Connector for electrical connection

Abstract

A connector for electric connection according to an embodiment of the present disclosure includes: an insulating portion having electrical insulation; a conductive portion supported by the insulating portion, extending in a vertical direction, and having electrical conductivity; and a plurality of hollow particles inserted in at least one of the insulating portion and the conductive portion and having a hollow formed inside.

Description

Technical Field ,

[0010]

[0001] The present disclosure relates to a connector for electrical connection disposed between a device under test and an inspection device. Background Art

[0002] In order to determine whether a device under test such as a manufactured semiconductor device is qualified, in an inspection process, a connector for electrical connection should be disposed between the device under test and the inspection device. Known inspection methods include electrically connecting the device under test and the inspection device through the connector for electrical connection to make the device under test operate, thereby determining whether the device under test is qualified.

[0003] The connector for electrical connection may include: an insulating portion made of an elastic material such as silicon; and a plurality of conductive portions extending in the vertical direction within the insulating portion such that electricity flows in the vertical direction. The connector for electrical connection requires a stroke (a range in which it operates while maintaining electrical contact) when the device under test presses on the connector for electrical connection. Summary of the Invention

[0004] Problems to be Solved by the Invention

[0005] Embodiments of the present disclosure provide a connector for electrical connection as follows, that is, it can increase the stroke and reduce the contact pressure with the device under test.

[0006] Regarding the connector for electrical connection, when a foaming agent is used to form bubbles in the insulating portion in order to increase the stroke, it will be difficult to form pore sizes as intended by the designer. For example, when a foaming agent is used to form bubbles in the insulating portion, it is difficult to make the bubble sizes uniform. Embodiments of the present disclosure are used to solve the problems that occur when a foaming agent is used.

[0007] Since existing connectors for electrical connection are made of materials that are difficult to compress, there is a problem as follows, that is, a relatively large force is required to compress the conductive portion in the vertical direction. An embodiment of the present disclosure is used to solve this problem.

[0008] Solutions to the Problems

[0009] The connector for electrical connection provided by embodiments of the present disclosure is disposed between a device under test and an inspection device such that the device under test and the inspection device are electrically connected in the vertical direction. In a representative embodiment, the connector for electrical connection includes: an insulating portion having electrical insulation; a conductive portion supported by the insulating portion and extending in the vertical direction, having conductivity; and a plurality of hollow particles inserted into at least one of the insulating portion and the conductive portion and having a hollow formed therein.

[0010] According to one embodiment, the plurality of hollow particles may include insulating insert particles inserted into the insulating portion. A boundary may be formed between the insulating insert particles and the insulating portion.

[0011] According to one embodiment, the plurality of hollow particles may include a plurality of insulating portion insert particles inserted into the insulating portion. In the connector for electrical connection, the density of the plurality of insulating portion insert particles may be greater in the portion surrounding the conductive portion than in the portion spaced apart from the conductive portion.

[0012] According to one embodiment, the plurality of hollow particles may include a plurality of conductive insert particles inserted into the conductive portion. The conductive portion may include: an upper electrode portion forming the upper end of the conductive portion; and a conductive connection portion extending downward from the upper electrode portion. In the aforementioned electrical connection connector, the density of the plurality of conductive insert particles may be greater at the upper electrode portion than at the conductive connection portion.

[0013] According to one embodiment, the hollow particle can have multiple mutually distinct hollows inside.

[0014] According to one embodiment, multiple hollow particles can form a cluster of hollow particles.

[0015] According to one embodiment, the plurality of hollow particles may include open particles that surround the hollow portion around which the hollow portion is open.

[0016] According to one embodiment, the hollow particle may include a membrane surrounding the hollow portion. The membrane may contain an insulating material.

[0017] According to one embodiment, the insulating material may comprise one of rubber, polyethylene, polymethyl methacrylate (PMMA), and acrylic acid.

[0018] According to one embodiment, the plurality of hollow particles may include conductive insert particles inserted into the conductive portion. The conductive insert particles may comprise a conductive material forming at least a portion of the outer surface of the conductive insert particles.

