一种应用于MEMS器件的温度补偿方法
By constructing a temperature compensation parameter table and using real-time querying, the accuracy and storage capacity issues of MEMS inertial sensors across the entire temperature range were solved, achieving efficient temperature compensation and fast querying, and improving the temperature characteristics of MEMS devices.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- CHINA ELECTRONICS TECH GRP NO 26 RES INST
- Filing Date
- 2022-11-22
- Publication Date
- 2026-07-17
AI Technical Summary
Traditional temperature compensation methods for MEMS inertial sensors suffer from low accuracy and large data storage capacity across the entire temperature range. In particular, they are not effective in compensating for non-smooth, uneven characteristic curves, and traditional methods use a single axial temperature for compensation.
A temperature compensation parameter table is constructed. The temperature of each axis of the MEMS device is collected in real time. The temperature compensation parameter index number is calculated, and the temperature compensation parameter table is queried by the index number for compensation. The corresponding temperature compensation parameter is compensated by the temperature of each axis. After being expanded by a fixed factor, it is stored in short type to reduce storage capacity.
It improves the temperature performance of MEMS devices across the entire temperature range, enables fast lookup and online temperature compensation, reduces storage capacity, and improves compensation accuracy.
Smart Images
Figure CN115962789B_ABST