Voltage source and measurement circuit and its integrated circuit test machine

Abstract

This application provides a voltage source and measurement circuit and its integrated circuit tester. The circuit includes a switching unit, a voltage source and measurement unit, and an amplification unit. The switching unit is used to control the amplification unit to receive a first voltage signal sent by the voltage source and measurement unit according to a first control signal. The amplification unit is used to amplify the first voltage signal to generate a first output voltage signal. The voltage source and measurement unit is used to compensate for the error of the first voltage signal according to the first output voltage signal. The switching unit is also used to switch the amplification unit to receive a second voltage signal transmitted externally according to a second control signal. The amplification unit is also used to amplify the second voltage signal to generate a second output voltage signal. The voltage source and measurement unit is also used to measure the second output voltage signal, thereby improving the applicability of integrated circuit testing.

Description

Technical Field

[0001] This application relates to the field of integrated circuits, and more specifically, to a voltage source and measurement circuit and an integrated circuit tester thereof. Background Technology

[0002] In the field of automated testing of integrated circuits, automated integrated circuit test machines are usually used to measure information such as voltage of the chip under test. However, when testing the chip under test, it is also necessary to provide power to the chip under test. However, the current automated integrated circuit test machines have limited applicability and can only realize the function of measuring the voltage of the chip under test, but cannot provide power to the chip under test. Summary of the Invention

[0003] The purpose of this application is to provide a voltage source and measurement circuit and its integrated circuit tester to solve the problem of low applicability of current automatic integrated circuit testers.

[0004] In a first aspect, the present invention provides a voltage source and measurement circuit, including a switching unit, a voltage source and measurement unit, and an amplification unit; the switching unit is used to control the amplification unit to receive a first voltage signal sent by the voltage source and measurement unit according to a first control signal; the amplification unit is used to amplify the first voltage signal to generate a first output voltage signal; the voltage source and measurement unit is used to compensate for errors in the first voltage signal according to the first output voltage signal; the switching unit is also used to switch the amplification unit to receive a second voltage signal transmitted externally according to a second control signal; the amplification unit is also used to amplify the second voltage signal to generate a second output voltage signal; the voltage source and measurement unit is also used to measure the second output voltage signal.

[0005] The voltage source and measurement circuit designed above allows the switching unit to control the amplification unit to receive and amplify the first voltage signal sent by the voltage source and measurement unit under a first control signal, thereby providing voltage to the outside. The switching unit can also switch the amplification unit to receive and amplify the second voltage signal transmitted from the outside under a second control signal, thereby providing voltage to the outside. The second output voltage signal is then transmitted to the voltage source and measurement unit to measure the second voltage signal. In other words, this application provides a voltage source and measurement circuit structure that can be switched according to the situation, improving the applicability of integrated circuit testing.

[0006] In an optional embodiment of the first aspect, the voltage source and measurement unit includes a DPS power supply subunit and a voltage conversion subunit; the DPS power supply subunit is used to send a third voltage signal to the voltage conversion subunit; the voltage conversion subunit is used to convert the third voltage signal into a first voltage signal, wherein the first voltage signal is a microvolt voltage signal.

[0007] The voltage source and measurement circuit designed above can convert the third voltage signal transmitted by the DPS power supply subunit into a first voltage signal at the microvolt level, thereby achieving a voltage output at the microvolt level. Furthermore, by adjusting the amplification factor of the amplification unit, the second voltage signal at the microvolt level can be amplified to the millivolt level or above, enabling the DPS power supply subunit to measure the second output voltage signal and achieve voltage measurement at the microvolt level. This, in turn, improves the power supply accuracy and measurement accuracy of integrated circuit automatic testing.

[0008] In an optional embodiment of the first aspect, the voltage output terminal of the DPS power supply subunit is electrically connected to the input terminal of the voltage conversion subunit, the output terminal of the voltage conversion subunit is electrically connected to the input terminal of the switching unit, the output terminal of the switching unit is electrically connected to the input terminal of the amplification unit, and the output terminal of the amplification unit is electrically connected to the detection terminal of the DPS power supply subunit.

[0009] In an optional embodiment of the first aspect, the switching unit includes a first controllable switch, which is disposed between the output terminal of the voltage conversion subunit and the input terminal of the amplification unit; the first controllable switch is used to control the output terminal of the voltage conversion subunit and the input terminal of the amplification unit to be connected according to a first control signal, so as to control the amplification unit to receive a first voltage signal; the first controllable switch is also used to switch the amplification unit to receive an external second voltage signal according to a second control signal.

