Vacuum valve with timing control

Abstract

The present invention relates to a vacuum valve with timing control for opening and closing, comprising a sealing plate, a longitudinal driving cylinder and a transverse driving cylinder. In the closing operation, the first fluid system first pushes the first piston rod of the longitudinal driving cylinder to rise from the second position to the first position, so as to allow the first fluid to push the second piston rod of the transverse driving cylinder to move towards the valve port, and make the sealing plate close the valve port. In the opening operation, the second fluid system first pushes the second piston rod of the transverse driving cylinder to move away from the valve port, and then makes the first piston rod of the longitudinal driving cylinder to descend from the first position to the second position. Thus, the present invention does not need to use a check valve, and does not need to use the control method of area pressure ratio, and the rigidity of the longitudinal driving cylinder is not affected by the lifting of the first piston rod, so the operation is more stable.

Description

Technical Field

[0001] This invention relates to a vacuum valve, and more particularly to a vacuum valve that uses timing control for opening and closing. Background Technology

[0002] Vacuum valves are commonly used in vacuum process chambers to selectively close or open the valve ports for vacuuming processes. However, traditional vacuum valves require an additional check valve for gas distribution to control longitudinal and lateral movement. Furthermore, they employ area pressure ratio control, resulting in more complex designs, more parts, and higher costs. Their operation is also more complex and relatively unstable. Additionally, traditional vacuum valves extend the piston rod of the drive cylinder outwards, causing a sealing plate to adhere to the valve port for closure. However, the overall rigidity of traditional vacuum valves gradually decreases to a minimum as the piston rod extends outwards. Therefore, traditional technology still needs improvement. Summary of the Invention

[0003] In view of this, one of the objectives of the present invention is to provide a vacuum valve that uses timing control for opening and closing, so as to solve the problems of conventional technology.

[0004] To achieve the aforementioned objectives, the present invention proposes a vacuum valve with time-controlled opening and closing, comprising a sealing plate, at least one longitudinal drive cylinder, and at least one transverse drive cylinder. The sealing plate is used to reciprocate to a closed position or an open position to close or open a valve port. The longitudinal drive cylinder comprises a first cylinder body, a first piston plate, and a first piston rod. The first piston plate is fixed to a central section of the first piston rod, and the first piston plate is movably disposed within the first cylinder body, thereby forming a first closing air inlet chamber and a first opening air inlet chamber on both sides of the first piston plate within the first cylinder body. The transverse drive cylinder is mounted on the first piston rod of the longitudinal drive cylinder. The transverse drive cylinder includes a second cylinder body, a second piston plate, and a second piston rod. The second piston plate is connected to a central section of the second piston rod, and the top end of the second piston rod is connected to the inner side of the sealing plate. The second piston plate is movably disposed within the second cylinder body, thereby forming a second closing air intake chamber and a second opening air intake chamber on either side of the second piston plate. When a first fluid is supplied to the first closing air intake chamber of the longitudinal drive cylinder, the first fluid system pushes the first piston plate upward until the bottom end of the first piston rod rises to a first position, allowing the first closing air intake chamber to open via a closing... An intake pipe connects the second closing intake chamber and the first opening intake chamber via an opening intake pipe, thereby allowing the first fluid to enter the second closing intake chamber through the first closing intake chamber and push the second piston plate to move the sealing plate to the closed position. When a second fluid is supplied to the first opening intake chamber of the longitudinal drive cylinder, the second fluid system is first supplied to the second opening intake chamber through the first opening intake chamber and pushes the second piston plate to move the sealing plate away from the closed position. Then, the first piston plate is pushed down until the bottom end of the first piston rod descends to a second position, so that the sealing plate moves to the open position.

[0005] During the rising and falling of the first piston rod, the top and bottom ends of the first cylinder body of the longitudinal drive cylinder are simultaneously and constantly in a tight fit with the first piston rod.

[0006] The first fluid and the second fluid system are sequentially supplied to the first closing air inlet chamber and the first opening air inlet chamber, thereby causing the sealing plate to close and open the valve port accordingly.

[0007] Specifically, when the first fluid is supplied to the first closing air inlet chamber, the second flow system stops being supplied to the first opening air inlet chamber, and when the second fluid is supplied to the first opening air inlet chamber, the first flow system stops being supplied to the first closing air inlet chamber.

