一种改善电池结合力的图形化电池制备方法及TOPCon电池

By using a combination of laser and wet cleaning on the TOPCon battery substrate to form a patterned mask and electroplat the grid line electrodes, the problems of insufficient adhesion and laser damage were solved, achieving efficient battery fabrication and silver resource conservation.

CN115986000BActive Publication Date: 2026-07-17SUZHOU KZONE EQUIP TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SUZHOU KZONE EQUIP TECH
Filing Date
2022-12-23
Publication Date
2026-07-17

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Abstract

本发明提供了一种改善电池结合力的图形化电池制备方法及TOPCon电池，所述的制备方法包括：(Ⅰ)提供电池基底，在电池基底的n型掺杂面上由内到外依次制备隧穿氧化层、第一多晶硅层与第一氮化硅层，在p型掺杂面上由内到外依次制备第二多晶硅层、氧化铝层与第二氮化硅层；(Ⅱ)在第一氮化硅层与第二氮化硅层的外表面分别覆盖保护膜层；(Ⅲ)采用激光去除待电镀区域的保护膜层；(Ⅳ)对图形化掩膜进行刻蚀处理，并分别进行电镀，形成若干第一栅线电极与第二栅线电极，随后去除其余保护膜层，得到图形化电池。本发明解决了TOPCon电池栅线结合力问题，同时减少激光对电池片的损伤，提升电池效率。
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