Motor structure and laser capable of preventing influence of corrosive gas

Abstract

The application provides a motor structure and a laser device capable of preventing corrosive gas from affecting, wherein the motor structure comprises a shell, a stator, a rotor, a magnetic pole plate and a magnetic fluid; the rotor is rotatably arranged in the shell through a shaft body; the magnetic pole plate is a ring-shaped plate with magnetic attraction; the magnetic pole plate is sleeved outside the shaft body; and the magnetic fluid is bound in a gap between the magnetic pole plate and the shaft body under the magnetic attraction of the magnetic pole plate to form a sealing ring. The application can adapt to dynamic sealing in high-speed rotation, has an ultra-low leakage rate, and the gas leakage rate can reach a level of not more than 10 ‑10 , which is higher than the sealing effect of rubber rings and metal rings, can be reliably operated for a long time, has the advantage of low maintenance cost, and is safer and more reliable than other sealing modes in the case of dealing with a strong corrosive gas environment.

Description

Technical Field

[0001] This invention relates to the field of laser technology, and in particular to a motor structure and laser that can prevent the effects of corrosive gases. Background Technology

[0002] During the discharge process, the discharge cavity of an excimer laser is accompanied by electrode wear, which continuously generates dust. This dust is dispersed to various locations in the cavity by the airflow circulation, causing significant damage, especially to the light output window of the lens laser, the bearing of the cross-flow fan, and the motor.

[0003] Meanwhile, during operation, working gas needs to be circulated into the discharge cavity of the excimer laser. Since the working gas is highly corrosive, leakage will corrode components such as motors, affecting their normal operation. Summary of the Invention

[0004] The purpose of this invention is to provide a motor structure and laser that can prevent the effects of corrosive gases, thereby solving at least one of the aforementioned technical problems in the prior art.

[0005] To solve the above-mentioned technical problems, the present invention provides a motor structure that can prevent the influence of corrosive gases, comprising: a housing, a stator, a rotor, magnetic pole plates, and a magnetofluid;

[0006] The rotor is rotatably mounted inside the housing via a shaft;

[0007] The magnetic pole plate is a ring-shaped plate with magnetic attraction force;

[0008] The magnetic pole plate is fitted onto the shaft body, and the magnetofluid is bound within the gap between the magnetic pole plate and the shaft body under the magnetic attraction of the magnetic pole plate, forming a sealing ring.

[0009] This application uses magnetic attraction to confine the magnetofluid within the gap between the magnetic pole plate and the motor shaft. When the rotor and shaft rotate, the fluidity of the magnetofluid fills the gap, preventing corrosive gases from entering the motor housing and forming a sealed structure. This reduces the leakage rate to 10%. -10 The following sealing effect and safety far exceed those of sealing structures such as rubber rings and metal rings.

[0010] Furthermore, it also includes a permanent magnet, which is connected to the magnetic pole plate and acts as a magnetic source to provide magnetic attraction to the magnetic pole plate.

[0011] Furthermore, the magnetic pole plate includes a first pole plate and a second pole plate; the first pole plate and the second pole plate are respectively attached to the two magnetic poles of the permanent magnet from the left and right sides; the gaps between the first pole plate, the second pole plate and the shaft are respectively filled with a first magnetic fluid and a second magnetic fluid; a closed-loop magnetic circuit is formed between the first pole plate, the permanent magnet, the second pole plate, the second magnetic fluid, the shaft and the first magnetic fluid. Additionally, a double-sealing ring structure is formed between the shaft and the housing.

[0012] Furthermore, the housing is provided with a shaft hole; the shaft is rotatably inserted into the shaft hole; the magnetic pole plate is snapped into the shaft hole and fitted onto the shaft body, and the magnetic pole plate is sealed and fixedly connected to the shaft hole.

[0013] Furthermore, the shaft is rotatably mounted on the housing via a bearing. Specifically, the bearing is fitted into the shaft hole and mounted on the shaft.

