A method of processing a process task and a semiconductor process apparatus

Abstract

The embodiment of the present application provides a process task processing method and a semiconductor process equipment, which are applied to the semiconductor process equipment, the semiconductor process equipment is connected with a factory automation system, the present application receives a process task sent by the factory automation system, then obtains target parameters from the process task, executes the process task according to a recipe control mode and a recipe identifier in the target parameters and whether the target parameter information further includes a process variable list, when the target parameter information further includes the process variable list, variable parameters of a process running recipe file can be modified, different process tasks can be executed by setting different parameters in the target parameters, and the recipe file control function required by the factory automation system of different customers is met.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a method for processing a process task and a semiconductor process apparatus. Background Technology

[0002] In semiconductor process equipment, process jobs are executed according to corresponding recipe files. Semiconductor fabrication plants are managed through factory automation systems, which control and manage semiconductor process equipment automatically. The semiconductor process equipment is required to run according to the instructions issued by the factory automation system and the specified recipe files. However, currently, it can only support process jobs with route recipe files, and cannot support the free combination of layout recipe files and process recipe files. Furthermore, it is not possible to modify some key process parameter values ​​in the process recipe file before the process job runs. Summary of the Invention

[0003] In view of the above problems, embodiments of the present invention are proposed to provide a method for processing a process task and a corresponding semiconductor process apparatus to overcome or at least partially solve the above problems.

[0004] To address the aforementioned problems, this invention discloses a method for processing process tasks, applied to semiconductor process equipment connected to a factory automation system. The method includes:

[0005] Receive the process task sent by the factory automation system, and obtain the target parameter information of the process task, the target parameter information including the formula control method and the formula identifier;

[0006] Determine whether the formula control method is a unique control method for the formula or a control method for formula adjustment;

[0007] If the formula control method is a unique control method for the formula, and the formula identifier includes a path formula file identifier, then the path formula file is found according to the path formula file identifier. The path formula file includes a layout formula file and a process operation formula file. The process task is executed according to the layout formula file and the process operation formula file.

[0008] If the formula control method is a formula adjustment control method, the formula identifier includes a path formula file identifier, and the target parameter information also includes a process variable list, then the variable parameters of the process running formula file in the path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process task is executed according to the layout formula file of the path formula file and the modified process running formula file.

[0009] If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information does not include a process variable list, then the layout formula file is searched according to the layout formula file identifier, the process operation formula file is searched according to the process operation formula file identifier, and the process task is executed according to the layout formula file and the process operation formula file.

[0010] If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information also includes a process variable list, then the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier; the variable parameters of the process operation formula file are modified according to the process variable list, and the process task is executed according to the layout formula file and the modified process operation formula file.

[0011] Optionally, before the step of receiving the process task sent by the factory automation system, the method further includes:

[0012] Receive the instruction from the factory automation system to start the process task;

[0013] According to the instruction, the initial parameter information of the process task is obtained; the initial parameter information includes: formula control method and formula identifier;

[0014] Determine whether the formula control method is a unique control method for the formula or a control method for formula adjustment;

[0015] If the formula control method is a unique control method for the formula, and the formula identifier is a path formula file identifier, then it is determined whether the path formula file identifier is valid. If the path formula file identifier is valid, then the formula control method and the path formula file identifier are determined as target parameter information.

[0016] If the formula control method is a formula adjustment control method, the formula identifier is a path formula file identifier, and the initial parameter information also includes a variable list, then it is determined whether the path formula file identifier and the variable list are valid. If both the path formula file identifier and the variable list are valid, then the formula control method, the path formula file identifier, and the process variable list stored in the variable list are determined as the target parameter information.

[0017] If the formula control method is a formula adjustment control method, the formula identifier is a valid process operation formula file identifier, and the initial parameter information also includes a variable list, then it is determined whether the variable list stores a layout formula file identifier; if the variable list stores the layout formula file identifier, then it is determined whether the layout formula file identifier is valid; if the layout formula file identifier is valid, then it is determined whether the variable list is valid; if the variable list is valid, then the formula control method, the layout formula file identifier, the process operation formula file identifier, and the process variable list stored in the variable list are determined as target parameter information; if the variable list is invalid, then the formula control method, the layout formula file identifier, and the process operation formula file identifier are determined as target parameter information.

[0018] Optionally, determining whether the path recipe file identifier is valid includes:

[0019] Determine whether the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment;

[0020] If the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, then the path recipe file identifier is determined to be valid.

[0021] Optionally, determining whether the layout recipe file identifier is valid includes:

[0022] Determine whether the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment;

[0023] If the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, then the layout recipe file identifier is determined to be valid.

[0024] Optionally, determining whether the variable list is valid includes:

[0025] Determine whether the process variable list is stored in the variable list and whether the process variable list is valid. The process variable list is used to store the variable parameter values ​​that need to be modified.

[0026] If the variable list contains the process variable list and the process variable list is valid, then the variable list is determined to be valid.

[0027] Optionally, determining whether the process variable list is valid includes:

[0028] Determine whether the variable parameter value in the process variable list is within the preset process parameter value range, and whether the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment;

[0029] If the variable parameter value in the process variable list is within the preset process parameter value range, and the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment, then the process variable list is determined to be valid.

