Methods and systems for sample transfer

Abstract

A sample transfer system can be used to transfer a gas-sensitive sample between charged particle instruments or between a charged particle instrument and a glovebox. The sample transfer system includes a transfer shuttle for receiving a sample carrier and a transfer rod detachably coupled to the transfer shuttle. The transfer rod moves the sample carrier into or out of the transfer shuttle.

Description

Background Technology

[0001] Charged particle microscopy is a well-known and increasingly important technique for imaging and analyzing microscopic objects. During workflows involving charged particle microscopy, samples may need to be transferred between multiple tools used for imaging, processing, manipulation, and / or storage. Some samples, such as battery samples, may be gas-sensitive and therefore must be transferred in a vacuum or inert gas environment. The applicant recognizes that current sample transfer systems are bulky, difficult to operate, and may require tool modifications. Summary of the Invention

[0002] In one embodiment, a sample transfer system for transferring a sample carrier into or out of a vacuum chamber includes: a transfer shuttle including a shuttle chamber for receiving the sample carrier, and a transfer rod detachably coupled to the transfer shuttle, wherein the sample carrier can be transferred into or out of the shuttle chamber by operating the transfer rod.

[0003] In another embodiment, a method for transferring a sample into a vacuum chamber includes: attaching a first side of a transfer shuttle to a sample loader fixed to the wall of the vacuum chamber, wherein a transfer rod is detachably coupled to a second side of the transfer shuttle; providing a vacuum to the sample loader; fluidly connecting the shuttle chamber of the transfer shuttle to the vacuum chamber; and transferring a sample carrier from the shuttle chamber into the vacuum chamber by operating the transfer rod.

[0004] In another embodiment, a method for transferring a sample out of a vacuum chamber includes: mechanically attaching a sample carrier holding the sample to a shuttle carrier of a transfer shuttle, wherein the shuttle carrier is locked to a transfer rod detachably connected to the transfer shuttle; transferring the sample carrier from the vacuum chamber to a shuttle chamber of the transfer shuttle by operating the transfer rod; isolating and sealing the shuttle chamber from the sample loader; and removing the transfer shuttle from the vacuum chamber.

[0005] This allows gas-sensitive samples to be transferred into and out of the vacuum chamber using the sample transfer system without contact with air. When the transfer rod is not attached to the transfer shuttle, the sample can be transferred into and out of the glove box simply by transferring the transfer shuttle in and out. Inside the glove box, a second transfer rod can be used to transfer the sample into and out of the transfer shuttle. Due to the small profile of the transfer shuttle, a large front chamber of the glove box is not required for the transfer of gas-sensitive samples.

[0006] It should be understood that the above overview is provided to present, in a simplified form, some concepts further described in the detailed description. It is not intended to identify key or essential features of the claimed subject matter, the scope of which is uniquely defined by the claims following the embodiments. Furthermore, the claimed subject matter is not limited to embodiments that address any shortcomings pointed out above or in any part of this disclosure. Attached Figure Description

[0007] Figure 1 An example of a charged particle microscope is shown.

[0008] Figure 2A and Figure 2B A sample transfer system for transferring gas-sensitive samples between tools is illustrated.

[0009] Figure 3 An example of a sample transfer system is shown, in which the transfer shuttle is not connected to the sample loader and transfer rod.

[0010] Figure 4 A sample transfer system is shown, in which a transfer shuttle is connected to a sample loader and a transfer rod.

[0011] Figure 5A The transfer shuttle is shown.

[0012] Figure 5B The transfer lever is shown.

[0013] Figure 6A and Figure 6B Another example of a sample transfer system observed from a different perspective is shown.

[0014] Figure 7 The far end of the transfer rod is shown.

[0015] Figure 8A This is a cross-sectional view of the transfer shuttle connected to the transfer rod.

[0016] Figure 8B Is with Figure 8A The same cross-sectional view is shown, except for the transfer shuttle.

[0017] Figure 8C This is another cross-sectional view of the transfer shuttle connected to the transfer rod.

[0018] Figure 9 This is another cross-sectional view of the transfer shuttle connected to the transfer rod.

[0019] Figure 10 This is a cross-sectional view of the transfer shuttle that connects to both the transfer rod and the sample loader.

[0020] Figure 11A and 11B These are two cross-sectional views of the transfer shuttle.

[0021] Figure 12A , 12B 12C and 12D show the different positions of the transfer rod.

[0022] Figure 13 A method for transferring a sample to a charged particle microscope is shown.

[0023] Figure 14 A method for transferring a sample from a charged particle microscope to a sample transfer system is shown.

[0024] Figure 15 A method for transferring a sample from a sample transfer system to a glove box is shown.

[0025] Throughout the various views of the diagram, the same reference numerals refer to the corresponding parts. Detailed Implementation

[0026] The following description relates to systems and methods for transferring one or more samples into or out of a vacuum chamber. The sample transfer system can be used to transfer one or more samples between instruments, for example, between different charged particle instruments or between a charged particle instrument and a glove box. The charged particle instrument can be a charged particle microscope or a charged particle processing device. The charged particle instrument can image and / or process the sample. Throughout the sample transfer process, the sample is sealed and isolated from the external environment. This prevents gas-sensitive samples, such as battery samples, from being oxidized during sample transfer. The sample can be moved into or out of the transfer system by manipulating a transfer rod, for example, by sliding a transfer column along the transfer rod. The transfer rod needs to be long enough to transfer the sample to the sample stage in the vacuum chamber. In conventional sample transfer systems, the transfer rod is permanently attached to the rest of the transfer system. The applicant recognizes that a long transfer rod makes the entire transfer system bulky and difficult to manipulate. Furthermore, the transfer rod increases the overall profile of the transfer system, thus requiring a large forecourt for moving the transfer system into the glove box.

