Crystal rod falling prevention device, crystal growth equipment and methods to prevent crystal rod falling

Abstract

This invention discloses a crystal rod anti-fall device, crystal growth equipment, and a method for preventing crystal rods from falling. The anti-fall device includes a mounting base and a support arm. The support arm is movably mounted on the mounting base and is movable between a first anti-fall position and a second anti-fall position. In the first anti-fall position, the support arm is located below the crystal rod and is adapted to contact the outer surface of the tail portion of the crystal rod, or the support arm is adapted to be vertically opposite the tail portion, so that the support arm can support the crystal rod. In the second anti-fall position, the support arm is located radially outside the crystal rod and is in contact with the outer surface of the equal-diameter portion of the crystal rod, or the distance between the support arm and the outer surface of the equal-diameter portion is less than a preset anti-fall distance, so that the support arm can support the crystal rod. According to the present invention, the anti-fall device can provide support for the crystal rod throughout the entire process of rod removal, thereby preventing the crystal rod from falling to the ground and reducing damage and injury to the crystal rod itself, ground operators, and growth equipment.

Description

Technical Field

[0001] This invention relates to the field of single crystal furnace technology, and in particular to a device for preventing crystal rods from falling, crystal growth equipment, and a method for preventing crystal rods from falling. Background Technology

[0002] A single crystal furnace is a commonly used piece of equipment in the semiconductor technology field for growing single crystals, employing the CZ (Crystal-Zero) method. Typically, polycrystalline silicon is first melted at high temperature in the main chamber of the furnace, and a seed crystal is then immersed. A pulling mechanism within the furnace slowly pulls the crystal upwards, and through steps such as seeding, shoulder formation, shoulder rotation, equal diameter setting, and tailing, a crystal ingot is finally formed. The crystal ingot is then removed from the secondary chamber of the furnace. Typically, the diameter of the crystal ingot at the seeding point is 4-6 mm, and the tensile stress in this seeding section is much greater than its shear stress. When removing the crystal ingot, the isolation valve is closed and the secondary chamber is rotated horizontally to separate it from the main chamber. During this rotation, the crystal ingot is subjected to shear stress, increasing the risk of wire breakage and the ingot falling, potentially causing damage to the crucible and thermal field. Removing a fallen crystal ingot from the furnace is difficult. In the secondary chamber, the lifting mechanism lowers the crystal ingot into the ingot removal cart. Due to vibration or tilting of the secondary chamber after rotation (because the crystal ingot inside the secondary chamber is always vertical under the lifting mechanism, its relative position to the secondary chamber is not coaxial), the crystal ingot is easily subjected to shear stress, posing a risk of falling during its entry into the ingot removal cart, causing significant damage. Currently, there is no protective device to ensure the safe rotation of the crystal ingot from the secondary chamber to the ingot removal cart. Summary of the Invention

[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, the present invention provides a crystal rod anti-fall device, which can support the crystal rod and protect the entire process of crystal rod removal, avoiding the risk of crystal rod falling, thereby reducing the damage and loss to the crystal rod itself, on-site operators and crystal growth equipment.

[0004] The present invention also proposes a crystal growth apparatus having the above-mentioned anti-crystal rod falling device.

[0005] The present invention also proposes a method for preventing crystal rods from falling off a crystal growth device.

[0006] According to a first aspect of the present invention, a crystal rod anti-fall device is used to prevent crystal rods from falling. The anti-fall device includes: a mounting base; and a support arm movably disposed on the mounting base. The support arm is movable between a first anti-fall position and a second anti-fall position. In the first anti-fall position, the support arm is located below the crystal rod and is adapted to contact the outer surface of the tail portion of the crystal rod, or the support arm is adapted to be vertically opposite the tail portion so that the support arm can support the crystal rod. In the second anti-fall position, the support arm is located radially outward of the crystal rod and is in contact with the outer surface of the equal-diameter portion of the crystal rod, or the distance between the support arm and the outer surface of the equal-diameter portion is less than a preset anti-fall distance so that the support arm can support the crystal rod.

