A polishing sheet edge removing apparatus

Abstract

The application discloses a kind of polishing sheet edge removal equipment, including the feeding table being arranged along equipment mesa, cleaning tank and the discharging table;It also includes the mechanical hand that can slide along equipment mesa, the end of mechanical hand is connected suction cup, suction cup is used to grab polishing sheet, polishing sheet surface film is attached, and the part that needs to be removed is exposed;Three cleaning tanks are provided, hydrofluoric acid is contained in the first cleaning tank, pure water is contained in the following two cleaning tanks, and the part that needs to be removed is etched away by suction cup suction polishing sheet and placed in hydrofluoric acid, then sequentially placed in the following two cleaning tanks for cleaning.The application adopts the form of mechanical hand plus suction cup to transfer polishing sheet, forms flow and automation operation, and can ensure the quality stability and edge removal precision of the product.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, specifically to a polishing wafer edge removal device. Background Technology

[0002] In the early stages of research and development, the applicant used manual equipment to remove the edges of heavily arsenic-doped polished sheets. Specifically, the polished sheets were manually extracted and placed into a cleaning tank for etching and edge removal. In this process, the edge removal width was poor and the precision was difficult to control. At the same time, because manual operation requires high skill from workers, it is easy to cause scratches on the oxide film surface, which affects product quality. Summary of the Invention

[0003] The purpose of this invention is to provide a polishing disc edge removal device to solve the problems mentioned in the background art regarding split guide rails.

[0004] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a polishing sheet edge removal device, comprising a loading table, a cleaning tank and a unloading table arranged along the table surface of the device;

[0005] It also includes a robotic arm that can slide along the equipment table. The end of the robotic arm is connected to a suction cup, which is used to grasp the polishing disc. The polishing disc has a film on its surface and exposes the part that needs to be trimmed.

[0006] There are three cleaning tanks. The first cleaning tank contains hydrofluoric acid, and the latter two cleaning tanks contain pure water. The suction cup picks up the polishing disc and puts it into the hydrofluoric acid to etch away the parts that need to be removed. Then, it is placed into the latter two cleaning tanks for cleaning in turn.

[0007] Preferably, the robotic arm includes a first drive unit for driving the sliding along the equipment table surface, and a second drive unit for driving the suction cup to move vertically up and down.

[0008] Preferably, the suction cup has a cylindrical structure, and the height of the suction cup is higher than the liquid level depth in the cleaning tank.

[0009] Preferably, a liquid brush is slidably sleeved on the outer peripheral surface of the suction cup, and the liquid brush is driven by the second driving part;

[0010] The second drive unit includes a first gear and a second gear. The first gear drives the suction cup in a rack and pinion manner, and the second gear drives the liquid brush in a rack and pinion manner.

[0011] The first gear is fixedly connected to the first drive shaft, the second gear is fixedly connected to the second drive shaft, the first drive shaft and the second drive shaft are rotatably connected to each other, and a transition shaft is provided between the first drive shaft and the second drive shaft.

[0012] The outer circumferential surfaces of the first drive shaft, the transition shaft, and the second drive shaft are all provided with swing arms. The first drive shaft drives the transition shaft to rotate through the swing arms during rotation, and the transition shaft drives the second drive shaft to rotate through the swing arms during rotation. The first drive shaft is driven by a motor.

[0013] In the initial state, the first drive shaft rotates, driving the first gear to rotate, and driving the suction cup to slide downward. After a certain distance, the first drive shaft pushes the transition shaft to rotate through the swing arm. After the transition shaft rotates a certain distance, it pushes the second drive shaft to rotate. The second drive shaft drives the second gear to drive the liquid brush to slide and remove liquid from the outer circumference of the suction cup.

[0014] Preferably, an absorbent sponge is provided on the end face of the unloading platform. After the suction cup puts down the polishing sheet, it moves to the top of the absorbent sponge and then presses down, and the absorbent sponge wipes the bottom end face of the suction cup dry.

[0015] Preferably, the upper part of the cleaning tank is provided with an overflow tank, and an input pipe is connected to the outside of the cleaning tank to keep the liquid flow in the cleaning tank continuously renewed through circulation input.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] This invention uses a robotic arm and suction cups to transfer polishing discs, forming a streamlined and automated process that ensures the quality stability and edge removal accuracy of the delivered product. Attached image description:

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 This is a schematic diagram of the suction cup structure of the present invention;

[0020] Figure 3 This is a schematic diagram of the structure of the second drive unit of the present invention;

[0021] Figure 4 This is a schematic diagram of the cleaning tank structure of the present invention. Detailed Implementation

[0022] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0023] A polishing disc edge removal device includes a loading table cleaning tank 3 and a unloading table 4 arranged along the table surface of the device.