[0010] In an optional embodiment of the first aspect, the voltage conversion subunit includes a first amplifier, a second amplifier, a first resistor, and a second resistor. The first terminal of the first resistor is electrically connected to the voltage output terminal of the DPS power supply subunit. The second terminal of the first resistor is connected to the second resistor and then grounded. The first pin of the first amplifier is grounded. The second and third pins of the first amplifier are left floating. The fourth pin of the first amplifier is electrically connected to the second terminal of the first resistor. The fifth pin of the first amplifier is used to receive a negative voltage signal. The sixth pin of the first amplifier is electrically connected to the output terminal of the second amplifier. The seventh pin of the first amplifier is electrically connected to the first input terminal of the amplification unit through a first controllable switch. The eighth pin of the first amplifier is used to receive a positive voltage signal. The non-inverting input terminal of the second amplifier is electrically connected to the second input terminal of the amplification unit or grounded. The inverting input terminal of the second amplifier is electrically connected to the output terminal of the second amplifier.

[0011] In an optional embodiment of the first aspect, the switching unit further includes a second controllable switch, wherein the non-inverting input terminal of the second amplifier is grounded through the second controllable switch, and the non-inverting input terminal of the second amplifier is electrically connected to the second input terminal of the amplification unit; the second controllable switch is used to control the non-inverting input terminal of the second amplifier to be electrically connected to the second input terminal of the amplification unit according to a third control signal, so that the non-inverting input terminal of the second amplifier receives a fixed voltage; the second controllable switch is also used to switch the grounding of the non-inverting input terminal of the second amplifier according to a fourth control signal.

[0012] In an optional embodiment of the first aspect, the amplification unit includes a third amplifier, a fourth amplifier, a fifth amplifier, a third resistor, a fourth resistor, a fifth resistor, a sixth resistor, a seventh resistor, an eighth resistor, and a ninth resistor; the non-inverting input terminal of the third amplifier is electrically connected to a first controllable switch, the output terminal of the third amplifier is electrically connected to the first terminal of the fifth resistor, and grounded through the eighth and ninth resistors, the inverting input terminal of the third amplifier is electrically connected to the second terminal of the fifth resistor; the second terminal of the fifth resistor is connected to the first terminal of the third resistor through the fourth resistor, the second terminal of the third resistor is electrically connected to the output terminal of the fourth amplifier, the inverting input terminal of the fourth amplifier is connected to the first terminal of the third resistor, the non-inverting input terminal of the fourth amplifier is connected to the non-inverting input terminal of the second amplifier; the output terminal of the fourth amplifier is connected to the inverting input terminal of the fifth amplifier through the sixth resistor, and connected to the output terminal of the fifth amplifier through the seventh resistor, the non-inverting input terminal of the fifth amplifier is connected between the eighth and ninth resistors, and the output terminal of the fifth amplifier is electrically connected to the detection terminal of the DPS power supply subunit.

[0013] In an alternative embodiment of the first aspect, both the second resistor and the fourth resistor are variable resistors, and the amplification factor of the amplification unit is equal to the voltage division ratio of the voltage conversion subunit.

[0014] In an optional embodiment of the first aspect, the DPS power supply subunit is further configured to determine whether the difference between the first output voltage signal and the third voltage signal is within a preset difference range. If not, the third voltage signal is adjusted until the difference between the initial voltage values ​​of the first output voltage signal and the third voltage signal is within the preset difference range, so as to compensate for the error of the voltage conversion subunit.

[0015] In a second aspect, the present invention provides an integrated circuit tester, which includes a voltage source and a measurement circuit as described in any optional embodiment of the first aspect.

[0016] The integrated circuit tester designed above includes the voltage source and measurement circuit described in the first aspect. Therefore, the switching unit of the integrated circuit tester can control the amplification unit to receive the first voltage signal sent by the voltage source and measurement unit and amplify it to obtain the first output voltage signal, thereby providing voltage to the outside, under the first control signal. The switching unit can switch the amplification unit to receive the second voltage signal transmitted from the outside and amplify it to obtain the second output voltage signal under the second control signal. The second output voltage signal is transmitted to the voltage source and measurement unit to realize the measurement of the second voltage signal. That is, this application provides a voltage source and measurement circuit structure that can be switched according to the situation, thereby improving the applicability of integrated circuit testing. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a first structural schematic diagram of the voltage source and measurement circuit provided in an embodiment of this application;

[0019] Figure 2 This is a second structural schematic diagram of the voltage source and measurement circuit provided in an embodiment of this application;

[0020] Figure 3 This is a first structural schematic diagram of the voltage conversion subunit provided in an embodiment of this application;

[0021] Figure 4 This is a schematic diagram of the second structure of the voltage conversion subunit provided in the embodiments of this application;

[0022] Figure 5 This is a schematic diagram of the structure of the switching unit provided in an embodiment of this application;

[0023] Figure 6 This is a schematic diagram of the structure of the amplification unit provided in the embodiments of this application;

[0024] Figure 7 This is a third structural schematic diagram of the voltage source and measurement circuit provided in an embodiment of this application.