[0007] According to the present invention, the anti-crystal ingot falling device, through the movable support arm provided on the mounting base, can provide a supporting function for the crystal ingot throughout the process of removing the crystal ingot from the auxiliary chamber, thereby preventing the crystal ingot from falling into the furnace or to the ground, reducing damage and injury to the crystal ingot itself, ground operators, and growth equipment. Furthermore, when a certain distance is formed between the support arm and the crystal ingot surface, it can ensure that the crystal ingot falls safely to the ingot removal position on the ingot removal cart under the protection of the support arm, reducing the risk of crystal ingot falling and effectively avoiding the risk of falling due to ingot tilting causing jamming.

[0008] According to some embodiments of the present invention, the anti-crystal rod falling device further includes: a distance sensor, the distance sensor being used to detect the distance between the support arm and the crystal rod.

[0009] According to some embodiments of the present invention, the anti-crystal rod falling device further includes: a rolling element, which is rotatably disposed on the support arm about the center of the ball, or the rolling element is rotatably disposed on the support arm about a horizontally extending rotation axis, the support arm being adapted to receive the crystal rod by means of the rolling element.

[0010] According to some embodiments of the present invention, the support arm extends along a curve and / or zigzag line that is recessed to one side, the inner side of the support arm defines a crystal rod receiving space, and the rolling element is disposed on the side of the support arm facing the crystal rod receiving space.

[0011] According to some embodiments of the present invention, the rolling elements include a plurality of rolling elements, which are arranged at intervals along the extension direction of the support arm.

[0012] According to some embodiments of the present invention, the anti-crystal rod falling device further includes: a support frame, one end of which is rotatably connected to the mounting base about a horizontally extending axis of rotation, and the support arm is disposed at the other end of the support frame; a driving member, which is connected to the support frame and is used to drive the support frame to rotate.

[0013] According to some embodiments of the present invention, the support arm further has a ready position in which the support arm is located on the upper side of the mounting base, and in both the first fall-prevention position and the second fall-prevention position, the support arm is located on the lower side of the mounting base.

[0014] According to some embodiments of the present invention, in the first anti-fall position and the second anti-fall position, the support arm is inclined upward in the radial direction from the inside to the outside of the crystal rod.

[0015] According to some embodiments of the present invention, the anti-crystal rod falling device further includes: a drive shaft, the drive shaft being horizontally arranged, one end of the drive shaft being connected to the drive member, the support frame having a connecting part, the connecting part being sleeved on the drive shaft and fixedly connected to the drive shaft; a bearing seat, the bearing seat being disposed on the mounting base, the bearing seat including at least two spaced apart, the bearing seat having a bearing, the drive shaft being rotatably supported on the bearing seat through the bearing; and a reducer, the reducer being connected between the drive member and the drive shaft, the drive member being a motor.

[0016] According to a second aspect of the present invention, a crystal growth apparatus includes a sub-chamber and a crystal rod anti-falling device according to a first aspect of the present invention, the crystal rod anti-falling device being disposed outside the sub-chamber.

[0017] According to the crystal growth apparatus of the present invention, by providing the crystal rod anti-fall device of the first aspect described above, the service life of the crystal growth apparatus is improved.

[0018] According to some embodiments of the present invention, the anti-crystal rod falling device includes a plurality of such devices, which are arranged at circumferential intervals along the sub-chamber.

[0019] According to some embodiments of the present invention, the lower end of the sub-chamber is formed with a flange that protrudes radially outward, and the mounting seat is disposed on the flange.

[0020] According to a third aspect of the present invention, a method for preventing crystal rods from falling in a crystal growth apparatus, wherein the crystal growth apparatus is the crystal growth apparatus according to a second aspect of the present invention, the method for preventing crystal rods from falling includes: raising the sub-chamber to a preset raising position; moving the support arm to a first anti-fall position; lowering the crystal rod until the vertical distance between the support arm and the conical portion of the crystal rod is a preset anti-fall distance; moving the support arm to a second anti-fall position; and lowering the crystal rod until the crystal rod reaches a predetermined unloading position.

[0021] The method for preventing crystal rods from falling in the crystal growth apparatus according to the present invention can prevent crystal rods from falling throughout the entire process of rod removal, and avoid damage caused by falling crystal rods.

