Flexible electrode and method of manufacturing the same, flexible sensor, and wearable electronic device

By employing a combination of one-dimensional and two-dimensional conductive material layers in the flexible electrode, the high cost of ITO material is solved, resulting in a low-cost, highly conductive, and flexible electrode suitable for self-powered transparent flexible strain sensors.

CN116026227BActive Publication Date: 2026-06-09BOE TECHNOLOGY GROUP CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BOE TECHNOLOGY GROUP CO LTD
Filing Date
2023-02-07
Publication Date
2026-06-09

AI Technical Summary

Technical Problem

The flexible electrode material of existing transparent flexible strain sensors is usually ITO, which is costly and difficult to use widely, mainly due to the scarcity of indium resources.

Method used

By employing a combination of one-dimensional and two-dimensional conductive material layers, such as silver nanowire mesh layers and transition metal carbide layers, flexible electrodes can be formed through specific fabrication methods, thereby reducing material costs and improving conductivity and flexibility.

Benefits of technology

This invention achieves low-cost, highly conductive, and flexible electrodes, improving the performance of flexible sensors and making them suitable for self-powered transparent flexible strain sensors.

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Abstract

The embodiment of the application provides a flexible electrode and a preparation method thereof, a flexible sensor and a wearable electronic device, wherein the flexible electrode comprises: a transparent substrate; a one-dimensional conductive material layer arranged on the transparent substrate; and a two-dimensional conductive material layer covering the one-dimensional conductive material layer. The technical scheme of the embodiment of the application can reduce the cost of the flexible electrode and improve the conductive performance and flexibility of the flexible electrode.
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Description

Technical Field

[0001] This application relates to the field of sensing technology, and in particular to a flexible electrode and its preparation method, a flexible sensor, and a wearable electronic device. Background Technology

[0002] In related technologies, self-powered transparent flexible strain sensors can operate normally without an external power source, leading to their widespread application. The flexible electrode material of self-powered transparent flexible strain sensors is typically indium tin oxide (ITO). However, the scarcity of indium, the material used to prepare ITO, results in its high cost. Summary of the Invention

[0003] This application provides a flexible electrode and its preparation method, a flexible sensor, and a wearable electronic device to solve or alleviate one or more technical problems in the prior art.

[0004] As a first aspect of the embodiments of this application, this application provides a flexible electrode, including: a transparent substrate; a one-dimensional conductive material layer disposed on the transparent substrate; and a two-dimensional conductive material layer covering the one-dimensional conductive material layer.

[0005] In one embodiment, the one-dimensional conductive material layer is a metal nanowire mesh layer; and / or the two-dimensional conductive material layer is a transition metal carbide layer.

[0006] As a second aspect of the present application, the present application provides a method for preparing a flexible electrode, comprising:

[0007] A transparent substrate and a one-dimensional conductive material layer are provided, wherein the transparent substrate is located on one side of the one-dimensional conductive material layer;

[0008] A two-dimensional conductive material layer is formed on the side of the one-dimensional conductive material layer that faces away from the transparent substrate.

[0009] In one embodiment, a two-dimensional conductive material layer is formed on the side of the one-dimensional conductive material layer facing away from the transparent substrate, including:

[0010] Ethyl acetate was added to a dispersion of a two-dimensional conductive material to form a first thin film;

[0011] Hydrochloric acid is added to a mixed solution of a two-dimensional conductive material dispersion and ethyl acetate to convert a first film into a second film, wherein the density of the second film is greater than that of the first film.

[0012] The second film is transferred to the side of the one-dimensional conductive material layer opposite to the transparent substrate so that the second film forms a two-dimensional conductive material layer after drying.

[0013] In one embodiment, a transparent substrate and a one-dimensional conductive material layer are provided, including:

[0014] A colloidal solution is sprayed onto a transparent substrate to allow microcracks to form after the colloidal solution dries.

[0015] A one-dimensional conductive material dispersion is sprayed onto the microcracks so that the one-dimensional conductive material dispersion dries to form a one-dimensional conductive material layer.

[0016] Remove the colloid.

[0017] In one embodiment, a transparent substrate and a one-dimensional conductive material layer are provided, including:

[0018] A one-dimensional conductive material layer is formed on the substrate;

[0019] A transparent substrate is formed on one side of a one-dimensional conductive material layer;

[0020] Remove the substrate.