[0014] Furthermore, the magnetic pole plate is disposed on the outside of the bearing to prevent corrosive gases from corroding the bearing.

[0015] Furthermore, a magnetic shielding plate is provided on the side of the magnetic pole plate opposite to the permanent magnet.

[0016] For example, a magnetic shielding plate is provided between the magnetic pole plate and the ceramic bearing.

[0017] Furthermore, the inner wall surface of the stator is coated with a ceramic protective layer.

[0018] Furthermore, the outer surface of the rotor is coated with a ceramic protective layer.

[0019] Furthermore, the ceramic protective layer is a non-magnetic anti-corrosion material layer such as alumina or silicon nitride.

[0020] Furthermore, the thickness of the ceramic protective layer is 0.5-1mm.

[0021] In the application of excimer laser discharge cavity, the shaft is a motor power output shaft. The power output shaft extends out of the shaft hole of the housing, enters the discharge cavity, and connects with the rotating components (such as the impeller of a cross-flow fan) inside the discharge cavity.

[0022] Preferably, the gas pressure inside the housing (i.e., the motor cavity) is the same as (or substantially the same as) the working gas pressure inside the discharge cavity, and they change synchronously.

[0023] Magnetofluids cannot withstand large pressure differences. The pressure difference between the inside and outside of the magnetofluid cannot exceed the set value. However, the working pressure of the discharge chamber needs to be increased to 3-5 times the atmospheric pressure. Therefore, it is necessary to apply an air pressure inside the motor that is equivalent to the air pressure inside the discharge chamber to maintain the air pressure balance between the inside and outside of the magnetofluid.

[0024] Furthermore, it also includes a rotor cooling system, which includes a cooling gas source; the cooling gas source is connected to the inner cavity of the housing through a circulation pipeline, and is used to circulate cooling gas into the housing to cool the rotor.

[0025] Preferably, the cooling gas is nitrogen or an inert gas.

[0026] Furthermore, an air inlet is provided on the housing and at the tail end of the rotor (the end opposite to the power output shaft), and an air outlet is provided on the housing and on one side of the rotor power output shaft. The air supply pipeline and gas circuit of the rotor cooling system are connected to the air inlet and the air outlet, respectively.

[0027] In this application, the magnetorheological fluid is a fluid formed by dissolving magnetic material particles in a matrix solution in the form of a liquid sol. The magnetorheological fluid is bound in the gap between the shaft and the magnetic pole plate by magnetic force. When the motor and the shaft rotate, the fluid flow of the magnetorheological fluid fills the gap.

[0028] Preferably, the matrix solution is a perfluoropolyether.

[0029] Using permanent magnets as the magnetic material for magnetofluids can improve magnetic force and enhance the ability to withstand pressure differences. Of course, in specific situations, electromagnets can also be used as the magnetic force source.

[0030] Furthermore, grooves are provided on the outer circumferential surface of the rotor (preferably on the ceramic protective layer of the outer circumferential surface of the rotor) spirally arranged around the rotor axis to guide and promote the flow of cooling gas along the rotor axis. This better cools the rotor and stator inside the motor, preventing excessive temperature rise from reducing the working performance of the motor rotor.

[0031] Furthermore, a dustproof and light-shielding sealing structure is provided on the outer side of the magnetic pole plate, between the shaft and the housing; the dustproof and light-shielding sealing structure includes a dustproof inner ring plate and a dustproof outer ring plate; the dustproof inner ring plate is fixedly fitted on the shaft; the dustproof outer ring plate is fixedly connected to the housing; the dustproof inner ring plate and the dustproof outer ring plate are staggered in the radial direction of the rotor.

[0032] The dustproof inner ring and dustproof outer ring are staggered in the radial direction of the rotor, which can achieve the function of shading light and prevent ultraviolet rays or lasers from entering the housing and damaging the rotor and stator, while also having a dustproof function.