[0019] According to one embodiment, the plurality of hollow particles may include conductive insert particles inserted into the conductive portion. The conductive insert particles may contain a magnetic material capable of being magnetized.

[0020] According to one embodiment, the conductive insert particle comprises a conductive material different from the magnetic material, and the conductive material forms at least a portion of the outer surface of the conductive insert particle. The outer surface of the conductive insert particle can be formed in two ways: (i) by mixing and depositing the magnetic material and the conductive material; or (ii) by depositing the conductive material on top of the surface on which the magnetic material is deposited.

[0021] According to one embodiment, the shape of the hollow particle can be one of sphere, ellipsoid, cylinder, polyhedron, or amorphous.

[0022] According to one embodiment, the conductive part can be made of a mixture of an elastic insulating material and multiple conductive particles.

[0023] According to one embodiment, the shape of the conductive particles can be one of spherical, ellipsoidal, cylindrical, polyhedral, amorphous, and fibrous.

[0024] According to one embodiment, the insulating portion may comprise silicone rubber.

[0025] According to one embodiment, the aforementioned silicone rubber can be formed with pores using a foaming agent.

[0026] According to one embodiment, a plurality of the hollow particles described above may be inserted only into the conductive portion of the insulating portion and the conductive portion described above.

[0027] Invention Effects

[0028] Several embodiments of this disclosure can increase the stroke of the device under test when applying pressure to the connector for electrical connection and reduce contact pressure.

[0029] Several embodiments of this disclosure can form a hollow space inside the connector for electrical connection by using hollow particles, thereby allowing designers to easily form the pore size inside the connector for electrical connection as intended.

[0030] One embodiment of this disclosure allows for a relatively high density of hollow particles in the surrounding portion of the conductive part. When the terminal of the device under test contacts the conductive part and compresses it in the vertical direction, the conductive part deforms in the horizontal direction and compresses in the vertical direction. Therefore, the force required for the device under test to press the conductive part can be reduced, and the stroke of the conductive part can be increased. Consequently, the individual operability of multiple conductive parts can be improved. Attached Figure Description

[0031] Figure 1 This is a partial cross-sectional view of the connector 1 for electrical connection according to the first embodiment of this disclosure.

[0032] Figure 2 This is a partial cross-sectional view of the connector 2 for electrical connection according to the second embodiment of this disclosure.

[0033] Figure 3 To show in Figure 2 A partial cross-sectional view of an example of how connector 2, used for electrical connection, may undergo biased deformation under pressure.

[0034] Figure 4 This is a partial cross-sectional view of the connector 3 for electrical connection according to the third embodiment of this disclosure.

[0035] Figure 5 This is a partial cross-sectional view of the connector 4 for electrical connection according to the fourth embodiment of this disclosure.

[0036] Figure 6 To show Figure 5 A partial cross-sectional view of the electrical connection connector 4 in the device under test 200 in contact with and being pressed against the terminal 210 of the device under test 200.

[0037] Figure 7 This is a cross-sectional view of the hollow particle 150' according to the fifth embodiment of this disclosure.

[0038] Figure 8 This is a perspective view of the hollow particle 150 of the sixth embodiment of this disclosure.

[0039] Figure 9 This is a perspective view of the hollow particle 150”' of the seventh embodiment of this disclosure.

[0040] Figure 10 This is a perspective view of the hollow particle 150”” of the eighth embodiment of this disclosure.

[0041] Figure 11 This is a cross-sectional view of the hollow particle assembly 150G according to the ninth embodiment of this disclosure.

[0042] Figure 12 This is a cross-sectional view of a hollow particle according to the tenth embodiment of this disclosure.

[0043] Figure 13 This is a cross-sectional view of the hollow particle assembly 150G' of the eleventh embodiment of this disclosure.