[0022] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of a crystal rod falling prevention device according to an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of a crystal growth apparatus according to an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of a crystal growth apparatus according to an embodiment of the present invention when no crystal rod falling device is used;

[0026] Figure 4 This is a front view of a crystal growth apparatus according to an embodiment of the present invention using a device to prevent crystal rods from falling, wherein the support arm and the rolling element support the bottom of the crystal rod;

[0027] Figure 5 This is a side view of a crystal growth apparatus according to an embodiment of the present invention using a crystal rod anti-fall device, wherein the support arm and the rolling element abut against the side wall of the crystal rod.

[0028] Figure 6 yes Figure 5 The front view of the crystal growth apparatus shown in the figure;

[0029] Figure 7 yes Figure 6 The image shows a partial enlarged view of the crystal growth apparatus.

[0030] Figure label:

[0031] 1000. Crystal growth equipment;

[0032] 100. Anti-crystal rod falling device;

[0033] 10. Support frame; 11. Connecting part;

[0034] 20. Support arm;

[0035] 30. Rolling parts;

[0036] 40. Mounting bracket;

[0037] 50. Driving components;

[0038] 60. Drive shaft;

[0039] 70. Bearing housing; 71. Bearing;

[0040] 80. Speed ​​reducer;

[0041] 200. Secondary compartment; 201. Flange;

[0042] 2000, Crystal rod; 2001, Constant diameter section; 2002, Tail section. Detailed Implementation

[0043] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0044] The following is for reference. Figures 1-7 A device 100 for preventing crystal rods from falling is described according to an embodiment of the first aspect of the present invention.

[0045] like Figure 1-6 As shown, according to a first aspect embodiment of the present invention, an anti-crystal rod falling device 100 is used to prevent crystal rods from falling. The anti-crystal rod falling device 100 includes: a mounting base 40 and a support arm 20. The support arm 20 is movably disposed on the mounting base 40 and is movable between a first anti-fall position and a second anti-fall position. In the first anti-fall position, the support arm 20 is located below the crystal rod 2000. The support arm 20 is adapted to contact the outer surface of the tail portion 2002 of the crystal rod, or the support arm 20 is adapted to be vertically opposite to the tail portion 2002, so that the support arm 20 can support the crystal rod 2000. That is, the support arm 20 can contact the outer surface of the tail portion 2002 of the crystal rod, or the support arm 20 can be at a certain distance from the tail portion 2002 of the crystal rod, but vertically opposite, so as to support the crystal rod 2000. In the second anti-fall position, the support arm 20 is located radially outside the crystal rod 2000. The support arm 20 is in contact with the outer surface of the equal diameter portion 2001 of the crystal rod, or the distance between the support arm 20 and the outer surface of the equal diameter portion 2001 is less than the preset anti-fall distance, so that the support arm 20 can support the crystal rod 2000. That is to say, the support arm 20 can be in contact with the outer surface of the equal diameter portion 2001, or it can be at a certain distance from the outer surface of the equal diameter portion 2001. This distance is less than the preset anti-fall distance. For example, the preset anti-fall distance can be 1mm-2mm from the outer surface of the crystal rod 2000.

[0046] First, after the crystal rod 2000 finishes growing, it completely enters the auxiliary chamber 200. The auxiliary chamber 200 is then raised to separate it from the furnace cover. At this time, the support arm 20 of the anti-fall device is flipped so that the support arm 20 is in the first anti-fall position and is located on the lower side of the crystal rod 2000. The crystal rod 2000 is lowered so that the support arm 20 contacts or forms a certain distance with the outer surface of the tail 2002 of the crystal rod. This distance is the preset anti-fall distance and remains unchanged during the process of rotating the auxiliary chamber 200 to the rod removal area. The sub-chamber 200 is rotated again, and the crystal rod 2000 also rotates accordingly. During this process, when the crystal rod 2000 is subjected to lateral shear force, it may fall. At this time, the support arm 20, located in the first anti-fall position, i.e., the support arm 20 below the crystal rod 2000, will support the crystal rod 2000 and prevent it from falling further, thereby reducing the damage to the crystal growth equipment 1000, the on-site operators, and the crystal rod 2000 itself. Then, the crystal rod 2000 slowly descends under the action of the lifting device. During the descent of the crystal rod 2000, the rotation angle of the support arm 20 gradually increases, so that the support arm 20 smoothly transitions from the first anti-fall position to the second anti-fall position. The support arm 20 is located outside the equal diameter portion 2001 of the crystal rod, and is in contact with or forms a certain distance from the outer surface of the equal diameter portion 2001. This distance is a preset distance and remains unchanged during the descent. If the crystal rod 2000 suddenly falls due to the action of lateral shear force, it will tilt relative to the vertical direction. Since the distance between the support arm 20 and the equal diameter part 2001 is less than the preset anti-fall distance, the crystal rod 2000 will directly get stuck on the support arm 20, or get stuck on the support arm 20 after falling a very short distance. The support arm 20 will generate an upward supporting force on the crystal rod 2000, thus supporting the crystal rod 2000 and reducing the risk of the crystal rod 2000 falling.