[0033] Furthermore, the surfaces of the inner and outer dustproof rings are roughened to generate eddies between the inner and outer dustproof rings when the inner dustproof ring rotates, thereby preventing external dust from entering the housing.

[0034] The inner and outer dustproof rings are roughened, meaning that the end faces and circumferential surfaces of the inner and outer dustproof rings are roughened, resulting in pitted and uneven end faces and surfaces with many irregular tiny protrusions, which are used to agitate the surrounding gas when rotating.

[0035] Furthermore, the number of the dustproof inner ring plate and the dustproof outer ring plate is several, and the dustproof inner ring plate and the dustproof outer ring plate are arranged alternately in the axial direction of the rotor.

[0036] Furthermore, the gap between the inner dustproof ring and the outer dustproof ring is no greater than 0.5 mm.

[0037] Furthermore, the inner and outer dustproof rings are made of highly corrosion-resistant materials such as ceramics, 316L or Monel alloy, and Hastelloy.

[0038] In addition, this application also discloses a laser with the above-mentioned motor structure, wherein the motor is arranged outside the discharge cavity, and the shaft extends out of the shaft hole of the housing as the motor power output shaft and extends into the discharge cavity to connect with the rotating component inside the discharge cavity.

[0039] By adopting the above technical solution, the present invention has the following beneficial effects:

[0040] This invention provides a motor structure that can prevent the effects of corrosive gases, adapts to dynamic seals during high-speed rotation, and has an ultra-low leakage rate, with a gas leakage rate of no more than 10%. -10 It achieves a sealing level exceeding that of rubber and metal rings, ensuring long-term reliable operation and low maintenance costs. Compared to other sealing methods, it is safer and more reliable in the face of highly corrosive gas environments. Attached Figure Description

[0041] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0042] Figure 1 This is a front view of a motor structure that can prevent the effects of corrosive gases, provided in an embodiment of the present invention.

[0043] Figure 2 for Figure 1 A partial schematic diagram of the magnetic pole plate and the magnetic fluid shown;

[0044] Figure 3 A schematic diagram of the structure when a ceramic protective layer is provided on the surface of the stator and rotor;

[0045] Figure 4 A schematic diagram of a rotor with grooves on its surface;

[0046] Figure 5 This is a partial schematic diagram of the dustproof and light-shielding sealing structure in the embodiment.

[0047] Figure label:

[0048] 1-Ceramic protective layer; 10-Shell; 11-Air inlet; 12-Air outlet; 20-Rotor; 21-Shaft; 22-Groove; 30-Stator; 40-Bearing; 50-Magnetic pole plate; 50a-First pole plate; 50b-Second pole plate; 51-Magnetic fluid; 51a-First magnetic fluid; 51b-Second magnetic fluid; 52-Permanent magnet; 54-Magnetic shielding plate; 60-Dustproof and light-shielding sealing structure; 61-Dustproof inner ring plate; 62-Dustproof outer ring plate. Detailed Implementation

[0049] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0050] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0051] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0052] The present invention will be further explained below with reference to specific embodiments.

[0053] like Figure 1As shown, this embodiment provides a motor structure that can prevent the influence of corrosive gases, including: a housing 10, a stator 30, a rotor 20, a magnetic pole plate 50, and a magnetorheological fluid 51; the rotor 20 is rotatably disposed in the shaft hole of the housing 10 through bearings at both ends, preferably ceramic bearings 40.

[0054] As the power output shaft of rotor 20, shaft 21 extends from the shaft hole on the side of housing 10 near laser discharge cavity. The magnetic pole plate 50 is an annular plate with magnetic attraction; the magnetic pole plate 50 is fitted outside the shaft 21, and the magnetofluid 51 is bound in the gap between the magnetic pole plate 50 and shaft 21 under the magnetic attraction of the magnetic pole plate 50 to form a sealing ring.

