Vacuum pumping system

Abstract

The application discloses a kind of vacuum pump systems.The vacuum pump system includes air inlet pipe, vacuum pump, exhaust pipe and filter.The air inlet of vacuum pump is connected with air inlet pipe.The exhaust port of vacuum pump is connected with exhaust pipe.Filter is arranged between air inlet pipe and the air inlet of vacuum pump.And filter includes air chamber and filter plate.Filter plate is arranged in air chamber and is arranged in the conveying direction of airflow to filter airflow.The vacuum pump system of the application sets filter between air inlet pipe and the air inlet of vacuum pump, filters airflow by the filter plate of filter, so that the peculiar smell impurities carried in airflow are filtered by filter plate, and in turn reduce the peculiar smell of vacuum pump exhaust gas.

Description

Technical Field

[0001] This invention relates to vacuum systems, and more particularly to a vacuum pump system. Background Technology

[0002] Screw vacuum pumps use male and female rotors to compress gas, which is then discharged into the atmosphere through an exhaust pipe. If the gas pumped back has an odor, the gas discharged after compression will also have an unpleasant odor. Therefore, reducing the odor of the gas discharged from vacuum pumps is a problem that urgently needs to be solved. Summary of the Invention

[0003] This invention provides a vacuum pump system to reduce the odor of the gas discharged from the vacuum pump.

[0004] This invention provides a vacuum pump system, comprising:

[0005] Intake pipe;

[0006] Vacuum pump, the air inlet of the vacuum pump is connected to the air inlet pipe;

[0007] The exhaust pipe connects to the exhaust port of the vacuum pump; and

[0008] A filter is installed between the air inlet pipe and the air inlet of the vacuum pump and includes a ventilation chamber and a filter plate. The filter plate is installed in the ventilation chamber and is positioned in the direction of airflow to filter the airflow.

[0009] In some embodiments, the ventilation chamber includes a first cavity wall and a second cavity wall arranged in parallel, and a third cavity wall connecting the first cavity wall and the second cavity wall. The first cavity wall is provided with a first ventilation hole communicating with an air inlet pipe, and the third cavity wall is provided with a second ventilation hole communicating with the air inlet of a vacuum pump. The first end of the filter plate is rotatably connected to the first cavity wall. The filter also includes a preload spring connected to the first end of the filter plate. The preload spring is configured to apply a preload force away from the first ventilation hole to the filter plate. The filter plate has a first position and a second position. In the first position, the filter plate is inclined relative to the first cavity wall under the action of the preload force, and the second end of the filter plate overlaps the second cavity wall.

[0010] In some embodiments, the filter further includes an elastic pad disposed on the second cavity wall, wherein in a first position, the second end of the filter plate rests against the elastic pad.

[0011] In some embodiments, when cleaning the filter plate, the filter plate absorbs water and becomes heavier under the spray of water. Under the action of gravity, the filter plate overcomes the pre-tightening force and rotates towards the direction of the first vent to reach the second position. When the filter plate dries, the filter plate returns to the first position under the action of the pre-tightening spring.

[0012] In some embodiments, the vacuum pump system further includes a drain pipe communicating with the ventilation chamber for draining water used to clean the filter plate.

[0013] In some embodiments, the vacuum pump system further includes a drying tank, which includes a tank body and drying packing disposed within the tank body. A first end of the tank body is connected to a filter, and a second end of the tank body is connected to a vacuum pump. The airflow filtered by the filter is dried by passing through the drying packing.

[0014] In some embodiments, the vacuum pump system further includes a condenser disposed between the filter and the drying tank. When the drying packing material in the drying tank is dehydrated, hot gas enters the tank to dehydrate the drying packing material. The condensate formed during the dehydration process rises and enters the condenser through the tank.

[0015] In some embodiments, the drying tank further includes a hot air pipe distributed within the drying packing and extending from a first end of the tank to a second end of the tank, through which hot air dries the drying packing.

[0016] In some embodiments, the vacuum pump system further includes a first on / off valve, a first end of which is connected to the vacuum pump, and a second end of which is connected to an exhaust pipe. The vacuum pump system also includes a hot gas supply pipe connected to the first end of the first on / off valve and a second on / off valve disposed on the hot gas supply pipe. The hot gas supply pipe is connected to the first end of the hot gas pipe to deliver hot gas into the hot gas pipe, and the second end of the hot gas pipe is connected to the exhaust pipe.