[0047] After crystal growth is complete, the crystal rod 2000 is fully raised to the auxiliary chamber 200. After the auxiliary chamber 200 is raised, the anti-crystal falling device 100 is activated. The support arm 20 of the anti-crystal falling device 100 is flipped and placed at the bottom of the auxiliary chamber 200, so that the support arm 20 reaches the first anti-fall position. The auxiliary chamber 200 is rotated so that the auxiliary chamber 200 reaches the rod picking area. The crystal rod 2000 is lowered so that the tail 2002 of the crystal rod 2000 is vertically aligned with the support arm 20, with a certain distance, or after contact, so that the support arm 20 plays a role in supporting the crystal rod 2000. The crystal rod 2000 is lowered further so that the support arm 20 moves to the second anti-fall position, so that the support arm 20 contacts the outer surface of the equal diameter part of the crystal rod 2000 or the distance between the support arm 20 and the crystal rod 2000 is less than the preset distance, so that it plays a role in supporting the crystal rod 2000 from the beginning. The crystal rod 2000 is lowered further to the rod picking position of the rod picking cart.

[0048] According to an embodiment of the present invention, the anti-crystal ingot falling device 100, through the movable support arm 20 provided on the mounting base 40, can provide support for the crystal ingot 2000 throughout the entire process of removing the crystal ingot 2000 from the auxiliary chamber 200, thereby preventing the crystal ingot 2000 from falling into the furnace or to the ground, reducing damage and injury to the crystal ingot 2000 itself, ground operators, and growth equipment. At the same time, a certain distance is formed between the support arm 20 and the surface of the crystal ingot 2000, ensuring that the crystal ingot 2000 safely falls to the picking position of the ingot picking cart under the protection of the support arm 20, reducing the risk of the crystal ingot 2000 falling.

[0049] Furthermore, compared to existing technologies, the anti-fall device 100 in this embodiment of the invention, through the movement of the support arm 20 in the first and second anti-fall positions, can protect the crystal rod 2000 throughout the entire process of picking up the crystal rod 2000. Moreover, the anti-fall device 100 in this embodiment can control the distance between the support arm 20 and the crystal rod 2000, thus allowing the crystal rod 2000 to descend freely without needing to be pulled up. In contrast, in existing technologies, most anti-fall protection measures for the crystal rod 2000 involve locking its tail structure into the anti-fall device. After the auxiliary chamber 200 rotates to the picking area, when the crystal rod 2000 needs to continue descending to the picking cart, it is necessary to appropriately raise the crystal rod 2000 to remove the existing anti-fall device, allowing the crystal rod 2000 to continue falling to the picking cart. This does not guarantee the safe exit of the crystal rod 2000 from the auxiliary chamber 200 to the picking cart position.

[0050] According to some embodiments of the present invention, such as Figure 1 As shown, the anti-crystal rod falling device 100 also includes a distance sensor, which is used to detect the distance between the support arm 20 and the crystal rod 2000. The distance sensor can be installed on the support arm 20. When the distance between the support arm 20 and the crystal rod 2000 reaches a preset distance, the distance sensor sends a signal to stop the support arm 20 from moving. This can prevent the support arm 20 from exerting a lateral force on the crystal rod 2000 due to excessive movement, thus reducing the risk of the crystal rod 2000 falling. At the same time, the distance sensor can precisely control the movement of the support arm 20, thereby reducing losses caused by human error.