[0008] The air inlet of the closing air inlet is located at a third position on the bottom end of the first piston rod of the longitudinal drive cylinder, and the air inlet of the opening air inlet is located at a fourth position on the central section of the first piston rod of the longitudinal drive cylinder.

[0009] When the bottom end of the first piston rod rises to the first position, the air inlet of the closing air inlet pipe is located in the first closing air inlet chamber, and the air inlet of the opening air inlet pipe is located in the first opening air inlet chamber.

[0010] The longitudinal drive cylinders are multiple in number, and the air inlet of the closing air inlet pipe and the air inlet of the opening air inlet pipe are respectively located on the first piston rod of the two of the longitudinal drive cylinders.

[0011] It also includes a first limit switch and a second limit switch disposed at the first position and the second position, wherein when the sealing plate moves to the closed position, the first limit opening relationship at the first position is triggered, and when the sealing plate moves to the open position, the second limit opening relationship at the second position is triggered.

[0012] It also includes a first fluid supply pipe and a second fluid supply pipe that are respectively connected to the first closing air intake chamber and the first opening air intake chamber of the longitudinal drive cylinders, so as to directly supply the first fluid into the first closing air intake chamber via the first fluid supply pipe or directly supply the second fluid into the first opening air intake chamber via the second fluid supply pipe.

[0013] The first cylinder has a first opening at its top end and a second opening at its bottom end. The top end of the first piston rod passes through the first opening to connect to the second cylinder of the transverse drive cylinder. The first piston rod passes through the second opening, causing the bottom end of the first piston rod to rise to the first position or to fall to the second position.

[0014] The outline of the sealing plate can be irregular or regular.

[0015] The sealing plate can be rectangular, circular, arc-shaped, or elliptical in shape.

[0016] The first flow system is supplied manually or automatically to the first closing air intake chamber and / or the second flow system is supplied manually or automatically to the first opening air intake chamber.

[0017] The sealing plate is moved back and forth to the closed position or the open position by its own independent intake and exhaust systems.

[0018] As described above, this invention controls the opening and closing of a vacuum valve in a time-sequential manner. The sealing plate closes the valve port by independently supplying a first fluid, and opens the valve port by independently supplying a second fluid, eliminating the need for more complex control methods such as check valves. Furthermore, because this invention controls the opening and closing of the vacuum valve in a time-sequential manner, it does not require area pressure ratio control, thus its operation is far more stable than conventional technologies. In addition, the top and bottom ends of the first cylinder of the longitudinal drive cylinder of this invention maintain a constant, tight fit with the first piston rod. That is, there are two points of circumferential connection between the first piston rod and the first cylinder, and the distance between them does not change due to the lifting height of the first piston rod. Therefore, the rigidity and strength of the vacuum valve of this invention are far superior to those of conventional technologies.

[0019] To enable you to have a better understanding of the technical features and effects of this invention, preferred embodiments and detailed descriptions are provided below. Attached Figure Description

[0020] Figure 1 This is a perspective view of the vacuum valve of the present invention, wherein the sealing plate is located in the closed position.

[0021] Figure 2 This is a perspective view of the vacuum valve of the present invention, wherein the sealing plate is located in the open position.

[0022] Figure 3 This is a cross-sectional view of the vacuum valve of the present invention, wherein the sealing plate is in the closed position.

[0023] Figure 4 This is a cross-sectional view of the vacuum valve of the present invention, wherein the sealing plate is located in the open position.

[0024] Figure 5 This is a cross-sectional view of the transverse drive cylinder of the vacuum valve of the present invention, wherein the sealing plate is in the closed position.

[0025] Figure 6 This is a cross-sectional view of the transverse drive cylinder of the vacuum valve of the present invention, wherein the sealing plate is located in the open position.

[0026] Figure 7 This is a cross-sectional view of the vacuum valve of the present invention, wherein the sealing plate performs a closing action.

[0027] Figure 8 This is a cross-sectional view of the vacuum valve of the present invention, wherein the sealing plate performs the opening action.

