology

[0002] A vacuum coating machine is a device that deposits coating materials onto the surface of a workpiece under vacuum conditions using methods such as evaporation, sputtering, or electric arc.

[0003] According to patent application CN202121793547.3, a dual-water-circuit connector component for vacuum coating is described. This connector component features unique inlet and outlet hole positions on the sealing flange, and an angled design between the water head inlet and outlet holes and their opening ends. This ingenious design solves the connection between two high-flow-rate water heads and a single sealing flange, resulting in highly reliable water-air sealing during use and significant cost savings in large-scale applications. This utility model is applicable to dual-water-circuit connector components for vacuum coating, addressing the problem that existing vacuum coating systems requiring two separate flange water fittings for high-flow-rate electron guns and ion sources increase installation costs and are inconvenient to install.

[0004] Due to limitations, traditional sealing joints cannot use common valve switching methods at the joint assembly. The usual practice is to first empty the residual water in the workpiece rack pipe before disconnecting the water circuit joint assembly. If the above operation is not performed, a large amount of residual water in the pipe will flow into the vacuum chamber, directly affecting the evacuation time of the next work cycle. Summary of the Invention

[0005] This invention provides a two-way sealed water circuit connector for vacuum applications to solve the technical problems mentioned in the background section.

[0006] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows: A vacuum bidirectional sealing water circuit connector includes an inlet connector and an outlet connector connected to one side of the inlet connector by a nut. An inlet side pipe is connected to the side of the inlet connector away from the outlet connector, and an outlet side pipe is connected to the side of the outlet connector away from the inlet connector. The inlet end of the inflow connector is connected to a first sealing ring, and the inflow connector is provided with an inflow-side one-way mechanism that is connected to the first sealing ring. The outlet end of the outlet connector is connected to an outlet side water ring. A sliding rod is slidably connected to the housing of the outlet side water ring. A first outlet side sealing plate is connected to the outer surface of one end of the sliding rod. A first spring is provided between the first outlet side sealing plate and the outlet side water ring and sleeved on the outside of the sliding rod. The other end of the sliding rod passes through the outlet side water ring and is connected to a second outlet side sealing plate.

[0007] Furthermore, the inflow-side one-way mechanism includes a first mounting groove located on the side of the inflow connector near the first sealing ring, an inflow-side sealing member located within the first mounting groove and inserted inside the first sealing ring, a guide rod connected to the inflow-side sealing member, and an inflow-side water ring mounted on the outer surface of the guide rod away from the inflow-side sealing member. A second spring sleeved on the outside of the guide rod is provided between the inflow-side water ring and the inflow-side sealing member. In this invention, the inflow-side sealing member blocks the backflow of water, prevents the pump and drive motor from reversing, and maintains the normal operation of the mechanical functions in the water circuit.

[0008] Furthermore, the inflow-side sealing member includes a support ring installed inside the first mounting groove and sleeved outside the guide rod, a groove provided on the support ring near the inflow-side water ring, and an inflow-side sealing disc provided in the groove and slidably connected to the outer surface of the guide rod. One side surface of the inflow-side sealing disc abuts against the second spring. In this invention, the inflow-side sealing disc is pushed by the water flow, so that the inflow-side sealing disc slides in the opposite direction along the groove of the guide rod on the inflow-side water ring, thereby using the sliding of the inflow-side sealing disc to seal the gap between it and the inflow-side water ring.

[0009] Furthermore, the inflow connector and the inflow side pipe are connected by a first locking device. The first locking device includes a threaded sleeve that is threadedly engaged with the outer surface of the inflow connector, a convex ring disposed inside the threaded sleeve and connected to the outer surface of the inflow side pipe, and a terminating ring installed on one side surface of the threaded sleeve and abutting against the convex ring. In this invention, the first mounting groove is used to accommodate the first sealing ring and the inflow side sealing element, which are located at the water inlet end of the inflow connector. This locks the first sealing ring and the inflow side sealing element in the first mounting groove, reducing the gap between the first sealing ring and the inflow side sealing element and improving the sealing performance of the water connector.

[0010] Furthermore, the outflow connector and the outflow side pipe are connected by a second locking device. The second locking device has the same structure as the first locking device. In this invention, the outflow side water ring is locked in the outflow connector by the second locking device, which has the same structure as the first locking device.