[0027] To address the aforementioned issues, this paper proposes a sample transfer system comprising a transfer shuttle and a detachable transfer rod. The transfer rod is attached to the transfer shuttle for moving the sample in and out of the shuttle. The transfer rod can be detached / removed from the transfer shuttle when the sample is securely docked or locked inside the shuttle chamber and the shuttle chamber is sealed. The sample inside the shuttle chamber can be maintained in a vacuum or inert gas environment. The sample can also be temporarily stored in the shuttle chamber of the transfer shuttle when the transfer rod is not attached. When the transfer rod is not attached to the transfer shuttle, the transfer shuttle holding the gas-sensitive sample can be moved into a glove box. Therefore, a smaller front chamber is required compared to conventional transfer systems for sample transfer. Inside the glove box, a second transfer rod can be used to move the sample in and out of the transfer shuttle. The second transfer rod can be shorter than the transfer rod used to transfer the sample to a charged particle microscope.

[0028] In one example, the transfer shuttle includes a shuttle chamber enclosed by the walls of the transfer shuttle. The shuttle chamber includes an opening that is sealed to the external environment via a shuttle valve. A first side of the shuttle chamber can be fluidly connected to a sample loader fixed to the wall of a vacuum chamber through the opening. The opposite second side of the shuttle chamber can be detachably coupled to a transfer rod. A shuttle carrier can be detachably coupled to a sample carrier for holding one or more samples. In some examples, the gas pressure inside the shuttle chamber can be monitored using a pressure sensor coupled to the wall of the transfer shuttle.

[0029] In one example, the transfer rod includes a transfer column movably sliding relative to a cylindrical housing. The transfer column can be coaxially positioned within the housing extending along the longitudinal axis of the transfer rod. The transfer column includes a distal end and a proximal end. By operating a switch on the proximal end of the transfer column, the distal end of the transfer column can be locked onto the shuttle carrier of the transfer shuttle. By sliding the transfer column relative to the housing along the longitudinal axis of the transfer rod, the shuttle carrier, along with the sample carrier locked onto the shuttle carrier, can be moved into or out of the shuttle chamber. By rotating the transfer column relative to the housing, the transfer carrier can be locked onto the wall of the transfer shuttle. When the transfer shuttle is engaged with both the transfer rod and the sample loader, the distal end of the transfer column is fluidly connected to the sample loader via a channel, bypassing the shuttle chamber. At least a portion of the channel can be embedded within the wall of the transfer shuttle. By fluidly connecting the distal end of the transfer column to the sample loader, any residual air surrounding the distal end of the transfer column can be drawn into the sample loader through the channel.

[0030] In one embodiment, a method for transferring a sample into a vacuum chamber includes: attaching a first side of a transfer shuttle to a sample loader fixed to the wall of the vacuum chamber, wherein a transfer rod is detachably coupled to a second side of the transfer shuttle; providing a vacuum to the sample loader; fluidly connecting the shuttle chamber of the transfer shuttle to the vacuum chamber; and transferring a sample carrier from the shuttle chamber to the vacuum chamber by operating the transfer rod. When a vacuum is provided to the sample loader, the distal end of the transfer rod is fluidly connected to the sample loader, while the shuttle chamber of the transfer shuttle is sealed and isolated from the sample loader. The fluid connection between the sample loader and the distal end of the transfer rod is achieved through a channel formed between the distal end of the transfer column of the transfer rod and the sample chamber. If the sample is stored in a vacuum in the shuttle chamber, the fluid connection between the shuttle chamber and the vacuum chamber can be formed by opening a shuttle valve between the shuttle chamber and the sample loader, and a loader valve between the sample loader and the vacuum chamber, after a vacuum has been formed around the distal end of the transfer column. For example, a shuttle carrier can be moved from the transfer chamber to the vacuum chamber by sliding the transfer column along the housing toward the vacuum chamber. If the sample is stored in a shuttle chamber in an inert gas environment, after a vacuum is created around the distal end of the transfer column, the sample loader is filled with inert gas to open the shuttle valve. Then, after opening the shuttle valve, the sample chamber is evacuated again before opening the loader valve to establish fluid connection between the shuttle chamber and the vacuum chamber. The sample carrier can then be transferred from the shuttle chamber to the vacuum chamber.

[0031] In another embodiment, a method for transferring a sample out of a vacuum chamber includes: mechanically coupling a sample carrier to a shuttle carrier of a transfer shuttle, wherein the shuttle carrier is locked to a transfer rod detachably connected to the transfer shuttle; transferring the sample carrier into the shuttle chamber of the transfer shuttle by operating the transfer rod; isolating and sealing the sample transfer shuttle from the vacuum chamber; and detaching the transfer shuttle from the vacuum chamber. The transfer rod can then be removed from the transfer shuttle. The sample can be stored inside the transfer shuttle or transferred to another instrument, such as another charged particle microscope or a glove box. In some instances, the shuttle chamber is filled with an inert gas before being isolated and sealed from the sample loader.

[0032] In the following detailed description, reference is made to the accompanying drawings, which form a part of the detailed description, wherein like reference numerals indicate like parts throughout, and various practical embodiments are illustrated in the drawings by way of illustration. It should be understood that other embodiments may be utilized, and structural or logical changes may be made, without departing from the scope of this disclosure. Therefore, the detailed description should not be construed as limiting.