[0051] According to some embodiments of the present invention, such as Figure 1As shown, the anti-crystal rod falling device 100 further includes: a rolling element 30, which is rotatably disposed on the support arm 20 about a sphere's center, or the rolling element 30 is rotatably disposed on the support arm 20 about a horizontally extending axis of rotation. The support arm 20 is adapted to receive the crystal rod 2000 via the rolling element 30. The rolling element 30 can be a rotatable sphere disposed on the support arm 20, allowing the crystal to move relative to the support arm 20. Of course, in other embodiments, the rolling element 30 can also be other objects rotatable about a horizontally extending axis of rotation disposed on the support arm 20, such as... Figure 1 The cylindrical shape shown is an example. The support arm 20 can contact the outer surface of the crystal ingot 2000 via the surface of the rolling element 30, thereby increasing the contact area between the support arm 20 and the crystal ingot 2000. When the support arm 20 is in the first anti-fall position, if the crystal ingot 2000 suddenly falls, the support arm 20 will promptly catch the crystal ingot 2000. The rolling action of the rolling element 30 on the support arm 20 cushions the sudden fall of the crystal ingot 2000, reducing the impact of the crystal ingot 2000's own weight on the support arm 20. This reduces the chance of damage to the crystal ingot 2000 itself, thus protecting the crystal ingot 2000. When the support arm 20 is in the second anti-fall position, if the crystal ingot 2000 suddenly falls, the control arm 20 will approach the crystal ingot 2000, so that the support arm 20 can effectively clamp the crystal ingot 2000. The rolling element 30 on the support arm 20 will contact the crystal ingot 2000 and exert a lateral force on the crystal ingot 2000, which can have a certain buffering effect on the fall of the crystal ingot 2000.

[0052] According to some embodiments of the present invention, such as Figure 1 As shown, the support arm 20 extends along a curve and / or a broken line that is concave to one side. That is, the support arm 20 can extend along a curve that is concave to one side, such as an arc; the support arm 20 can also extend along a broken line that is concave to one side, such as a V-shaped line; the support arm 20 can also extend along a combination of a curve and a broken line that is concave to one side. The inner side of the support arm 20 defines a space for receiving the crystal ingot 2000, and the rolling element 30 is disposed on the side of the support arm 20 facing the space for receiving the crystal ingot 2000. Statistics show that 70% to 80% of the world's silicon single crystal production is achieved using the Czochralski method. The crystal ingot 2000 produced by the Czochralski method is generally a cylinder with a conical bottom. The support arm 20, facing the crystal ingot 2000, has a concave curve and / or a broken line. This design ensures that when the crystal ingot 2000 contacts the inner side of the support arm 20, its inner side completely adheres to the outer surface of the crystal ingot 2000, thereby increasing the contact area and ensuring uniform force distribution on the contact surface between the support arm 20 and the crystal ingot 2000, preventing damage to the crystal ingot 2000 from the support arm 20 itself. The rolling element 30, located on the side of the support arm 20 facing the crystal ingot 2000, slides the crystal ingot 2000 downwards when it contacts the inner side of the support arm 20.

[0053] According to some embodiments of the present invention, such as Figure 1 As shown, the rolling elements 30 include multiple rolling elements 30, which are arranged at intervals along the extension direction of the support arm 20. For example, there can be two, three or more rolling elements 30. When the support arm 20 comes into contact with the crystal ingot 2000, providing multiple rolling elements 30 can increase the contact area between the support arm 20 and the crystal ingot 2000, thereby increasing the uniformity of force on the crystal ingot 2000 and reducing the chance of the crystal ingot falling and being damaged.

[0054] According to some embodiments of the present invention, such as Figure 1 As shown, the anti-crystal rod falling device 100 also includes: a support frame 10 and a driving member 50. One end of the support frame 10 is rotatably connected to the mounting base 40 about a horizontally extending rotation axis. The support arm 20 is located at the other end of the support frame 10. The driving member 50 is connected to the support frame 10. The driving member 50 is used to drive the support frame 10 to rotate, thereby controlling the movement of the support arm 20, so that the support arm 20 can move between the first anti-fall position and the second anti-fall position, thereby protecting the entire process of taking the crystal rod 2000.