[0030] Optionally, the variable parameters include at least one of the following: process chamber room temperature, gas flow rate, and process step duration.

[0031] This invention also discloses a conductor processing equipment, including a controller. The controller receives a process task sent by the factory automation system and obtains target parameter information of the process task. The target parameter information includes a recipe control method and a recipe identifier. The controller determines whether the recipe control method is a recipe-unique control method or a recipe adjustment control method. If the recipe control method is a recipe-unique control method, and the recipe identifier includes a path recipe file identifier, the controller searches for a path recipe file based on the path recipe file identifier. The path recipe file includes a layout recipe file and a process execution recipe file. The controller then executes the process task according to the layout recipe file and the process execution recipe file. If the recipe control method is a recipe adjustment control method, and the recipe identifier includes a path recipe file identifier, and the target parameter information also includes a process variable list, the controller modifies the variable parameters of the process execution recipe file in the path recipe file corresponding to the path recipe file identifier according to the process variable list, and executes the process task according to the layout recipe file. The process task is executed according to the layout formula file and the modified process operation formula file. If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information does not include a process variable list. Then, the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier. The process task is then executed according to the layout formula file and the process operation formula file. If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information also includes a process variable list. Then, the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier. The variable parameters of the process operation formula file are modified according to the process variable list, and the process task is executed according to the layout formula file and the modified process operation formula file.

[0032] The embodiments of the present invention have the following advantages:

[0033] This invention provides a method for processing process tasks and a semiconductor process equipment. The semiconductor process equipment is connected to a factory automation system. This invention receives process tasks sent by the factory automation system, then obtains target parameters from the process tasks. The process tasks are executed based on the recipe control method and recipe identifier in the target parameters, and whether the target parameter information also includes a process variable list. If the target parameter information also includes a process variable list, the variable parameters in the process execution recipe file can be modified. This allows different process tasks to be executed by setting different parameters in the target parameters, satisfying the recipe file control function requirements of different customers' factory automation systems. Attached Figure Description

[0034] Figure 1 This is a flowchart of the steps of a process task processing method provided in an embodiment of the present invention;

[0035] Figure 2 This is a system flowchart for determining target parameters provided in an embodiment of the present invention;

[0036] Figure 3 This is a structural block diagram of a semiconductor process equipment provided in an embodiment of the present invention. Detailed Implementation

[0037] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0038] In existing technologies, semiconductor process equipment can only support the operation of process tasks with a path recipe file. This is because a path recipe file can only contain one layout recipe file and one process run recipe file, and cannot be used to start the semiconductor process equipment by freely combining and pairing the layout recipe file and the process run recipe file according to the user's needs. Furthermore, the process run recipe file has fixed values ​​for the variable parameters in each process step, and the process must be run according to these fixed values, which cannot be modified. This makes it impossible to meet the requirements of factory automation systems to modify some key variable parameter values ​​in the process run recipe file before the process runs.

[0039] Based on this, one of the core concepts of this invention is to propose a process task processing method. This method involves receiving a process task sent by a factory automation system, obtaining target parameters from the process task, and executing the process task based on the formula control method and formula identifier in the target parameters, as well as whether the target parameter information also includes a process variable list. When the target parameter information also includes a process variable list, the variable parameters of the process execution formula file can be modified. This enables the execution of different process tasks by setting different parameters in the target parameters, thus meeting the formula file control function requirements of different customers' factory automation systems.

[0040] Reference Figure 1 This diagram illustrates a flowchart of a process task processing method according to an embodiment of the present invention. The method is applied to semiconductor process equipment, which is connected to a factory automation system. The method may include the following steps:

[0041] Step 101: Receive the process task sent by the factory automation system and obtain the target parameter information of the process task. The target parameter information includes the formula control method and the formula identifier.

[0042] In this embodiment of the invention, the factory automation system refers to a system that automates the control and management of semiconductor equipment. It can send process tasks to semiconductor process equipment, and after receiving the process tasks, the semiconductor process equipment can execute different process tasks based on the target parameter information in the process tasks.

[0043] The formula control method refers to the way the process task is executed. It can include a formula-unique control method and a formula adjustment control method. The formula-unique control method can include process tasks that only execute path formula files. The formula adjustment control method can include process tasks that execute path formula files containing modified process operation formula files, process tasks that execute layout formula files and process operation formula files in a free combination, and process tasks that execute layout formula files and modified process operation formula files in a free combination.

[0044] Formula identification refers to the identification of process documents required for a process task. The operation mode of a process task can be determined by both the formula control method and the formula identification.

[0045] Step 102: Determine whether the formula control method is a unique control method or a formula adjustment control method.

[0046] In this embodiment of the invention, the semiconductor process equipment can determine whether the recipe control method is a recipe-unique control method or a recipe adjustment control method based on the received recipe control method identifier. If the received recipe control method identifier is RecipeOnly, then the recipe control method is a recipe-unique control method; if the received recipe control method identifier is RecipeTurning, then the recipe control method is a recipe adjustment control method.

[0047] Step 103: If the formula control method is a unique control method for the formula, and the formula identifier includes the path formula file identifier, then the path formula file is found according to the path formula file identifier. The path formula file includes the layout formula file and the process operation formula file; the process task is executed according to the layout formula file and the process operation formula file.