[0011] Furthermore, a second sealing ring is embedded on the side surface of the outflow connector near the inflow connector and on the outer surface of the inflow connector near the outflow connector. In this invention, the gap between the outflow connectors is reduced by the second sealing ring, thereby improving the sealing performance of the water connector.

[0012] Furthermore, the inner ring surface of the inflow-side water ring is equipped with multiple guide vanes, which are arranged around the guide rod array. In this invention, the water flow passing through the inflow-side water ring is guided by the guide vanes arranged in a circular array, thereby guiding the water flow to flow evenly within the inflow connector.

[0013] Furthermore, the shell of the outflow side water ring is provided with multiple through holes for water to flow through.

[0014] Furthermore, a plurality of guide vanes are installed on the surface of the second outflow side sealing plate near the outflow side water ring. The guide vanes are inserted into the through hole. In this invention, the water flow through the outflow side water ring is guided by the guide vanes on the second outflow side sealing plate to flow evenly in the outflow joint.

[0015] Furthermore, a third sealing ring is fitted on the outer surface of the outflow side water ring, and the third sealing ring is installed inside the outflow connector. In this invention, by setting the third sealing ring, the gap between the third sealing ring and the outflow side water ring is reduced, thereby improving the sealing performance of the water circuit connector.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: Firstly, this invention seals the water on both sides of the water joint to prevent water from flowing into the vacuum chamber and causing difficulties in vacuuming in the next working cycle. Specifically, the liquid inside the inflow and outflow joints, in conjunction with a second spring, pushes the inflow-side sealing plate. The sliding of the inflow-side sealing plate seals the gap between itself and the inflow-side water ring, preventing liquid from flowing out. At the same time, the first spring pushes the first outflow-side sealing plate, and the second outflow-side sealing plate seals the opening of the outflow-side water ring. By setting a seal at the ends of the inflow and outflow joints that are far apart from each other, the water on both sides of the water joint is sealed, preventing water from flowing into the vacuum chamber and causing difficulties in vacuuming in the next working cycle.

[0017] Secondly, in this invention, the water flow through the inflow side water ring is guided by the guide vanes arranged in a circular array, thereby guiding the water flow to flow evenly within the inflow connector. The water flow through the outflow side water ring is guided by the guide vanes on the second outflow side sealing plate to flow evenly within the outflow connector.

[0018] The present invention will be explained in detail below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 for Figure 1 Enlarged view of the structure of area A in the middle; Figure 3 This is an exploded view of the present invention; Figure 4 This is a cross-sectional view of the inflow-side pipe of the present invention; Figure 5 This is a schematic diagram of the inflow-side sealing component of the present invention; Figure 6 This is a schematic diagram of the structure of the second outflow side sealing disc of the present invention; Figure 7 This is a schematic diagram of the outflow connector of the present invention; Figure 8 This is the right view of the present invention.

[0020] In the diagram: 10. Inflow connector; 11. First sealing ring; 12. Inflow side one-way mechanism; 121. First mounting groove; 122. Inflow side sealing element; 1221. Support ring; 1222. Groove; 1223. Inflow side sealing disc; 123. Guide rod; 124. Inflow side water ring; 125. Second spring; 126. Drain vane; 20. Outflow connector; 21. Outflow side water ring; 211. Through hole; 212. Third sealing ring; 22. Sliding rod; 23. First outflow side sealing disc; 24. Second outflow side sealing disc; 241. Guide vane; 25. First spring; 30. Inflow side connecting pipe; 40. Outflow side connecting pipe; 50. First locking device; 51. Screw sleeve; 52. Convex ring; 53. Termination ring; 60. Second locking device. Detailed Implementation

[0021] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be given below with reference to the accompanying drawings, which illustrate several embodiments of the present invention. However, the present invention can be implemented in different forms and is not limited to the embodiments described in the text. Rather, these embodiments are provided to make the disclosure of the present invention more thorough and complete.