[0044] Explanation of reference numerals in the attached figures:

[0045] 200: Equipment under inspection

[0046] 210: Terminals of the device under test

[0047] 300: Inspection device

[0048] 310: Inspect the terminals of the device

[0049] 1, 2, 3, 4, 10: Connectors for electrical connections

[0050] 110: Insulation section

[0051] 111: Elastic Insulation Part

[0052] 113: Upper cover

[0053] 130: Conductive part

[0054] 131: Upper electrode section

[0055] 132: Lower electrode section

[0056] 133: Conductive connection part

[0057] 150, 150', 150”, 150”', 150””: Hollow particles

[0058] 150a: Inserted particles in the insulating part

[0059] 150b: Particles inserted into the conductive part

[0060] 150G, 150G': Hollow Particle Group

[0061] 150P, 150P': Open particles

[0062] 150Q: Closed Particle

[0063] 151: Membrane

[0064] 151a: Hole

[0065] 152, 152a, 152b, 152c: Hollow

[0066] 153: partition. Detailed Implementation

[0067] The embodiments disclosed herein are illustrated for the purpose of demonstrating the technical concepts of this disclosure. The scope of protection of this disclosure is not limited to the embodiments disclosed below or the specific descriptions of the embodiments.

[0068] Unless otherwise defined, all technical and scientific terms used in this disclosure have the meanings commonly understood by one of ordinary skill in the art to which this disclosure pertains. All terms used in this disclosure are for further clarification and are not intended to limit the scope of this disclosure.

[0069] Unless otherwise stated in sentences or texts including the following expressions, expressions such as “comprising,” “setting,” and “having” as used in this disclosure should be understood as open-ended terms, implying the possibility of including other embodiments.

[0070] Unless otherwise defined, the singular expression described in this disclosure may include the meaning of the plural, and this also applies to the singular expression described in the claims.

[0071] The terms “first”, “second”, etc., used in this disclosure are used to distinguish multiple structural elements from each other, and do not limit the order or importance of the corresponding structural elements.

[0072] In this disclosure, the directional terms "above" and "upper" refer to the orientation of the electrical connector relative to the inspection device, while the directional terms "below" and "lower" refer to the opposite direction. Furthermore, the term "horizontal direction" as used in this disclosure refers to a direction perpendicular to the vertical direction. This is merely an illustrative reference for clarity of understanding this disclosure; the definitions of "above" and "below" may differ depending on the established reference position. Figure 1 The upper direction U, the lower direction D, and the horizontal direction H are shown.

[0073] Hereinafter, embodiments will be described with reference to the examples shown in the accompanying drawings. In the drawings, the same or corresponding structural elements are given the same reference numerals. Furthermore, in the following description of the embodiments, the description of the same or corresponding structural elements is omitted. However, even if the description of relevant structural elements is omitted, it does not mean that such structural elements are not part of a certain embodiment.

[0074] Figure 1 This is a partial cross-sectional view of the electrical connection connector 1 according to the first embodiment of this disclosure. (Refer to...) Figure 1 The device under test 200 can be a semiconductor device, etc. The device under test 200 includes a plurality of terminals 210. The plurality of terminals 210 are disposed on the lower side of the device under test 200. When the device under test 200 is tested, the plurality of terminals 210 can come into contact with the upper side of the electrical connection connector 1.

[0075] The inspection device 300 includes a plurality of terminals 310. The plurality of terminals 310 correspond to a plurality of terminals 210. The plurality of terminals 310 are disposed on the upper side of the inspection device 300.

[0076] In this embodiment, the plurality of terminals 310 are respectively arranged at positions facing the plurality of terminals 210 along the vertical direction. Although not shown, in another embodiment where the plurality of conductive portions 130 are inclined relative to the vertical direction, the plurality of terminals 310 may be respectively arranged at positions facing the plurality of terminals 210 along the inclined direction of the plurality of conductive portions 130.