[0048] In this embodiment of the invention, the Route Recipe may include a fixed Layout Recipe and a Process Recipe. In semiconductor process equipment, the Route Recipe is generally a fixed recipe file and cannot be flexibly combined with the Layout Recipe and the Process Recipe. For example, Route Recipe A includes Layout Recipe A and Process Recipe A. If the recipe control mode is RecipeOnly and the recipe identifier is RouteRecipe A, the corresponding path recipe file A can be found according to RouteRecipe A. Since the path recipe file A includes the layout recipe file A and the process execution recipe file A, the process task is executed according to the layout recipe file A and the process execution recipe file A.

[0049] Step 104: If the formula control method is the formula adjustment control method, the formula identifier includes the path formula file identifier, and the target parameter information also includes the process variable list, then modify the variable parameters of the process running formula file in the path formula file corresponding to the path formula file identifier according to the process variable list, and execute the process task according to the layout formula file of the path formula file and the modified process running formula file.

[0050] In this embodiment of the invention, the process variable list can store the variable parameter values ​​that need to be modified in the process running formula file. When the target parameter information also includes the process variable list, it means that the variable parameters of the process running formula file need to be modified. When the target parameter information does not include the process variable list, it means that the variable parameters of the process running formula file do not need to be modified.

[0051] If the recipe control mode is RecipeTurning, the recipe identifier is the path recipe file identifier, and the target parameter information also includes a list of process variables, then it means that the semiconductor process equipment is executing a process task that includes a path recipe file containing a modified process run recipe file.

[0052] A Variable Table can be added to the process operation formula file. The Variable Table sets up variable parameters that can be temporarily modified. When it is necessary to temporarily modify the value of a variable parameter, the value can be modified in the Variable Table. For example, if the temperature value of the process chamber room temperature zone that needs to be modified is 100℃, the temperature value of the process chamber room temperature zone can be modified to 100℃ in the Variable Table.

[0053] In one example, the recipe control method is a recipe adjustment control method, the recipe is identified as RouteRecipeA, and the variable parameter stored in the process variable list is the process chamber room temperature zone temperature value of 100℃. Since the recipe file corresponding to RouteRecipeA is path recipe file A, which includes layout recipe file A and process run recipe file A, the process chamber room temperature zone temperature in the parameter variable table of process run recipe file A is modified to 100℃, and then the process task is executed according to layout recipe file A and the modified process run recipe file A.

[0054] In another example, the recipe control method is a recipe adjustment control method. The path recipe file is identified as path recipe file B. The variable parameter values ​​stored in the process variable list are: the time for process step 1 is 30 minutes, the time for process step 2 is 20 minutes, and the time for process step 3 is 10 minutes. Then, the time for process step 1 in the parameter variable table of Process Recipe B in path recipe file B is modified to 30 minutes, the time for process step 2 is modified to 20 minutes, and the time for process step 3 is modified to 10 minutes. After the modification, the semiconductor process equipment obtains the modified process run recipe file B and layout recipe file B from path recipe file B, and then performs wafer transfer in the process chamber according to layout recipe file B. After the transfer is completed, the wafer is processed according to the modified process run recipe file B, where the time for process step 1 is 30 minutes, the time for process step 2 is 20 minutes, and the time for process step 3 is 10 minutes.

[0055] Step 105: If the formula control method is the formula adjustment control method, the formula identifier includes the layout formula file identifier and the process operation formula file identifier, and the target parameter information does not include the process variable list, then the layout formula file is searched according to the layout formula file identifier, the process operation formula file is searched according to the process operation formula file identifier, and the process task is executed according to the layout formula file and the process operation formula file.

[0056] In this embodiment of the invention, if the recipe control method is RecipeTurning, the recipe identifier includes a layout recipe file identifier and a process run recipe file identifier, and the target parameter information does not include a process variable list, then it means that the semiconductor process equipment executes a process task that freely combines the layout recipe file and the process run recipe file. By freely combining the layout recipe file and the process run recipe file, different layout recipes and process recipes can be freely paired according to user needs to execute the process task. For example, layout recipe A and process recipe C can be combined to execute the process task.

[0057] In one example, the recipe control method is a recipe adjustment control method. The recipe identifiers are LayoutRecipeA and Process RecipeC. The corresponding layout recipe file A can be found based on Layout RecipeA, and the corresponding process execution recipe file C can be found based on Process RecipeC. Then, the process task is executed according to the layout recipe file A and the process execution recipe file C. It should be noted that the recipe identifiers can be set according to customer needs and then freely combined and paired. There are no restrictions here.

[0058] Step 106: If the formula control method is formula adjustment control method, the formula identifier includes the layout formula file identifier and the process operation formula file identifier, and the target parameter information also includes a process variable list, then the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier; the variable parameters of the process operation formula file are modified according to the process variable list, and the process task is executed according to the layout formula file and the modified process operation formula file.

[0059] In this embodiment of the invention, if the recipe control method is RecipeTurning, the recipe identifier includes the layout recipe file identifier and the process run recipe file identifier, and the target parameter information also includes a list of process variables, then it indicates that the process task is to execute a free combination of the layout recipe file and the modified process run recipe file.