[0024] It also includes a robotic arm 2 that can slide along the equipment table. The end of the robotic arm 2 is connected to a suction cup 21, which is used to grasp the polishing disc. The polishing disc has a film on its surface and exposes the part that needs to be removed.

[0025] The cleaning tank 3 has three compartments. The first compartment contains hydrofluoric acid, and the latter two contain pure water. Suction cup 21 picks up the polishing disc and places it into the hydrofluoric acid to etch away the areas requiring edge removal. Then, the disc is sequentially placed into the latter two cleaning tanks for further cleaning. The liquids in the three cleaning tanks circulate continuously. (Refer to...) Figure 4 As shown, an overflow tank 31 is provided at the top of the cleaning tank, and an external pipe 32 is connected to the overflow tank 31 for discharge. An input pipe 33 is connected to the external cleaning tank 3 to keep the liquid flow in the cleaning tank 3 continuously updated through circulation input.

[0026] Reference Figures 1-3 As shown, the robotic arm 2 includes a first drive unit (which can be a servo slide) for driving the arm to slide along the equipment table surface, and a second drive unit for driving the suction cup to move vertically up and down. The suction cup has a cylindrical structure, and its height is higher than the liquid level in the cleaning tank. The height of the suction cup is high enough (about 20cm is sufficient) to ensure that the liquid does not submerge the suction cup when the polishing pad is placed in the cleaning tank; otherwise, the liquid will remain on the upper surface of the suction cup, and when the suction cup lowers the polishing pad, the liquid will flow onto the polishing pad and contaminate it.

[0027] A liquid brush 22 is slidably sleeved on the outer peripheral surface of the suction cup 21, and the liquid brush 22 is driven by the second driving part. The suction cup 21 is made of corrosion-resistant material and its peripheral surface is kept smooth to avoid water retention. However, due to the surface tension of the liquid, it is difficult to achieve zero retention, so a liquid brush 22 is used to remove water.

[0028] Reference Figure 3 As shown, the second drive unit includes a first gear 28 and a second gear 27. The first gear 28 drives the suction cup in a rack and pinion manner, and the second gear drives the liquid brush 22 in a rack and pinion manner.

[0029] The first gear 28 is fixedly connected to the first drive shaft 23, and the second gear 27 is fixedly connected to the second drive shaft 26. The first drive shaft 23 and the second drive shaft 26 are rotatably connected to each other, and a transition shaft 29 is provided between the first drive shaft 23 and the second drive shaft 26. The transition shaft 29 is free to rotate.

[0030] The outer peripheral surfaces of the first drive shaft 23, the transition shaft 29, and the second drive shaft 26 are all provided with swing arms (24, 25, and 20 in the figure). The first drive shaft 23 drives the transition shaft 29 to rotate through the swing arms during rotation, and the transition shaft 29 drives the second drive shaft 26 to rotate through the swing arms during rotation. The first drive shaft 23 is driven by a motor.

[0031] In the initial state, the first drive shaft 23 rotates, driving the first gear 28 to rotate, and driving the suction cup to slide downward. After a certain distance, the first drive shaft 23 pushes the transition shaft 29 to rotate through the swing arm. After the transition shaft 29 rotates a certain distance, it pushes the second drive shaft 26 to rotate. The second drive shaft 26 drives the second gear 27 to drive the liquid brush to slide and remove liquid from the outer circumference of the suction cup.