[0055] This application uses magnetic attraction to bind the magnetorheological fluid 51 within the gap between the magnetic pole plate 50 and the motor shaft 21. When the rotor 20 and shaft 21 rotate, the fluidity of the magnetorheological fluid 51 fills the gap, preventing corrosive gases from entering the motor housing 10 and forming a sealed structure. The leakage rate can be reduced to 10%. -10 The following sealing effect and safety far exceed those of sealing structures such as rubber rings and metal rings.

[0056] More preferably, this embodiment also includes a permanent magnet 52, which is connected to the magnetic pole plate 50, and the permanent magnet 52 serves as a magnetic source to provide magnetic attraction to the magnetic pole plate 50.

[0057] A more preferred embodiment, based on the above technical solution, refers to... Figure 2 As shown, the magnetic pole plate 50 includes a first pole plate 50a and a second pole plate 50b; the first pole plate 50a and the second pole plate 50b are respectively attached to the two magnetic poles of the permanent magnet 52 from the left and right sides; the gaps between the first pole plate 50a and the second pole plate 50b and the shaft 21 are respectively filled with a first magnetic fluid 51a and a second magnetic fluid 51b; a closed-loop magnetic circuit is formed between the first pole plate 50a, the permanent magnet 52, the second pole plate 50b, the second magnetic fluid 51b, the shaft 21, and the first magnetic fluid 51a. Furthermore, a double sealing ring structure is formed between the shaft 21 and the housing 10. The magnetic pole plate 50 is fitted into the shaft hole of the housing 10 and sleeved on the outside of the shaft 21, and the magnetic pole plate 50 is sealed and fixedly connected to the inner wall of the shaft hole.

[0058] Reference Figure 2 As shown, the magnetic pole plate 50 is disposed on the outer side of the ceramic bearing 40 to prevent corrosive gases from corroding the ceramic bearing 40. A magnetic shielding plate 54 is disposed on the side of the magnetic pole plate 50 opposite to the permanent magnet 52. For example, a magnetic shielding plate 54 is disposed between the magnetic pole plate 50 and the ceramic bearing 40.

[0059] More preferably, refer to Figure 3 As shown, the inner wall surface of the stator 30 and the outer surface of the rotor 20 are coated with a ceramic protective layer 1. The ceramic protective layer 1 is a non-magnetic anti-corrosion material layer such as alumina or silicon nitride. The thickness of the ceramic protective layer 1 is 0.5-1 mm.

[0060] In the application of excimer laser discharge cavity, the shaft 21 is a motor power output shaft. The power output shaft extends out of the shaft hole of the housing 10, extends into the discharge cavity, and connects with the rotating components (such as the impeller of a cross-flow fan) inside the discharge cavity.

[0061] Preferably, the air pressure inside the housing 10 (i.e., the motor cavity) is the same as (or substantially the same as) the working gas pressure inside the discharge cavity, and they change synchronously.

[0062] The magnetofluid 51 cannot withstand a large pressure difference. The pressure difference between the inside and outside of the magnetofluid 51 cannot exceed the set value. The working pressure of the discharge chamber needs to be increased to 3-5 times the atmospheric pressure. Therefore, it is necessary to apply an air pressure inside the motor that is equivalent to the air pressure inside the discharge chamber in order to maintain the air pressure balance between the inside and outside of the magnetofluid 51.

[0063] Furthermore, it may also include a rotor cooling system, which includes a cooling gas source. The cooling gas source is connected to the inner cavity of the housing 10 through a circulation pipeline, a pump body, etc., for circulating cooling gas into the housing 10 to cool the rotor 20. Preferably, the cooling gas is an inert gas such as nitrogen or argon.

[0064] Reference Figure 1 As shown, an air inlet 11 is provided on the housing 10 and at the tail end of the rotor 20 (the end opposite to the power output shaft), and an air outlet 12 is provided on the housing 10 and on one side of the power output shaft of the rotor 20. The air supply pipeline and gas circuit (not shown) of the rotor 20 cooling system are connected to the air inlet 11 and the air outlet 12, respectively.