[0060] In one example, the recipe control method is a recipe adjustment control method. The recipes are identified as LayoutRecipeA and Process RecipeC. The variable parameter stored in the process variable list is that the temperature of the process chamber room temperature is 100°C. Then, the corresponding layout recipe file A can be found according to Layout RecipeA, and the corresponding process run recipe file C can be found according to Process RecipeC. Then, the temperature of the process chamber room temperature in the process run recipe file C is modified to 100°C. The process task is executed according to the layout recipe file A and the modified process run recipe file C. That is, the semiconductor process equipment transfers the wafer in the process chamber according to the layout recipe file A. After the transfer is completed, the wafer is processed according to the modified process run recipe file C, where the temperature of the process chamber room temperature is 100°C.

[0061] This invention receives process tasks sent by a factory automation system, then obtains target parameters from the process tasks, and executes the process tasks based on the formula control method and formula identifier in the target parameters, as well as whether the target parameter information also includes a list of process variables. When the target parameter information also includes a list of process variables, the variable parameters of the process execution formula file can be modified. This enables the execution of different process tasks by setting different parameters in the target parameters, thus meeting the formula file control function requirements of different customers' factory automation systems.

[0062] In one embodiment of the present invention, before the step of receiving the process task sent by the factory automation system, the method may further include:

[0063] Receive instructions from the factory automation system to start the process task.

[0064] In this embodiment of the invention, the semiconductor process equipment can receive a command to start a process task sent by the factory automation system, and then verify the parameters contained in the process task according to the command to determine the target parameter information of the process task.

[0065] According to the instructions, obtain the initial parameter information of the process task; the initial parameter information includes: formula control method and formula identifier.

[0066] In this embodiment of the invention, the semiconductor process equipment can obtain the initial parameter information of the process task according to the instructions. The initial parameter information may include the recipe control method and the recipe identifier. The recipe control method and the recipe identifier have been explained above and will not be repeated here.

[0067] Determine whether the formula control method is the only control method for the formula or the control method for formula adjustment.

[0068] In this embodiment of the invention, the semiconductor process equipment can determine whether the recipe control method is a recipe-unique control method or a recipe adjustment control method based on the received recipe control method identifier. If the received recipe control method identifier is RecipeOnly, then the recipe control method is a recipe-unique control method; if the received recipe control method identifier is RecipeTurning, then the recipe control method is a recipe adjustment control method.

[0069] If the formula control method is a unique control method for the formula and the formula identifier is the path formula file identifier, then determine whether the path formula file identifier is valid. If the path formula file identifier is valid, then the formula control method and the path formula file identifier are determined as target parameter information.

[0070] In this embodiment of the invention, if the recipe control method is a unique control method for the recipe and the recipe identifier is RouteRecipeB, then it is necessary to determine the validity of RouteRecipeB to ensure the safety and effectiveness of the semiconductor process equipment operation, avoid invalid operation, and improve the operating efficiency of the semiconductor process equipment. When RouteRecipeB is valid, the recipe control method and the path recipe file identifier can be determined as target parameter information.

[0071] In one embodiment of the present invention, determining whether the path recipe file identifier is valid includes:

[0072] Determine whether the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment; if the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, then the path recipe file identifier is determined to be valid.

[0073] In this embodiment of the invention, if the route recipe file is identified as Route RecipeB, it can be determined whether the route recipe file B corresponding to Route RecipeB exists in the semiconductor process equipment. If the route recipe file B exists in the semiconductor process equipment, then Route RecipeB is determined to be valid; otherwise, if the route recipe file B does not exist in the semiconductor process equipment, then Route RecipeB is determined to be invalid.

[0074] If the formula control method is the formula adjustment control method, the formula identifier is the path formula file identifier, and the initial parameter information also includes a variable list, then it is determined whether the path formula file identifier and the variable list are valid. If both the path formula file identifier and the variable list are valid, then the formula control method, the path formula file identifier, and the process variable list stored in the variable list are determined as the target parameter information.

[0075] In this embodiment of the invention, the variable list is used to store the layout formula file identifier and the process parameter variable list. When the formula control method is the formula adjustment control method, the formula identifier is the path formula file identifier, and the initial parameter information also includes the variable list, it is necessary to determine the validity of the path formula file identifier and the variable list. The determination of the validity of the path formula file identifier has been introduced previously and will not be repeated here. Determining the validity of the variable list means determining the validity of the process variable list in the variable list. When it is determined that both the path formula file identifier and the variable list are valid, the formula control method, the path formula file identifier, and the process variable list stored in the variable list can be determined as the target parameter information.

[0076] In one example, the recipe control method is identified as RecipeTurning, the recipe is identified as Route RecipeB, and the variable list stores a list of process variables. If both Route RecipeB and the variable list are valid, then RecipeTurning, Route RecipeB, and the list of process variables can be identified as target parameter information.

[0077] If the formula control method is a formula adjustment control method, the formula identifier is a valid process operation formula file identifier, and the initial parameter information also includes a variable list, then determine whether the layout formula file identifier is stored in the variable list; if the layout formula file identifier is stored in the variable list, then determine whether the layout formula file identifier is valid; if the layout formula file identifier is valid, then determine whether the variable list is valid; if the variable list is valid, then the formula control method, the layout formula file identifier, the process operation formula file identifier, and the process variable list stored in the variable list are determined as the target parameter information.