[0077] When the device under test 200 is tested, the plurality of terminals 310 of the inspection device 300 can contact the lower side of the conductive portion 130 of the electrical connection connector 1. The electrical connection connector 1 is disposed between the device under test 200 and the inspection device 300, enabling an electrical connection between the device under test 200 and the inspection device 300 in the vertical direction. The electrical connection connector 1 includes an insulating portion 110 that is electrically insulating. The electrical connection connector 1 includes a conductive portion 130 that extends in the vertical direction and is conductive. The insulating portion 110 supports the conductive portion 130. The conductive portion 130 can extend in the vertical direction within the insulating portion 110 such that its upper and lower ends are exposed outside the insulating portion 110.

[0078] The connector 1 for electrical connection may include a plurality of conductive portions 130. The plurality of conductive portions 130 may be arranged spaced apart from each other along a horizontal direction H. Although Figure 1 The diagram shows a configuration with three conductive portions 130 arranged on a cross-section; however, the arrangement distance or number of conductive portions 130 is not limited to this.

[0079] The conductive portion 130 can extend in the vertical direction. The conductive portion 130 can extend in the vertical direction within the insulating portion 110 so as to be energized in the vertical direction. The conductive portion 130 extends in the vertical direction, and its sides can be surrounded by the insulating portion 110.

[0080] The conductive portion 130 has its vertical ends exposed on the vertical surfaces of the insulating portion 110. The conductive portion 130 may include an upper electrode portion 131 exposed on the upper surface of the insulating portion 110, and a lower electrode portion 132 exposed on the lower surface of the insulating portion 110. The conductive portion 130 may include a conductive connection portion 133 extending vertically to connect the upper electrode portion 131 and the lower electrode portion 132. The upper electrode portion 131 may contact the terminal 210 of the device under test 200, and the lower electrode portion 132 may contact the terminal 310 of the inspection device 300.

[0081] The conductive portion 130 is made of a conductive material. A vertically extending conductive portion 130 may include multiple conductive particles. In addition to the aforementioned conductive particles, the conductive portion 130 may include other components. The conductive portion 130 may be flexible.

[0082] In one embodiment, the conductive portion 130 may be formed by mixing an elastic insulating material with a plurality of conductive particles. For example, the elastic insulating material may be silicone rubber, rubber, plastic, polyurethane, etc. For example, the conductive particles may be spherical, ellipsoidal, cylindrical, polyhedral, amorphous, or fibrous. Examples of hollow particle shapes such as ellipsoidal, polyhedral, and amorphous particles 150 can be found. Figures 8 to 10 Furthermore, for example, the aforementioned conductive particles can be metal particles, carbon fibers, graphene, carbon nanowires, carbon nanotubes, etc. For instance, the aforementioned fibrous conductive particles can be formed from carbon fibers, graphene, carbon nanowires, or carbon nanotubes.

[0083] In another embodiment, the conductive portion 130 may comprise a conductive elastic polymer. For example, the conductive elastic polymer may be a 3,4-ethylenedioxythiophene monomer (Poly(3,4-ethylenedioxythiophene), PEDOT), etc.

[0084] As an example of the manufacturing method, after mixing a conductive material (e.g., the aforementioned conductive particles, elastic polymer) and a non-cured (liquid) elastic insulating material, the conductive material can be aligned vertically at a specific location by forming a magnetic field in the vertical direction at that specific location. In this state, as the liquid elastic insulating material is cured, the conductive part 130 can be disposed on the insulating part 110.

[0085] As another example of the manufacturing method, after forming a sheet-shaped elastic insulating material at the aforementioned specific location and curing it, a hole can be formed that runs through the sheet-shaped elastic insulating material in the vertical direction. This hole can be formed using a laser. Subsequently, a conductive material (e.g., the aforementioned conductive particles, elastic polymer) and a non-cured (liquid) elastic insulating material are injected into the hole, and a conductive portion 130 can be formed by curing.

[0086] The insulating portion 110 has a thickness in the vertical direction. The insulating portion 110 can be formed into a sheet shape. The insulating portion can be made of an elastically deformable insulating material. As an example, the insulating portion can be made of an elastic polymer.