[0065] In this embodiment, the magnetic fluid 51 is a fluid formed by dissolving magnetic material particles in a sol form into a matrix solution. The magnetic fluid 51 is bound to the gap between the shaft 21 and the magnetic pole plate 50 using magnetic force. When the motor and shaft 21 rotate, the fluidity of the magnetic fluid 51 fills the gap. Preferably, the matrix solution is perfluoropolyether.

[0066] Using permanent magnet materials as the magnetic body of the magnetofluid 51 can improve the magnetic force and enhance the ability to withstand pressure differences. Of course, in specific situations, an electromagnet can also be used as the magnetic force source.

[0067] More preferably, refer to Figure 4As shown, grooves 22 are provided on the outer circumferential surface of the rotor 20 (preferably on the ceramic protective layer 1 on the outer circumferential surface of the rotor 20) and are spirally arranged around the rotor 20 axially. These grooves guide and promote the flow of cooling gas along the axial direction of the rotor 20. This allows for better cooling of the rotor 20 and stator 30 inside the motor, preventing excessive temperature rise from reducing the operating performance of the motor rotor 20.

[0068] More preferably, refer to Figure 1 and 5 As shown, a dustproof and light-shielding sealing structure 60 is also provided on the outer side of the magnetic pole plate 50, between the shaft 21 and the housing 10; the dustproof and light-shielding sealing structure 60 includes a dustproof inner ring plate 61 and a dustproof outer ring plate 62; the dustproof inner ring plate 61 is fixedly fitted on the shaft 21; the dustproof outer ring plate 62 is secured in the shaft hole of the housing 10; the dustproof inner ring plate 61 and the dustproof outer ring plate 62 are arranged alternately in the radial direction of the rotor 20.

[0069] Furthermore, the surfaces of the dustproof inner ring plate 61 and the dustproof outer ring plate 62 are roughened to generate eddies between the dustproof inner ring plate 61 and the dustproof outer ring plate 62 when the dustproof inner ring plate 61 rotates, thereby blocking external dust from entering the housing 10.

[0070] The inner dustproof ring 61 and the outer dustproof ring 62 are roughened, that is, the end faces and circumferential surfaces of the inner dustproof ring 61 and the outer dustproof ring 62 are roughened, so that the end faces and surfaces are pitted and have many irregular small protrusions, which are used to stir the surrounding gas when rotating.

[0071] More preferably, the number of the inner dustproof ring plate 61 and the outer dustproof ring plate 62 is 2-4 sets, and the inner dustproof ring plate 61 and the outer dustproof ring plate 62 are alternately arranged in the axial direction of the rotor 20. The axial gap between the inner dustproof ring plate 61 and the outer dustproof ring plate 62 is no greater than 0.5mm. The inner dustproof ring plate 61 and the outer dustproof ring plate 62 are made of highly corrosion-resistant materials such as ceramic, 316L or Monel alloy, Hastelloy, etc.

[0072] The dustproof inner ring plate 61 and the dustproof outer ring plate 62 are arranged alternately in the radial direction of the rotor 20, which can achieve the function of shading light and prevent ultraviolet rays or lasers from entering the housing 10 and damaging the rotor 20 and stator 30. At the same time, they also have the function of dust prevention.