[0078] In this embodiment of the invention, the variable list can also be set with a layout recipe file identifier according to the user's needs, so as to meet the user's combination of different layout recipe files and process operation recipe files. If the recipe control method is RecipeTurning, the recipe identifier is Process RecipeA and is valid, and the initial parameter information also includes a variable list, then it can be determined whether the variable list stores a layout recipe file identifier. If it stores Layout RecipeC, then it can be determined whether Layout RecipeC is valid. If Layout RecipeC is valid, then it can be determined whether the variable list is valid to determine whether to modify the variable parameters of process operation recipe file A. If the variable list is valid, then the RecipeTurning, Process RecipeA, and Layout RecipeC process variable lists can be determined as target parameter information.

[0079] In one embodiment of the present invention, determining whether the layout recipe document identifier is valid includes:

[0080] Determine whether the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment; if the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, then the layout recipe file identifier is determined to be valid.

[0081] In this embodiment of the invention, when the layout recipe file is identified as Layout RecipeC, it can be determined whether the layout recipe file C corresponding to LayoutRecipeC exists in the semiconductor process equipment. If it exists, it means that the layout recipe file identification is valid; if it does not exist, it means that the layout recipe file identification is invalid, that is, the instruction to start the process task is invalid.

[0082] In one embodiment of the present invention, determining whether the variable list is valid includes:

[0083] Determine whether the variable list contains a process variable list and whether the process variable list is valid. The process variable list is used to store the variable parameter values ​​that need to be modified. If the variable list contains a process variable list and the process variable list is valid, then the variable list is determined to be valid.

[0084] In this embodiment of the invention, it can be determined whether to modify the process parameter values ​​in the process running formula file by judging whether the process variable list is stored in the variable list and whether the process variable list is valid. If the process variable list exists and is valid, the variable list is determined to be valid. If the process variable list does not exist or is invalid, the variable list is determined to be invalid.

[0085] In one embodiment of the present invention, determining whether the process variable list is valid may include:

[0086] Determine whether the variable parameter values ​​in the process variable list are within the preset process parameter value range, and whether the process parameters corresponding to the variable parameter values ​​exist in the semiconductor process equipment; if the variable parameter values ​​in the process variable list are within the preset process parameter value range, and the process parameters corresponding to the variable parameter values ​​exist in the semiconductor process equipment, then the process variable list is determined to be valid.

[0087] In this embodiment of the invention, the preset process parameter value range refers to the normal range of process parameter values. The process parameter values ​​set in the process list should be within the preset process parameter value range, and the corresponding process parameters should also exist in the semiconductor process equipment. For example, if the variable parameter value in the process variable list is 200°C for the process chamber room temperature zone, but the preset process parameter value range is (100°C, 180°C), then 200°C is obviously not within the preset process parameter range, indicating that the process variable list is invalid. If the process parameter value is a heating time of 1 hour, but the corresponding heating time does not exist in the semiconductor process equipment, meaning that the corresponding process task does not require heating, then the process variable list is invalid. Conversely, if the variable parameter value in the process variable list is within the preset process parameter value range, and the corresponding process parameter exists in the semiconductor process equipment, then the process variable list is determined to be valid.

[0088] In one embodiment of the present invention, the variable parameters may include at least one of the following: process chamber room temperature, gas flow rate, and process step duration.

[0089] In this embodiment of the invention, some variable parameters in the process operation formula file can be modified as needed. These variable parameters refer to a series of basic data or indicators for completing the process task. In other words, these basic parameters constitute the content of the entire process task flow. The process parameters may include at least one of the following: process chamber room temperature, gas flow rate, and process step time. They may also be other basic parameters related to the entire process task flow, which are not limited here.

[0090] If the variable list is invalid, the formula control method, layout formula file identifier, and process operation formula file identifier will be determined as the target parameter information.

[0091] In this embodiment of the invention, when the recipe control mode is identified as RecipeTurning, the recipe is identified as ProcessRecipeA and is valid, the variable list contains Layout RecipeC and is valid, but the variable list is invalid, that is, there is a situation where the process variable list is missing or invalid, it means that the variable parameters of the process running recipe file A do not need to be modified. At this time, RecipeTurning, Process RecipeA, and Layout RecipeC can be determined as target parameter information.

[0092] Reference Figure 2The diagram shows a system flowchart for determining target parameters according to an embodiment of the present invention. In the flowchart, a first method is set as a control method for unique formula, and a second method is set as a control method for formula adjustment. After receiving the instruction to start the process task, the semiconductor process equipment first obtains the set initial parameter information from the running instruction, and determines whether the method to start the process task is the first method or the second method according to the formula control method.

[0093] When the recipe method is determined to be the first method, it is checked whether the path recipe file corresponding to the recipe identifier exists in the semiconductor process equipment (i.e., the machine). If it does not exist in the semiconductor process equipment, the recipe identifier is invalid, and the creation of this process task fails. If the path recipe file corresponding to the recipe identifier exists in the semiconductor process equipment, it is checked whether the process variable list in the variable list exists and is valid. If the process variable list in the variable list exists and is valid, the recipe identifier and the variable list are valid. The path recipe file identifier and the process variable list are saved. The variable parameter values ​​of the process running recipe file in the path recipe file are modified according to the variable parameter values ​​stored in the process variable list. The target parameters of the Job are generated according to the path recipe file identifier, the recipe adjustment control method, and the process variable list. If the process variable list in the variable list does not exist or is invalid, the recipe identifier is valid. The path recipe file identifier is saved, and the target parameters of the Job are generated according to the path recipe file identifier and the recipe's unique control method.