[0021] In one embodiment, the substrate is a polymer thin film; a one-dimensional conductive material layer is formed on the substrate, including:

[0022] A one-dimensional conductive material dispersion is sprayed onto a substrate so that the dispersion forms a mesh-like one-dimensional conductive material layer under the action of capillary flow.

[0023] In one embodiment, the substrate is a glass substrate; a one-dimensional conductive material layer is formed on the substrate, including:

[0024] A surfactant and a thickener are added to a one-dimensional conductive material dispersion to form a first mixture;

[0025] The first mixture is stirred to obtain a foamy mixture containing bubbles;

[0026] The mixed foam is dropped between two substrates to form a one-dimensional conductive material layer on each substrate.

[0027] As a third aspect of the present application, the present application provides a flexible sensor, including: a friction layer including a body and a plurality of protrusions disposed on the body; two flexible electrodes disposed opposite to each other as described in any of the above embodiments, respectively disposed on both sides of the friction layer, one of the two flexible electrodes being in contact with the body, and the other of the two flexible electrodes being in contact with the plurality of protrusions.

[0028] As a fourth aspect of the present application, the present application provides a wearable electronic device, including a flexible electrode of any of the above embodiments, or a flexible sensor of any of the above embodiments.

[0029] The embodiments of this application employ the above-described technical solution to reduce the cost of flexible electrodes. Furthermore, the two-dimensional conductive material layer can reduce the contact resistance between the one-dimensional conductive materials, giving the flexible electrode high conductivity. Additionally, both the one-dimensional and two-dimensional conductive material layers offer good flexibility, thereby enhancing the flexibility of the flexible electrode.

[0030] The above overview is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features of this application will become readily apparent from the accompanying drawings and the following detailed description. Attached Figure Description

[0031] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0032] Figure 1 A schematic diagram of the structure of a flexible electrode according to an embodiment of this application is shown.

[0033] Figure 2 A schematic flowchart illustrating a method for fabricating a flexible electrode according to an embodiment of this application is shown.

[0034] Figure 3 A process diagram illustrating the fabrication of a two-dimensional conductive material layer according to an embodiment of this application is shown.

[0035] Figure 4 A process diagram illustrating the fabrication of a one-dimensional conductive material layer according to the first embodiment of this application is shown.

[0036] Figure 5 A process diagram illustrating the fabrication of a one-dimensional conductive material layer according to a second embodiment of this application is shown.

[0037] Figure 6 A schematic diagram illustrating the fabrication principle of a one-dimensional conductive material layer according to a second embodiment of this application is shown.

[0038] Figure 7 A process diagram illustrating the fabrication of a one-dimensional conductive material layer according to a third embodiment of this application is shown.

[0039] Figure 8 A schematic diagram of the structure of a flexible sensor according to an embodiment of this application is shown.

[0040] Figure 9 A schematic diagram illustrating the working principle of a flexible sensor according to an embodiment of this application is shown.

[0041] Figure 10A schematic diagram of the structure of a friction layer according to an embodiment of this application is shown.

[0042] Figure 11 A schematic diagram of the structure of a friction layer according to another embodiment of this application is shown.

[0043] Figure 12 A schematic diagram of the structure of a friction layer according to yet another embodiment of this application is shown.

[0044] Explanation of reference numerals in the attached figures:

[0045] 100: Flexible electrode; 110: Transparent substrate; 120: One-dimensional conductive material layer; 130: Two-dimensional conductive material layer; 200: One-dimensional conductive material dispersion; 300: Substrate; 410: Silver nanowires; 420: Coffee rings; 510: Two-dimensional conductive material dispersion; 520: Container; 530: Ethyl acetate; 540: First thin film; 550: Second thin film; 620: Colloid; 630: Microcrack; 710: First mixture; 720: Bubble; 800: Flexible sensor; 810: Friction layer; 811: Body; 812: Protrusion; 820: Display. Detailed Implementation

[0046] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this application. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0047] Wearable electronic devices have shown great promise in fields such as tactile sensing, motion detection, and biomedical signal monitoring, making them a focus of attention. To better conform to human skin, it is urgent to design strain sensors with characteristics such as sensitivity, transparency, and flexibility. However, common strain sensors typically require an external power source to function properly. Triboelectric nanogenerators can convert mechanical energy into electrical energy, and self-powered sensors developed based on this offer a promising solution for transparent flexible strain sensors. Among these solutions, the fabrication of transparent, conductive, and flexible electrode materials is a major challenge limiting the widespread application of transparent flexible strain sensors.