[0032] In the above process, initially, the liquid brush 22 is located near the bottom of the suction cup 21 (e.g., Figure 2 As shown), the motor is started at this time, the first drive shaft 23 rotates and the suction cup 21 slides downward. During this process, the stroke can be set by the gear ratio of the rack and pinion. When the suction cup 21 is about to reach the bottom limit position, the first drive shaft 23 pushes the transition shaft 23 to rotate through the swing arm until the swing arm of the transition shaft 23 contacts the swing arm of the second drive shaft 26, which drives the second gear 27 to rotate a certain distance to make the liquid brush 22 slide downward, so that the liquid brush 22 is located near the top of the suction cup 21 (the liquid brush 22 is above the liquid surface), and at this time the suction cup 21 just reaches the bottom. At this time, the first drive shaft 23, the transition shaft 29 and the second drive shaft 26 are in contact with each other by the three swing arms. At this point, suction cup 21 reaches the bottom, performing actions such as sucking up the polishing pad, removing its edge in the cleaning tank, or releasing the polishing pad. After completing these actions, the first drive shaft 23 rotates in the opposite direction, causing suction cup 21 to rise. After rotating one revolution, the swing arm pushes the transition shaft 29 to rotate in the opposite direction, continuing the rotation. During this rotation, suction cup 21 and liquid brush 22 slide relative to each other, scraping away water from the circumference of suction cup 21. After the first drive shaft 23 pushes the transition shaft 23 to rotate one revolution again, the swing arm of the transition shaft 23 pushes the swing arm of the second drive shaft 26 to rotate in the opposite direction, causing the liquid brush 22 to slide upwards and maintain its initial position. In this state, the positions of the three shafts and the swing arm are opposite to when suction cup 21 is at the bottom; that is, the three swing arms are in contact with each other, but the second drive shaft 26 is at the top, the transition shaft 25 is in the middle, and the first drive shaft 23 is at the bottom. During the second descent, the first drive shaft 23 rotates directly downwards. During this process, the liquid brush 22 does not come into contact with the liquid in the cleaning tank, ensuring that no additional liquid residue remains. In addition, since the driving of the liquid brush 22 is lagging behind the driving of the suction cup 21, the liquid brush 22 will not work when the suction cup 21 slides a short distance, which also adapts to the overall working rhythm.

[0033] In addition, a water-absorbing sponge is provided on the end face of the unloading platform 4. When the suction cup 21 puts down the polishing sheet, it moves to the top of the water-absorbing sponge and then presses down, the water-absorbing sponge dries the bottom end face of the suction cup.

[0034] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A polishing pad de-burring apparatus, characterized by: This includes a loading platform, a cleaning tank, and a unloading platform installed along the equipment table surface; It also includes a robotic arm that can slide along the equipment table. The end of the robotic arm is connected to a suction cup, which is used to grasp the polishing disc. The polishing disc has a film on its surface and exposes the part that needs to be trimmed. There are three cleaning tanks. The first cleaning tank contains hydrofluoric acid, and the latter two cleaning tanks contain pure water. The suction cup picks up the polishing disc and puts it into the hydrofluoric acid to etch away the parts that need to be removed. Then, it is put into the latter two cleaning tanks for cleaning in turn. The robotic arm includes a first drive unit for driving the sliding along the equipment table surface, and a second drive unit for driving the suction cup to move vertically up and down. The suction cup has a cylindrical structure, and its height is higher than the liquid level depth in the cleaning tank. A liquid brush is slidably sleeved on the outer peripheral surface of the suction cup, and the liquid brush is driven by the second driving part. The second drive unit includes a first gear and a second gear. The first gear drives the suction cup in a rack and pinion manner, and the second gear drives the liquid brush in a rack and pinion manner. The first gear is fixedly connected to the first drive shaft, the second gear is fixedly connected to the second drive shaft, the first drive shaft and the second drive shaft are rotatably connected to each other, and a transition shaft is provided between the first drive shaft and the second drive shaft. The outer circumferential surfaces of the first drive shaft, the transition shaft, and the second drive shaft are all provided with swing arms. The first drive shaft drives the transition shaft to rotate through the swing arms during rotation, and the transition shaft drives the second drive shaft to rotate through the swing arms during rotation. The first drive shaft is driven by a motor. In the initial state, the first drive shaft rotates, driving the first gear to rotate, and driving the suction cup to slide downward. After a certain distance, the first drive shaft pushes the transition shaft to rotate through the swing arm. After the transition shaft rotates a certain distance, it pushes the second drive shaft to rotate. The second drive shaft drives the second gear to drive the liquid brush to slide and remove liquid from the outer circumference of the suction cup.

2. The polishing disc edge removal device according to claim 1, characterized in that: A water-absorbing sponge is installed on the end face of the unloading platform. After the suction cup puts down the polishing disc, it moves to the top of the water-absorbing sponge and then presses down. The water-absorbing sponge wipes the bottom end face of the suction cup dry.

3. The polishing disc edge removal device according to claim 2, characterized in that: An overflow tank is provided at the top of the cleaning tank, and an input pipe is connected to the outside of the cleaning tank to keep the liquid flow in the cleaning tank constantly renewed through circulation input.

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