[0094] When the formulation method is determined to be the second method, it is determined whether the formulation identifier is a process running formulation file identifier. If the formulation identifier is a process running formulation file identifier, it is determined whether the process running formulation file corresponding to the process running formulation file identifier exists in the semiconductor process equipment. If the process running formulation file corresponding to the process running formulation file identifier exists in the semiconductor process equipment, it is determined whether a layout formulation file identifier is set in the variable list and whether the layout formulation file corresponding to the layout formulation file identifier exists in the semiconductor process equipment. If a layout formulation file identifier is set in the variable list and the layout formulation file corresponding to the layout formulation file identifier exists in the semiconductor process equipment, it is determined whether the process variable list in the variable list is valid and exists. If the list is valid and exists, it means the recipe identifier and variable list are valid. Save the process running recipe file name, layout recipe file name, and process variable list. Modify the variable parameter values ​​of the process running recipe file according to the variable parameter values ​​stored in the process variable list. Generate the target parameters of the Job based on the process running recipe file identifier, layout recipe file identifier, recipe adjustment control method, and process variable list. If the process variable list does not exist or is invalid, it means that the process running recipe file does not need to be modified, but the recipe identifier is valid. Save the process running recipe file identifier and layout recipe file identifier, and generate the target parameter information of the Job based on the process running recipe file identifier, layout recipe file identifier, and recipe adjustment control method.

[0095] This invention discloses a method for processing process tasks. The method receives process tasks sent by a factory automation system, then obtains target parameters from the task. The process task is executed based on the recipe control method and recipe identifier in the target parameters, and whether the target parameter information also includes a process variable list. If the target parameter information includes a process variable list, the variable parameters in the process execution recipe file can be modified. This allows different process tasks to be executed by setting different parameters in the target parameters, satisfying the recipe file control function requirements of different customers' factory automation systems. This invention satisfies the recipe file control function requirements of different customers' factory automation systems; customers only need to set different target parameters in the instructions to achieve the required recipe file control function. This invention adds a judgment on the validity of modified variables in the process recipe file, ensuring the safety of semiconductor process equipment operation. This invention also adds a judgment on the validity of recipe file identifiers, ensuring the safety and effectiveness of equipment operation.

[0096] It should be noted that, for the sake of simplicity, the method embodiments are all described as a series of actions. However, those skilled in the art should understand that the embodiments of the present invention are not limited to the described order of actions, because according to the embodiments of the present invention, some steps can be performed in other orders or simultaneously. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions involved are not necessarily essential to the embodiments of the present invention.

[0097] Reference Figure 3 This diagram illustrates a structural block diagram of a semiconductor process apparatus 20 according to an embodiment of the present invention. The semiconductor process apparatus includes a controller 201.

[0098] The controller 201 is used to receive process tasks sent by the factory automation system, obtain target parameter information of the process task, the target parameter information including recipe control mode and recipe identifier; determine whether the recipe control mode is a recipe-unique control mode or a recipe adjustment control mode; if the recipe control mode is a recipe-unique control mode, the recipe identifier includes a path recipe file identifier, then the path recipe file is searched according to the path recipe file identifier, the path recipe file includes a layout recipe file and a process operation recipe file; the process task is executed according to the layout recipe file and the process operation recipe file; if the recipe control mode is a recipe adjustment control mode, the recipe identifier includes a path recipe file identifier, and the target parameter information also includes a process variable list, then the variable parameters of the process operation recipe file in the path recipe file corresponding to the path recipe file identifier are modified according to the process variable list, and the process task is executed according to the layout recipe file and the modified process operation recipe file. The process operation formula file is used to execute the process task. If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information does not include a process variable list, then the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier; and the process task is executed according to the layout formula file and the process operation formula file. If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information also includes a process variable list, then the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier; the variable parameters of the process operation formula file are modified according to the process variable list, and the process task is executed according to the layout formula file and the modified process operation formula file.

[0099] In one embodiment of the present invention, the controller 201 is further configured to receive an instruction from the factory automation system to start the process task; according to the instruction, obtain initial parameter information of the process task; the initial parameter information includes: a formula control method and a formula identifier; determine whether the formula control method is a formula-unique control method or a formula adjustment control method; if the formula control method is a formula-unique control method and the formula identifier is a path formula file identifier, then determine whether the path formula file identifier is valid; if the path formula file identifier is valid, then determine the formula control method and the path formula file identifier as target parameter information; if the formula control method is a formula adjustment control method and the formula identifier is a path formula file identifier, and the initial parameter information also includes a variable list, then determine whether the path formula file identifier and the variable list are valid; if both the path formula file identifier and the variable list are valid... If the formula control method is effective, the formula file identifier, and the process variable list stored in the variable list are determined as target parameter information. If the formula control method is a formula adjustment control method, the formula identifier is a valid process operation formula file identifier, and the initial parameter information also includes a variable list, then it is determined whether the layout formula file identifier is stored in the variable list. If the layout formula file identifier is stored in the variable list, then it is determined whether the layout formula file identifier is valid. If the layout formula file identifier is valid, then it is determined whether the variable list is valid. If the variable list is valid, then the formula control method, the layout formula file identifier, the process operation formula file identifier, and the process variable list stored in the variable list are determined as target parameter information. If the variable list is invalid, then the formula control method, the layout formula file identifier, and the process operation formula file identifier are determined as target parameter information.