[0048] Currently, the flexible electrode material for transparent flexible strain sensors is typically ITO. ITO is a brittle material, making it difficult to achieve good flexibility. Furthermore, the availability of indium, a key material for preparing ITO, is limited, resulting in high manufacturing costs for the flexible electrodes.

[0049] The flexible electrode 100 according to the first aspect of this application is applied to a flexible sensor. Figure 1 A schematic diagram of the structure of a flexible electrode 100 according to an embodiment of this application is shown. Figure 1As shown, the flexible electrode 100 includes a transparent substrate 110, a one-dimensional conductive material layer 120, and a two-dimensional conductive material layer 130. The one-dimensional conductive material layer 120 is disposed on the transparent substrate 110, and the two-dimensional conductive material layer 130 covers the one-dimensional conductive material layer 120.

[0050] It should be noted that one-dimensional materials refer to materials in which electrons can move freely (linearly) in only one nanometer-scale direction, such as nanolinear junction materials and quantum wires; one-dimensional materials that can conduct electricity are called one-dimensional conductive materials. Two-dimensional materials refer to materials in which electrons can move freely (planarly) in only two nanometer-scale dimensions (1-100 nm), such as nanofilms, superlattices, and quantum wells; two-dimensional materials that can conduct electricity are called two-dimensional conductive materials. For example, in the embodiments of this application, one-dimensional materials can be materials such as nanowires; two-dimensional materials can be materials such as nanosheets.

[0051] For example, both the one-dimensional conductive material layer 120 and the two-dimensional conductive material layer 130 can be transparent material layers, thereby ensuring the transparency of the flexible electrode 100. When the flexible electrode 100 is applied to the flexible sensor 800, the transparency of the flexible sensor 800 can be guaranteed.

[0052] According to the embodiments of this application, the flexible electrode 100, by providing a one-dimensional conductive material layer 120 and a two-dimensional conductive material layer 130, and having the two-dimensional conductive material layer 130 cover the one-dimensional conductive material layer 120, can reduce the cost of the one-dimensional and two-dimensional conductive materials compared to flexible electrodes using ITO in related technologies, thereby reducing the cost of the flexible electrode 100. Furthermore, the two-dimensional conductive material layer 130 can reduce the contact resistance between the one-dimensional conductive materials, giving the flexible electrode 100 high conductivity. In addition, the one-dimensional conductive material layer 120 and the two-dimensional conductive material layer 130 have good flexibility, thereby improving the flexibility of the flexible electrode 100.

[0053] In one embodiment, the one-dimensional conductive material layer 120 can be a metal nanowire mesh layer. For example, the one-dimensional conductive material layer 120 can be a silver nanowire mesh layer. The silver nanowire mesh layer can be coated between the transparent substrate 110 and the two-dimensional conductive material layer 130. Thus, by making the one-dimensional conductive material layer 120 a metal nanowire mesh layer, the one-dimensional conductive material layer 120 not only has excellent conductivity, but also excellent light transmittance and flexibility due to the nanoscale size effect, thereby improving the performance of the flexible electrode 100.

[0054] In the above example, a silver nanowire mesh layer is used as an example of a one-dimensional conductive material layer 120. Those skilled in the art will understand that the one-dimensional conductive material layer 120 can also be other metal nanowire mesh layers, organic conductive material layers, or inorganic conductive material layers, etc., and this application does not limit it in this regard.

[0055] In one embodiment, the two-dimensional conductive material layer 130 can be a two-dimensional inorganic compound, which may be composed of a transition metal carbide, nitride, or carbonitride with a thickness of several atomic layers. With this configuration, the two-dimensional conductive material layer 130 can possess the metallic conductivity of transition metal carbides, thereby effectively reducing the contact resistance between one-dimensional conductive materials and enabling the flexible electrode 100 to have high conductivity.