[0028] Explanation of reference numerals in the attached figures: 10: Valve seat 11: Structure 12: Hollow interior 14: Valve port 15: Sealing plate 20: Longitudinal drive cylinder 21: First closing air intake chamber 22: First cylinder block 23: First opening of the air intake chamber 24: First Piston Plate 26: First piston rod 27: First Opening 28: Second opening 40: Lateral drive cylinder 41: Second closing air intake chamber 42: Second cylinder block 43: Second intake chamber 44: Second piston plate 46: Second piston rod 47: Third opening 50: Intake pipe fitting for closing 51a: Air intake 51b: Air outlet 52: Open the intake manifold 53a: Air intake 53b: Air outlet 60: First Limit Switch 62: Second Limit Switch 64: Dial 70: First fluid supply fitting 72: Second fluid supply fitting 100: Vacuum valve A: Closed position B: Opening position C: First position D: Second position E: Third position F: Fourth position Detailed Implementation To facilitate understanding of the technical features, content, advantages, and effects of this invention, the invention is described in detail below with reference to accompanying drawings and embodiments. The drawings used are for illustrative and supplementary purposes only and may not represent the actual scale and precise configuration of the invention in practice. Therefore, the scale and configuration of the accompanying drawings should not be used to interpret or limit the scope of the invention in actual implementation. Furthermore, for ease of understanding, the same elements in the following embodiments are indicated by the same symbols.

[0029] Furthermore, unless otherwise specified, the terms used throughout this specification and the claims generally have their ordinary meaning in the context of the art, the disclosure, and the specific content. Certain terms used to describe the invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

[0030] The use of terms such as "first," "second," "third," and "fourth" in this article does not specifically refer to any order or sequence, nor is it intended to limit this work. It is merely used to distinguish components or operations described using the same technical terminology.

[0031] Secondly, when this article uses terms such as "contains", "includes", "has", or "contains", these are all open-ended terms, meaning that they include but are not limited to.

[0032] This invention utilizes timing control to open or close a vacuum valve. The vacuum valve to which this invention is applicable is not limited to gate valves, but may also include, for example, angle valves, pendulum valves, or various types of valve structures. Please refer to [link / reference]. Figures 1 to 8 The vacuum valve 100 of the present invention, which uses timing control for opening and closing, includes a sealing plate 15, at least one longitudinal drive cylinder 20, and at least one transverse drive cylinder 40. The sealing plate 15, the longitudinal drive cylinder 20, and the transverse drive cylinder 40 are respectively disposed on a valve seat 10. The valve seat 10, for example, has a hollow interior 12, and the valve seat 10 can be rigidly connected to a structure 11 having a valve port 14, for example, by bolts. The aforementioned structure 11 can be, for example, a valve body, a vacuum chamber, or a connecting structure, and for the sake of simplicity, only a portion of the structure 11 is shown in the illustration. Furthermore, the outline of the sealing plate 15 of the present invention can be irregular or a regular shape such as rectangular (e.g., square), circular, arc-shaped, or elliptical. Although the present invention uses... Figures 1 to 8 The rectangular sealing plate shown is an example, but not a limitation thereof. The vacuum valve 100 of the present invention utilizes the sealing plate 15 to reciprocate to the closed position A or the open position B, thereby controlling whether the two sides of the valve port 14 of the structure 11 of the vacuum valve 100 are connected by the sealing plate 15 closing or opening the valve port 14.

[0033] The longitudinal drive cylinder 20 of the vacuum valve 100 of the present invention is disposed on the valve seat 10, and for example disposed in the hollow interior 12 of the valve seat 10. The longitudinal drive cylinder 20 includes a first cylinder body 22, a first piston plate 24 and a first piston rod 26. The first piston plate 24 is fixed to the central section of the first piston rod 26 rather than the top or tail end, and the first piston plate 24 is movably disposed in the first cylinder body 22, thereby forming a first closing air inlet chamber 21 and a first opening air inlet chamber 23 on both sides of the first piston plate 24 in the first cylinder body 22. The top and bottom ends of the first cylinder body 22 of the longitudinal drive cylinder 20 are airtightly sealed to the first piston rod 26 by sealing elements such as sealing rings or sealing gaskets, and the first piston plate 24 is airtightly sealed to the first cylinder body 22 by sealing elements such as sealing rings or sealing gaskets. In this way, a first closing air chamber 21 and a first opening air chamber 23 with variable volume can be formed between the two sides of the first piston plate 24 and the first cylinder body 22, respectively.