[0017] In some embodiments, the condensate in the condenser is configured to flow to the filter to clean the filter plates.

[0018] In some embodiments, the filter plate is a corrugated plate.

[0019] In some embodiments, the vacuum pump includes a screw vacuum pump.

[0020] Based on the technical solution provided by this invention, a vacuum pump system includes an inlet pipe, a vacuum pump, an exhaust pipe, and a filter. The inlet of the vacuum pump is connected to the inlet pipe. The exhaust port of the vacuum pump is connected to the exhaust pipe. The filter is disposed between the inlet pipe and the inlet of the vacuum pump. The filter includes a ventilation chamber and a filter plate. The filter plate is disposed within the ventilation chamber and positioned in the airflow delivery direction to filter the airflow. This invention's vacuum pump system, by placing a filter between the inlet pipe and the inlet of the vacuum pump, filters the airflow through the filter plate, thereby reducing the odor of the exhaust gas from the vacuum pump by filtering out odor impurities carried in the airflow.

[0021] Other features and advantages of the invention will become clear from the following detailed description of exemplary embodiments of the invention with reference to the accompanying drawings. Attached Figure Description

[0022] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, illustrate exemplary embodiments of the invention and, together with their description, serve to explain the invention and do not constitute an undue limitation thereof. In the drawings:

[0023] Figure 1 This is a schematic diagram of the vacuum pump system according to an embodiment of the present invention.

[0024] Figure 2 for Figure 1 The diagram shows the structure of the filter in the vacuum pump system.

[0025] Figure 3 To Figure 1 The diagram shows the dehydration process of the dry packing material in the vacuum pump system.

[0026] Figure 4 for Figure 2 The diagram shows the structure of the filter plate of the filter.

[0027] Figure 5 To Figure 4 This diagram illustrates the cleaning process of the filter plate.

[0028] Figure 6 This is a schematic diagram showing the filter plate in its second position after cleaning. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0031] For ease of description, spatial relative terms such as "above," "over," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "above" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways, and the spatial relative descriptions used herein will be interpreted accordingly.

[0032] refer to Figure 1 and Figure 2 This invention provides a vacuum pump system. The vacuum pump system includes an inlet pipe 5, a vacuum pump 1, an exhaust pipe 12, and a filter 4. The inlet of the vacuum pump 1 is connected to the inlet pipe 5. The exhaust port of the vacuum pump 1 is connected to the exhaust pipe 12. The filter 4 is disposed between the inlet pipe 5 and the inlet of the vacuum pump 1. The filter 4 includes a ventilation chamber 400 and a filter plate 405. The filter plate 405 is disposed within the ventilation chamber 400 and positioned in the airflow delivery direction to filter the airflow.

[0033] The vacuum pump system of this invention sets up a filter 4 between the air inlet pipe 5 and the air inlet of the vacuum pump 1, and filters the airflow through the filter plate 405 of the filter 4, so that the odor impurities carried in the airflow are filtered by the filter plate 405, thereby reducing the odor of the gas discharged from the vacuum pump.

[0034] refer to Figure 2In some embodiments, the venting chamber 400 includes a first chamber wall 4001 and a second chamber wall 4002 arranged in parallel, and a third chamber wall 4003 connecting the first chamber wall 4001 and the second chamber wall 4002. The first chamber wall 4001 has a first vent hole communicating with the air inlet pipe 5. The third chamber wall 4003 has a second vent hole communicating with the air inlet of the vacuum pump 1. A first end of a filter plate 405 is rotatably connected to the first chamber wall. The filter 4 also includes a preload spring connected to the first end of the filter plate 405, the preload spring being configured to apply a preload force to the filter plate 405 away from the first vent hole. The filter plate 405 has a first position and a second position. In the first position, the filter plate 405 is inclined relative to the first chamber wall 4001 under the action of the preload force, and the second end of the filter plate 405 overlaps the second chamber wall 4002. Figure 2 As shown, in the first position, the first end of the filter plate 405 is disposed on the first cavity wall 4001, and the second end of the filter plate 405 is disposed on the second cavity wall 4002. In this way, the filter plate 405 is disposed at an angle in the ventilation cavity 400, so that the airflow entering from the air inlet pipe 5 can flow through the filter plate 405 to the second ventilation hole on the third cavity wall 4003, and then flow to the air inlet of the vacuum pump 1, thereby achieving the filtering effect on the airflow.

