回音壁-FP-侧向光栅耦合腔半导体激光器

By introducing a lateral grating into a whispering-gallery-FP coupled-cavity semiconductor laser, a high-quality coupling mode is formed, solving the problems of lasing wavelength uncertainty and multimode lasing in small volume, and realizing stable high-power narrow-linewidth laser output, which is suitable for optical communication and photonic integrated circuits.

CN115986559BActive Publication Date: 2026-07-17INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
Filing Date
2023-01-18
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing whispering-gallery-FP coupled-cavity semiconductor lasers are difficult to achieve stable single-mode, high-power, narrow-linewidth laser output in a small volume, and the uncertainty of lasing wavelength and multimode lasing problems limit their application in optical communication and photonic integrated circuits.

Method used

A whispering-FP-side-grating coupled-cavity semiconductor laser is designed. By introducing a side grating between the whispering-gallery type microcavity and the FP type microcavity, a high-quality coupling mode is formed. Stable single-mode lasing is achieved by controlling the reflectivity and period number of the grating using the Bragg condition.

Benefits of technology

It achieves high-power, narrow-linewidth laser output, improves laser gain and mode photon number density, ensures laser stability and efficient coupling, and has the advantages of small size, simple fabrication, and low cost. It is suitable for optical communication, optical information processing, and photonic integrated circuits.

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Abstract

本发明提供了一种回音壁‑FP‑侧向光栅耦合腔半导体激光器,包括:N面电极;下接触层,形成在N面电极上;N型衬底,形成在下接触层上;回音壁‑FP‑侧向光栅耦合腔,形成在N型衬底上,其中,回音壁‑FP‑侧向光栅耦合腔包括回音壁型微腔、FP型微腔和侧向光栅;其中,回音壁型微腔、FP型微腔和侧向光栅均为叠层结构,由下到上依次包括N型限制层、有源层、P型限制层、P型盖层、上接触层和P面电极。在回音壁‑FP耦合微腔半导体激光器的基础上引入侧向耦合光栅结构,利用侧向耦合光栅的纯净反射谱实现耦合微腔半导体激光器的稳定单模激射,避免耦合微腔激光器多模激射、模式跳变,以增大FP腔长,提高激光器增益,从而实现高功率、窄线宽的激光输出。
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