[0100] In one embodiment of the present invention, the controller 201 is further configured to determine whether the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment; if the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, then the path recipe file identifier is determined to be valid.

[0101] In one embodiment of the present invention, the controller 201 is further configured to determine whether the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment; if the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, then the layout recipe file identifier is determined to be valid.

[0102] In one embodiment of the present invention, the controller 201 is further configured to determine whether the variable list stores a process variable list and whether the process variable list is valid, wherein the process variable list is used to store variable parameter values ​​that need to be modified; if the variable list stores the process variable list and the process variable list is valid, then the variable list is determined to be valid.

[0103] In one embodiment of the present invention, the controller 201 is further configured to determine whether the variable parameter value in the process variable list is within a preset process parameter value range, and whether the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment; if the variable parameter value in the process variable list is within a preset process parameter value range, and the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment, then the process variable list is determined to be valid.

[0104] In one embodiment of the present invention, the variable parameters include at least one of the following: process chamber room temperature, gas flow rate, and process step time.

[0105] This invention discloses a semiconductor process equipment, including a controller. The controller receives process tasks sent by a factory automation system, acquires target parameter information of the process tasks, including a recipe control method and a recipe identifier; determines whether the recipe control method is a recipe-unique control method or a recipe adjustment control method; if the recipe control method is a recipe-unique control method, and the recipe identifier includes a path recipe file identifier, then the controller searches for a path recipe file based on the path recipe file identifier. The path recipe file includes a layout recipe file and a process execution recipe file; the controller executes the process task according to the layout recipe file and the process execution recipe file; if the recipe control method is a recipe adjustment control method, and the recipe identifier includes a path recipe file identifier, and the target parameter information also includes a process variable list, then the controller modifies the variable parameters of the process execution recipe file in the path recipe file corresponding to the path recipe file identifier according to the process variable list, and executes the process task according to the path recipe file. The invention executes process tasks based on the layout formula file and the modified process operation formula file. If the formula control method is a formula adjustment control method, the formula identifier includes the layout formula file identifier and the process operation formula file identifier, and the target parameter information does not include a process variable list. In this case, the layout formula file is searched based on its identifier, and the process operation formula file is searched based on its identifier. The process tasks are then executed according to the layout formula file and the modified process operation formula file. If the formula control method is a formula adjustment control method, the formula identifier includes the layout formula file identifier and the process operation formula file identifier, and the target parameter information also includes a process variable list. In this case, the layout formula file is searched based on its identifier, and the process operation formula file is searched based on its identifier. The variable parameters of the process operation formula file are modified according to the process variable list, and the process tasks are executed according to the layout formula file and the modified process operation formula file. This invention meets the formula file control function requirements of different customers' factory automation systems. Customers only need to set different initial parameters in the instructions to achieve the formula file control function they need. This invention adds the judgment of the validity of the modified variables in the process formula file to ensure the safety of equipment process operation. This invention adds the judgment of the validity of the formula file identifier to ensure the safety and effectiveness of equipment operation.

[0106] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0107] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of the present invention.

[0108] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0109] The present invention has provided a detailed description of a process task processing method and a semiconductor process equipment. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A method for processing a technological task, characterized in that, Applied to semiconductor process equipment, wherein the semiconductor process equipment is connected to a factory automation system, the method includes: Receive the process task sent by the factory automation system, and obtain the target parameter information of the process task, the target parameter information including the formula control method and the formula identifier; Determine whether the formula control method is a unique control method for the formula or a control method for formula adjustment; If the formula control method is a unique control method for the formula, and the formula identifier includes a path formula file identifier, then the path formula file is located according to the path formula file identifier. The path formula file includes a layout formula file and a process operation formula file. The process task is executed according to the layout formula file and the process operation formula file. If the formula control method is a formula adjustment control method, the formula identifier includes a path formula file identifier, and the target parameter information also includes a process variable list, then the variable parameters of the process running formula file in the path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process task is executed according to the layout formula file of the path formula file and the modified process running formula file. If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information does not include a process variable list, then the layout formula file is searched according to the layout formula file identifier, the process operation formula file is searched according to the process operation formula file identifier, and the process task is executed according to the layout formula file and the process operation formula file. If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information also includes a process variable list, then the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier; the variable parameters of the process operation formula file are modified according to the process variable list, and the process task is executed according to the layout formula file and the modified process operation formula file.