[0025] Icons: 10 - Switching unit; 20 - Voltage source and measurement unit; 210 - DPS power supply subunit; FORCE - Voltage output terminal; SENSE - Detection terminal; 220 - Voltage conversion subunit; 30 - Amplification unit; L1 - First amplifier; L2 - Second amplifier; L3 - Third amplifier; L4 - Fourth amplifier; L5 - Fifth amplifier; R1 - First resistor; R2 - Second resistor; R3 - Third resistor; R4 - Fourth resistor; R5 - Fifth resistor; R6 - Sixth resistor Resistors; R7 - Seventh resistor; R8 - Eighth resistor; R9 - Ninth resistor; R10 - Tenth resistor; A1 - First pin; A2 - Second pin; A3 - Third pin; A4 - Fourth pin; A5 - Fifth pin; A6 - Sixth pin; A7 - Seventh pin; A8 - Eighth pin; K1 - First controllable switch; K2 - Second controllable switch; C1 - First capacitor; C2 - Second capacitor; C3 - Third capacitor; C4 - Fourth capacitor; C5 - Fifth capacitor; C6 - Sixth capacitor. Detailed Implementation

[0026] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0028] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0029] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0030] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0031] In the description of the embodiments of this application, the term "multiple" refers to two or more (including two), similarly, "multiple sets" refers to two or more (including two sets), and "multiple pieces" refers to two or more (including two pieces).

[0032] In the description of the embodiments of this application, the technical terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0033] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.

[0034] In the field of integrated circuit automated testing, integrated circuit automated testing machines are typically used to measure information such as voltage of the chip under test.

[0035] The inventors of this application have discovered that when testing a chip under test, it is also necessary to provide power to the chip under test. However, current automatic integrated circuit testing machines have limited applicability, as they can only perform voltage measurement of the chip under test but cannot provide power to it.

[0036] Furthermore, in the field of automated testing, the provision and measurement of microvolt-level voltage signals are often involved. For example, providing a microvolt-level voltage to the chip under test or measuring the microvolt-level voltage output by the chip. However, the accuracy of current automated integrated circuit testers on the market is limited, generally above millivolt. Excessively long wires between the automated integrated circuit tester and the chip under test may introduce noise or impedance, leading to attenuation of small signals, thus making it impossible for current automated integrated circuit testers to meet accuracy requirements.

[0037] To address the aforementioned issues, the inventors of this application have designed a voltage source and measurement circuit and its integrated circuit tester. The switching unit in this voltage source and measurement circuit can control an amplification unit to receive and amplify a first voltage signal sent by the voltage source and measurement unit under a first control signal, thereby providing voltage to the external circuit. The switching unit can also switch the amplification unit to receive and amplify a second voltage signal transmitted from the external circuit under a second control signal, thereby providing a second output voltage signal. This second output voltage signal is then transmitted to the voltage source and measurement unit to measure the second voltage signal. In other words, this application provides a voltage source and measurement circuit structure that can be switched as needed, improving applicability.

[0038] In addition, the voltage source and measurement unit designed by the inventors of this application also includes a DPS power supply subunit and a voltage conversion subunit. The voltage conversion subunit can convert the third voltage signal transmitted by the DPS power supply subunit into a first voltage signal at the microvolt level, thereby realizing a voltage output at the microvolt level. Furthermore, by adjusting the amplification factor of the amplification unit, the second voltage signal at the microvolt level can be amplified to the millivolt level or above, thereby enabling the PDS power supply subunit to measure the second output voltage signal, realizing voltage measurement at the microvolt level, and thus improving the power supply accuracy and measurement accuracy of the DPS power supply subunit in the integrated circuit automatic test machine.

[0039] Based on the above ideas, this application provides a voltage source and a measurement circuit, such as... Figure 1 As shown, the voltage source and measurement circuit includes a switching unit 10, a voltage source and measurement unit 20, and an amplification unit 30. The voltage source and measurement unit 20 can be electrically connected to the switching unit 10, the switching unit 10 is electrically connected to the amplification unit 30, and the amplification unit 30 is electrically connected to the voltage source and measurement unit 20.