[0055] According to some embodiments of the present invention, such as Figure 2-6 As shown, the support arm 20 also has a ready position. In the ready position, the support arm 20 is located on the upper side of the mounting base 40. In the first anti-fall position and the second anti-fall position, the support arm 20 is located on the lower side of the mounting base 40. During the production process of the crystal ingot 2000, the anti-crystal ingot falling device 100 is not activated. The support arm 20 is in the ready position, away from the crystal ingot 2000, and tightened against the outer wall of the auxiliary chamber 200, reducing storage space. When the crystal ingot 2000 has finished growing and enters the ingot removal stage, the crystal ingot 2000 is first pulled up into the auxiliary chamber 200, the isolation valve is closed, the auxiliary chamber 200 is pulled up to the designated position, and the anti-crystal ingot falling device 100 is activated simultaneously, flipping the support arm 20 to the first anti-fall position. Then, the auxiliary chamber 200 is rotated... In chamber 200, the crystal rod 2000 rotates together with the auxiliary chamber 200. Because the crystal rod 2000 is susceptible to shear stress and may fall during the rotation of the auxiliary chamber 200, the support arm 20, which is flipped to the first anti-fall position, can be used to support the crystal rod 2000. This can effectively prevent the crystal rod 2000 from falling suddenly and causing damage to the hot zone of the single crystal furnace, crucible, etc., and prevent injury to on-site personnel caused by the sudden fall of the crystal rod 2000, thereby improving the operational safety of on-site personnel and equipment.

[0056] After the auxiliary chamber 200 is rotated to the rod retrieval vehicle, the crystal rod 2000 slowly descends under the action of the lifting device. At this time, the support arm 20 moves to the second anti-fall position, so that the support arm 20 is in a state that can support the crystal rod 2000 at any time. It can play a timely supporting role when the crystal rod 2000 suddenly falls or tilts, ensuring that the crystal rod 2000 is safely lowered to the position of the rod retrieval vehicle.

[0057] According to some embodiments of the present invention, such as Figure 4-6 As shown, in the first and second fall protection positions, the support arm 20 is inclined upwards in the radial direction from the inside to the outside of the crystal rod 2000. The support arm 20 is positioned to form a certain angle α with the support frame 10 (e.g., ...). Figure 7 (The included angle shown), 90°<α≤150°, can thus make the angle formed between the support arm 20 and the crystal rod surface the optimal clamping angle, which can better clamp the crystal rod 2000 that suddenly falls. For example Figure 4 As shown, the angle between the support arm 20 and the support frame 10 is 117°. When the support arm 20 is in the first anti-fall position, it forms a certain angle with the conical part 2002 of the crystal, which can better support the crystal rod 2000 when it falls. When the support arm 20 is in the second anti-fall position, the crystal rod 2000 descends slowly. When the crystal rod 2000 falls suddenly, it will be accompanied by a certain tilt. At this time, the upward tilting support arm 20 will exert a radial force on the crystal rod 2000, which will in turn exert an upward supporting force on the crystal rod 2000, thus supporting the crystal rod 2000 and reducing the risk of the crystal rod 2000 falling.

[0058] According to some embodiments of the present invention, such as Figure 1 As shown, the anti-crystal rod falling device 100 also includes: a drive shaft 60, a bearing housing 70, and a reducer 80. The drive shaft 60 is horizontally arranged, and one end of the drive shaft 60 is connected to the drive member 50. The support frame 10 is provided with a connecting part 11, which is sleeved on the drive shaft 60 and fixedly connected to the drive shaft 60. The bearing housing 70 is provided on the mounting base 40, and includes at least two bearing housings arranged at intervals. The bearing housing 70 is provided with a bearing 71, and the drive shaft 60 is rotatably supported on the bearing housing 70 through the bearing 71. The reducer 80 is connected between the drive member 50 and the drive shaft 60. The drive member 50 is a motor.

[0059] In this way, the drive motor can drive the reducer 80 to rotate, the reducer 80 can drive the transmission shaft 60 to rotate, and the transmission shaft 60 can drive the support frame 10 to rotate through the connecting part 11, so that the support frame 10 can move between the ready position and the anti-fall position, thus completing the storage of the support frame 10 and the protective support for the crystal rod 2000. Among them, the anti-crystal rod falling device 100 requires a low speed when in use. The reducer 80 is mainly used to reduce the motor speed, increase the output torque, and reduce the load inertia to meet the use of the anti-crystal rod 2000 falling device 100.