[0033] Go to Figure 1 , Figure 1 This is a highly schematic depiction of an embodiment of a two-beam charged particle microscope (CPM). Coordinate 110 is the system coordinate. The microscope 100 includes a particle optical column 1, which generates a beam 3 of charged particles (in this case, an electron beam) propagating along an electron optical axis 101. The electron optical axis 101 can be aligned with the Z-axis of the system. The column 1 is mounted on a vacuum chamber 5, which includes a sample stage 7 and associated actuators (not shown) for positioning a sample carrier 6 held by the sample stage. The sample carrier 6 can hold one or more samples. The vacuum chamber 5 is evacuated using a vacuum pump (not depicted). The sample carrier can be introduced into or removed from the vacuum chamber via a sample loader 8 on the wall of the vacuum chamber.

[0034] The electron column 1 includes an electron source 10 and an illuminator 2. The illuminator 2 includes lenses 11 and 13 for focusing the electron beam 3 onto the sample, and a deflection unit 15 (for performing beam guidance / scanning of the beam 3). The microscope 100 further includes a controller / computer processing device 26, specifically for controlling the deflection unit 15, lenses 11, 13, and detectors 19, 21, and 41, and displaying information collected from detectors 19, 21, and 41 on a display unit 27.

[0035] Detectors 19 and 21 can be selected from a variety of possible detector types that can be used to examine different types of "stimulated" radiation emitted from the sample in response to irradiation by the (impacting) electron beam 3. For example, they can be X-ray detectors, such as silicon drift detectors (SDD) or lithium silicon (Si(Li)) detectors. For example, detector 21 can be an electron detector in the form of a solid-state photomultiplier (SSPM) or a evacuated photomultiplier tube (PMT). This can be used to detect backscattered and / or secondary electrons emitted from the sample. Microscope 100 may also include ion detectors and mass analyzers for SIMS imaging. Those skilled in the art will understand that many different types of detectors can be selected in the setup depicted, including, for example, ring / segmented detectors.

[0036] Stimulated radiation, including, for example, X-rays, infrared / visible / ultraviolet light, secondary electrons (SE), and / or backscattered electrons (BSE), is emitted from the sample by scanning beam 3 on the sample held by sample carrier 6. Since such stimulated radiation is position-sensitive (due to the scanning motion), the information obtained from detectors 19 and 21 will also be position-dependent.

[0037] Signals from the detector are transferred along control lines (bus) 25, processed by controller 26, and displayed on display unit 27. Such processing may include operations such as combination, integration, subtraction, false shading, edge enhancement, and other processes known to those skilled in the art. Additionally, automated identification processes (e.g., for particle analysis) may be included in such processing. The controller includes non-transitory memory for storing computer-readable instructions and a processor for executing the computer-readable instructions. The methods disclosed herein can be implemented by executing computer-readable instructions in a processor.

[0038] In addition to the electron column 1 described above, the microscope 100 also includes an ion column 31. The ion column contains an ion source 39 and an illuminator 32, which generate / guide a focused ion beam (FIB) 33 along an ion optical axis 34. To facilitate easy access to the sample, the ion optical axis 34 is tilted relative to the electron optical axis 101. As described above, such an ion column 31 can be used, for example, for processing / machining operations on the sample, such as cutting, grinding, etching, deposition, etc. Additionally, the ion column 31 can be used to generate images of the sample. It should be noted that the ion column 31 may be capable of generating a variety of different types of ions; therefore, a reference to the ion beam 33 need not be considered as specifying a particular type of ion in the beam at any given time—in other words, the ion beam 33 may contain ion type A for operation A (e.g., milling) and ion type B for operation B (e.g., implantation), where types A and B can be selected from a variety of possible options.

[0039] The microscope may include a gas injection system (GIS) for the purpose of performing gas-assisted etching or deposition to achieve localized injection of gases such as etching or precursor gases. For example, such gases may be stored / buffered in a reservoir and applied through a narrow nozzle to be ejected near the intersection of axes 101 and 34.

[0040] In another example, CPM is a scanning electron microscope (SEM) that only includes an electron column.

[0041] Figure 2A and 2B An example sample transfer process between different tools is illustrated. Arrows 205 to 208 indicate the sample transfer direction. The sample transfer system can be used to move samples between CPM 201 and glove box 202, or between two different CPMs (203 and 204). CPMs can be such as... Figure 1 The example shown is a dual-beam CPM or SEM. In some instances, the sample transfer system can be used to transfer samples into and out of other charged particle instruments, such as ion beam polishers and X-ray photoelectron spectrometers. In other instances, the sample transfer system can be used to transfer samples into and out of other microscopy systems, such as Raman microscopy.

[0042] Figure 3An example of a sample transfer system 210, a sample loader 303, and an outer wall 304 of a vacuum chamber is shown. In this figure, a transfer shuttle 301 is detached from or removed from the sample loader 303 and the transfer rod 300. The sample loader, transfer shuttle, and transfer rod can be assembled / connected along the Z-axis. A first side of the transfer shuttle can be connected to the sample loader, and the opposite (i.e., along the Z-axis) second side of the transfer shuttle can be connected to the transfer rod. The vacuum chamber can be part of a charged particle microscope, such as a dual-beam CPM or SEM. The sample loader 303 is fixed to the outer wall 304 of the vacuum chamber. The sample loader can be mechanically connected to the transfer shuttle using a loader clamp 321. The sample loader 303 can be isolated and sealed from the vacuum chamber by manually operating a loader valve, for example by operating the valve handle 309 of the loader valve. In some examples, the loader valve can be controlled by a controller. The sample transfer system 210 includes a transfer shuttle 301 and a detachable transfer rod 300. A first side of the transfer shuttle is mechanically connected to the sample loader 303. The transfer shuttle is isolated and sealed from the sample loader 303 by a shuttle valve. The shuttle valve can be manually operated by a valve handle 310. Alternatively, the shuttle valve can be operated by a controller. A second side of the transfer shuttle 301 can be mechanically coupled to the transfer rod 300. The transfer rod 300 includes a transfer column 306 coaxially positioned within a cylindrical housing 305. The housing 305 can be locked to the transfer shuttle using a rod clamp 322. The transfer rod can slide along its longitudinal axis (in this case, the Z-axis) by operating a knob 307. The knob 307 is fixed to the transfer column 306 and can move along a slit 311 on the housing 305. The proximal end 313 of the transfer column includes a switch 308 for locking / unlocking the transfer column to the shuttle carrier of the transfer shuttle 301. Different transfer rods, such as transfer rods of different lengths, can be used to move the sample in / out of the transfer shuttle.