2. The method according to claim 1, characterized in that, Before the step of receiving the process task sent by the factory automation system, the method further includes: Receive the instruction from the factory automation system to start the process task; According to the instruction, the initial parameter information of the process task is obtained; the initial parameter information includes: formula control method and formula identifier; Determine whether the formula control method is a unique control method for the formula or a control method for formula adjustment; If the formula control method is a unique control method for the formula, and the formula identifier is a path formula file identifier, then it is determined whether the path formula file identifier is valid. If the path formula file identifier is valid, then the formula control method and the path formula file identifier are determined as target parameter information. If the formula control method is a formula adjustment control method, the formula identifier is a path formula file identifier, and the initial parameter information also includes a variable list, then it is determined whether the path formula file identifier and the variable list are valid. If both the path formula file identifier and the variable list are valid, then the formula control method, the path formula file identifier, and the process variable list stored in the variable list are determined as the target parameter information. If the formula control method is a formula adjustment control method, the formula identifier is a valid process operation formula file identifier, and the initial parameter information also includes a variable list, then it is determined whether the variable list stores a layout formula file identifier; if the variable list stores the layout formula file identifier, then it is determined whether the layout formula file identifier is valid; if the layout formula file identifier is valid, then it is determined whether the variable list is valid; if the variable list is valid, then the formula control method, the layout formula file identifier, the process operation formula file identifier, and the process variable list stored in the variable list are determined as target parameter information. If the variable list is invalid, then the formula control method, the layout formula file identifier, and the process operation formula file identifier will be determined as the target parameter information.

3. The method according to claim 2, characterized in that, The determination of whether the path recipe file identifier is valid includes: Determine whether the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment; If the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, then the path recipe file identifier is determined to be valid.

4. The method according to claim 2, characterized in that, The determination of whether the layout recipe file identifier is valid includes: Determine whether the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment; If the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, then the layout recipe file identifier is determined to be valid.

5. The method according to claim 2, characterized in that, The determination of whether the variable list is valid includes: Determine whether the process variable list is stored in the variable list and whether the process variable list is valid. The process variable list is used to store the variable parameter values ​​that need to be modified. If the variable list contains the process variable list and the process variable list is valid, then the variable list is determined to be valid.

6. The method according to claim 5, characterized in that, The determination of whether the process variable list is valid includes: Determine whether the variable parameter value in the process variable list is within the preset process parameter value range, and whether the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment; If the variable parameter value in the process variable list is within the preset process parameter value range, and the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment, then the process variable list is determined to be valid.

7. The method according to claim 1, characterized in that, The variable parameters include at least one of the following: process chamber room temperature, gas flow rate, and process step duration.

8. A semiconductor process apparatus, characterized in that, The system includes a controller, which is used to receive process tasks sent by the factory automation system and obtain target parameter information of the process tasks, including formula control method and formula identifier. Determine whether the formula control method is a unique control method for the formula or a control method for formula adjustment; If the formula control method is a unique control method for the formula, and the formula identifier includes a path formula file identifier, then the path formula file is found according to the path formula file identifier. The path formula file includes a layout formula file and a process operation formula file. Execute the process task according to the layout formula file and the process operation formula file; If the formula control method is a formula adjustment control method, the formula identifier includes a path formula file identifier, and the target parameter information also includes a process variable list, then the variable parameters of the process running formula file in the path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process task is executed according to the layout formula file of the path formula file and the modified process running formula file. If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information does not include a process variable list, then the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier; And to perform the process tasks according to the layout formula file and the process operation formula file; If the formula control method is a formula adjustment control method, the formula identifier includes a layout formula file identifier and a process operation formula file identifier, and the target parameter information also includes a process variable list, then the layout formula file is searched according to the layout formula file identifier, and the process operation formula file is searched according to the process operation formula file identifier; The variable parameters of the process run recipe file are modified according to the process variable list, and the process task is executed according to the layout recipe file and the modified process run recipe file.

9. The semiconductor process equipment according to claim 8, characterized in that, The controller is also used to receive instructions from the factory automation system to start the process task; According to the instructions, obtain the initial parameter information of the process task; The initial parameter information includes: formula control method and formula identifier; it is determined whether the formula control method is a formula-unique control method or a formula adjustment control method; if the formula control method is a formula-unique control method and the formula identifier is a path formula file identifier, then it is determined whether the path formula file identifier is valid; if the path formula file identifier is valid, then the formula control method and the path formula file identifier are determined as target parameter information; if the formula control method is a formula adjustment control method and the formula identifier is a path formula file identifier, and the initial parameter information also includes a variable list, then it is determined whether the path formula file identifier and the variable list are valid; if both the path formula file identifier and the variable list are valid, then the process stored in the formula control method, the path formula file identifier, and the variable list is... The variable list is determined as the target parameter information. If the formula control method is a formula adjustment control method, the formula identifier is a valid process operation formula file identifier, and the initial parameter information also includes a variable list, then it is determined whether the variable list stores a layout formula file identifier. If the variable list stores the layout formula file identifier, then it is determined whether the layout formula file identifier is valid. If the layout formula file identifier is valid, then it is determined whether the variable list is valid. If the variable list is valid, then the formula control method, the layout formula file identifier, the process operation formula file identifier, and the process variable list stored in the variable list are determined as the target parameter information. If the variable list is invalid, then the formula control method, the layout formula file identifier, and the process operation formula file identifier are determined as the target parameter information.

10. The semiconductor process equipment according to claim 9, characterized in that, The controller is further configured to determine whether the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment; if the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, then the path recipe file identifier is determined to be valid.

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