[0022] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the specification of this invention is for the purpose of describing particular embodiments only and is not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0024] For an example, please refer to the appendix. Figure 1-8 A vacuum bidirectional sealing water circuit connector includes an inlet connector 10 and an outlet connector 20 connected to one side of the inlet connector 10 by a nut. An inlet side pipe 30 is connected to the side of the inlet connector 10 away from the outlet connector 20, and an outlet side pipe 40 is connected to the side of the outlet connector 20 away from the inlet connector 10. The inlet end of the inflow connector 10 is connected to a first sealing ring 11, and the inflow connector 10 is provided with an inflow-side one-way mechanism 12 that is connected to the first sealing ring 11. The outlet end of the outlet connector 20 is connected to an outlet side water ring 21. A sliding rod 22 is slidably connected to the housing of the outlet side water ring 21. A first outlet side sealing plate 23 is connected to the outer surface of one end of the sliding rod 22. A first spring 25 is provided between the first outlet side sealing plate 23 and the outlet side water ring 21 and sleeved on the outside of the sliding rod 22. The other end of the sliding rod 22 passes through the outlet side water ring 21 and is connected to a second outlet side sealing plate 24.

[0025] For details, please refer to the appendix. Figure 1 and 3 The inflow-side one-way mechanism 12 includes a first mounting groove 121 located on the side of the inflow connector 10 near the first sealing ring 11, an inflow-side sealing member 122 located in the groove of the first mounting groove 121 and inserted inside the first sealing ring 11, a guide rod 123 connected to the inflow-side sealing member 122, and an inflow-side water ring 124 mounted on the outer surface of the guide rod 123 away from the inflow-side sealing member 122. A second spring 125 sleeved on the outside of the guide rod 123 is provided between the inflow-side water ring 124 and the inflow-side sealing member 122. The inflow-side sealing member 122 includes a support ring 1221 installed inside the first mounting groove 121 and sleeved on the outside of the guide rod 123, a groove 1222 provided on the side of the support ring 1221 near the inflow-side water ring 124, and an inflow-side sealing disc 1223 provided in the groove 1222 and slidably connected to the outer surface of the guide rod 123. One side surface of the inflow-side sealing disc 1223 abuts against the second spring 125. It should be noted that in this embodiment, the first sealing ring 11 and the inflow-side sealing member 122 are accommodated by the first mounting groove 121. After the water flows through the inflow-side sealing member 122, it enters the outlet connector 20 through the hole on the inflow-side water ring 124, forming a water flow passage. When the water flows back, it is blocked by the inflow-side sealing member 122, thereby preventing the water from flowing back, preventing the pump and drive motor from reversing, and maintaining the normal function of the mechanical system in the water circuit. Furthermore, when the water flows through the inflow-side sealing member 122, the water flow pushes the inflow-side sealing plate 1223, causing the inflow-side sealing plate 1223 to slide along the guide rod 123 in the groove 1222 on the inflow-side water ring 124. At this time, the water flows through the gap between the inflow-side sealing plate 1223 and the inflow-side water ring 124 caused by the sliding and enters the outlet connector 20, forming a water flow passage. When the water flows back, the water flow pushes the inflow-side sealing plate 1223, causing the inflow-side sealing plate 1223 to slide in the opposite direction along the guide rod 123 in the groove 1222 on the inflow-side water ring 124, thereby using the sliding of the inflow-side sealing plate 1223 to seal the gap between it and the inflow-side water ring 124.

[0026] For details, please refer to the appendix. Figure 1 and 3 The inflow connector 10 and the inflow side pipe 30 are connected by a first locking device 50. The first locking device 50 includes a threaded sleeve 51 that is threadedly engaged with the outer surface of the inflow connector 10, a convex ring 52 disposed inside the threaded sleeve 51 and connected to the outer surface of the inflow side pipe 30, and a termination ring 53 installed on one side surface of the threaded sleeve 51 and abutting against the convex ring 52. The outflow connector 20 and the outflow side pipe 40 are connected by a second locking device 60, which has the same structure as the first locking device 50. It should be noted that, in this embodiment, the rotation of the threaded sleeve 51 on the outer surface of the inflow connector 10 drives the convex ring 52 on the threaded sleeve 51 to advance along the spiral line. The convex ring 52 pushes the termination ring 53, so that the inflow side pipe 30 connected to the termination ring 53 presses onto the inflow connector 10, completing the docking and locking between the inflow connector 10 and the inflow side pipe 30. Since the first sealing ring 11 and the inflow side sealing member 122 are accommodated by the first mounting groove 121, which is located at the water inlet end of the inflow connector 10, the first sealing ring 11 and the inflow side sealing member 122 are locked in the first mounting groove 121, reducing the gap between the first sealing ring 11 and the inflow side sealing member 122 and improving the sealing performance of the water circuit connector. Furthermore, the outflow side water ring 21 is locked inside the outflow connector 20 by a second locking device 60, which has the same structure as the first locking device 50.