[0040] In the voltage source and measurement circuit designed above, when providing a voltage signal as a voltage source, the switching unit 10 controls the amplification unit 30 to receive the first voltage signal V1 sent by the voltage source and measurement unit 20 according to the first control signal. The amplification unit 30 amplifies the first voltage signal V1 to generate a first output voltage signal OUT1. The first output voltage signal OUT1 can be fed back to the voltage source and measurement unit 20. The voltage source and measurement unit 20 compensates for the error of the first voltage signal V1 according to the first output voltage signal OUT1, thereby compensating for the deviation of the first voltage signal V1 during transmission, so that the voltage source and measurement circuit outputs a more accurate voltage signal when acting as a voltage source.

[0041] When used as a measurement circuit, the switching unit 10 switches the amplification unit 30 to receive the externally transmitted second voltage signal V2 according to the second control signal. The amplification unit 30 amplifies the second voltage signal V2 to generate a second output voltage signal OUT2. The voltage source and measurement unit 20 receives the second output voltage signal OUT2 transmitted by the amplification unit 30 and measures the second output voltage signal OUT2, thereby realizing the measurement of the externally transmitted second voltage signal V2.

[0042] The voltage source and measurement circuit designed above allows the switching unit to control the amplification unit to receive and amplify the first voltage signal sent by the voltage source and measurement unit under a first control signal, thereby providing voltage to the outside. The switching unit can also switch the amplification unit to receive and amplify the second voltage signal transmitted from the outside under a second control signal, thereby providing voltage to the outside. The second output voltage signal is then transmitted to the voltage source and measurement unit to measure the second voltage signal. In other words, this application provides a voltage source and measurement circuit structure that can be switched according to the situation, improving the applicability of chip testing.

[0043] In an optional implementation of this embodiment, such as Figure 2 As shown, the voltage source and measurement unit 20 may include a DPS power supply subunit 210 and a voltage conversion subunit 220. The DPS power supply subunit 210 may include a voltage output terminal FORCE and a detection terminal SENSE. The voltage output terminal FORCE of the DPS power supply subunit 210 is electrically connected to the input terminal of the voltage conversion subunit 220. The output terminal of the voltage conversion subunit 220 is electrically connected to the input terminal of the switching unit 10. The output terminal of the switching unit 10 is electrically connected to the input terminal of the amplification unit 30. The output terminal of the amplification unit 30 is electrically connected to the detection terminal SENSE of the DPS power supply subunit. The DPS power supply subunit 210 may be a built-in DPS power module found in current integrated circuit automatic testing machines, employing a Kelvin connection.

[0044] In the voltage source and measurement circuit designed above, when providing a voltage signal as a voltage source, the DPS power supply subunit 210 can send a third voltage signal V3 to the voltage conversion subunit 220. The voltage conversion subunit 220 can convert the third voltage signal V3 into a first voltage signal V1, and then transmit the converted first voltage signal V1 to the amplification unit 30 for amplification through the switching unit 10.

[0045] Specifically, the first voltage signal V1 converted by the voltage conversion subunit 220 can be a microvolt voltage signal, enabling the voltage source and measurement unit 20 to provide a microvolt-level voltage, thereby improving the accuracy of the voltage source's output. Furthermore, since the amplification unit 30 needs to amplify both the first voltage signal V1 and the second voltage signal V2, based on the voltage division method used by the voltage conversion subunit 220 to achieve a microvolt-level voltage signal output, the amplification factor of the amplification unit 30 can be equal to the voltage division ratio of the voltage conversion subunit 220. This allows the amplification unit 30 to also amplify a microvolt-level voltage signal. Therefore, the external second voltage signal V2 can be a microvolt-level voltage, enabling the voltage source and measurement circuit designed in this scheme to measure microvolt-level voltage signals.

[0046] The voltage source and measurement circuit designed above allows the voltage conversion subunit 220 to convert the third voltage signal V3 transmitted by the DPS power supply subunit 210 into a first voltage signal V1 at the microvolt level, thereby achieving a voltage output at the microvolt level. Furthermore, by adjusting the amplification factor of the amplification unit 30, the second voltage signal V2 at the microvolt level can be amplified to the millivolt level or above, enabling the DPS power supply subunit 210 to measure the second output voltage signal OUT2, achieving voltage measurement at the microvolt level, and thus improving the power supply accuracy and measurement accuracy of integrated circuit automatic testing.