[0035] A preload spring is provided at the first end of the filter plate 405, and its function is to apply an upward force to the filter plate 405 to keep it in an inclined state. Moreover, when the vacuum pump system of this embodiment is working, the suction effect of the vacuum airflow will also cause the second end of the filter plate 405 to press more against the second cavity wall 4002, thereby improving the sealing of the second end of the filter plate 405 and thus improving the filtration performance of the filter.

[0036] To further improve sealing performance, in some embodiments, the filter 4 further includes an elastic pad 410 disposed on the second cavity wall. In a first position, the second end of the filter plate 405 rests against the elastic pad 410. The elastic pad 410 is elastic and can deform, so the elastic pad 410 can fit and abut against the second end of the filter plate 405, thereby ensuring a tight seal between the elastic pad and the second end of the filter plate 405.

[0037] refer to Figure 4 In some embodiments, the filter plate 405 is a corrugated plate. Setting the filter plate 405 as a corrugated plate increases its filtration area. When airflow passes through the filter plate 405, solid dust particles carried in the airflow are adsorbed onto the filter plate 405, thus achieving a filtering effect.

[0038] Specifically, the corrugated cross-section of the corrugated plate can be triangular.

[0039] Filter plate 405 is made of filter material.

[0040] After the filter plate 405 has been functioning for a period of time, a large amount of dust particles will adhere to it. To improve its filtration efficiency, the filter plate 405 needs to be cleaned. Specifically, as follows... Figure 5 As shown, the spray water used for cleaning flows through the inlet 401 to the leeward side of the filter plate 405, and further flows to the windward side of the filter plate 405 to achieve cleaning.

[0041] refer to Figure 6 In some embodiments, when cleaning the filter plate 405, the filter plate 405 absorbs water and becomes heavier under the spray of water. Under the action of gravity, the filter plate 405 overcomes the pre-tightening force and rotates towards the first vent to reach the second position. When the filter plate 405 dries, the filter plate 405 returns to the first position under the action of the pre-tightening spring.

[0042] In some embodiments, the vacuum pump system further includes a drain pipe 6 communicating with the ventilation chamber 400, the drain pipe 6 being used to drain water used to clean the filter plate 405.

[0043] In some embodiments, the vacuum pump system further includes a drying tank 2. The drying tank 2 includes a tank body 21 and drying packing 22 disposed within the tank body 21. A first end of the tank body 21 is connected to a filter 4, and a second end of the tank body 21 is connected to the vacuum pump 1. The airflow filtered by the filter 4 is dried by the drying packing 22. During the operation of the vacuum pump, the drying packing 22 adsorbs odorous gases from the intake airflow.

[0044] In some embodiments, the vacuum pump system further includes a condenser 3. The condenser 3 is disposed between the filter 4 and the drying tank 2. During the dehydration of the drying packing 22 in the drying tank 2, hot gas enters the tank body 21 to dehydrate the drying packing 22. The condensate formed during the dehydration process rises and enters the condenser 3 through the tank body 21. Odor gases are desorbed along with the drying packing 22 during dehydration and dissolve in the condensate. The odor gases are subsequently discharged along with the condensate.

[0045] In some embodiments, the drying tank 2 further includes a hot air pipe 23 distributed within the drying packing 22 and extending from a first end of the tank body 21 to a second end of the tank body 21, through which hot air dries the drying packing.

[0046] In some embodiments, the vacuum pump system further includes a first on / off valve 11. A first end of the first on / off valve 11 is connected to the vacuum pump 1. A second end of the first on / off valve 11 is connected to an exhaust pipe 12. The vacuum pump system also includes a hot gas supply pipe 13 connected to the first end of the first on / off valve 11 and a second on / off valve 14 disposed on the hot gas supply pipe 13. The hot gas supply pipe 13 is connected to a first end of a hot gas pipe 23 to deliver hot gas into the hot gas pipe 23, and the second end of the hot gas pipe 23 is connected to the exhaust pipe 12. By switching the first on / off valve 11 and the second on / off valve 14 on and off, the exhaust heat from other operating vacuum pumps can be used to dehydrate the drying tank.

[0047] In some embodiments, the condensate in the condenser 3 is configured to flow to the filter 4 to clean the filter plate.

[0048] In some embodiments, vacuum pump 1 includes a screw vacuum pump.

[0049] The following is based on Figures 1 to 6 The structure and operation of a vacuum pump system according to a specific embodiment of the present invention will be described in detail.