[0056] Figure 2 A schematic flowchart illustrating a method for fabricating a flexible electrode 100 according to an embodiment of this application is shown. Figure 1 and Figure 2 As shown, the method for preparing the flexible electrode 100 according to the second aspect embodiment of this application includes:

[0057] Step S201: Provide a transparent substrate 110 and a one-dimensional conductive material layer 120, wherein the transparent substrate 110 is located on one side of the one-dimensional conductive material layer 120;

[0058] Step S202: A two-dimensional conductive material layer 130 is formed on the side of the one-dimensional conductive material layer 120 facing away from the transparent substrate 110.

[0059] According to the method for preparing the flexible electrode 100 in the embodiments of this application, the one-dimensional conductive material layer 120 and the two-dimensional conductive material layer 130 can work synergistically to achieve the preparation of a low-cost, highly conductive, and flexible flexible electrode 100. When the flexible electrode 100 is applied to a flexible sensor, the performance of the flexible sensor 800 can be improved.

[0060] In one embodiment, in step S202, forming a two-dimensional conductive material layer 130 on the side of the one-dimensional conductive material layer 120 opposite to the transparent substrate 110 may include: adding ethyl acetate to a two-dimensional conductive material dispersion to form a first film; adding hydrochloric acid to a mixed solution of the two-dimensional conductive material dispersion and ethyl acetate to convert the first film into a second film, wherein the density of the second film is greater than the density of the first film; and transferring the second film to the side of the one-dimensional conductive material layer opposite to the transparent substrate so that the second film dries to form a two-dimensional conductive material layer.

[0061] For example, Figure 3 A fabrication process diagram of the two-dimensional conductive material layer 130 according to an embodiment of this application is shown. Figure 3As shown, a two-dimensional conductive material dispersion 510 is first added to a container 520, such as a glass petri dish. The concentration of the two-dimensional conductive material dispersion 510 can be 0.001 mg / mL to 0.5 mg / mL (including endpoints) to achieve high transparency while ensuring conductivity. Then, ethyl acetate 530 is slowly added dropwise to the two-dimensional conductive material dispersion 510. As the ethyl acetate 530 evaporates, a high surface tension field forms on the liquid surface, resulting in the Marangoni effect, which causes the two-dimensional conductive material dispersion 510 to self-assemble into a loose first film 540. Next, a small amount of hydrochloric acid is added dropwise to the mixed solution of the two-dimensional conductive material dispersion 510 and ethyl acetate 530 to break the electrostatic repulsion in the liquid, thereby forming a denser second film 550. Then, a one-dimensional conductive material layer 120, such as a silver nanowire mesh layer, disposed on a transparent substrate 110 is used as a substrate to transfer the second film 550 to the side of the one-dimensional conductive material layer 120 facing away from the transparent substrate 110. Finally, drying is performed to obtain a two-dimensional conductive material layer 130 covering the one-dimensional conductive material layer 120.

[0062] In this embodiment, a two-dimensional conductive material layer 130 can be deposited on the one-dimensional conductive material layer 120, so that the two-dimensional conductive material layer 130 covers the one-dimensional conductive material layer 120, thereby effectively reducing the contact resistance between one-dimensional conductive materials such as silver nanowires and realizing the fabrication of a highly conductive flexible electrode.

[0063] Figure 4 A fabrication process diagram of a one-dimensional conductive material layer 120 according to a first embodiment of this application is shown. In one embodiment, combined with... Figure 4 In step S201, providing a transparent substrate 110 and a one-dimensional conductive material layer 120 may include: spraying a colloidal solution onto the transparent substrate 110 to form microcracks 630 after the colloidal solution 620 dries; spraying a one-dimensional conductive material dispersion 200 onto the microcracks 630 to form a one-dimensional conductive material layer 120 after the one-dimensional conductive material dispersion 200 dries; and removing the colloidal solution 620.

[0064] Exemplarily, the transparent substrate 110 can be a transparent polymer substrate, such as polyethylene terephthalate, polyvinyl chloride, transparent polyimide, or other transparent films. The colloid 620 can be titanium dioxide colloid; the solvent for the colloidal solution can be a mixture of ethanol and ethyl acetate. After the colloid 620 dries, the capillary action caused by the evaporation of the solvent creates significant microcracks 630 on the colloid 620, forming a crack template with the transparent substrate 110. A silver nanowire dispersion can then be sprayed onto the crack template, and after drying, a silver nanowire mesh layer can form at the microcracks 630. The colloid 620 can then be ultrasonically removed in ethanol, resulting in a silver nanowire mesh layer disposed on the transparent substrate 110. Finally, a two-dimensional conductive material dispersion 510 can be sprayed onto the silver nanowire mesh layer, covering it, and heat treatment is performed to achieve cold welding of the silver nanowire mesh layer through capillary action.

