Semiconductor memory device and method for manufacturing semiconductor memory device

By designing a memory cell array and peripheral circuitry in a semiconductor memory device, and utilizing GIDL and impurity element diffusion, the problem of difficult erasure in existing technologies has been solved, achieving a highly efficient erasure effect.

CN116034637BActive Publication Date: 2025-12-12KIOXIA CORP
View PDF 2 Cites 0 Cited by

Patent Information

Application Number
CN202080103412.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-10-26
Publication Date
2025-12-12
Estimated Expiration
2040-10-26

Smart Images

  • Figure CN116034637B_ABST
    Figure CN116034637B_ABST
Patent Text Reader

Abstract

A semiconductor storage device in which an easy erasing operation can be performed is provided. The semiconductor storage device includes: a laminate having a plurality of conductive layers and a plurality of insulating layers, the plurality of conductive layers including a first selection gate line connected to a gate of a first selection transistor, a word line provided above the first selection gate line and connected to a gate of a memory transistor, and a second selection gate line provided above the word line and connected to a gate of a second selection transistor; a core insulating layer having an upper surface lower than an upper surface of the second selection gate line with respect to a surface of a semiconductor substrate; a semiconductor layer including a first semiconductor portion having a channel formation region of each of the memory transistor and the first and second selection transistors, and a second semiconductor portion provided on the upper surface of the core insulating layer; and a memory layer provided between the semiconductor layer and the laminate in a first direction. The first semiconductor portion has an impurity semiconductor region containing an impurity element and overlapping the second selection gate line.
Need to check novelty before this filing date? Find Prior Art

Citation Information

Patent Citations

  • Semiconductor device and method for manufacturing same

    US10361218B2

  • Memory device including multiple gate-induced drain leakage current generator circuits

    US9916901B1