[0027] For details, please refer to the appendix. Figure 1 , 2 In addition to 3, a second sealing ring 13 is embedded in both the side surface of the outflow connector 20 near the inflow connector 10 and the outer surface of the inflow connector 10 near the outflow connector 20. The inner ring surface of the inflow side water ring 124 is equipped with a plurality of drainage blades 126, and the plurality of drainage blades 126 are arranged in an array around the guide rod 123; The water ring 21 on the outflow side is provided with a plurality of through holes 211 through which water flows; The second outflow-side sealing plate 24 has a plurality of guide vanes 241 installed on the side surface near the outflow-side water ring 21, and the guide vanes 241 are inserted into the through hole 211; A third sealing ring 212 is fitted on the outer surface of the outflow side water ring 21, and the third sealing ring 212 is installed inside the outflow connector 20; It should be noted that in this embodiment, the gap between the outflow connector 20 and the outflow connector 20 is reduced by the second sealing ring 13, thereby improving the sealing performance of the water connector. Furthermore, the water flow passing through the inflow side water ring 124 is guided by the guide vanes 126 arranged in a circular array, thereby guiding the water flow to flow evenly within the inflow connector 10. Furthermore, the water flow through the outflow side water ring 21 is guided by the guide vanes 241 on the second outflow side sealing plate 24 to achieve uniform flow within the outflow connector 20; Furthermore, by setting the third sealing ring 212, the gap between the third sealing ring 212 and the outflow side water ring 21 is reduced, thereby improving the sealing performance of the water circuit joint.

[0028] The specific operation method of this invention is as follows: When water needs to flow through the water joint, the water in the corrugated pipe connected to the inflow side pipe 30 enters the inflow joint 10 through the inflow side pipe 30. After passing through the inflow side sealing member 122, the water enters the outlet joint 20 through the hole on the inflow side water ring 124, forming a water flow passage. When the water flows back, it is blocked by the inflow side sealing member 122, thereby preventing the water from flowing back, preventing the pump and drive motor from reversing, and maintaining the normal function of the mechanical system in the water circuit. Water flowing through the inlet connector 10 enters the interior of the outlet connector 20, pushing open the first outlet-side sealing plate 23. At the same time, since the first outlet-side sealing plate 23 and the second outlet-side sealing plate 24 are respectively installed at both ends of the sliding rod 22, the second outlet-side sealing plate 24 forms a gap between itself and the outlet-side water ring 21 by its translation, so that the water flows through the hole on the outlet-side water ring 21 and is discharged through the gap. Since the inflow connector 10 is connected to the inflow side pipe 30 through the screw sleeve 51 in the first locking device 50, and the outflow connector 20 is connected to the outflow side pipe 40 through the screw sleeve 51 in the second locking device 60, the disassembly of the screw sleeve 51 facilitates the disconnection between the water pipe connector and the water pipe. When the water circuit connector is disconnected from the water circuit, the liquid inside the inflow connector 10 and the outflow connector 20, in conjunction with the second spring 125, pushes the inflow-side sealing plate 1223, causing the inflow-side sealing plate 1223 to slide in the opposite direction along the guide rod 123 within the groove 1222 on the inflow-side water ring 124. This sliding action of the inflow-side sealing plate 1223 seals the gap between itself and the inflow-side water ring 124, preventing liquid from flowing out. Simultaneously, the first spring 25 pushes the first outflow-side sealing plate 23. Since the first outflow-side sealing plate 23 and the second outflow-side sealing plate 24 are respectively installed at both ends of the sliding rod 22, the second outflow-side sealing plate 24 seals the opening of the outflow-side water ring 21. By setting a seal at the ends of the inflow connector 10 and the outflow connector 20 that are far apart from each other, the water on both sides of the water circuit connector is sealed, preventing water in the pipeline from flowing into the vacuum chamber and causing difficulties in vacuuming in the next working cycle.