[0043] Figure 4 A sample transfer system 210, coupled to a sample loader 303, is shown during sample transfer. A transfer shuttle 301 is locked to the sample loader 303 using a loader clamp 321, and a transfer rod 300 is locked to the transfer shuttle 301 using a rod clamp 322. The loader valve and shuttle valve are opened to allow the sample carrier to move in / out of the shuttle chamber of the transfer shuttle. The transfer rod is locked to the shuttle carrier, and the shuttle carrier is locked to the sample carrier 401. Figure 3 In contrast, the knob 307 slides along the slit 311 of the housing 305, so that the sample carrier 401 is outside the transfer shuttle and sample loader.

[0044] Figure 5A The transfer shuttle 301 is shown. The sample inside the transfer shuttle 301 can be maintained in a vacuum or inert gas environment. Figure 5B Another example of a transfer rod 501 is shown. (Compared to...) Figures 3 to 4The transfer lever shown is different; here, the transfer lever includes a cap 503 at the proximal end 502 of the transfer lever 501 for guiding the knob 307 to different transfer lever positions. In one example, as... Figure 12D As shown, the transfer lever can have four positions: locked, unlocked, parked, and transfer. In the locked position, the shuttle carrier is locked to the rest of the transfer shuttle. The transfer lever can be removed from the transfer shuttle. By moving the knob from the locked position to the unlocked position, the shuttle carrier assembly is unlocked from the shuttle chamber and can move along the longitudinal axis of the transfer lever. In the parked position, the shuttle carrier can be rotated about and slid along the longitudinal axis of the transfer lever using the transfer pin. In the transfer position, the transfer pin can push the shuttle carrier along a slit in the housing to move the shuttle carrier to the outside of the transfer shuttle.

[0045] Figure 6A and Figure 6B These are two different views of another instance of a transfer shuttle connected to a transfer rod. Figures 3 to 4 Unlike the transfer shuttle shown in 5A, the transfer shuttle 601 includes a pressure sensor 603 for monitoring the pressure in the shuttle chamber. The knob 605 of the transfer lever is in the locked position. The shuttle valve 604 is opened to allow the shuttle carrier to extend outside the shuttle chamber. The shuttle valve 604 is opened using the valve handle 606. Here, the shuttle valve 604 has a double-door mechanism.

[0046] Figure 7 The distal end of the transfer rod 602 is shown when the distal end 704 of the transfer column is not connected to the transfer carrier. The transfer rod 602 includes a housing 701 and a clamp 705. The distal end 704 of the transfer column includes a trapezoidal member 702 and a cap 703. The transfer rod can be rotatably aligned with the transfer shuttle via a guide pin on the transfer shuttle.

[0047] Figure 8A yes Figure 6A and 6B The enlarged cross-sectional view of the sample transfer system shown indicates that the transfer shuttle 601 is locked with a transfer rod 602 having a rod clamp 705. The cross-sectional view is parallel to the longitudinal axis (Z-axis) of the transfer rod 602. The transfer rod is in the locked position. The transfer shuttle 601 includes a shuttle chamber 830 for receiving or storing a sample carrier. The shuttle chamber 830 is surrounded by a wall 831. The shuttle carrier 801 can be locked to a sample carrier (not shown here) using a first pin 802 of the shuttle carrier. The shuttle carrier 801 includes a second pin 810 for docking / locking the sample carrier to the wall 831 of the shuttle chamber. The shuttle carrier can be released from the wall 831 by rotating and sliding the shuttle carrier relative to the Z-axis using a transfer post 821. By rotating and sliding the shuttle carrier, the second pin 810 can be released from a groove in the wall 831.

[0048] Figure 8B In Figure 8AThe same cross-sectional view shows only the transfer shuttle, not the transfer rod. In this view, the transfer rod is still attached to the transfer shuttle. The transfer rod is not shown so that the features of the transfer shuttle can be seen. The first side of the transfer chamber includes a first opening 808 that can be sealed by the shuttle valve 604. The opposite second side of the transfer chamber has a second opening 807 sealed by the transfer carrier 801, O-ring 822, and O-ring 823. The first opening 808 can be coupled to a sample loader. Figure 8A and 8B The cross-sectional view is generated by visualizing a portion of channel 804. At least a portion of channel 804 is within wall 831. Channel 804 also extends into region 825 (i.e., the region between O-rings 822 and 823). Through channel 804, the sample loader is fluidly connected to the distal end of the transfer column, bypassing the shuttle chamber. In this way, gas at the distal end of transfer column 821 can be drawn into the sample loader through the channel.

[0049] Figure 8C This is an enlarged cross-sectional view showing the connection between transfer rod 602 and transfer shuttle 601. The cross-section is parallel to the Z-axis. The transfer rod is in the locked position. The second pin 810 is within the groove 1101. Region 825 is fluidly connected to channel 804 through hole 833. Thus, the distal end of transfer column 821 is fluidly connected to sample loader through channel 804. Region 825 is sealed to region 832 (the region formed by transfer column 821, housing 701, and transfer shuttle 601) by O-ring 822. Shuttle chamber 830 is sealed to region 825 by O-ring 823. The positions of O-rings 822 and 823 are shown by intersecting dashed lines.