[0087] The insulating portion 110 is made of a material with electrical insulating properties. The insulating portion 110 may include an elastic insulating portion 111, which is made of an insulating material capable of elastic deformation. The elastic insulating portion 111 may be made of an elastic polymer material with insulating properties.

[0088] The aforementioned elastic polymers can be polymers with cross-linked structures. For example, curable polymer molding materials used to obtain the aforementioned cross-linked polymers include polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber and other conjugated diene rubbers and their hydrogen additives, styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer and other block copolymer rubbers and their hydrogen additives, chloroprene rubber, polyurethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, etc.

[0089] As an example, the insulating portion 110 may include silicone rubber. The silicone rubber may also be formed with pores using a foaming agent. The elastic insulating portion 111 may be made of silicone rubber.

[0090] For example, the aforementioned silicone rubber can be a polysiloxane material. The aforementioned silicone rubber can also be liquid silicone rubber (LSR).

[0091] The insulating portion 110 may further include an upper cover portion 113 disposed on the upper side of the elastic insulating portion 111 (see reference). Figure 5 The upper cover 113 may be attached to the upper side of the elastic insulating portion 111. The upper cover 113 may be made of a different material than the elastic insulating portion 111. For example, the upper cover 113 may be an insulating film. The upper end of the upper electrode portion 113 is exposed on the upper side of the upper cover 113. The upper cover 113 may support the periphery of the upper electrode portion 131.

[0092] The insulating portion 110 may further include a lower cover (not shown) disposed on the lower side of the elastic insulating portion 111. The lower cover may be attached to the lower side of the elastic insulating portion 111. The lower cover may be made of a different material than the elastic insulating portion 111. For example, the lower cover may be an insulating film. The lower end of the conductive portion 130 is exposed on the lower side of the lower cover. The lower cover may support the area around the lower portion of the lower electrode portion 132.

[0093] The electrical connector 1 may include a frame (not shown) disposed around the resilient insulating portion 111. For example, the frame may be a stainless steel (SUS) plate. The lower cover may be attached to the frame and the lower side of the resilient insulating portion 111.

[0094] The electrical connector 1 includes a plurality of hollow particles 150, with a hollow portion 152 formed inside. The plurality of hollow particles 150 can be inserted into at least one of the insulating portion 110 and the conductive portion 130. Therefore, the device under test 200 can increase the stroke when applying pressure to the electrical connector 1 and reduce the contact pressure. The plurality of hollow particles 150 may have a uniform size.

[0095] The plurality of hollow particles 150 may include insulating portion insert particles 150a inserted into the insulating portion 110. The plurality of hollow particles may include conductive portion insert particles 150b inserted into the aforementioned conductive portion. In the first embodiment, although the plurality of hollow particles 150 includes both insulating portion insert particles 150a and conductive portion insert particles 150b, the plurality of hollow particles 150 may also include only one of the insulating portion insert particles 150a and conductive portion insert particles 150b.

[0096] Hollow particle 150 includes a membrane 151 surrounding the hollow particle 150. Membrane 151 may contain an insulating material. The insulating material of membrane 151 may be one of rubber, polyethylene, polymethyl methacrylate (PMMA), or acrylic acid. For example, membrane 151 may contain rubber or silicone material.

[0097] A boundary can be formed between the insulating insert 150a and the insulating portion 110. This boundary can be formed on the outer surface of the film 151 of the insulating insert 150a. As an example, this boundary can be formed by making the insulating insert 150a and the insulating portion 110 from different materials. As another example, during the manufacturing process, the insulating insert 150a and the elastic insulating portion 111 are not completely integrated during the curing of the elastic insulating portion 111 after the insulating insert 150a is inserted into it, thus forming the boundary. Conversely, when a foaming agent is used to form the connector for electrical connection, the boundary cannot be formed because there is no structure corresponding to the film 151.

[0098] The conductive insert 150b may contain a conductive material, which forms at least a portion of the outer surface of the conductive insert 150b. Therefore, the conductive insert 150b may also have an electrical conduction function within the conductive portion 130. For example, the outer surface of the conductive insert 150b may be plated with a conductive material.