[0050] like Figure 1 As shown, the vacuum pump system in this embodiment includes a vacuum pump 1, a drying tank 2, a condenser 3, a filter 4, an air inlet pipe 5, and a drain pipe 6.

[0051] Vacuum pump 1 has an intake port and an exhaust port. The exhaust port of vacuum pump 1 is connected to an exhaust pipe 12, and a first on / off valve 11 is provided between the exhaust port and the exhaust pipe 12. The intake port of vacuum pump 1 is connected to a drying tank 2.

[0052] The drying tank 2 includes a tank body 21, a drying packing 22 disposed within the tank body 21, and a hot gas pipe 23 coiled within the drying packing 22. The first end of the hot gas pipe 23 is connected to the exhaust port of the vacuum pump 1 via a hot gas supply pipe 13, and a second on / off valve 14 is provided on the hot gas supply pipe 13. The second end of the hot gas pipe 23 is connected to an exhaust pipe 12.

[0053] The drying filler 22 can be any desiccant, such as silica gel.

[0054] Specifically, the hot air pipe 23 is arranged in a serpentine shape within the drying packing 22. The hot air supply pipe 13 is connected to the first end of the hot air pipe 23 to deliver hot air into the hot air pipe 23, and the second end of the hot air pipe 23 is connected to the exhaust pipe 12.

[0055] The upper end of the condenser 3 is connected to the drying tank 2, and the lower end of the condenser 3 is connected to the filter 4. The condenser 3 includes condenser tubes. Specifically, pipes with low thermal resistance are used. In some embodiments, the condenser 3 includes multiple sets of tubes to increase the heat dissipation area. Alternatively, pipes with good thermal conductivity, such as copper tubes, or thin-walled materials are used to ensure that the high-temperature, high-humidity gas inside the condenser can be fully condensed into water.

[0056] like Figure 2 As shown, the filter 4 includes a venting chamber 400, a filter plate 405, and an elastic pad 410. The venting chamber 400 includes a first chamber wall 4001, a second chamber wall 4002, a third chamber wall 4003, and a fourth chamber wall 4004. The first chamber wall 4001 and the second chamber wall 4002 are arranged opposite to each other, and the third chamber wall 4003 and the fourth chamber wall 4004 are arranged opposite to each other. The first end of the filter plate 405 is rotatably connected to the first chamber wall 4001 by a screw 411, and the second end of the filter plate 405 abuts against the elastic pad 410.

[0057] like Figure 1 As shown, during the operation of the vacuum pump in this embodiment, the airflow from the workshop sequentially enters the vacuum pump 1 through the inlet pipe 5, filter 4, condenser 3, and drying tank 2, and is discharged through the exhaust pipe 12. The airflow is filtered by the filter 4 to remove solid particles from the airflow, and is further dried by the drying tank 2 before being discharged through the vacuum pump 1, thereby discharging cleaner airflow and reducing the emission of external odors.

[0058] like Figure 2 As shown, filter 4 includes filter plate 405. The first end of filter plate 405 is rotatably connected by screw 411. Thus, filter plate 405 is suspended from the cavity wall of ventilation chamber 400. A preload spring is mounted on screw 411, configured to cause the dry filter plate to flip upwards to cover the airflow passage of ventilation chamber 400, thereby achieving a filtering effect. Furthermore, when vacuum pump 1 is running, the suction force of the vacuum airflow causes filter plate 405 to adhere more tightly to elastic pad 410, thus ensuring the filter's sealing performance. At the same time, the preload force of the preload spring should not be too large, refer to... Figure 6 When the filter plate 405 is cleaned and in a wet and heavy state, the filter plate overcomes the pre-tightening force and leaves the airflow channel under the action of gravity.

[0059] The elastic pad 410 can be a rubber pad.

[0060] like Figure 4As shown, the filter plate 405 includes a filter plate body and a frame 412 disposed on the circumferential edge of the filter plate body. The filter plate body is made of filter material. The filter plate body is a corrugated plate and includes multiple triangular grooves 414 and multiple ribs 413 disposed between two adjacent triangular grooves 414. This arrangement can increase the filtration area of ​​the filter plate 405 and improve the filtration effect.

[0061] When vacuum pump 1 is operating normally, condenser 3 serves as the airflow channel. The top of condenser 3 is connected to the top of drying tank 2 via a connecting pipe.