[0047] In an optional implementation of this embodiment, such as Figure 3 As shown above, the voltage conversion subunit 220 can convert the third voltage signal V3 into a first voltage signal V1 at the microvolt level. Based on this, as... Figure 3As shown, the voltage conversion subunit 220 may include a first amplifier L1, a second amplifier L2, a first resistor R1, and a second resistor R2. The first terminal of the first resistor R1 is electrically connected to the voltage output terminal FORCE of the DPS power supply subunit 210, and the second terminal of the first resistor R1 is connected to the second resistor R2 and then grounded. The first amplifier L1 includes 8 pins. The first pin A1 (inverting input terminal) of the first amplifier L1 is grounded, the second pin A2 and the third pin A3 of the first amplifier L1 are floating, and the fourth pin A4 (non-inverting input terminal) of the first amplifier L1 is connected to the second resistor R2 and then grounded. The first amplifier L1 has its fifth pin A5 connected to receive a negative voltage signal -VEE. The sixth pin A6 of the first amplifier L1 is electrically connected to the output of the second amplifier L2. The seventh pin A7 (output) of the first amplifier L1 is electrically connected to the first input of the amplification unit 30 through the switching unit 10. The eighth pin A8 of the first amplifier L1 is connected to receive a positive voltage signal +VEE. The non-inverting input of the second amplifier L2 is electrically connected to the second input of the amplification unit 30, or grounded. The inverting input of the second amplifier L2 is electrically connected to the output of the second amplifier L2.

[0048] The voltage conversion subunit 220 designed above receives the third voltage signal V3 transmitted from the voltage output terminal FORCE of the DPS power supply subunit 210 at the first end of the first resistor R1. The third voltage signal V3 is divided by the first resistor R1 and the second resistor R2 and then outputs the first voltage signal V1 to the amplification unit 30 through the seventh pin A7 of the first amplifier.

[0049] Specifically, the voltage value of the first voltage signal V1 is related to the ratio of the first resistor R1 and the second resistor R2, as well as the voltage signal received at the non-inverting input terminal of the second amplifier L2, as shown in the following formula:

[0050]

[0051] Wherein, VO2 is the voltage signal received at the non-inverting input terminal of the second amplifier L2. When the non-inverting input terminal of the second amplifier L2 is electrically connected to the second input terminal of the amplification unit 30, VO2 is a fixed value; when the non-inverting input terminal of the second amplifier L2 is grounded, VO2 is 0.

[0052] Based on the above, this scheme can adjust the voltage conversion ratio by setting the ratio of the second resistor R2 to the first resistor R1, thereby converting the third voltage signal V3 into a first voltage signal V1 at the microvolt level.

[0053] As one possible implementation, the ratio of the second resistor R2 to the first resistor R1 can be set to less than one-thousandth, thus allowing the millivolt-level voltage transmitted by the DPS power supply subunit 210 to be converted to a microvolt-level voltage. Additionally, when the non-inverting input terminal of the second amplifier L2 is electrically connected to the second input terminal of the amplification unit 30, and VO2 is a fixed value, VO2 can also be set to a microvolt-level voltage.

[0054] Furthermore, the second resistor R2 can be a variable resistor, for example, a sliding rheostat or other form of variable resistor, so that the ratio of the second resistor R2 to the first resistor R1 can be adjusted, thereby making the magnitude of the converted first voltage signal adjustable, and thus improving the applicability and adjustability of the conversion.

[0055] Furthermore, such as Figure 4 As shown, the first amplifier L1 can be a precision instrumentation amplifier of model AD8422, and the second amplifier L2 can be a CMOS operational amplifier of model OPA2333. In addition, the second amplifier L2 can also include a first pin B1 and a second pin B2. The first pin B1 is electrically connected to +VEE, and the second pin B2 is grounded, so that the second amplifier L2 provides power. The voltage conversion subunit 220 can also include a first capacitor C1, a second capacitor C2, a third capacitor C3, a fourth capacitor C4, a fifth capacitor C5, and a sixth capacitor C6. The first capacitor C1 can be connected between one end of the first resistor R1 and the ground. The second capacitor C2 and the third capacitor C3 can both be connected between the eighth pin A8 and the ground. The fourth capacitor C4 and the fifth capacitor C5 can be connected between the fifth pin A5 and the ground. The sixth capacitor C6 can be connected between the first pin B1 of the second amplifier L2 and the ground, so that circuit protection is achieved through multiple capacitors.

[0056] It should be noted that, in addition to the models described above, the first amplifier L1 and the second amplifier L2 can also use other types of amplifiers, as long as they achieve the corresponding voltage amplification accuracy. The specific amplifier model used can be adapted according to the actual application scenario.

[0057] In an optional embodiment of this example, the switching unit 10 may include a first controllable switch K1, which is disposed between the output terminal of the voltage conversion subunit 220 and the first input terminal of the amplification unit 30.

[0058] Specifically, in voltage conversion subunit 220 for Figure 3 and Figure 4 Based on the structure, such as Figure 5 As shown, the input terminal of the first controllable switch K1 is connected to the seventh pin A7 of the first amplifier L1 in the voltage conversion subunit 220.