[0099] The conductive insert particle 150b may contain a magnetic material that can be magnetized. Thus, a magnetic field can be formed to arrange the conductive insert particle 150b and the multiple magnetizable conductive particles of the conductive part 130 together in a predetermined position along the vertical direction.

[0100] The conductive insert particle 150b may comprise a magnetizable magnetic material and a conductive material forming at least a portion of the outer surface of the conductive insert particle 150b. The conductive material may differ from the magnetic material. For example, the outer surface of the conductive insert particle 150b may be formed by plating the magnetic material and the conductive material together. For another example, the conductive insert particle 150b may be formed by plating the conductive material over a surface coated with the magnetic material.

[0101] Figure 2 This is a partial cross-sectional view of the connector 2 for electrical connection according to the second embodiment of this disclosure. (Refer to...) Figure 2 Unlike the electrical connector 1 of the first embodiment described above, the electrical connector 2 of the second embodiment includes insulating insert particles 150a but does not include conductive insert particles 150b. Compared to the first embodiment, although the conductivity of the second embodiment is further improved due to the increased density of conductive particles in the conductive portion 130, the degree of increase in stroke and the degree of reduction in contact pressure are reduced.

[0102] As in the second embodiment, as the number of particles 150a inserted into the insulating part increases, when the device under test 200 applies pressure to the electrical connection connector 1, the electrical connection connector 2 may be easily deformed (front end deformation). Figure 3 To show in Figure 2 A partial cross-sectional view of an example of how connector 2, used for electrical connection, may undergo biased deformation under pressure.

[0103] To reduce the possibility of biased deformation as described above, a portion of the multiple insulating insert particles 150a inserted into the insulating portion 110 with a relatively low density can be formed. Figure 4 This is a partial cross-sectional view of the electrical connection connector 3 according to the third embodiment of this disclosure. (Refer to...) Figure 4 In the electrical connector 3, the density of the plurality of insulating insert particles is greater in the portion surrounding the conductive portion 130 than in the portion separated from the conductive portion 130. In the aforementioned portion surrounding the conductive portion 130 of the electrical connector 3, the density of the plurality of insulating insert particles 150b is relatively high. Therefore, when the conductive portion 130 is compressed vertically, it can easily deform in the horizontal direction, thereby increasing the stroke and reducing contact pressure. Simultaneously, in the portion separated from the conductive portion 130 of the electrical connector 3, the density of the plurality of insulating insert particles 150 is relatively low. Therefore, the rigidity is relatively high, thereby increasing the service life of the electrical connector by reducing the possibility of excessive bias deformation.

[0104] Figure 5 This is a partial cross-sectional view of the connector 4 for electrical connection according to the fourth embodiment of this disclosure. Figure 6 To show Figure 5 A partial cross-sectional view of the electrical connector 4 in contact with terminal 210 of the device under test 200. (Refer to...) Figure 5 and Figure 6 Unlike the electrical connection connector 1 of the first embodiment described above, the electrical connection connector 4 of the fourth embodiment includes conductive part insert particles 150b, but does not include insulating part insert particles 150a.

[0105] Reference Figure 5 and Figure 6 The conductive portion 130 may include an upper electrode portion 131 forming the upper end of the conductive portion 130. The conductive portion 130 may include a conductive connection portion 133 extending downward from the upper electrode portion 131. The conductive portion 130 may include a lower electrode portion 132 forming the lower end of the conductive portion 130. The conductive connection portion 133 connects the upper electrode portion 131 and the lower electrode portion 132.

[0106] In the electrical connector 4, the density of the multiple conductive insert particles 150b in the upper electrode portion 131 can be greater than that in the conductive connection portion 133. Therefore, when the upper electrode portion 131 is pressed downwards by the terminal 210 of the device under test 200, the elastic coefficient of the upper electrode portion 131 can be reduced, making it easier for the upper electrode portion 131 to deform in a shape surrounding the terminal 210. This increases the contact area between the terminal 210 and the upper electrode portion 131 and reduces contact resistance.