[0065] In this embodiment, a one-dimensional conductive material layer 120, such as a metal nanowire mesh layer, can be prepared on the transparent substrate 110 using microcracks 630. This reduces the cost of the flexible electrode 100 while ensuring the high conductivity and good flexibility of the flexible electrode 100.

[0066] In one embodiment, step S201, providing a transparent substrate 110 and a one-dimensional conductive material layer 120, may include: forming a one-dimensional conductive material layer 120 on a substrate 300; forming a transparent substrate 110 on one side of the one-dimensional conductive material layer 120; and peeling off the substrate 300.

[0067] The difference from the above embodiments is that, in this embodiment, it is not necessary to directly form a one-dimensional conductive material layer 120 on the transparent substrate 110. Instead, a one-dimensional conductive material layer 120 can be formed on the substrate 300 first, and then the transparent substrate 110 can be formed on the side of the one-dimensional conductive material layer 120 facing away from the substrate 300. Finally, the substrate 300 is peeled off, realizing the transfer of the one-dimensional conductive material layer 120 from the substrate 300 to the transparent substrate 110. This configuration makes the fabrication of the one-dimensional conductive material layer 120 more flexible and effectively reduces the fabrication difficulty.

[0068] Figure 5 A fabrication process diagram of a one-dimensional conductive material layer according to a second embodiment of this application is shown. In one embodiment, combined with... Figure 5 The substrate 300 is a polymer film; forming a one-dimensional conductive material layer 120 on the substrate 300 includes: spraying a one-dimensional conductive material dispersion 200 on the substrate 300 so that the one-dimensional conductive material dispersion 200 forms a mesh-like one-dimensional conductive material layer 120 under the action of capillary flow.

[0069] For example, the concentration of the one-dimensional conductive material dispersion 200, such as a silver nanowire dispersion, can be from 0.005 mg / mL to 1 mg / mL (including endpoint values). During preparation, the silver nanowire dispersion can be sprayed onto a polymer film using a spray gun. The solvent for the silver nanowire dispersion can be ethanol, isopropanol, water, or mixtures thereof. The polymer film can be a polyethylene terephthalate film, a polytetrafluoroethylene film, a polyvinyl chloride film, a perfluoroalkoxyalkane film, or a polyimide film, etc. The surface tension of the solvent and the polymer film is matched through surface treatment or other means. Figure 6 A schematic diagram illustrating the fabrication principle of a one-dimensional conductive material layer for a flexible electrode 100 according to a second embodiment of this application is shown. Figure 6 As shown, the rapid evaporation of the high-speed sprayed silver nanowire dispersion droplets induces strong capillary flow A, effectively suppressing Marangoni flow B, causing the silver nanowires 410 to aggregate from the center outwards, thus forming coffee rings 420. The coffee rings 420 interconnect to form a silver nanowire mesh layer. The thickness of the silver nanowire mesh layer can be adjusted by multiple sprayings. Then, a transparent substrate solution is spin-coated onto the silver nanowire mesh layer, transferring the silver nanowire mesh layer onto the transparent substrate 110. Finally, a two-dimensional conductive material dispersion 510 can be sprayed onto the silver nanowire mesh layer, covering it completely. Heat treatment is then performed to achieve cold welding of the silver nanowire mesh layer through capillary action.

[0070] In this embodiment, the coffee ring effect can be used to prepare a one-dimensional conductive material layer 120, thereby realizing the preparation of the flexible electrode 100. This can also reduce the cost of the flexible electrode 100 and achieve the characteristics of high conductivity and good flexibility of the flexible electrode 100.

[0071] Figure 7 A fabrication process diagram of a one-dimensional conductive material layer according to a third embodiment of this application is shown. In one embodiment, reference is made to... Figure 7 The substrate 300 is a glass substrate; forming a one-dimensional conductive material layer 120 on the substrate 300 includes: adding a surfactant and a thickener to a one-dimensional conductive material dispersion 200 to form a first mixture 710; stirring the first mixture 710 to obtain a mixture foam with bubbles 720; and dropping the mixture foam between two substrates 300 so that a one-dimensional conductive material layer 120 is formed on each substrate 300.