[0050] Figure 9 yes Figure 6A and 6B Another enlarged cross-sectional view of the sample transfer system shown. The cross-sectional view is parallel to the longitudinal axis (Z-axis) of the transfer rod 602. The transfer column 821 includes a transfer column core 902 that is movably slidable relative to the transfer column housing 905. Operating the transfer rod to lock the transfer column to the shuttle carrier includes a switch for operating the transfer column (e.g., ...). Figure 6A The transfer column core is slidable relative to the transfer column housing via switch 607. By doing so, at the distal end of the transfer column, trapezoidal member 702 pushes cap 703 against container 904 of shuttle carrier assembly 801 and compresses spring 903. Thus, the distal end of the transfer column is locked to the shuttle carrier. When the transfer column is locked to the shuttle carrier, there is no relative rotation or translation between the transfer column and the shuttle carrier. When the transfer rod is in the unlocked or locked position as shown, region 825 is fluidly connected to region 908 (around trapezoidal member 702). In this way, gas in region 908 can be removed through channel 804. O-ring 907 seals the distal end of transfer column 821 to the rest of the transfer column.

[0051] Figure 10 A cross-sectional view of an example sample transfer system 1006 coupled to a sample loader 1007 is shown. The cross-sectional view is parallel to the longitudinal axis (Z-axis) of the transfer rod. The sample transfer system 1006 includes a transfer rod locked to a transfer shuttle. A shuttle valve 1001 is opened between a shuttle chamber 1008 and a chamber 1009 of the sample loader 1007. The sample loader can be sealed to the vacuum chamber via a loader valve 1002. The sample loader 1007 includes an opening 1003 for drawing gas to the outside of the sample loader. Gas can also enter the sample loader through the opening.

[0052] Figure 11A It is along Figure 6B The XY cross-sectional view along line A-A' is shown. When the transfer lever is in the unlocked position, the shuttle carrier device 801 is unlocked from the wall 831 of the transfer shuttle. In this position, by pushing the shuttle carrier 801 along the Z-axis, the second pin 810 can be displaced from the groove 1101 on the wall 831. In the direction opposite to the Z-axis, the groove 1101 first extends along the Z-axis and then twists about the Z-axis. Thus, when the transfer lever is moved from the parked position to the locked position, the second pin first slides against the Z-axis direction and then rotates about the Z-axis to the locked position.

[0053] Figure 11B It is along Figure 6B The XY cross-sectional view of line B-B' shown. Cap 703 and container (e.g.) Figure 9 The transfer shuttle wall around container 904 forms channels to allow gas around transfer core 902 to be drawn into region 825, as indicated by arrow 1104. Gas can then be drawn along channels partially embedded in the transfer shuttle wall (e.g., Figure 8B Channel 804 removes gas from region 825 into the sample loader. In this way, gas or air at the distal end of the transfer rod (or around the distal end of the transfer column) can be removed before the shuttle valve is opened.

[0054] Figure 12A , 12B Figures 12C and 12C show the transfer lever in the locked, unlocked / parked, and transfer positions, respectively. Figure 12D The position of the corresponding knob near the end of the transfer lever is shown. Figure 12A The locking position in the groove (e.g.) Figure 11A The second pin of the shuttle carrier device in the groove 1101 is not aligned with the groove opening 1201 leading to the shuttle chamber 830. Figure 12B In the unlock / parking position, the second pin 810 of the shuttle carrier is aligned with the groove opening 1201, and can be moved out of the groove by pushing the transfer post along the Z-axis. Figure 12CAt the transfer position, the second pin is outside the groove opening and aligned along the Y-axis. The shuttle carrier is ready to be transferred to the outside of the shuttle chamber 830.

[0055] Figure 13 An example method 1300 for transferring a sample into a vacuum chamber (e.g., a CPM vacuum chamber) using a sample transfer system is shown. The sample is placed on a sample carrier attached to a transfer shuttle.

[0056] At point 1302, connect the transfer rod to the transfer shuttle and lock the transfer rod to the shuttle carrier. The transfer rod can be secured using a rod clamp (e.g., Figure 3 The lever clamp 322 in the middle is connected to the transfer shuttle. This is achieved by operating a switch near the end of the transfer column (e.g., ...). Figure 3 Switch 308 (in the middle) can lock the transfer rod to the shuttle carrier device. Locking the transfer rod to the shuttle carrier includes locking the distal end of the transfer column to the shuttle carrier. The transfer rod is in the locked position.

[0057] At position 1304, attach the transfer shuttle to the sample loader. The transfer shuttle can be connected using a loader fixture (e.g., Figure 3 The loader clamp 321 is attached to the sample loader fixed to the wall of the vacuum chamber. A fluid connection is formed between the sample loader and the distal end of the transfer rod. For example, this can be achieved by forming a channel (e.g., between the distal end of the sample loader and the distal end of the transfer rod) Figures 8A to 8C The fluid connection is formed by channel 804 in the middle. In some instances, the transfer rod can be connected to the transfer shuttle after the transfer shuttle is connected to the sample loader.

[0058] At 1306, the sample loader is evacuated by providing a vacuum in the chamber of the sample loader. For example, the gas / air in the sample loader can be released from an opening in the sample loader wall (e.g., Figure 10 Aspiration occurs at the opening 1003. Due to the fluid connection between the sample loader and the distal end of the transfer rod, the distal end of the transfer rod is also evacuated. That is, gas / air is removed from the distal end of the transfer rod (or transfer column) through the channel formed at 1304.