[0107] In another embodiment of the connector for electrical connection described above (not shown), the density of the plurality of conductive insert particles 150b in the lower electrode portion 132 may be greater than that in the conductive connection portion 133. Therefore, when the lower electrode portion 132 is pressed upwards by the terminal 310 of the inspection device 300, the elastic coefficient of the lower electrode portion 132 can be reduced, making it easier for the lower electrode portion 132 to deform in a shape surrounding the terminal 310.

[0108] Figure 7 This is a cross-sectional view of the hollow particle 150' according to the fifth embodiment of this disclosure. (Refer to...) Figure 7 The hollow particle 150' may have multiple distinct hollow particles 152 formed inside. For example, the hollow particle 150' may have three distinct hollow particles 152a, 152b, and 152c. The hollow particle 150' may include a partition 153 for distinguishing and dividing the multiple hollow particles 152. The partition 153 may be fixed to the inner surface of the membrane 151.

[0109] Figure 8 This is a perspective view of the hollow particle 150 of the sixth embodiment of this disclosure. Figure 9 This is a perspective view of the hollow particle 150”' of the seventh embodiment of this disclosure. Figure 10This is a perspective view of the hollow particle 150”” of the eighth embodiment of this disclosure.

[0110] Reference Figures 8 to 10 The hollow particles described above can be spherical, ellipsoidal, cylindrical, polyhedral, or amorphous. As shown in the above embodiment, hollow particles 150 and 150' can be spherical. (Refer to...) Figure 8 In the sixth embodiment, the hollow particle 150 can be an ellipsoid. The hollow particle described above is a cube (see reference). Figure 9 It can also be a tetrahedron or other polyhedral shape. (See reference...) Figure 10 In the eighth embodiment, the hollow particle 150” can be non-amorphous.

[0111] Figure 11 This is a cross-sectional view of the hollow particle assembly 150G according to the ninth embodiment of this disclosure. (Refer to...) Figure 11 In the ninth embodiment, multiple hollow particles 150 can form a clustered hollow particle group 150G. The hollow particle group 150G can be composed of multiple hollow particles 150 that are adhered to each other.

[0112] Figure 12 This is a cross-sectional view of a hollow particle according to the tenth embodiment of this disclosure. (Refer to...) Figure 12 The connector 10 for electrical connection may include multiple hollow particles, such as open particles 150P and 150P', which surround the hollow 152 and partially surround the hollow 152. When the sealed particles formed by the membrane 151 sealing the hollow 152 are pressed, the volume of the hollow 152 decreases, resulting in increased internal pressure and repulsive force. When the open particles 150P and 150P' are pressed, some air inside the hollow 152 leaks to the outside of the open particles 150P and 150P', reducing the increase in internal pressure and the repulsive force. Thus, the tenth embodiment allows for a further increase in stroke and a further reduction in contact pressure with the device under test 200.

[0113] The open particles 150P and 150P' may include a membrane 151 with pores 151a. The pores 151a are connected to a hollow space 152 inside the membrane 151. These open particles can be formed into various shapes, such as spheres, ellipsoids, cylinders, polyhedra, amorphous materials, and fibers. As an example, Figure 12 The diagram shows a spherical open particle 150P and an amorphous open particle 150P'.

[0114] Figure 13 This is a cross-sectional view of the hollow particle assembly 150G' according to the eleventh embodiment of this disclosure. (Refer to...) Figure 13In the eleventh embodiment, the plurality of hollow particles may include closed particles 150Q and open particles 150P formed by the membrane 151 sealing the hollow 152. The plurality of hollow particles may form a hollow particle group 150G' formed by the mutual aggregation of closed particles 150Q and open particles 150P. The hollow particle group 150G' may include closed particles 150Q and open particles 150P that are adhered to each other.

[0115] While the technical concept of this disclosure has been illustrated above through some embodiments and accompanying drawings, it should be understood that those skilled in the art to which this disclosure pertains can make various modifications, variations, and alterations without departing from the technical concept and scope of this disclosure. Furthermore, all such modifications, variations, and alterations fall within the scope of the appended patent applications.