[0059] In the switching unit 10 designed above, the first controllable switch K1 can control the output terminal of the voltage conversion subunit 20, i.e., the seventh pin A7 of the first amplifier L1, to be connected to the first input terminal of the amplification unit 30 according to the first control signal, thereby controlling the amplification unit 30 to receive the first voltage signal V1 converted and output by the voltage conversion subunit 220. In addition, the first controllable switch K1 can also switch the amplification unit 30 to receive the second voltage signal V2 transmitted from the outside according to the second control signal.

[0060] Specifically, this scheme can be designed such that when the first controllable switch K1 receives the first control signal, the first controllable switch K1 closes, thereby making the output terminal of the voltage conversion subunit 220 connected to the first input terminal of the amplification unit 30; when the first controllable switch K1 receives the second control signal, the first controllable switch K1 opens, thereby making the output terminal of the voltage conversion subunit 220 disconnected from the first input terminal of the amplification unit 30, thereby receiving the externally transmitted second voltage signal V2.

[0061] As another possible implementation, the non-inverting input terminal of the second amplifier L2 of the voltage conversion subunit 220, as described above, can be electrically connected to or grounded to the second input terminal of the amplification unit 30. Based on this, such as... Figure 5 As shown, the switching unit 10 may also include a second controllable switch K2. The non-inverting input terminal of the second amplifier L2 is grounded through the second controllable switch K2. The non-inverting input terminal of the second amplifier L2 is also electrically connected to the second input terminal of the amplification unit 30.

[0062] In the switching unit designed above, the second controllable switch K2 controls the non-inverting input terminal of the second amplifier L2 to be connected to the second input terminal of the amplification unit 30 according to the third control signal, so that the non-inverting input terminal of the second amplifier L2 receives a fixed voltage VO2, and the amplification unit 30 receives the differential voltage of the first voltage signal V1 and the fixed voltage VO2; in addition, the second controllable switch K2 also switches the non-inverting input terminal of the second amplifier L2 to ground according to the fourth control signal, so that the amplification unit 30 receives the single-ended first voltage signal V1.

[0063] Specifically, the second controllable switch K2 can be opened under the control of the third control signal, so that the non-inverting input terminal of the second amplifier L2 is connected to the second input terminal of the amplification unit 30; the second controllable switch K2 can be closed under the control of the fourth control signal, so that the non-inverting input terminal of the second amplifier L2 is grounded.

[0064] As one possible implementation, the first controllable switch K1 and the second controllable switch K2 described above can both be relays. Of course, in addition to using relays, the first controllable switch K1 and the second controllable switch K2 can be other forms of controllable switches, such as transistors, thyristors, etc. The specific implementation can be adapted according to the actual application scenario.

[0065] The switching unit designed above can switch between the voltage source and the measurement circuit by setting a simple first controllable switch, and can switch between single-ended voltage and differential voltage by setting a simple second controllable switch, thus simplifying the circuit structure while realizing the switching function.

[0066] In an optional implementation of this embodiment, such as Figure 6 As shown, the amplification unit 30 includes a third amplifier L3, a fourth amplifier L4, a fifth amplifier L5, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a seventh resistor R7, an eighth resistor R8, and a ninth resistor R9. The non-inverting input terminal of the third amplifier L3 is electrically connected to the first controllable switch K1. The output terminal of the third amplifier L3 is electrically connected to the first terminal of the fifth resistor R5 and grounded through the eighth resistor R8 and the ninth resistor R9. The inverting input terminal of the third amplifier L3 is electrically connected to the second terminal of the fifth resistor R5. The second terminal of the fifth resistor R5 is connected to the first terminal of the third resistor R3 through the fourth resistor R4. The connections are as follows: the second terminal of the third resistor R3 is electrically connected to the output terminal of the fourth amplifier L4; the inverting input terminal of the fourth amplifier L4 is connected to the first terminal of the third resistor R3; the non-inverting input terminal of the fourth amplifier L4 is connected to the non-inverting input terminal of the second amplifier L2; the output terminal of the fourth amplifier L4 is connected to the inverting input terminal of the fifth amplifier L5 through the sixth resistor R6, and also through the seventh resistor R7; the non-inverting input terminal of the fifth amplifier L5 is connected between the eighth resistor R8 and the ninth resistor R9; and the output terminal of the fifth amplifier L5 is electrically connected to the SENSE terminal of the DPS power supply subunit 210. The third amplifier L3, fourth amplifier L4, and fifth amplifier L5 can all be OPA2333 CMOS operational amplifiers. Alternatively, any existing amplifier model can be selected based on the specific application scenario.