[0059] At 1308, method 1300 checks whether the sample is stored in a vacuum environment within the shuttle chamber. If the shuttle chamber is under vacuum, method 1300 moves to 1310. Otherwise, if the shuttle chamber is not under vacuum (air or inert gas), method 1300 moves to 1312 to open the shuttle valve between the shuttle chamber and the sample loader.

[0060] At position 1312, the sample loader is filled with inert gas. At position 1306, inert gas can flow into the sample loader through the same opening used for evacuating gas.

[0061] At point 1314, after the sample loader reaches the threshold gas pressure, the shuttle valve between the shuttle chamber and the sample loader is opened. Alternatively, the shuttle valve can be opened after a predetermined time of gas flow.

[0062] At 1316, the sample loader was evacuated again to remove the inert gas from the shuttle chamber and the sample loader.

[0063] At point 1318, after the sample loader reaches the threshold vacuum, the sample loader valve between the sample loader and the vacuum chamber is opened. The sample loader pressure can be monitored using a pressure sensor connected to the transfer shuttle. In some instances, the sample loader valve can be opened after a predetermined time has evicted the sample loader.

[0064] At 1320, remove the shuttle carrier from the transfer shuttle. The shuttle carrier device can be removed from the transfer shuttle by moving the knob on the transfer lever sequentially from the locked position to the unlocked position, the parked position, and the switching position.

[0065] At position 1322, the sample carrier locked to the shuttle carrier is transferred into the vacuum chamber by sliding the transfer column along the longitudinal axis of the transfer rod.

[0066] At position 1324, the sample carrier is detached from the shuttle carrier. The sample carrier can then be coupled to the sample stage in the vacuum chamber for charged particle beam imaging or processing of the sample held on the sample carrier.

[0067] After the sample carrier is transferred into the vacuum chamber, the sample transfer system can remain attached to the vacuum chamber wall or be detached from the vacuum chamber wall.

[0068] Figure 14 An example method 1400 for transferring a sample carrier from the vacuum chamber of a CPM to a transfer shuttle is shown.

[0069] At 1402, the sample carrier is removed from the sample stage and locked to the shuttle carrier extending into the CPM vacuum chamber using a transfer rod.

[0070] At position 1404, the shuttle carrier, together with the sample carrier, retracts from the CPM vacuum chamber and moves into the shuttle chamber.

[0071] At 1406, the shuttle carrier is locked to the transfer shuttle wall by moving the transfer lever to the locking position.

[0072] At 1408, close the sample loader valve to isolate and seal the sample loader from the CPM vacuum chamber.

[0073] At position 1410, the shuttle chamber is optionally filled with an inert gas (e.g., argon). For example, the gas can flow into the shuttle chamber through an opening in the wall of the sample loader. The gas pressure in the shuttle chamber can be monitored using a pressure sensor coupled to the transfer shuttle (if the sample needs to be transferred under Ar). At position 1412, close the shuttle valve. This isolates and seals the shuttle chamber from the external environment.

[0074] At point 1414, the transfer rod can be detached from the transfer shuttle by operating the switch and release lever clamp near the end of the transfer column. (Alternatively, the transfer rod and shuttle can be removed from the loader.) Figure 15 This is Example Method 1500 for transferring samples into a glove box using a sample transfer system. The transfer rod can be held inside the glove box for moving the sample inside / outside the transfer shuttle. The transfer rod used inside the glove box can be... Figure 14 and 15 The transfer rod used in CPM for sample transfer is short.

[0075] At position 1502, the transfer shuttle holding the sample is moved into the glove box through the anterior chamber.

[0076] At position 1504, connect the transfer rod inside the glove box to the transfer shuttle. Additionally, lock the distal end of the transfer column to the shuttle carrier.

[0077] At position 1506, open the shuttle valve to make the shuttle chamber fluidly connected to the glove box.

[0078] At 1508, the shuttle carrier is unlocked from the transfer shuttle by moving the transfer lever from the locked position to the transfer position.

[0079] At position 1510, the sample carrier locked to the shuttle carrier can be moved out of the shuttle chamber. The operator can then manually remove the sample carrier from the sample transfer system.

[0080] By reversing the steps of method 1500, the sample carrier can be transferred to the outside of the glove box using a sample transfer system.

[0081] In this way, the transfer shuttle can be detached from the transfer rod when moving samples in and out of the glove box. A separate short transfer rod can be used to open or close the transfer shuttle inside the glove box. The short transfer rod can be easily moved into the existing glove box of the anteroom.

[0082] The technical advantage of a sample transfer system with a detachable transfer rod is a reduced overall profile, allowing samples to be moved in and out of a glovebox with a relatively small front chamber using only a transfer shuttle. The technical advantage of fluidly connecting the distal end of the transfer rod to the sample loader is that gas / air adjacent to the distal end of the transfer column can be removed before opening the shuttle valve. The technical advantage of including a pressure sensor for measuring shuttle chamber pressure is the ability to monitor the sample storage environment within the shuttle chamber.

[0083] Clause 1. A sample transfer system for transferring a sample carrier into or out of a vacuum chamber, comprising: a transfer shuttle including a shuttle chamber for receiving the sample carrier; and a transfer rod detachably coupled to the transfer shuttle, wherein the sample carrier can be transferred into or out of the shuttle chamber by operating the transfer rod.

[0084] Clause 2. The sample transfer system according to Clause 1, wherein the transfer rod can be isolated and sealed from the shuttle chamber.

[0085] Clause 3. The sample transfer system according to Clauses 1 to 2, wherein the transfer shuttle is detachably coupled to a sample loader fixed to the wall of the vacuum chamber, and the distal end of the transfer rod is fluidly connected to the sample loader while being isolated and sealed from the shuttle chamber.