[0062] like Figure 3 As shown, in some embodiments, the vacuum pump system includes multiple vacuum pumps (other vacuum pumps are not shown). When vacuum pump 1 stops operating, the first on / off valve 11 is closed and the second on / off valve 14 is opened via valve switching. Hot gas (approximately 100°C) discharged from the other vacuum pumps enters the hot gas pipe 23 via the hot gas supply pipe 13 to heat the drying packing 22 from bottom to top, causing the moisture-absorbing packing 22 to dehydrate and regain its drying capacity. The outlet of the hot gas pipe 23 is connected to the exhaust pipe 12 to exhaust gas. In this embodiment, the vacuum pump system utilizes the exhaust gas from other operating vacuum pumps, thus utilizing the waste heat from the exhaust. Furthermore, the drying packing 22 installed inside the tank increases the dryness of the vacuum working gas. Simultaneously, the waste heat from the exhaust gas from other vacuum pumps is used to arrange the hot gas pipe 23 inside the tank to regenerate the packing and restore its moisture absorption capacity.

[0063] In other embodiments, the direction of hot air flow in the hot air pipe 23 is opposite to the direction of air flow when the vacuum pump 1 is running, thereby improving the adsorption and drying effect of the drying packing 22 during adsorption operation.

[0064] The drying packing 22, heated by the hot air pipe 23, is dehydrated. Because water vapor density is lower than air density, the moisture in the drying packing 22 evaporates from bottom to top and accumulates at the top of the drying tank 2, then enters the condenser 3 via the connecting pipe 24. During vacuum pump operation, the drying packing 22 adsorbs odorous gases from the intake airflow. As the drying packing 22 dehydrates, the odorous gases are also desorbed and dissolved in the condensate. The odorous gases are subsequently discharged along with the condensate.

[0065] To prevent hot, humid air from condensing in the connecting pipe 24 and flowing back into the dryer tank 2, the connecting pipe 24 is inclined downwards. That is, the first end of the connecting pipe 24 connects to the dryer tank 2, and the second end connects to the condenser 3, with the first end higher than the second end. This allows the condensate to flow towards the condenser. Similarly, to ensure sufficient drainage of condensate in the condenser 4, the connecting pipe between the condenser 3 and the filter 4 is also inclined downwards. The condenser 3 is a tube-and-shell design, using pipes with low thermal resistance. In some cases, multiple sets of tubes are used to increase the heat dissipation area, or pipes with good thermal conductivity such as copper are used, or thin-walled materials are used, allowing the high-temperature, high-humidity gas inside the condenser to fully condense into water. The condensate flows into the filter 4 through the connecting pipe under its own gravity.

[0066] The condensate flowing into filter 4 passes through inlet 401 and reaches the high position of filter plate 405 near screw 411. The condensate cleans the filter media in filter plate 405. Part of the condensate flows over the leeward side of filter plate 405, through the upper folded triangular groove 414, over the ribs 413, and overflows into the next folded triangular groove until it reaches the lowest point of the filter plate. Filter plate 405 is secured by a frame 412, preventing condensate from overflowing the frame. When filter plate 405 is not draining, it adheres tightly to the elastic pad 410. Another portion of the condensate passes through the filter material of filter plate 405, cleaning the windward side of filter plate 405. The condensate flows from top to bottom along the angle of inclination of filter plate 405 to the lowest point of filter plate 405. Preferably, if further cleaning of filter screen 405 is desired, tap water can be introduced through inlet pipe 403 to further clean filter plate 405.

[0067] like Figure 6 As shown, after cleaning the filter plate 405, when the filter plate 405 is in a wet and heavy state, under the action of gravity, the part of the filter plate 405 away from the screw 411 falls downward and flips, detaching from the air intake pipe, and the screw 411 vertically suspends the filter screen 405 for draining. At this time, the hot and humid air and condensate generated by the drying tank 2 are directly condensed in the subsequent pipeline and discharged into the drain pipe 6. When the water in the filter plate 405 has drained to a certain extent, and the filter plate 405 regains its filtering function, under the action of the pre-tightening force of the screw 411, the filter plate 405 flips over again and adheres tightly to the elastic pad 410, covering the air intake pipe again.

[0068] The condensate generated in the system, or the cleaning water generated during further cleaning, is led out through the pipe below the filter plate 405 and drained using a steam trap. This facilitates subsequent connection to the wastewater treatment plant for further treatment. In this embodiment, the condensate drainage process requires no additional power or energy consumption. To prevent leakage of the steam trap and subsequent vacuum loss, a water trap is installed in the drainage pipe, ensuring that the water column pressure in the trap is greater than the vacuum pump's suction pressure; that is, a water seal is also used for sealing.