[0060] According to the crystal growth apparatus 1000 of the second aspect of the present invention, such as Figure 2 As shown, it includes a sub-chamber 200 and a crystal rod anti-fall device 100 according to the first aspect of the present invention, the crystal rod anti-fall device 100 being disposed outside the sub-chamber 200.

[0061] According to an embodiment of the crystal growth apparatus 1000 of the present invention, by providing the crystal rod anti-falling device 100 of the first aspect embodiment described above, the movable support arm 20 provided on the mounting base 40 can provide support for the crystal rod 2000 throughout the entire crystal rod removal process, thereby preventing the crystal rod 2000 from falling to the ground and reducing damage and injury to the crystal rod 2000 itself, ground operators, and growth equipment. Simultaneously, the support arm 20 forms a certain distance from the surface of the crystal rod 2000, ensuring that the crystal rod 2000 falls freely to the rod removal position of the rod removal cart under the protection of the support arm 20, reducing the rod removal steps and lowering the risk of the crystal rod 2000 falling. The anti-falling device 100 is located outside the auxiliary chamber 200 and will not generate additional vibration to the crystal growth apparatus 1000, thereby further reducing the risk of the crystal rod 2000 falling.

[0062] According to some embodiments of the present invention, such as Figure 2 As shown, the anti-crystal rod falling device 100 includes multiple devices, which are arranged at intervals along the circumference of the auxiliary chamber 200. For example, there can be two, three or more anti-crystal rod falling devices 100. The multiple anti-crystal rod falling devices 100 are evenly spaced along the circumference of the auxiliary chamber 200, which can ensure that the anti-crystal rod falling device 100 protects the crystal rod 2000 from multiple directions, better reduce the risk of the crystal rod 2000 falling, and thus reduce the damage and loss to on-site operators, equipment and the crystal rod 2000 itself.

[0063] According to some embodiments of the present invention, such as Figure 2 As shown, a flange 201 protruding radially outward is formed at the lower end of the auxiliary chamber 200, and a mounting seat 40 is provided on the flange 201. The flange 201 has a high wall thickness, high load-bearing capacity, is not easily deformed, and is easy to replace and retrofit later.

[0064] Furthermore, the side of the mounting base 40 facing the sub-chamber 200 is a concave curved surface that can fit against the outer surface of the sub-chamber 200, and the end of the mounting base 40 facing the sub-chamber 200 is provided with a mounting hole, which can be fixedly connected to the sub-chamber 200 by bolts.

[0065] A method for preventing a crystal rod 2000 from falling in a crystal growth apparatus 1000 according to a third aspect of the present invention includes: raising the sub-chamber 200 to a preset raising position; moving the support arm 20 to a first anti-fall position; lowering the crystal rod 2000 until the vertical distance between the support arm 20 and the tail 2002 of the crystal rod 2000 is a preset anti-fall distance; moving the support arm 20 to a second anti-fall position; and lowering the crystal rod 2000 until the crystal rod 2000 reaches a predetermined unloading position.

[0066] After crystal growth is complete and the crystal rod 2000 is fully raised into the auxiliary chamber 200, the auxiliary chamber 200 is raised to a certain distance away from the isolation valve. Then, the anti-crystal rod falling device 100 is activated. The drive motor drives the support frame 10 to move, thereby causing the support arm 20 to flip to the first anti-fall position and lower the crystal rod 2000 until the distance between the support arm 20 and the conical part 2002 of the crystal rod 2000 is less than the preset anti-fall distance. For example, the preset anti-fall distance can be set in the range of 1mm-5mm. The distance sensor sends a signal to stop the crystal rod 2000 from moving. The auxiliary chamber 200 is then rotated to the area of ​​the rod retrieval cart, and the drive motor is started to move the support arm 20 to the second anti-fall position. Through the distance sensor, the distance between the support arm 20 and the outer surface of the crystal rod 2000 is controlled to be less than the preset anti-fall distance. For example, the preset anti-fall distance can be set in the range of 1mm-2mm. The support arm 20 stops moving and the crystal rod 2000 continues to fall until it enters the position of the rod retrieval cart, completing the rod retrieval.