[0086] Clause 4. The sample transfer system according to Clause 3, wherein the distal end of the transfer rod is fluidly connected to the sample loader via a channel, at least a portion of which is embedded in the wall of the transfer shuttle.

[0087] Clause 5. The sample transfer system according to Clauses 1 to 4, wherein the transfer rod includes a transfer column and a housing extending along the longitudinal axis of the transfer rod, and operating the transfer rod includes sliding the transfer column relative to the housing.

[0088] Clause 6. The sample transfer system according to Clause 5, wherein the transfer column includes a distal end detachably coupled to a shuttle carrier of the transfer shuttle, the sample carrier being detachably coupled to the shuttle carrier.

[0089] Clause 7. The sample transfer system according to Clause 6, wherein the transfer column further includes a switch for locking the transfer column to the shuttle carrier.

[0090] Clause 8. The sample transfer system according to Clause 6, wherein the transfer column further includes a knob for adjusting the position of the shuttle carrier.

[0091] Clause 9. The sample transfer system according to Clause 8, wherein the transfer column slides movably along the housing by pushing the knob along the housing.

[0092] Clause 10. The sample transfer system according to Clause 9, wherein the knob slides along a slit on the housing, wherein the slit extends along the longitudinal axis of the transfer rod.

[0093] Clause 11. The sample transfer system according to Clauses 1 to 10, wherein the housing is cylindrical.

[0094] Clause 12. The sample transfer system according to Clauses 1 to 11, wherein the vacuum chamber is the sample chamber of a charged particle instrument.

[0095] Clause 13. The sample transfer system according to Clauses 1 to 12, wherein the sample transfer system further includes a pressure sensor for monitoring the pressure in the shuttle chamber.

[0096] Clause 14. The sample transfer system according to Clauses 1 to 13, wherein one or more samples are positioned on the sample carrier, and at least one of the one or more samples is irradiated with a beam of charged particles in the vacuum chamber while the one or more samples are held by the sample carrier.

[0097] Clause 15. The sample transfer system according to Clauses 1 to 14, wherein the transfer shuttle further includes a shuttle valve for sealing the shuttle chamber with the sample loader.

[0098] Clause 16. A method for transferring a sample to a vacuum chamber, comprising: The first side of the transfer shuttle is attached to a sample loader fixed to the wall of the vacuum chamber, wherein the transfer rod is detachably connected to the second side of the transfer shuttle; Provide a vacuum to the sample loader; The shuttle chamber of the transfer shuttle is fluidly connected to the vacuum chamber; and The sample carrier is transferred from the shuttle chamber to the vacuum chamber by operating the transfer rod.

[0099] Clause 17. The method according to Clause 16 further comprises: fluidly connecting the distal end of the transfer rod to the sample loader before providing a vacuum to the sample loader, while maintaining the shuttle chamber isolated and sealed from the transfer rod and the sample loader.

[0100] Clause 18. The method according to Clauses 16 to 17, wherein isolating and sealing the transfer shuttle from the sample loader with a shuttle valve, and fluidly connecting the shuttle chamber to the sample loader includes opening the shuttle valve.

[0101] Clause 19. The method according to Clauses 16 to 18, wherein the distal end of the transfer rod is fluidly connected to the sample loader via a channel partially located within the wall of the transfer shuttle.

[0102] Clause 20. The method according to Clauses 16 to 19, wherein the transfer rod includes a transfer column enclosed by a housing, the transfer column being movably slidable within the housing, and when the distal end of the transfer rod is fluidly connected to the sample loader, gas at the distal end of the transfer column is drawn off by the vacuum in the sample loader.

[0103] Clause 21. The method according to Clauses 16 to 20, wherein detachably connecting the transfer rod to the second side of the transfer shuttle includes locking the transfer post of the transfer rod to the shuttle carrier of the transfer shuttle.

[0104] Clause 22. The method described pursuant to Clauses 16 to 21 further comprises: Before attaching the first side of the transfer shuttle to the sample loader, the sample carrier is loaded into the shuttle chamber in the glove box using a second transfer rod attached to the second side of the transfer shuttle; The shuttle chamber is isolated and sealed; Remove the second transfer rod from the transfer shuttle; and Move the transfer shuttle out of the glove box.

[0105] Clause 23. The method according to Clauses 16 to 22, wherein transferring the sample carrier from the shuttle chamber to the vacuum chamber comprises transferring the sample carrier from the shuttle chamber to a sample stage in the vacuum chamber.

[0106] Clause 24. The method according to Clauses 16 to 23, wherein the transfer rod includes a transfer column enclosed within a housing, the transfer column being movably slidable within the housing, and transferring the sample carrier from the shuttle chamber to the vacuum chamber includes sliding the transfer column relative to the housing toward the vacuum chamber.

[0107] Clause 25. The method according to Clauses 16 to 24, wherein the first side is opposite to the second side.

[0108] Clause 26. The method described in Clauses 16 to 25 further comprises: filling the sample loader with an inert gas after providing a vacuum to the sample loader and before fluidly connecting the shuttle chamber to the vacuum chamber; fluidly connecting the shuttle chamber to the sample loader; and providing a vacuum in the sample loader.

[0109] Clause 27. A method for transferring a sample out of a vacuum chamber, comprising: The sample carrier holding the sample is mechanically coupled to the shuttle carrier of the transfer shuttle, wherein the shuttle carrier is locked to a transfer rod that is detachably connected to the transfer shuttle; The sample carrier is transferred from the vacuum chamber to the shuttle chamber of the transfer shuttle by operating the transfer rod; The shuttle chamber is isolated and sealed from the vacuum chamber; and Remove the transfer shuttle from the vacuum chamber.