[0029] The present invention has been described by way of example in conjunction with the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvement made by adopting the inventive concept and technical solution of the present invention, or the direct application of the inventive concept and technical solution of the present invention to other occasions without modification, shall be within the protection scope of the present invention.

Claims

1. A bidirectional sealed water circuit connector for vacuum applications, characterized in that, Includes an inlet connector (10), an outlet connector (20) connected to one side of the inlet connector (10) by a nut, an inlet side pipe (30) connected to the side of the inlet connector (10) away from the outlet connector (20), and an outlet side pipe (40) connected to the side of the outlet connector (20) away from the inlet connector (10). The inlet end of the inlet connector (10) is connected to a first sealing ring (11), and the inlet connector (10) is provided with an inlet-side one-way mechanism (12) connected to the first sealing ring (11). The outlet end of the outlet connector (20) is connected to an outlet side water ring (21). A sliding rod (22) is slidably connected to the housing of the outlet side water ring (21). A first outlet side sealing plate (23) is connected to the outer surface of one end of the sliding rod (22). A first spring (25) is provided between the first outlet side sealing plate (23) and the outlet side water ring (21) and sleeved on the outside of the sliding rod (22). The other end of the sliding rod (22) passes through the outlet side water ring (21) and is connected to a second outlet side sealing plate (24). The inflow-side one-way mechanism (12) includes a first mounting groove (121) located on the side of the inflow connector (10) near the first sealing ring (11), an inflow-side sealing member (122) located in the groove of the first mounting groove (121) and inserted inside the first sealing ring (11), a guide rod (123) connected to the inflow-side sealing member (122), and an inflow-side water ring (124) installed on the outer surface of the guide rod (123) away from the inflow-side sealing member (122). A second spring (125) sleeved on the outside of the guide rod (123) is provided between the inflow-side water ring (124) and the inflow-side sealing member (122). The inflow-side sealing member (122) includes a support ring (1221) installed inside the first mounting groove (121) and sleeved on the outside of the guide rod (123), a groove (1222) provided on the side of the support ring (1221) near the inflow-side water ring (124), and an inflow-side sealing disc (1223) provided in the groove (1222) and slidably connected to the outer surface of the guide rod (123). One side surface of the inflow-side sealing disc (1223) abuts against the second spring (125).

2. The vacuum bidirectional sealing water circuit connector according to claim 1, characterized in that, The inflow connector (10) and the inflow side pipe (30) are connected by a first locking device (50). The first locking device (50) includes a threaded sleeve (51) that is threadedly engaged with the outer surface of the inflow connector (10), a convex ring (52) located inside the threaded sleeve (51) and connected to the outer surface of the inflow side pipe (30), and a termination ring (53) installed on one side surface of the threaded sleeve (51) and abutting against the convex ring (52).

3. A bidirectional sealed water circuit connector for vacuum applications according to claim 2, characterized in that, The outflow connector (20) is connected to the outflow side pipe (40) via a second locking device (60), which has the same structure as the first locking device (50).

4. A bidirectional sealed water circuit connector for vacuum applications according to claim 1, characterized in that, A second sealing ring (13) is embedded in the surface of the outflow connector (20) near the inflow connector (10) and the outer surface of the inflow connector (10) near the outflow connector (20).

5. A bidirectional sealed water circuit connector for vacuum applications according to claim 1, characterized in that, The inner ring surface of the inflow side water ring (124) is equipped with a plurality of drainage blades (126), and the plurality of drainage blades (126) are arranged in an array around the guide rod (123).

6. A bidirectional sealed water circuit connector for vacuum applications according to claim 1, characterized in that, The water ring (21) on the outflow side is provided with a plurality of through holes (211) for water to flow through.

7. A bidirectional sealed water circuit connector for vacuum applications according to claim 6, characterized in that, The second outflow-side sealing plate (24) has multiple guide vanes (241) installed on one side surface near the outflow-side water ring (21), and the guide vanes (241) are inserted into the through hole (211).

8. A bidirectional sealed water circuit connector for vacuum applications according to claim 1, characterized in that, The outer surface of the outflow side water ring (21) is fitted with a third sealing ring (212), which is installed inside the outflow connector (20).

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