[0034] The transverse drive cylinder 40 of the vacuum valve 100 of the present invention is disposed on the first piston rod 26 of the longitudinal drive cylinder 20. The transverse drive cylinder 40 includes a second cylinder body 42, a second piston plate 44, and a second piston rod 46. The second piston plate 44 is connected to the second piston rod 46, for example, on the central section. The top end of the second piston rod 46 is connected to the inner side of the sealing plate 15, and the second piston plate 44 is movably disposed in the second cylinder body 42, thereby forming a second closing air inlet chamber 41 and a second opening air inlet chamber 43 on both sides of the second piston plate 44. The top end of the second cylinder body 42 of the transverse drive cylinder 40 has, for example, a third opening 47, through which the second piston rod 46 passes and connects to the sealing plate 15. The top of the second cylinder 42 is airtightly sealed to the second piston rod 46 by a sealing element such as a sealing ring or a sealing gasket, and the second piston plate 44 is airtightly sealed to the second cylinder 42 by a sealing element such as a sealing ring or a sealing gasket. This allows for the formation of a second closing intake chamber 41 and a second opening intake chamber 43 with variable volumes on both sides of the second piston plate 44 and between the second cylinder 42. While the sealing element is exemplified by a sealing ring or a sealing gasket, this is not intended to limit the invention, and its structure and installation method are well known to those skilled in the art, and will not be described further. The number of transverse drive cylinders 40 used in this invention can be one or more. Although three adjacent transverse drive cylinders 40 are shown as an example in the illustration, this is not a limitation. Furthermore, the second cylinder 42 may, for example, have a cylindrical inner groove, and its external shape may be, for example, cylindrical or a rectangular prism as shown in the figure.

[0035] like Figures 1 to 8 As shown, in the closing action of the vacuum valve 100 of the present invention, when a first fluid, such as gas or liquid, is supplied to the first closing inlet chamber 21 of the longitudinal drive cylinder 20, as... Figure 7As shown by the dark path, the first fluid can push the first piston plate 24 upward until the bottom end of the first piston rod 26 rises to a first position C. This allows the first closing air inlet chamber 21 of the longitudinal drive cylinder 20 to connect to the second closing air inlet chamber 41 of the transverse drive cylinder 40 via the closing air inlet pipe 50, and allows the first opening air inlet chamber 23 of the longitudinal drive cylinder 20 to connect to the second opening air inlet chamber 43 of the transverse drive cylinder 40 via the opening air inlet pipe 52. This allows the first fluid to enter the second closing air inlet chamber 41 through the first closing air inlet chamber 21 and push the second piston plate 44 of the transverse drive cylinder 40, causing the sealing plate 15 to move to the closed position A. In other words, the present invention can directly supply the first fluid to cause the sealing plate 15 to close the valve port 14 of the structure 11. Therefore, the present invention can omit components such as check valves commonly used in conventional technology, thus simplifying operation. Furthermore, this invention controls the opening and closing of the vacuum valve in a time-sequential manner, eliminating the need for area pressure ratio control. Therefore, the operation of this invention is far more stable than conventional technologies. Similarly, when the vacuum valve 100 of this invention closes, the second fluid previously in the second opening inlet chamber 43 is discharged from the second fluid supply pipe 72 via the opening inlet pipe 52 and the first opening inlet chamber 23. Figure 7 As shown by the light-colored path.

[0036] like Figures 1 to 8 As shown, in the opening operation of the vacuum valve 100 of the present invention, when a second fluid, such as gas or liquid, is supplied to the first opening inlet chamber 23 of the longitudinal drive cylinder 20, as... Figure 8 As shown in the dark path, the second flow system first connects to the second opening intake chamber 43 of the transverse drive cylinder 40 via the opening intake pipe 52 and pushes the second piston plate 44, causing the sealing plate 15 to move away from the closed position A. Then, it pushes the first piston plate 24 down until the bottom end of the first piston rod 26 descends to a second position D, so that the sealing plate 15 moves to the open position B. That is, the present invention can directly supply the second fluid to make the sealing plate 15 open the valve port 14 of the structure 11. Similarly, when the vacuum valve 100 of the present invention performs the opening action, the first fluid originally in the second closing intake chamber 41 will be discharged from the first fluid supply pipe 70 via the closing intake pipe 50 and the first closing intake chamber 21. Figure 8The light-colored path indicates this. It can be seen that in the vacuum valve of this invention, the longitudinal drive cylinder 20 and the transverse drive cylinder 40 operate using their respective independent fluid sources (air sources), and the intake and exhaust of the longitudinal drive cylinder 20 and the transverse drive cylinder 40 are performed independently. That is, the sealing plate 15 moves back and forth to the closed position A or the open position B via the aforementioned independent intake and exhaust systems. The movement of the longitudinal drive cylinder 20 and the transverse drive cylinder 40 controls the supply sequence of the first and second fluids; that is, one action must be completed before the next action can be performed. Therefore, the operation of this invention is more reliable. Moreover, this invention can supply the first and second fluids using manual or automatic control methods, thereby manually or automatically executing the opening and closing actions.

