Lead zirconate titanate film with composition gradient and method for manufacturing the same
The method for preparing lead zirconate titanate thin films with varying composition gradients utilizes photomasks and pulsed laser deposition technology to form lead zirconate titanate thin films with varying composition gradients. This method solves the problem of low accuracy in the relationship between composition and performance of lead zirconate titanate thin films, and achieves higher testing accuracy and performance control.
CN115988947BActive Publication Date: 2026-07-24SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
- Filing Date
- 2022-11-24
- Publication Date
- 2026-07-24
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Abstract
The application discloses a component-gradient-variation lead zirconate titanate thin film and a preparation method thereof. The preparation method of the component-gradient-variation lead zirconate titanate thin film comprises the following steps: obtaining a substrate; depositing a bottom electrode layer on the substrate; depositing lead zirconate and lead titanate with different contents on the bottom electrode layer by moving a mask to obtain the component-gradient-variation lead zirconate titanate thin film. The application solves the technical problem of low accuracy of the prior art in testing the relationship between the component and the performance of the lead zirconate titanate thin film.
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