[0073] This invention provides a motor structure that can prevent the effects of corrosive gases, adapts to dynamic seals during high-speed rotation, and has an ultra-low leakage rate, with a gas leakage rate of no more than 10%. -10It achieves a sealing level exceeding that of rubber and metal rings, ensuring long-term reliable operation and low maintenance costs. Compared to other sealing methods, it is safer and more reliable in the face of highly corrosive gas environments.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A motor structure capable of preventing the effects of corrosive gases, characterized in that, include: The components include a housing (10), a stator (30), a rotor (20), magnetic pole plates (50), and a magnetofluid (51). The rotor (20) is rotatably mounted inside the housing (10) via a shaft (21); The magnetic pole plate (50) is a ring plate with magnetic attraction; The magnetic pole plate (50) is fitted outside the shaft (21), and the magnetic fluid (51) is bound in the gap between the magnetic pole plate (50) and the shaft (21) under the magnetic attraction of the magnetic pole plate (50) to form a sealing ring; It also includes a permanent magnet (52), which is connected to the magnetic pole plate (50). The permanent magnet (52) acts as a magnetic source to provide magnetic attraction to the magnetic pole plate (50). It also includes a rotor cooling system, which includes a cooling gas source; the cooling gas source is connected to the inner cavity of the housing (10) through a circulation pipeline, and is used to circulate cooling gas into the housing (10) to cool the rotor (20); the inner wall surface of the stator (30) is coated with a ceramic protective layer (1). The outer surface of the rotor (20) is coated with a ceramic protective layer (1); The outer circumferential ceramic protective layer (1) of the rotor (20) is provided with grooves (22) spirally arranged around the rotor (20) axially, which are used to guide and promote the flow of cooling gas along the axial direction of the rotor (20); A dustproof and light-shielding sealing structure (60) is also provided outside the magnetic pole plate (50) and between the shaft (21) and the housing (10); the dustproof and light-shielding sealing structure (60) includes a dustproof inner ring plate (61) and a dustproof outer ring plate (62); the dustproof inner ring plate (61) is fixedly fitted on the shaft (21); the dustproof outer ring plate (62) is fixedly connected to the housing (10); the dustproof inner ring plate (61) and the dustproof outer ring plate (62) are staggered in the radial direction of the rotor (20); The surfaces of the dustproof inner ring (61) and the dustproof outer ring (62) are roughened to generate eddies between the dustproof inner ring (61) and the dustproof outer ring (62) when the dustproof inner ring (61) rotates, thereby blocking external dust from entering the housing (10).

2. The motor structure according to claim 1, characterized in that, The magnetic pole plate (50) includes a first pole plate (50a) and a second pole plate (50b); the first pole plate (50a) and the second pole plate (50b) are respectively attached to the two magnetic poles of the permanent magnet (52) from the left and right sides; the gap between the first pole plate (50a) and the second pole plate (50b) and the shaft (21) is respectively filled with a first magnetic fluid (51a) and a second magnetic fluid (51b); a closed-loop magnetic circuit is formed between the first pole plate (50a), the permanent magnet (52), the second pole plate (50b), the second magnetic fluid (51b), the shaft (21) and the first magnetic fluid (51a).

3. The motor structure according to claim 1, characterized in that, The housing (10) is provided with a shaft hole; the shaft (21) is rotatably inserted into the shaft hole; the magnetic pole plate (50) is clamped in the shaft hole and fitted outside the shaft (21), and the magnetic pole plate (50) is sealed and fixedly connected to the shaft hole.

4. The motor structure according to claim 1, characterized in that, The shaft (21) is rotatably mounted on the housing (10) via a bearing (40), and the magnetic pole plate (50) is disposed on the outside of the bearing (40) to prevent corrosive gases from corroding the bearing (40).

5. The motor structure according to claim 1, characterized in that, A magnetic shielding plate (54) is provided on the side of the magnetic pole plate (50) away from the permanent magnet (52).

6. The motor structure according to claim 1, characterized in that, The gas pressure inside the housing (10) is the same as the working gas pressure inside the laser discharge cavity, and they change synchronously.

7. The motor structure according to claim 1, characterized in that, The magnetic fluid (51) is a fluid formed by dissolving magnetic material particles in a matrix solution in the form of a sol, and the matrix solution is perfluoropolyether.

8. A laser having the motor structure described in any one of claims 1-7, characterized in that, The motor is located outside the discharge chamber. The shaft (21) extends out of the shaft hole of the housing (10) and into the discharge chamber to connect with the rotating parts inside the discharge chamber.

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