[0067] From the circuit structure of the amplifier unit designed above, it can be seen that the amplified output voltage, i.e., the first output voltage OUT1 or the second output voltage signal OUT2, are respectively:

[0068]

[0069]

[0070] This scheme can amplify a voltage signal at the microvolt level by adjusting the amplification factor of the amplification unit 30 to be equal to the voltage division ratio in the voltage conversion subunit. Specifically, this scheme can adjust (R3+R4+R5) / R4=R1 / R2 to achieve the amplification of a voltage signal at the microvolt level.

[0071] As one possible implementation, the fourth resistor R4 in this design can also be a variable resistor, such as a sliding rheostat or other form of variable resistance. Based on this, this design can adjust the resistance value of the fourth resistor R4 so that the amplification factor of the amplification unit 30 is equal to the voltage division ratio in the voltage conversion subunit.

[0072] In an optional embodiment of this example, since voltage drift or other device factors of the voltage conversion subunit 220 may affect the conversion capability of the voltage conversion subunit 220, the converted first voltage signal V1 may have an error. Based on this, the DPS power supply subunit 210 can compensate for the error of the first voltage signal V1. Specifically, the detection terminal SENSE of the DPS power supply subunit 210 receives the first output voltage signal OUT1 fed back by the amplification unit 30 and determines whether the difference between the first output voltage signal OUT1 and the third voltage signal V3 emitted by the DPS power supply subunit 210 is within a preset difference range. If it is not within the preset difference range, it indicates that the error is large. The DPS power supply subunit 210 then continuously adjusts the emitted third voltage signal V3 until the difference between the initial voltage values ​​of the first output voltage signal OUT1 and the third voltage signal V3 is within the preset difference range, thereby compensating for the error of the voltage conversion subunit 220.

[0073] As a possible example, suppose the voltage value of the third voltage signal emitted by the voltage output terminal FORCE of the DPS power supply subunit 210 is 5V. Based on the amplification factor of the amplification unit 30 being equal to the voltage division ratio of the voltage conversion subunit 220, the first output voltage signal OUT1 fed back by the amplification unit 30 should theoretically be 5V. However, due to error, the first output voltage signal OUT1 detected by the detection terminal SENSE of the DPS power supply subunit 210 is 4.8V.

[0074] Assuming the preset difference range is 0V, meaning the third voltage signal V3 needs to be equal to the first output voltage signal OUT1, and the first output voltage signal OUT1 is 4.8V while the third voltage signal is 5V, the DPS power supply subunit 210 increases the voltage value of the third voltage signal if they are not equal. Then, it detects the voltage value of the first output voltage signal OUT1 through the detection terminal SENSE until the voltage value of the first output voltage signal OUT1 is equal to the initial voltage value of the third voltage signal, i.e., 5V, and stops adjusting, thereby compensating for the error of the voltage conversion subunit 220.

[0075] Specifically, such as Figure 7 This is a specific example of the overall circuit structure diagram of the voltage source and measurement circuit provided in this application, from... Figure 7 As can be seen from the diagram, the DPS power supply sub-unit 210 may also include a tenth resistor R10, thereby protecting the DPS power supply sub-unit 210.

[0076] This application also provides an integrated circuit tester, which includes the voltage source and measurement circuit described in any of the optional embodiments above.

[0077] The integrated circuit tester designed above includes the voltage source and measurement circuit described in the first aspect. Therefore, the switching unit of the integrated circuit tester can control the amplification unit to receive the first voltage signal sent by the voltage source and measurement unit and amplify it to obtain the first output voltage signal, thereby providing voltage to the outside, under the first control signal. The switching unit can switch the amplification unit to receive the second voltage signal transmitted from the outside and amplify it to obtain the second output voltage signal under the second control signal. The second output voltage signal is transmitted to the voltage source and measurement unit to realize the measurement of the second voltage signal. That is, this application provides a voltage source and measurement circuit structure that can be switched according to the situation, thereby improving the applicability of integrated circuit testing.