[0072] For example, the concentration of the one-dimensional conductive material dispersion 200, such as a silver nanowire dispersion, can be 40 mg / mL to 60 mg / mL (including endpoint values). During preparation, the first mixture 710 can be placed in a vortex mixer and stirred at high speed to generate bubbles 720, resulting in a foamy mixture. The size of the bubbles 720 can be adjusted by regulating the rotation speed of the vortex mixer and the proportion of the surfactant. The foamy mixture is then dropped between two glass substrates. After air drying, the two glass substrates are peeled apart, forming a silver nanowire mesh layer on each substrate. A transparent substrate solution is then spin-coated onto the silver nanowire mesh layer, transferring the silver nanowire mesh layer to the transparent substrate 110. Finally, a two-dimensional conductive material dispersion 510 can be sprayed onto the silver nanowire mesh layer, covering it completely. Heat treatment is then performed to achieve cold welding of the silver nanowire mesh layer through capillary action.

[0073] The distance between the two glass substrates can be 0.2 mm to 1 mm (including the endpoints) to ensure that a silver nanowire mesh layer can be formed on each glass substrate.

[0074] In this embodiment, the fabrication of a one-dimensional conductive material layer 120, such as a metal nanowire mesh layer, can be achieved by introducing air bubbles 720, thereby also enabling the fabrication of the flexible electrode 100.

[0075] Figure 8 A schematic diagram of the structure of a flexible sensor 800 according to an embodiment of this application is shown. Figure 8 As shown, a flexible sensor 800 according to a third aspect embodiment of this application includes a friction layer 810 and two flexible electrodes 100 disposed opposite each other. The friction layer 810 includes a body 811 and a plurality of protrusions 812 disposed on the body 811. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0076] The flexible electrode 100 is the flexible electrode 100 according to any embodiment of the first aspect of this application. Two flexible electrodes 100 are respectively disposed on both sides of the friction layer 810, one of the two flexible electrodes 100 is in contact with the body 811, and the other of the two flexible electrodes 100 is in contact with a plurality of protrusions 812.

[0077] For example, the friction layer 810 can be a patterned friction layer. The friction layer 810, the one-dimensional conductive material layer 120, and the two-dimensional conductive material layer 130 can all be transparent material layers to ensure the transparency of the flexible sensor 800. The flexible sensor 800 operates on the principle of triboelectric charging and electrostatic induction. Figure 9 This diagram illustrates the working principle of a flexible sensor 800 according to an embodiment of this application. (In conjunction with...) Figure 8 and Figure 9 Two flexible electrodes 100 are respectively a first electrode in contact with the protrusions 812 and a second electrode in contact with the body 811. When no pressure is applied to the first electrode, it is supported by multiple protrusions 812 and is separated from the body 811. When pressure F is applied to the first electrode, the friction layer 810 undergoes elastic deformation, and the first electrode begins to contact the friction layer 810, causing the first electrode to become positively charged and the friction layer 810 to become negatively charged. After the pressure F is released, the deformation of the friction layer 810 disappears, and the first electrode separates from the body 811. The second electrode couples out a positive charge to balance the negative charge on the surface of the friction layer 810. To balance the potential difference between the two electrodes, when the two electrodes are connected by a wire, electrons will transfer to the first electrode through the external circuit under the action of Coulomb force, and a transient charge flow will generate a current pulse. When the first electrode and the friction layer 810 return to their initial positions, the positive charge on the first electrode is completely shielded. When the first electrode and the friction layer 810 come into contact again, electrons will transfer in the opposite direction through the external circuit to balance the potential difference that reappears. One contact-separation cycle will generate an alternating current signal. The generated signal is displayed on the display 820 to monitor stress. At the same time, with the repeated contact-separation movement between the first electrode and the friction layer 810, alternating currents will be generated to enable the flexible sensor 800 to be self-powered.

[0078] Figures 10-12 A schematic diagram of the structure of the friction layer 810 according to an embodiment of this application is shown. Figures 10-12 As shown, the protrusions 812 of the friction layer 810 can be semi-circular (e.g., Figure 10 As shown), triangle (as shown) Figure 11 (as shown) or rectangle (such as) Figure 12 (as shown). Optionally, the friction layer 810 can be a polydimethylsiloxane (PDMS) film, but is not limited thereto.