[0037] Furthermore, in the vacuum valve 100 of the present invention, the top and bottom ends of the first cylinder body 22 of the longitudinal drive cylinder 20 may respectively have a first opening 27 and a second opening 28, thereby the top end of the first piston rod 26 can pass through the first opening 27 to connect to the second cylinder body 42 of the transverse drive cylinder 40, and the first piston rod 26 passes through the second opening 28 so that the bottom end of the first piston rod 26 can rise to the first position C or the bottom end of the first piston rod 26 can fall to the second position D.

[0038] like Figure 3 As shown, the present invention also includes a closing air inlet pipe 50 and an opening air inlet pipe 52 disposed on the first piston rod 26 of the longitudinal drive cylinder 20. For clarity of illustration and explanation, the vacuum valve 100 of the present invention is exemplified by having two longitudinal drive cylinders 20, with the closing air inlet pipe 50 disposed on the first piston rod 26 of one of the longitudinal drive cylinders 20, and the opening air inlet pipe 52 disposed on the first piston rod 26 of the other longitudinal drive cylinder 20. Specifically, one air inlet 51a of the closing air inlet pipe 50 is located at a third position E on the bottom end of the first piston rod 26 of the longitudinal drive cylinder 20, and one air outlet 51b of the closing air inlet pipe 50 is connected to the second closing air inlet chamber 41 of the transverse drive cylinder 40. The air inlet 53a of the opening air inlet pipe 52 is located at the fourth position F on the central section of the first piston rod 26 of the longitudinal drive cylinder 20, and the air outlet 53b of the opening air inlet pipe 52 is connected to the second opening air inlet chamber 43 of the transverse drive cylinder 40. However, it is worth noting that the present invention is not limited to the above examples. In the present invention, the number of longitudinal drive cylinders 20 can be one or more, and the closing air inlet pipe 50 and the opening air inlet pipe 52 can also be provided, for example, on the same first piston rod 26.

[0039] According to the present invention, during the raising and lowering of the first piston rod 26, the top and bottom ends of the first cylinder body 22 of the longitudinal drive cylinder 20 simultaneously maintain a tight fit with the first piston rod 26. In other words, the overlapping area between the first piston rod 26 and the first cylinder body 22 does not change due to the raising and lowering of the first piston rod 26, thus maintaining the overall rigidity. In contrast, in conventional technology, the piston rod and cylinder body of the drive cylinder usually only have one circumferential joint, so the overall rigidity decreases as the piston rod moves outward. Therefore, the rigidity of the vacuum valve 100 of the present invention is far superior to that of conventional technology. Preferably, the first piston rod 26 is cylindrical, and the closing air inlet pipe 50 is located in the first piston rod 26, with the air inlet 51a of the closing air inlet pipe 50 exposed on the side wall of the third position E of the cylindrical first piston rod 26. Therefore, when the first piston rod 26 continues to rise until the air inlet 51a is located in the first closing air inlet chamber 21 (see...) Figure 7 The first fluid can then enter the closing air intake pipe 50 through the first closing air intake chamber 21, and further enter the second closing air intake chamber 41 of the transverse drive cylinder 40 through the closing air intake pipe 50, thereby pushing the sealing plate 15 to the closed position A, so as to close the valve port 14 (see...). Figure 5 The opening intake pipe 52 is also located in the first piston rod 26, and the air inlet 53a of the opening intake pipe 52 is exposed on the side wall of the fourth position F of the cylindrical first piston rod 26. Therefore, when the air inlet 53a of the opening intake pipe 52 is located in the first opening intake chamber 23, the second fluid can enter the opening intake pipe 52 through the first opening intake chamber 23, and further enter the second opening intake chamber 43 of the transverse drive cylinder 40 through the opening intake pipe 52, thereby pushing the sealing plate 15 away from the closed position A, so as to open the valve port 14.