[0078] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application, and they should all be covered within the scope of the claims and specification of this application. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any way. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A voltage source and measuring circuit, characterized in that, Includes a switching unit, a voltage source and measurement unit, and an amplification unit; The switching unit is configured to control the amplification unit to receive the first voltage signal sent by the voltage source and the measurement unit according to the first control signal. The amplification unit is used to amplify the first voltage signal to generate a first output voltage signal; The voltage source and measurement unit are used to compensate for the error of the first voltage signal based on the first output voltage signal; The switching unit is also used to switch the amplification unit to receive the second voltage signal transmitted from the outside according to the second control signal; The amplification unit is further configured to amplify the second voltage signal to generate a second output voltage signal; The voltage source and measuring unit are also used to measure the second output voltage signal; The voltage source and measurement unit includes a DPS power supply subunit and a voltage conversion subunit; The DPS power supply subunit is used to send a third voltage signal to the voltage conversion subunit; The voltage conversion subunit is used to convert the third voltage signal into the first voltage signal, wherein the first voltage signal is a microvolt voltage signal; The voltage output terminal of the DPS power supply subunit is electrically connected to the input terminal of the voltage conversion subunit, the output terminal of the voltage conversion subunit is electrically connected to the input terminal of the switching unit, the output terminal of the switching unit is electrically connected to the input terminal of the amplification unit, and the output terminal of the amplification unit is electrically connected to the detection terminal of the DPS power supply subunit. The switching unit includes a first controllable switch, which is disposed between the output terminal of the voltage conversion subunit and the first input terminal of the amplification unit. The first controllable switch is used to control the output terminal of the voltage conversion subunit to be connected to the input terminal of the amplification unit according to the first control signal, so as to control the amplification unit to receive the first voltage signal; The first controllable switch is also used to switch the amplifier unit to receive an external second voltage signal according to the second control signal; The voltage conversion subunit includes a first amplifier, a second amplifier, a first resistor, and a second resistor. The first end of the first resistor is electrically connected to the voltage output terminal of the DPS power supply subunit. The second end of the first resistor is connected to the second resistor and then grounded. The first pin of the first amplifier is grounded. The second and third pins of the first amplifier are left floating. The fourth pin of the first amplifier is electrically connected to the second end of the first resistor. The fifth pin of the first amplifier is used to receive a negative voltage signal. The sixth pin of the first amplifier is electrically connected to the output terminal of the second amplifier. The seventh pin of the first amplifier is electrically connected to the first input terminal of the amplification unit through the first controllable switch. The eighth pin of the first amplifier is used to receive a positive voltage signal. The non-inverting input terminal of the second amplifier is electrically connected to the second input terminal of the amplification unit, or grounded, and the inverting input terminal of the second amplifier is electrically connected to the output terminal of the second amplifier.

2. The circuit according to claim 1, characterized in that, The switching unit further includes a second controllable switch, the non-inverting input terminal of the second amplifier is grounded through the second controllable switch, and the non-inverting input terminal of the second amplifier is electrically connected to the second input terminal of the amplification unit; The second controllable switch is used to control the non-inverting input terminal of the second amplifier to be connected to the second input terminal of the amplification unit according to the third control signal, so that the non-inverting input terminal of the second amplifier receives a fixed voltage; The second controllable switch is also used to switch the non-inverting input terminal of the second amplifier to ground according to the fourth control signal.

3. The circuit according to claim 2, characterized in that, The amplification unit includes a third amplifier, a fourth amplifier, a fifth amplifier, a third resistor, a fourth resistor, a fifth resistor, a sixth resistor, a seventh resistor, an eighth resistor, and a ninth resistor; The non-inverting input terminal of the third amplifier is electrically connected to the first controllable switch, the output terminal of the third amplifier is electrically connected to the first terminal of the fifth resistor, and is grounded through the eighth and ninth resistors, and the inverting input terminal of the third amplifier is electrically connected to the second terminal of the fifth resistor. The second end of the fifth resistor is connected to the first end of the third resistor through the fourth resistor. The second end of the third resistor is electrically connected to the output terminal of the fourth amplifier. The inverting input terminal of the fourth amplifier is connected to the first end of the third resistor. The non-inverting input terminal of the fourth amplifier is connected to the non-inverting input terminal of the second amplifier. The output terminal of the fourth amplifier is connected to the inverting input terminal of the fifth amplifier through the sixth resistor, and is also connected to the output terminal of the fifth amplifier through the seventh resistor. The non-inverting input terminal of the fifth amplifier is connected between the eighth and ninth resistors. The output terminal of the fifth amplifier is electrically connected to the detection terminal of the DPS power supply subunit.

4. The circuit according to claim 3, characterized in that, Both the second and fourth resistors are variable resistors, and the amplification factor of the amplification unit is equal to the voltage division ratio of the voltage conversion subunit.

5. The circuit according to claim 1, characterized in that, The DPS power supply subunit is further configured to determine whether the difference between the first output voltage signal and the third voltage signal is within a preset difference range. If not, the third voltage signal is adjusted until the difference between the initial voltage values ​​of the first output voltage signal and the third voltage signal is within the preset difference range, so as to compensate for the error of the voltage conversion subunit.

6. An integrated circuit testing machine, characterized in that, The integrated circuit tester includes a voltage source and measurement circuit as described in any one of claims 1-5.

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