[0067] The method for preventing the crystal rod 2000 from falling according to the present invention can prevent the crystal rod 2000 from falling throughout the entire process of taking the rod, and avoid damage caused by the crystal rod 2000 falling.

[0068] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0069] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0070] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0071] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0072] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A device for preventing crystal rods from falling, characterized in that, The crystal rod anti-fall device is used to prevent crystal rods from falling, and the crystal rod anti-fall device includes: Mounting base; A support arm is movably mounted on the mounting base. The support arm is movable between a first anti-fall position and a second anti-fall position. In the first anti-fall position, the support arm is located below the crystal rod and is adapted to contact the outer surface of the tail of the crystal rod, or the support arm is adapted to be vertically opposite the tail, so that the support arm can support the crystal rod. In the second anti-fall position, the support arm is located radially outside the crystal rod and is in contact with the outer surface of the equal-diameter portion of the crystal rod, or the distance between the support arm and the outer surface of the equal-diameter portion is less than a preset anti-fall distance, so that the support arm can support the crystal rod. A support frame, one end of which is rotatably connected to the mounting base about a horizontally extending axis of rotation, and the support arm is located at the other end of the support frame; A driving component, which is connected to the support frame, is used to drive the support frame to rotate; A drive shaft is horizontally arranged, one end of which is connected to the drive component. A connecting part is provided on the support frame, and the connecting part is sleeved on the drive shaft and fixedly connected to the drive shaft. A bearing housing is provided on the mounting base. The bearing housing includes at least two bearing housings arranged at intervals. A bearing is provided on the bearing housing. The transmission shaft is rotatably supported on the bearing housing through the bearing. A speed reducer is connected between the drive component and the transmission shaft, wherein the drive component is a motor.

2. The device for preventing crystal rods from falling according to claim 1, characterized in that, Also includes: A distance sensor is used to detect the distance between the support arm and the crystal rod.

3. The device for preventing crystal rods from falling according to claim 1, characterized in that, Also includes: A rolling element, which is rotatably disposed on the support arm about the center of a ball, or the rolling element is rotatably disposed on the support arm about a horizontally extending axis of rotation, the support arm being adapted to receive the crystal rod by means of the rolling element.

4. The device for preventing crystal rods from falling according to claim 3, characterized in that, The support arm extends along a curve and / or zigzag line that is concave to one side, the inner side of the support arm defines a crystal rod receiving space, and the rolling element is disposed on the side of the support arm facing the crystal rod receiving space.

5. The device for preventing crystal rods from falling according to claim 4, characterized in that, The rolling elements include a plurality of rolling elements, which are arranged at intervals along the extension direction of the support arm.

6. The device for preventing crystal rods from falling according to claim 1, characterized in that, The support arm also has a ready position, in which the support arm is located on the upper side of the mounting base, and in both the first fall-prevention position and the second fall-prevention position, the support arm is located on the lower side of the mounting base.

7. The device for preventing crystal rods from falling according to claim 1, characterized in that, In the first and second anti-fall positions, the support arm is inclined upward in the radial direction from the inside to the outside of the crystal rod.

8. A crystal growth apparatus, characterized in that, It includes a secondary chamber and a crystal rod anti-fall device according to any one of claims 1-7, wherein the crystal rod anti-fall device is disposed outside the secondary chamber.

9. The crystal growth apparatus according to claim 8, characterized in that, The anti-crystal rod falling device includes multiple devices, which are arranged at circumferential intervals along the sub-chamber.

10. The crystal growth apparatus according to claim 9, characterized in that, The lower end of the sub-chamber has a flange that protrudes radially outward, and the mounting seat is disposed on the flange.

11. A method for preventing crystal rods from falling in a crystal growth apparatus, wherein the crystal growth apparatus is the crystal growth apparatus according to any one of claims 8-10, characterized in that, The method for preventing crystal rods from falling includes: Raise the auxiliary room to the preset elevation position; Move the support arm to the first fall protection position; Lower the crystal rod until the vertical distance between the support arm and the cone-shaped part of the crystal rod is the preset anti-fall distance; Move the support arm to the second fall protection position; Lower the crystal rod until it reaches the designated unloading position.

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