[0040] Therefore, in the vacuum valve 100 of the present invention, the first fluid and the second fluid system are sequentially supplied to the first closing inlet chamber 21 and the first opening inlet chamber 23 via the first fluid supply pipe 70 and the second fluid supply pipe 72, respectively, so that the sealing plate 15 correspondingly closes and opens the valve port 14 of the structure 11. Moreover, when the first fluid is supplied to the first closing inlet chamber 21, the second fluid system stops being supplied to the first opening inlet chamber 23, and when the second fluid is supplied to the first opening inlet chamber 23, the first fluid system stops being supplied to the first closing inlet chamber 21.

[0041] Furthermore, the vacuum valve 100 of the present invention may also include a first limit switch 60 and a second limit switch 62 disposed at a first position C and a second position D, wherein the bottom end of the first piston rod 26 may be provided with a lever 64, such that when the sealing plate 15 moves to the closed position A, the lever 64 can trigger the first limit switch 60 located at the first position C. Similarly, when the sealing plate 15 moves to the open position B, the lever 64 can trigger the second limit switch 62 located at the second position D. In other words, the vacuum valve 100 of the present invention may also include a control device (not shown) that can receive the signals generated after the first limit switch 60 and the second limit switch 62 are triggered, thereby generating corresponding control commands to open or close the supply of the first fluid and the second fluid. Since those skilled in the art to which this invention pertains should be able to clearly understand how the control device controls the supply of the first fluid and the second fluid through the first limit switch 60 and the second limit switch 62 based on the disclosure of this invention, it will not be described in detail here. Furthermore, although the longitudinal drive cylinder 20 and the transverse drive cylinder 40 used in this invention are examples of fluid drive cylinders such as pneumatic cylinders, they can also be driven by servo motors or push-pull electromagnets, with push-pull electromagnets being preferred, which can save costs and provide simpler and more practical operation.

[0042] In summary, this invention controls the opening and closing of a vacuum valve in a time-sequential manner. The valve opening is closed by independently supplying a first fluid, and opened by independently supplying a second fluid, eliminating the need for more complex control methods such as check valves. Furthermore, because this invention controls the opening and closing of the vacuum valve in a time-sequential manner, it does not require area-pressure ratio control, making its operation far more stable than conventional technologies. In addition, the top and bottom ends of the first cylinder of the longitudinal drive cylinder of this invention maintain a constant, tight fit with the first piston rod. That is, there are two points of circumferential connection between the first piston rod and the first cylinder, and the distance between them does not change with the lifting height of the first piston rod. Therefore, the rigidity and strength of the vacuum valve of this invention are far superior to conventional technologies.

[0043] The above description is merely illustrative and not restrictive. Any equivalent modifications or alterations made without departing from the spirit and scope of this invention should be included in the claims.