Claims

1. A connector for electrical connection, disposed between a device under test (DUT) and an inspection device, such that the DUT and the inspection device are electrically connected in the vertical direction, wherein... include: The insulating part possesses electrical insulation properties; The conductive part, supported by the aforementioned insulating part, extends in the vertical direction and is conductive. as well as Multiple hollow particles are inserted into at least one of the aforementioned insulating portion and the aforementioned conductive portion, forming a hollow structure inside. Among them, the aforementioned hollow particles are formed to have a uniform size. The aforementioned hollow particles include multiple insulating particles inserted into the aforementioned insulating portion. The density of particles inserted into the plurality of insulating portions is greater around the conductive portions than in the portions separated from the conductive portions. This allows the conductive part to deform more easily in the horizontal direction around it when compressed in the vertical direction.

2. The connector for electrical connection as claimed in claim 1, wherein, A boundary is formed between the inserted particle and the aforementioned insulating part.

3. The connector for electrical connection as claimed in claim 1, wherein, The aforementioned hollow particles include multiple conductive insert particles inserted into the aforementioned conductive portion. The aforementioned conductive part includes: The upper electrode portion, the upper end portion forming the aforementioned conductive portion; and The conductive connection portion extends downward from the upper electrode portion. The density of particles inserted into the multiple conductive portions is greater in the upper electrode portion than in the conductive connection portion.

4. The connector for electrical connection as claimed in claim 1, wherein, The aforementioned hollow particles have multiple distinct hollow structures inside.

5. The connector for electrical connection as claimed in claim 1, wherein, Multiple hollow particles form clusters of hollow particles.

6. The connector for electrical connection as claimed in claim 1, wherein, The aforementioned hollow particles include open particles, which surround the hollow portion around which the hollow portion is open.

7. The connector for electrical connection as claimed in claim 1, wherein, The hollow particle mentioned above includes a membrane surrounding the hollow part, and the membrane contains an insulating material.

8. The connector for electrical connection as claimed in claim 7, wherein, The aforementioned insulating materials include one of rubber, polyethylene, polymethyl methacrylate, and acrylic acid.

9. The connector for electrical connection as claimed in claim 1, wherein, The plurality of hollow particles mentioned above include conductive insert particles inserted into the conductive portion. The aforementioned conductive insert particle contains a conductive material, and the conductive material forms at least a portion of the outer surface of the aforementioned conductive insert particle.

10. The connector for electrical connection as claimed in claim 1, wherein, The plurality of hollow particles mentioned above include conductive insert particles inserted into the conductive portion. The aforementioned conductive insert particles contain magnetic materials that can be magnetized.

11. The connector for electrical connection as claimed in claim 10, wherein, The aforementioned conductive insert particle comprises a conductive material different from the aforementioned magnetic material, and the conductive material forms at least a portion of the outer surface of the aforementioned conductive insert particle. The aforementioned conductive portion is inserted into the outer surface of the particle in the following two ways: (i) A mixed plating of the above-mentioned magnetic material and the above-mentioned conductive material; or (ii) The conductive material is plated on the surface on which the magnetic material is plated.

12. The connector for electrical connection as claimed in claim 1, wherein, The hollow particles mentioned above can be spherical, ellipsoidal, cylindrical, polyhedral, or amorphous.

13. The connector for electrical connection as claimed in claim 1, wherein, The aforementioned conductive part is composed of a mixture of elastic insulating material and multiple conductive particles.

14. The connector for electrical connection as claimed in claim 13, wherein, The shape of the aforementioned conductive particles is one of the following: spherical, ellipsoidal, cylindrical, polyhedral, amorphous, and fibrous.

15. The connector for electrical connection as claimed in claim 1, wherein, The aforementioned insulating part contains silicone rubber.

16. The connector for electrical connection as claimed in claim 15, wherein, The aforementioned silicone rubber has pores formed with the help of a foaming agent.

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