[0079] According to the embodiments of this application, the flexible sensor 800, by employing the flexible electrode 100 described above, can achieve synergistic effects between the one-dimensional conductive material layer 120 and the two-dimensional conductive material layer 130, thereby realizing the fabrication of a low-cost, highly conductive, and flexible electrode 100, which can improve the performance of the flexible sensor 800.

[0080] A wearable electronic device according to a fourth aspect of this application includes a flexible electrode 100 according to any embodiment of the first aspect of this application, or includes a flexible sensor 800 according to any embodiment of the second aspect of this application.

[0081] The flexible electrode 100, the method for preparing the flexible electrode 100, the flexible sensor 800, and other components of the wearable electronic device described in the above embodiments can be derived from various technical solutions that are now and will be known to those skilled in the art, and will not be described in detail here.

[0082] In the description of this specification, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0083] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0084] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0085] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0086] The foregoing disclosure provides many different implementations or examples for carrying out different structures of this application. To simplify the disclosure, specific examples of components and arrangements are described above. Of course, these are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0087] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various variations or substitutions within the technical scope disclosed in this application, and these should all be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for preparing a flexible electrode, characterized in that, include: A transparent substrate and a one-dimensional conductive material layer are provided, wherein the transparent substrate is located on one side of the one-dimensional conductive material layer; A two-dimensional conductive material layer is formed on the side of the one-dimensional conductive material layer that is opposite to the transparent substrate; A two-dimensional conductive material layer is formed on the side of the one-dimensional conductive material layer opposite to the transparent substrate, including: Ethyl acetate was added to a dispersion of a two-dimensional conductive material to form a first thin film; Hydrochloric acid is added to the mixed solution of the two-dimensional conductive material dispersion and the ethyl acetate to convert the first film into a second film, wherein the density of the second film is greater than the density of the first film. The second film is transferred to the side of the one-dimensional conductive material layer opposite to the transparent substrate, so that the second film dries to form the two-dimensional conductive material layer.

2. The preparation method according to claim 1, characterized in that, It provides a transparent substrate and a one-dimensional conductive material layer, including: A colloidal solution is sprayed onto the transparent substrate to allow microcracks to form after the colloidal solution dries. A one-dimensional conductive material dispersion is sprayed onto the microcracks so that the one-dimensional conductive material dispersion dries to form the one-dimensional conductive material layer. Remove the colloid.

3. The preparation method according to claim 1, characterized in that, It provides a transparent substrate and a one-dimensional conductive material layer, including: The one-dimensional conductive material layer is formed on the substrate; The transparent substrate is formed on one side of the one-dimensional conductive material layer; The substrate is peeled off.

4. The preparation method according to claim 3, characterized in that, The substrate is a polymer thin film; the one-dimensional conductive material layer formed on the substrate includes: A one-dimensional conductive material dispersion is sprayed onto the substrate so that the one-dimensional conductive material dispersion forms a mesh-like one-dimensional conductive material layer under the action of capillary flow.

5. The preparation method according to claim 3, characterized in that, The substrate is a glass substrate; the one-dimensional conductive material layer formed on the substrate includes: A surfactant and a thickener are added to a one-dimensional conductive material dispersion to form a first mixture; The first mixture is stirred to obtain a mixture foam containing bubbles; The mixture foam is dropped between the two substrates to form a one-dimensional conductive material layer on each substrate.

6. A flexible electrode, characterized in that, The flexible electrode is prepared by the preparation method according to any one of claims 1 to 5, and the flexible electrode is applied to a flexible sensor, comprising: Transparent substrate; A one-dimensional conductive material layer is disposed on the transparent substrate; A two-dimensional conductive material layer covers the one-dimensional conductive material layer.

7. The flexible electrode according to claim 6, characterized in that, The one-dimensional conductive material layer is a metal nanowire mesh layer; and / or the two-dimensional conductive material layer is a transition metal carbide layer.

8. A flexible sensor, characterized in that, include: The friction layer includes a body and a plurality of protrusions disposed on the body; Two flexible electrodes as described in claim 6 or 7 are respectively disposed on both sides of the friction layer, one of the two flexible electrodes is in contact with the body, and the other of the two flexible electrodes is in contact with the plurality of protrusions.

9. A wearable electronic device, characterized in that, It includes the flexible electrode according to claim 6 or 7, or the flexible sensor according to claim 8.