[0069] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them; although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications can still be made to the specific implementation of the present invention or equivalent substitutions can be made to some technical features without departing from the spirit of the technical solutions of the present invention, and all such modifications and substitutions should be covered within the scope of the technical solutions claimed in the present invention.

Claims

1. A vacuum pump system, characterized in that, include: Intake pipe (5); Vacuum pump (1), the air inlet of the vacuum pump (1) is connected to the air inlet pipe (5); Exhaust pipe (12), the exhaust port of the vacuum pump (1) is connected to the exhaust pipe (12); and A filter (4) is provided between the air inlet pipe (5) and the air inlet of the vacuum pump (1) and includes a ventilation chamber (400) and a filter plate (405). The filter plate (405) is provided in the ventilation chamber (400) and is positioned in the airflow delivery direction to filter the airflow. The ventilation chamber (400) includes a first cavity wall and a second cavity wall arranged in parallel, and a third cavity wall connecting the first cavity wall and the second cavity wall. The first cavity wall is provided with a first ventilation hole communicating with the air inlet pipe (5), and the third cavity wall is provided with a second ventilation hole communicating with the air inlet of the vacuum pump (1). The first end of the filter plate (405) is rotatably connected to the first cavity wall. The filter (4) also includes a pre-tightening spring connected to the first end of the filter plate (405). The pre-tightening spring is configured to apply a pre-tightening force away from the first ventilation hole to the filter plate (405). The filter plate (405) has a first position and a second position. In the first position, the filter plate (405) is inclined relative to the first cavity wall under the action of the pre-tightening force and the suction of the vacuum airflow, and the second end of the filter plate (405) overlaps the second cavity wall. When the filter plate (405) is being cleaned, it absorbs water and becomes heavier under the spray of water. Under the action of gravity, the filter plate (405) overcomes the pre-tightening force and rotates towards the first vent to reach the second position. After the filter plate (405) dries, it returns to the first position under the action of the pre-tightening spring. The vacuum pump system also includes a drying tank (2) and a condenser (3). The drying tank (2) includes a tank body (21) and a drying packing (22) disposed in the tank body (21). The first end of the tank body (21) is connected to the filter (4), and the second end of the tank body (21) is connected to the vacuum pump (1). The airflow filtered by the filter (4) passes through the drying packing (22) for drying. The condenser (3) is disposed between the filter (4) and the drying tank (2). When the drying packing (22) of the drying tank (2) is dehydrated, hot air enters the tank body (21) to dehydrate the drying packing (22). The condensate formed during the dehydration process rises and enters the condenser (3) through the tank body (21). The connecting pipe between the condenser (3) and the filter (4) is configured to be inclined downward so that the condensate in the condenser (3) flows through the connecting pipe to the filter (4) to clean the filter plate.

2. The vacuum pump system according to claim 1, characterized in that, The filter (4) further includes an elastic pad (410) disposed on the second cavity wall, and in the first position, the second end of the filter plate (405) rests on the elastic pad (410).

3. The vacuum pump system according to claim 1, characterized in that, The vacuum pump system also includes a drain pipe (6) connected to the ventilation chamber (400) for draining water used to clean the filter plate (405).

4. The vacuum pump system according to claim 1, characterized in that, The drying tank (2) also includes a hot air pipe (23) distributed within the drying packing (22) and extending from the first end of the tank body (21) to the second end of the tank body (21), through which hot air dries the drying packing.

5. The vacuum pump system according to claim 4, characterized in that, The vacuum pump system further includes a first on / off valve (11), the first end of which is connected to the vacuum pump (1), and the second end of which is connected to the exhaust pipe (12). The vacuum pump system also includes a hot gas supply pipe (13) connected to the first end of the first on / off valve (11) and a second on / off valve (14) disposed on the hot gas supply pipe (13). The hot gas supply pipe (13) is connected to the first end of the hot gas pipe (23) to deliver hot gas into the hot gas pipe (23), and the second end of the hot gas pipe (23) is connected to the exhaust pipe (12).

6. The vacuum pump system according to any one of claims 1 to 3, characterized in that, The filter plate (405) is a corrugated plate.

7. The vacuum pump system according to claim 1, characterized in that, The vacuum pump (1) includes a screw vacuum pump.

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