Claims

1. A vacuum valve that uses timing control for opening and closing, characterized in that, Include: A sealing plate is used to move repeatedly to a closed position or an open position to close or open a valve port; A plurality of longitudinal drive cylinders, including a first longitudinal drive cylinder and a second longitudinal drive cylinder, each of the longitudinal drive cylinders including a first cylinder body, a first piston plate and a first piston rod, wherein the first piston plate is fixedly connected to a central section of the first piston rod and is movably disposed in the first cylinder body, thereby forming a first closing intake chamber and a first opening intake chamber on both sides of the first piston plate in the first cylinder body, wherein during the rising and falling of the first piston rod, the top and bottom ends of the first cylinder bodies of each of the longitudinal drive cylinders are simultaneously and constantly kept in a tight fit with the first piston rod; and At least one lateral drive cylinder is disposed on the first piston rod of the longitudinal drive cylinders. The lateral drive cylinder includes a second cylinder body, a second piston plate, and a second piston rod. The second piston plate is connected to a central section of the second piston rod, and the top end of the second piston rod is connected to the inner side of the sealing plate. The second piston plate is movably disposed in the second cylinder body, thereby forming a second closing intake chamber and a second opening intake chamber on both sides of the second piston plate within the second cylinder body. One of the closing intake pipes is located in the first piston rod of the first longitudinal drive cylinder, and one of the intake ports of the closing intake pipe is exposed on the side wall of a third position at the bottom end of the first piston rod of the first longitudinal drive cylinder, and moves with the first piston rod of the first longitudinal drive cylinder. The other intake pipe is located in the first piston rod of the second longitudinal drive cylinder, and one of the intake ports of the opening intake pipe is exposed on the side wall of a fourth position at the central section of the first piston rod of the second longitudinal drive cylinder, and moves with the first piston rod of the second longitudinal drive cylinder. When a first fluid is supplied to the first closing air inlet chamber of the first longitudinal drive cylinder, the first fluid system first pushes the first piston plate of the first longitudinal drive cylinder upward until the bottom end of the first piston rod of the first longitudinal drive cylinder rises to a first position. This allows the first closing air inlet chamber of the first longitudinal drive cylinder to connect to the second closing air inlet chamber via the closing air inlet pipe, and the first opening air inlet chamber of the second longitudinal drive cylinder to connect to the second opening air inlet chamber via the opening air inlet pipe. This allows the first fluid to enter the second closing air inlet chamber from the first closing air inlet chamber of the first longitudinal drive cylinder through the closing air inlet pipe and, by pushing the second piston plate, move the sealing plate to the closed position. When a second fluid is supplied to the first opening intake chamber of the second longitudinal drive cylinder, the second fluid system is first supplied from the opening intake pipe into the second opening intake chamber via the first opening intake chamber of the second longitudinal drive cylinder, pushing the second piston plate to move the sealing plate away from the closed position. This causes the second fluid to push the first piston plate of the second longitudinal drive cylinder downwards until the bottom end of the first piston rod of the second longitudinal drive cylinder descends to a second position, thereby moving the sealing plate to the open position. When the bottom end of the first piston rod of the first longitudinal drive cylinder rises to the first position, the air inlet of the closing air inlet pipe is located in the first closing air inlet chamber of the first longitudinal drive cylinder, and the air inlet of the opening air inlet pipe is located in the first opening air inlet chamber of the second longitudinal drive cylinder.

2. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, The first fluid and the second fluid system are sequentially supplied to the first closing air inlet chamber of the first longitudinal drive cylinder and the first opening air inlet chamber of the second longitudinal drive cylinder, so that the sealing plate closes and opens the valve port accordingly.

3. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, When the first fluid is supplied to the first closing air chamber of the first longitudinal drive cylinder, the second flow system stops being supplied to the first opening air chamber of the second longitudinal drive cylinder, and when the second fluid is supplied to the first opening air chamber of the second longitudinal drive cylinder, the first flow system stops being supplied to the first closing air chamber of the first longitudinal drive cylinder.

4. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, It also includes a control device, a first limit switch and a second limit switch, which are respectively disposed at the first position and the second position. When the sealing plate moves to the closed position, the first limit switch at the first position is triggered, and when the sealing plate moves to the open position, the second limit switch at the second position is triggered. The control device receives the signals generated after the first limit switch and the second limit switch are triggered, and generates corresponding control commands to open or close the supply of the first fluid and the second fluid.

5. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, It also includes a first fluid supply pipe and a second fluid supply pipe that are respectively connected to the first closing air intake chamber of the first longitudinal drive cylinder and the first opening air intake chamber of the second longitudinal drive cylinder, so as to directly supply the first fluid into the first closing air intake chamber of the first longitudinal drive cylinder through the first fluid supply pipe or directly supply the second fluid into the first opening air intake chamber of the second longitudinal drive cylinder through the second fluid supply pipe.

6. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, Each of the longitudinal drive cylinders has a first opening at its top end and a second opening at its bottom end of the first cylinder body. The top end of the first piston rod passes through the first opening to connect to the second cylinder body of the transverse drive cylinder. The first piston rod passes through the second opening, causing the bottom end of the first piston rod to rise to the first position or to fall to the second position.

7. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, The outline of the sealing plate can be irregular or regular.

8. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, The outline of the sealing plate can be rectangular, circular, arc-shaped, or elliptical.

9. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, The first flow system is supplied manually or automatically to the first closing intake chamber of the first longitudinal drive cylinder and / or the second flow system is supplied manually or automatically to the first opening intake chamber of the second longitudinal drive cylinder.

10. The vacuum valve with timing-controlled opening and closing as described in claim 1, characterized in that, The sealing plate is moved back and forth to the closed position or the open position by its own independent intake and exhaust systems.

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