[0110] Clause 28. The method according to Clause 27, wherein isolating and sealing the shuttle chamber from the transfer rod includes closing the shuttle valve of the transfer shuttle.

[0111] Clause 29. The method according to Clauses 27 to 28 further comprises removing the transfer rod from the transfer shuttle after isolating and sealing the shuttle chamber from the vacuum chamber.

[0112] Clause 30. The method according to Clauses 27 to 29 further comprises filling the shuttle chamber with an inert gas before isolating and sealing the shuttle chamber from the vacuum chamber.

[0113] Clause 31. The method according to Clauses 27 to 30, wherein the vacuum chamber is the sample chamber of a charged particle instrument.

Claims

1. A sample transfer system for transferring a sample carrier into or out of a vacuum chamber, comprising: A transfer shuttle, the transfer shuttle including a shuttle chamber for receiving the sample carrier; and A transfer rod, detachably connected to the transfer shuttle, wherein the sample carrier can be transferred into or out of the shuttle chamber by operating the transfer rod. The transfer rod includes a transfer post and a housing extending along the longitudinal axis of the transfer rod, and operating the transfer rod includes sliding the transfer post relative to the housing.

2. The sample transfer system according to claim 1, wherein the transfer rod is capable of being isolated and sealed from the shuttle chamber.

3. The sample transfer system according to claim 2, wherein the transfer shuttle is detachably coupled to a sample loader fixed to the wall of the vacuum chamber, and the distal end of the transfer rod is fluidly connected to the sample loader while being isolated and sealed from the shuttle chamber.

4. The sample transfer system of claim 3, wherein the distal end of the transfer rod is fluidly connected to the sample loader via a channel, at least a portion of the channel being embedded in the wall of the transfer shuttle.

5. The sample transfer system according to claim 1, wherein the transfer column includes a distal end detachably connected to a shuttle carrier of the transfer shuttle, the sample carrier being detachably connected to the shuttle carrier.

6. The sample transfer system according to any one of claims 1 to 5, wherein the vacuum chamber is the sample chamber of a charged particle instrument.

7. The sample transfer system according to any one of claims 1 to 5, wherein the sample transfer system further comprises a pressure sensor for monitoring the pressure in the shuttle chamber.

8. The sample transfer system according to any one of claims 1 to 5, wherein one or more samples are positioned on the sample carrier, and at least one of the one or more samples is irradiated with a charged particle beam in the vacuum chamber while the one or more samples are held by the sample carrier.

9. A method for transferring a sample into a vacuum chamber, comprising: The first side of the transfer shuttle is attached to a sample loader fixed to the wall of the vacuum chamber, wherein the transfer rod is detachably connected to the second side of the transfer shuttle; Provide a vacuum to the sample loader; The shuttle chamber of the transfer shuttle is fluidly connected to the vacuum chamber; and The sample carrier is transferred from the shuttle chamber to the vacuum chamber by operating the transfer rod. The transfer rod includes a transfer column enclosed by a housing, the transfer column being movably slidable within the housing.

10. The method of claim 9, further comprising: fluidly connecting the distal end of the transfer rod to the sample loader before providing a vacuum to the sample loader, while maintaining the shuttle chamber isolated and sealed from the transfer rod and the sample loader.

11. The method of claim 10, wherein isolating and sealing the transfer shuttle from the sample loader with a shuttle valve, and fluidly connecting the shuttle chamber to the sample loader includes opening the shuttle valve.

12. The method of claim 10, wherein the distal end of the transfer rod is fluidly connected to the sample loader via a channel partially located within the wall of the transfer shuttle.

13. The method of claim 10, wherein when the distal end of the transfer rod is fluidly connected to the sample loader, the gas at the distal end of the transfer column is drawn off by the vacuum in the sample loader.

14. The method of claim 10, wherein detachably connecting the transfer rod to the second side of the transfer shuttle comprises locking the transfer post of the transfer rod to the shuttle carrier of the transfer shuttle.

15. The method of claim 10, further comprising: Before attaching the first side of the transfer shuttle to the sample loader, the sample carrier is loaded into the shuttle chamber in the glove box using a second transfer rod attached to the second side of the transfer shuttle; The shuttle chamber is isolated and sealed; Remove the second transfer rod from the transfer shuttle; as well as Move the transfer shuttle out of the glove box.

16. The method according to any one of claims 9 to 15, further comprising: filling the sample loader with an inert gas after providing a vacuum to the sample loader and before fluidly connecting the shuttle chamber to the vacuum chamber; fluidly connecting the shuttle chamber to the sample loader; and providing a vacuum in the sample loader.

17. A method for transferring a sample out of a vacuum chamber, comprising: The sample carrier holding the sample is mechanically coupled to the shuttle carrier of the transfer shuttle, wherein the shuttle carrier is locked to a transfer rod that is detachably connected to the transfer shuttle; The sample carrier is transferred from the vacuum chamber to the shuttle chamber of the transfer shuttle by operating the transfer rod, wherein the transfer rod includes a transfer column and a housing extending along the longitudinal axis of the transfer rod, and operating the transfer rod includes sliding the transfer column relative to the housing; The shuttle chamber is isolated and sealed from the vacuum chamber; and Remove the transfer shuttle from the vacuum chamber.

18. The method of claim 17, further comprising removing the transfer rod from the transfer shuttle after isolating and sealing the shuttle chamber from the vacuum chamber.

19. The method of claim 17, further comprising filling the shuttle chamber with an inert gas before isolating and sealing the shuttle chamber from the vacuum chamber.

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